JP2014185929A - Edge position detection device and edge position detection method - Google Patents

Edge position detection device and edge position detection method Download PDF

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JP2014185929A
JP2014185929A JP2013060792A JP2013060792A JP2014185929A JP 2014185929 A JP2014185929 A JP 2014185929A JP 2013060792 A JP2013060792 A JP 2013060792A JP 2013060792 A JP2013060792 A JP 2013060792A JP 2014185929 A JP2014185929 A JP 2014185929A
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position detection
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edge position
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JP5877171B2 (en
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Takahiro Inamura
隆宏 稲村
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Fujifilm Corp
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PROBLEM TO BE SOLVED: To allow easy and accurate detection of edge positions of a light-transmissive member being transported and to allow the improvement of installation layout performance.SOLUTION: An edge position detection device 10 includes: a light projection mechanism 26 which irradiates a transparent web 14 being transported, with inspection light to propagate the inspection light along the inside of the transparent web 14; a light receiving mechanism 28 which is disposed on the outside of an irradiation area S directly irradiated with the inspection light from the light projection mechanism 26 and detects scattering light of the inspection light propagated in the transparent web 14 and scattering to the outside from an edge part 14e of the transparent web 14; and an edge position detection circuit 30 which detects the position of the edge part 14e of the transparent web 14 on the basis of the detected scattering light.

Description

本発明は、搬送されているウエブ状又はシート状の光透過性部材のエッジ位置を検出するエッジ位置検出装置及びエッジ位置検出方法に関する。   The present invention relates to an edge position detection device and an edge position detection method for detecting an edge position of a web- or sheet-like light-transmitting member being conveyed.

一般に、長尺状フイルム等のウエブを用いた製造設備やラミネート処理等を行う処理設備では、前記ウエブを所定の搬送路に沿って搬送する搬送ラインを備えている。   Generally, a manufacturing facility using a web such as a long film or a processing facility for performing a laminating process includes a transport line for transporting the web along a predetermined transport path.

その際、搬送ラインに沿って搬送されるウエブは、搬送方向に交差する幅方向にずれる場合がある。このため、作業ステーションに搬送されたウエブは、エッジ位置が変動し易く、所望の作業を高精度に遂行することができないという問題がある。そこで、搬送されたウエブのエッジ位置を修正するために、例えば、特許文献1に開示されているウエブのエッジ位置検出装置を備えた、エッジ位置修正装置が知られている。   In that case, the web conveyed along a conveyance line may shift | deviate in the width direction which cross | intersects a conveyance direction. For this reason, the web conveyed to the work station has a problem that the edge position is likely to fluctuate and a desired work cannot be performed with high accuracy. Therefore, in order to correct the edge position of the conveyed web, for example, an edge position correction device including a web edge position detection device disclosed in Patent Document 1 is known.

ところが、透明フイルムのような光透過性ウエブでは、通常の光学式エッジ検出装置によるエッジ位置の検出が困難である。そこで、光透過性ウエブに対応する装置として、例えば、特許文献1では、超音波式や空気式のエッジ位置検出装置が提案されている。   However, it is difficult to detect the edge position with a normal optical edge detector in a light-transmitting web such as a transparent film. Therefore, as an apparatus corresponding to the light transmissive web, for example, Patent Document 1 proposes an ultrasonic or pneumatic edge position detection apparatus.

しかしながら、特許文献1のエッジ位置検出装置のような投光器と受光器との間にウエブが挿入される透過型の検出装置では、前記ウエブのエッジにカール等の変形が発生すると、前記エッジの位置検出精度が大幅に低下するという問題がある。さらに、超音波式や空気式では、検出幅が数mmと短いため、エッジの位置に対応して検出器の位置を追従させる移動機構が必要である。従って、設備全体が複雑化且つ大型化するという問題がある。   However, in a transmission type detection device in which a web is inserted between a projector and a light receiver, such as the edge position detection device of Patent Document 1, when the curl or the like is deformed on the edge of the web, the position of the edge is detected. There is a problem that the detection accuracy is greatly reduced. Furthermore, since the detection width is as short as several millimeters in the ultrasonic type and the pneumatic type, a moving mechanism for tracking the position of the detector corresponding to the position of the edