JP2014191229A - Microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a microscope in which a Nomarski prism can be simply and surely arranged at an optimal position according to an objective lens to be used.SOLUTION: The microscope includes: a revolver part for arranging any one of a plurality of objective lenses on an optical path; a Nomarski prism which can be inserted in or removed from the optical path and is movable in a direction along the optical path; lens position detection means for detecting information related to the objective lens on the optical path; prism position detection means for detecting positional information of the Nomarski prism; a storage part for storing first relation information in which the information to be detected by the lens position detection means and the type of the objective lens are associated with each other, and second relation information in which the type of the objective lens and the optimal position of the Nomarski prism are associated with each other; and a control part for determining whether or not the position of the Nomarski prism is appropriate on the basis of the information detected by the lens position detection means and the prism position detection means, and the first and second relation information.

Description

  The present invention relates to a microscope for observing a specimen by irradiating the specimen with illumination light.

  Conventionally, in the fields of medicine and biology, a microscope for illuminating and observing a specimen is used for observing cells and the like. In the industrial field, microscopes are used for various purposes such as quality control of metal structures, research and development of new materials, inspection of electronic devices and magnetic heads, and the like. As for observation of the specimen with a microscope, in addition to visual observation, an image of a specimen is picked up using an imaging device such as a CCD image sensor or a CMOS image sensor, and observation of the picked-up image and numerical display such as light intensity is performed. Are known.

  In the observation method using a microscope, various spectroscopic methods such as phase contrast observation, differential interference observation, dark field observation, and polarization observation are used in addition to general bright field observation and transmission observation. According to these spectroscopic methods, features that are difficult to detect in bright field observation or transmission observation, such as the shape distribution of observation objects, impurities, and foreign matter, are more easily detected.

  For example, in differential interference observation on biological specimens, the phase distribution between the light that has passed through a part of the observation object and the light that has passed through it is expressed as color or contrast of light and darkness, so that the shape distribution and position of the observation object are displayed. Obtain the phase difference distribution. The transmission type differential interference observation is also used for observing the shape of a substantially transparent biological specimen, and can detect a minute structure. On the other hand, in reflection type differential interference observation, in combination with epi-illumination, it is also used for inspection of scratches, impurities, minute protrusions, etc. generated in IC patterns and the like, and observation of surface shapes of metals and minerals.

  By the way, in order to perform differential interference observation, a polarizer, an analyzer, and a polarizing prism are used as optical elements to generate and interfere with two polarized lights whose vibration directions are orthogonal to each other (having vibration surfaces orthogonal to each other). It is necessary to add to the optical system to be formed. Of these, a Nomarski prism is generally used as the polarizing prism, and is disposed on the optical axis of the optical system in the vicinity of the pupil of the objective lens. Therefore, in order to switch between other spectroscopic methods such as bright field observation and differential interference observation, it is necessary to dispose the above-mentioned Nomarski prism so as to be insertable / removable on the optical axis.

  Here, in differential interference observation, in order to perform retardation adjustment that adjusts the phase difference between the two polarized light beams that interfere with each other, the position of the Nomarski prism arranged on the optical axis of the objective lens is finely adjusted in a direction perpendicular to the optical axis. There is a need. As a technique for adjusting the position of the Nomarski prism, a technique for electrically arranging the Nomarski prism on the optical axis and adjusting the retardation in a microscope is disclosed (for example, see Patent Document 1). With the technique disclosed in Patent Document 1, time and labor required for differential interference observation can be saved.

  In differential interference observation, the specimen is observed in a state where the localization position of the Nomarski prism (the position where two orthogonal polarizations intersect each other) matches the pupil position of the objective lens. Therefore, when observation is performed by switching objective lenses having different pupil positions, it is necessary to adjust the position of the Nomarski prism in the optical axis direction in accordance with the pupil position of each objective lens. As a technique for adjusting the position of the Nomarski prism in the optical axis direction, a technique in which a plurality of Nomarski prisms and a Nomarski prism corresponding to the objective lens can be arranged is disclosed (for example, see Patent Document 2).

JP 2008-26568 A Utility Model Registration No. 2556098

  However, in the techniques disclosed in Patent Documents 1 and 2, in order to determine whether the localization position of the Nomarski prism is appropriate for the pupil position of the objective lens being used, It is necessary to check the correspondence with the localization position one by one, which takes time.

  On the other hand, even if the localization position of the Nomarski prism is not appropriate for the pupil position of the objective lens being used, the contrast of the differential interference image deteriorates, but the observation itself is possible. There was also a risk of observing in a state other than the optimum position.

  The present invention has been made in view of the above, and an object of the present invention is to provide a microscope in which a Nomarski prism can be easily and surely arranged at an optimal position according to an objective lens to be used.

  In order to solve the above-described problems and achieve the object, a microscope according to the present invention holds a plurality of objective lenses that collect observation light from a specimen to be observed, and any one of the plurality of objective lenses. Is disposed on the optical path, a revolver unit that is disposed on an optical path that passes through the sample, a Nomarski prism that is detachable with respect to the optical path and is movable in a direction along the optical path, and the optical path. A lens position detecting means for detecting information relating to the objective lens, a prism position detecting means for detecting position information of the Nomarski prism, and information detected by the lens position detecting means and the type of the objective lens And the second relation information in which the type of the objective lens and the optimum position of the Nomarski prism are related to each other. The position of the Nomarski prism is arranged on the optical path based on the memory, the information detected by the lens position detecting means and the prism position detecting means, respectively, and the first and second relation information. And a controller that determines whether or not the objective lens is appropriate.

  In the microscope according to the present invention, in the above invention, the control unit determines that the position of the Nomarski prism is not suitable for the objective lens arranged on an optical path passing through the sample. In some cases, the apparatus includes output means for outputting at least one of light, sound, and character information.

  In the microscope according to the present invention, in the above invention, the control unit determines that the position of the Nomarski prism is not suitable for the objective lens disposed on an optical path passing through the sample. In this case, control is performed to move the Nomarski prism to an appropriate position.

  The microscope according to the present invention is the microscope according to the above-described invention, wherein the sample image of the sample is captured and an image unit that generates image data corresponding to the sample image is generated. And an information adding unit for adding additional information including information on the objective lens arranged on the optical path passing through and / or the position of the Nomarski prism at the time of imaging.

  According to the present invention, the type of the objective lens arranged on the optical path and the arrangement position of the Nomarski prism are detected, and the position of the Nomarski prism corresponds to the objective lens arranged on the optical path. Since it is determined whether or not, there is an effect that the Nomarski prism can be easily and surely arranged at the optimum position according to the objective lens to be used.

FIG. 1 is a side view schematically showing the overall configuration of the microscope according to the first embodiment of the present invention. FIG. 2 is a schematic diagram illustrating a configuration of a main part of the microscope according to the first embodiment of the present invention. FIG. 3 is a diagram showing an in-use objective lens table showing the correspondence between each hole number of the revolver and the type of attached objective lens in the microscope according to the first embodiment of the present invention. FIG. 4 is possible in the microscope according to the first embodiment of the present invention based on the relationship between the type of objective lens arranged and the position of the Nomarski prism, and the relationship between the type of objective lens arranged and the position of the Nomarski prism. It is a figure which shows the objective lens detailed information table which showed correspondence, such as an observation method. FIG. 5 is a flowchart showing the Nomarski prism position adjustment process performed by the microscope according to the first embodiment of the present invention. FIG. 6 is a schematic diagram illustrating a configuration of a main part of the microscope according to the modification of the first embodiment of the present invention. FIG. 7 is a schematic diagram illustrating a configuration of a main part of a microscope according to a modification of the first embodiment of the present invention. FIG. 8 is a side view schematically showing the overall configuration of the microscope according to the second embodiment of the present invention.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the drawings. In addition, this invention is not limited by the following embodiment. The drawings referred to in the following description only schematically show the shape, size, and positional relationship so that the contents of the present invention can be understood. That is, the present invention is not limited only to the shape, size, and positional relationship illustrated in each drawing.

(Embodiment 1)
FIG. 1 is a side view schematically showing the overall configuration of the microscope according to the first embodiment of the present invention. A microscope 1 shown in FIG. 1 includes a main body 2 that forms a base, a stage 3 that is attached to the upper surface of the main body 2 and places a specimen S, and a plurality of objective lenses 4 that collect observation light from the specimen S. (Objective lenses 4a, 4b,...) Are held and placed on the stage 3 so as to be positioned above the main body 2 and the revolver 5 that switches them on the optical path (observation optical axis N1). A transmission illumination unit 6 that irradiates the sample S with transmission illumination, a light source 7 configured using a lamp such as a halogen lamp, and a lens barrel unit 8 for visually observing the sample S are provided.

  The microscope 1 includes a polarizer 9 necessary for differential interference observation, an analyzer 10, and two polarizing prisms on the illumination side and the observation side with respect to the specimen, an illumination-side Nomarski prism 11 and an observation-side Nomarski prism 12 (hereinafter, Nomarski prism). 11 and 12). The microscope 1 can perform specimen observation by switching at least differential interference observation and bright field observation, and the polarizer 9, the analyzer 10, and the Nomarski prisms 11 and 12 are configured to be detachable with respect to the observation optical axis N1. Has been. FIG. 1 particularly shows the configuration during differential interference observation.

  Illumination light from the light source is guided onto the observation optical axis by an illumination optical system (not shown). The polarizer 9 extracts linearly polarized light in a predetermined vibration direction from the illumination light. The Nomarski prism 11 splits the incident linearly polarized light into two linearly polarized lights having vibration directions orthogonal to each other, and emits the two branched linearly polarized lights in different directions. The condenser lens 13 irradiates the specimen with the two linearly polarized lights in a telecentric manner.

  The two irradiated linearly polarized light passes through the specimen, and the transmitted observation light enters the Nomarski prism 12 through the objective lens 4. The Nomarski prism 12 combines these two linearly polarized lights coaxially and emits them parallel to the observation optical axis N1. The two synthesized linearly polarized lights enter the analyzer 10. The analyzer 10 extracts linearly polarized light having a common vibration direction from each of the two synthesized linearly polarized lights. Thereafter, the observation light forms an observation image of the specimen by an observation optical system (not shown). The observation image of the specimen is visually observed through an eyepiece lens or the like.

  FIG. 2 is a schematic diagram illustrating a configuration of a main part of the microscope according to the first embodiment, and is a schematic diagram of a Nomarski prism moving unit 14 that is provided in the revolver unit 5 and moves the Nomarski prism 12. The Nomarski prism moving unit 14 includes a motor M1 for moving the Nomarski prism 12 in the direction of the observation optical axis N1 (arrow Y1), a sensor S1 that detects position information corresponding to the position of the Nomarski prism 12 in the optical axis direction, A motor M2 for moving the Nomarski prism 12 in a direction (arrow Y2) perpendicular to the observation optical axis N1, and a sensor S2 for detecting position information according to the position of the Nomarski prism 12 in the direction perpendicular to the observation optical axis N1 . In the first embodiment, position information corresponding to the position of the Nomarski prism 12 is detected by the sensors S1 and S2. The Nomarski prism 12 is moved by the motors M1 and M2 between a position on the observation optical axis N1 (optical path), a position away from the observation optical axis N1, and a direction along the observation optical axis N1.

  Here, the Nomarski prism moving unit 14 secures the stroke in the direction (arrow Y2) orthogonal to the optical axis by an amount that can sufficiently retract the Nomarski prism 12 from the optical path, thereby observing the optical axis N1 of the Nomarski prism 12. An upward insertion / removal operation (arrow Y2) and retardation adjustment operation (arrow Y3) can be performed by a single mechanism.

  Note that the Nomarski prism moving unit 14 may have different mechanisms for performing the retardation adjustment operation and for performing the insertion / removal operation of the Nomarski prism 12 on the observation optical axis N1. In this case, a turret is an example of a mechanism that performs an insertion / removal operation on the observation optical axis N1.

  Next, a control system of the microscope 1 shown in FIG. 1 will be described. The main control unit 15 that manages the operation of the entire microscope includes a control unit 16 that collectively controls the operation of the entire microscope, an input unit 17 for giving instructions to the control unit 16 by a user of the microscope 1, and a display unit. And an output unit 18 for outputting various types of information from the control unit 16 and a storage unit 19 for storing various types of information of the microscope 1.

  The control unit 16 is configured using a CPU or the like, and collectively controls the operation of the microscope 1.

  The input unit 17 is configured to be pasted on the display screen in the display unit 18a of the output unit 18 using, for example, a touch panel. By displaying various switches on the display unit 18a and causing the user to press the switches, it is possible to perform control according to the switches displayed on the display unit 18a from the pressed position detection information on the touch panel.

  The output unit 18 includes a display unit 18a, a speaker that emits sound, and an LED that emits light. The display unit 18a is configured by a display device such as an LCD, and displays various display contents including character information sent from the control unit 16.

  The storage unit 19 stores various programs to be executed by the microscope 1 and various data used during execution of the programs. In addition, as shown in FIG. 3, the storage unit 19 includes a hole number of a plurality of holding holes for holding the plurality of objective lenses 4 provided in the revolver unit 5 and the type of objective lens attached to the holding hole. The in-use objective lens table D1 (first relation information) indicating the correspondence of (magnification, etc.) is stored. The in-use objective lens table D <b> 1 is created when the user inputs the type of objective lens attached to each hole of the revolver unit 5 via the input unit 17 before starting observation with the microscope 1.

  Further, as shown in FIG. 4, the storage unit 19 includes an optimum localization position (position in the optical axis direction of the Nomarski prism) according to the types of all objective lenses that can be attached, possible observation methods, NA, and WD (working distance). The objective lens detailed information table D2 (second relation information) indicating the above is stored. In the objective lens detailed information table D2, the possibility of each observation method is stored as possible observation methods, for example, ◎ if it is suitable, ◯ if it is suitable, and × if it is not suitable.

  A revolver control unit 20 that controls the operation of the revolver unit 5 and a Nomarski prism control unit 21 that controls the operation of the Nomarski prism 12 are connected to the main control unit 15. In addition, when there exists an electrically-driven part in the other site | part of the microscope 1, the control part according to each may be further connected. Further, the revolver control unit 20 and the Nomarski prism control unit 21 may be independent as external devices, may be built in the main body 2 of the microscope 1, or may be built in the main control unit 15.

  The revolver control unit 20 is configured to perform revolver rotation drive and control of the revolver unit 5 and to detect the hole number (information on the objective lens) of the mounting hole to which the objective lens 4 on the observation optical axis N1 is attached. Has been. For example, a DC motor may be used as a drive source for rotational driving of the revolver, and a magnetic sensor, for example, may be used as lens position detecting means for detecting the hole number of the mounting hole of the objective lens 4.

  The Nomarski prism control unit 21 performs drive control and position detection of the Nomarski prism 12 in the optical axis direction, drive control in the direction orthogonal to the observation optical axis N1, and position detection. In order to perform drive control and position detection of the Nomarski prism 12 in the optical axis direction, for example, a mechanical mechanism such as a cam and a DC motor (motor M1) may be used. Further, if the micro switch that is pressed when the prism is arranged at the position P1 and the micro switch that is pressed when the prism is arranged at the position P2 are used as the sensor S1, the Nomarski prism 12 Position detection in the optical axis direction can be performed. In order to perform drive control and position detection of the Nomarski prism 12 in the direction orthogonal to the observation optical axis N1, for example, a mechanism such as a feed screw is driven by a stepping motor (motor M2) and used as an origin sensor (sensor S2). If a photo interrupter or the like is used, position control can be performed, and the position of the Nomarski prism 12 in the direction perpendicular to the optical axis can be detected by measuring the amount of feed pulses from the detection position of the origin sensor.

  FIG. 5 is a flowchart showing correctness / incorrectness determination processing of the optical axis direction position of the Nomarski prism 12 performed by the microscope according to the first embodiment.

  First, the control unit 16 acquires position information in a direction orthogonal to the observation optical axis N1 of the Nomarski prism 12 via the Nomarski prism control unit 21, and the Nomarski prism 12 is currently on the optical path (observation optical axis N1). Determine whether or not. (Step S101).

  When the control unit 16 determines that the current Nomarski prism is on the optical path (step S101: Yes), the mounting hole for the objective lens 4 currently disposed on the observation optical axis N1 is set via the revolver control unit 20. Number information is acquired (step S102).

  The control unit 16 includes hole number information of a holding hole holding the objective lens 4 on the observation optical axis N1, each hole number of the revolver unit 5 stored in the storage unit 19, and the attached objective lens. The type of the objective lens 4 currently arranged on the observation optical axis N1 is determined based on the in-use objective lens table information D1 indicating the type correspondence. (Step S103).

  The control unit 16 refers to the objective lens detailed information table D2 and acquires information on the position in the optical axis direction of the Nomarski prism 12 that is optimal for the type of the objective lens 4 currently arranged on the observation optical axis N1. (Step S104). Thereafter, the control unit 16 acquires information about the current position of the Nomarski prism 12 in the optical axis direction via the Nomarski prism control unit 21 (step S105).

  Based on the information acquired in step S104 and the information acquired in step S105, the control unit 16 sets the current position of the Nomarski prism 12 in the optical axis direction on the current observation optical axis N1. It is determined whether or not the type is appropriate (step S106).

  Here, when the control unit 16 determines that the Nomarski prism 12 is not in the optimal position in the optical axis direction (step S106: No), the control unit 16 performs notification processing that the Nomarski prism 12 is not in the optimal position in the optical axis direction. The output unit 18 is instructed. The output unit 18 displays character information and the like on the display screen of the display unit 18a, and performs notification processing (step S107). The output unit 18 may perform the notification process by emitting sound or light.

  In addition, the control unit 16 may perform only a notification process that notifies the user that the position of the Nomarski prism 12 is not an optimal position in the optical axis direction, or the control of the Nomarski prism control unit 21 may be performed. Then, the motor M1 may be driven to move the Nomarski prism 12 to an appropriate position (in the first embodiment, either the position P1 or the position P2), or the notification process and the Nomarski prism 12 may be performed. The movement process may be performed.

  After the notification process, the control unit 16 proceeds to step S108, and if there is an instruction to end observation (step S108: Yes), the correctness / incorrectness determination process of the position of the Nomarski prism 12 in the optical axis direction is ended. On the other hand, if there is an instruction to continue observation (step S108: No), the control unit 16 proceeds to step S101 and repeats the above-described processing. In step S101, when it is determined that the current Nomarski prism is not on the optical path (step S101: No), the control unit 16 proceeds to step S108 and confirms whether there is an instruction to end observation.

  If the control unit 16 determines that the Nomarski prism 12 is at the optimum position in the optical axis direction (step S106: Yes), the control unit 16 proceeds to step S108 and performs the above-described processing.

  In the present embodiment, the correctness / incorrectness determination process of the optical axis direction position of the Nomarski prism 12 is always performed until an instruction to end the observation is given in step S108. May be performed only when any one of the switching operation of the objective lens 4, the switching operation of the position of the Nomarski prism 12 in the optical axis direction, and the arrangement operation of the Nomarski prism 12 on the optical axis is performed. .

  According to the first embodiment described above, the type of the objective lens 4 arranged on the optical path (observation optical axis N1) and the position of the Nomarski prism 12 in the optical axis direction are detected, and the optical axis of the Nomarski prism 12 is detected. Since it is determined whether or not the direction position corresponds to the type of the objective lens 4 arranged on the optical path N1, the Nomarski prism can be simply and reliably optimally aligned with the optical axis direction according to the objective lens used. Can be placed in position.

  In the first embodiment described above, two microswitches are used to determine whether the optical axis direction of the Nomarski prism 12 is the position P1 or the position P2. However, detection is performed from either of the two microswitches. The case where there is no position may be determined as an indefinite position, and the user may be notified that the position of the Nomarski prism 12 is indefinite.

  Further, in the above-described first embodiment, it has been described that there are two switching positions in the direction parallel to the observation optical axis N1 of the Nomarski prism 12, but three or more switching positions are provided, and a stepping motor or an origin is provided. Further positional control may be performed by combining sensors and the like.

  Further, in the first embodiment described above, it has been described that the Nomarski prism 12 is moved by driving the motors M1 and M2. However, the position of the Nomarski prism 12 is changed by a user operation by a mechanical mechanism such as a lever. You may do. Further, for example, the movement in the direction parallel to the observation optical axis N1 may be performed manually by a lever, and the movement in the direction perpendicular to the observation optical axis N1 may be moved by the motor M2.

  Further, in the first embodiment described above, instead of the objective lens detailed information table D2, information regarding the optimum position of the Nomarski prism 12 is individually given in advance to the information of each objective lens, and the control unit 16 provides the objective lens 4 with the information. Then, the optimum position of the Nomarski prism 12 may be acquired by referring to the information of the objective lens 4.

  6 and 7 are schematic views showing the configuration of the main part of the microscope according to the modification of the first embodiment. In the first embodiment described above, the description has been made assuming that the Nomarski prism 12 (Nomarski prism moving unit 14) is disposed inside the integrally formed revolver unit 5. However, the revolver unit 5a shown in FIGS. The Nomarski prism moving part 14 may be detachably provided.

  The revolver 5a shown in FIGS. 6 and 7 has an opening 50 that is perforated in a prismatic shape so as to include the observation optical axis N1. The revolver portion 5 a is engaged with the connecting portion 22 in the opening 50.

  The connection part 22 has the 1st prismatic part 22a extended in substantially prismatic shape, and the 2nd prismatic part 22b which continues to the 1st prismatic part 22a and extends in prismatic form. In addition, the above-described Nomarski prism moving unit 14 is disposed inside the connecting unit 22.

  At this time, the Nomarski prism 12 is provided inside the first prismatic portion 22a so as to be movable in the longitudinal direction of the first prismatic portion 22a and the direction perpendicular to the longitudinal direction. The Nomarski prism 12 is moved by a mechanical mechanism such as the motors M1 and M2 or lever operation described above.

  The revolver portion 5a and the connecting portion 22 are connected by being fixed by a fixing means such as a screw after the first prismatic portion 22a and the opening 50 are fitted. The Nomarski prism 12 can be arranged on the optical path N1 in a state where the first prism portion 22a and the opening 50 are fitted. At this time, the position of the connecting portion 22 with respect to the revolver portion 5a is such that the first prism portion 22a is applied to the end surface on the deep side of the opening 50 or the step portion formed by the first prism portion 22a and the second prism portion 22b. It can regulate by applying the end surface of the opening part 50. FIG. Further, as shown in FIG. 7, a switch 51 may be provided in the opening 50 to detect attachment of the connecting portion 22 to the opening 50.

  According to the modification, the same effects as those of the first embodiment described above can be obtained, and the Nomarski prism 12 (Nomarski prism moving unit 14) can be detached from the revolver unit 5a. It becomes possible to perform processing such as these more easily.

(Embodiment 2)
FIG. 8 is a side view schematically showing the overall configuration of the microscope according to the second embodiment of the present invention. In addition, the same code | symbol is attached | subjected to the component same as the structure demonstrated in FIG. In the second embodiment, a microscope having a configuration in which a prism 23 (or a half mirror) is provided to branch the optical path of the observation light of the sample S and a sample image is captured by the imaging unit 24 is added to the microscope 1 described above. 1a will be described. The imaging unit 24 images a sample image obtained by forming an image of light incident through the prism 23, generates image data corresponding to the sample image, and outputs the image data to the camera control unit 25. The camera control unit 25 is connected to the main control unit 15a and outputs the obtained image data to the main control unit 15a.

  Here, in place of the control unit 16, the main control unit 15a is provided with a control unit 16a that collectively controls the operation of the entire microscope 1a. The main control unit 15a also performs image processing on the image data corresponding to the specimen image generated by the imaging unit 24, and image data processed by the image processing unit 26. And an information adding unit 27 for adding information at the time of imaging.

  The image processing unit 26 performs predetermined image processing on the image data input from the imaging unit 24. Specifically, the image processing unit 26 performs image processing including optical black subtraction processing, white balance adjustment processing, color matrix calculation processing, γ correction processing, color reproduction processing, and edge enhancement processing on the image data.

  The information adding unit 27 adds the image information D4 at the time of imaging as metadata (additional information) to the image data D3 subjected to image processing by the image processing unit 26. The metadata (image information D4) includes information related to an observation method at the time of imaging, information related to the type of the objective lens 4, position information of the Nomarski prism 12, and the like. The position information of the Nomarski prism 12 includes information on whether or not it is on the optical path (observation optical axis N1), and information on the position on the optical path when it is on the optical path.

  According to the second embodiment described above, the same effects as those of the first embodiment described above can be obtained, and the image information D4 is extracted based on the image data D3, whereby the Nomarski prism 12 at the time of imaging is extracted. It becomes possible to confirm position information and the like.

  In the first and second embodiments, the transmission type differential interference observation optical system has been described as an example. However, the present invention can also be applied to a reflection type differential interference observation optical system. In the first and second embodiments described above, the inverted microscope has been described as an example. For example, an upright microscope, an objective lens that forms a differential interference observation optical system, and enlarges the sample, and an objective lens The present invention can also be applied to an imaging apparatus having an imaging function for imaging a specimen and a display function for displaying an image, such as a video microscope.

  As described above, the microscope according to the present invention is useful for easily and surely arranging the Nomarski prism at the optimum position according to the objective lens to be used.

DESCRIPTION OF SYMBOLS 1,1a Microscope 2 Main body part 3 Stage 4 Objective lens 5, 5a Revolver part 6 Transmitted illumination part 7 Light source 8 Lens barrel part 9 Polarizer 10 Analyzer 11 Illumination side Nomarski prism (Nomarski prism)
12 Observation side Nomarski prism (Nomarski prism)
DESCRIPTION OF SYMBOLS 13 Condenser lens 14 Nomarski prism moving part 15,15a Main control part 16,16a Control part 17 Input part 18 Output part 18a Display part 19,19a Storage part 20 Revolver control part 21 Nomarski prism control part 22 Connection part 22a 1st prism part 22b 2nd prism part 23 prism 24 imaging part 25 camera control part 26 image processing part 27 information addition part 50 opening part 51 switch D1 in-use objective lens table D2 objective lens detailed information table D3 image data D4 image information M1, M2 motor S1 , S2 sensor

Claims (4)

A revolver unit that holds a plurality of objective lenses that collect observation light from a specimen to be observed, and that arranges any of the plurality of objective lenses on an optical path that passes through the specimen;
A Nomarski prism that can be inserted into and removed from the optical path and is movable in a direction along the optical path;
Lens position detecting means for detecting information on the objective lens arranged on the optical path;
Prism position detecting means for detecting position information of the Nomarski prism;
First relation information relating the information detected by the lens position detection means and the type of the objective lens, and second relation information relating the kind of the objective lens and the optimum position of the Nomarski prism. A storage unit for storing;
The objective lens in which the position of the Nomarski prism is arranged on the optical path based on the information detected by the lens position detecting means and the prism position detecting means respectively and the first and second relation information. A control unit for determining whether or not it is appropriate for
A microscope comprising:   When the control unit determines that the position of the Nomarski prism is not suitable for the objective lens arranged on the optical path passing through the sample, at least one of light, sound, and character information is obtained. The microscope according to claim 1, further comprising output means for outputting.   When the control unit determines that the position of the Nomarski prism is not suitable for the objective lens arranged on the optical path passing through the sample, the control unit moves the Nomarski prism to an appropriate position. The microscope according to claim 1, wherein: An imaging unit that captures a specimen image of the specimen and generates image data corresponding to the specimen image;
An information adding unit that adds, to the image data, information related to the objective lens arranged on an optical path passing through the specimen at the time of imaging, and / or additional information including the position of the Nomarski prism at the time of imaging;
The microscope according to any one of claims 1 to 3, further comprising:

Images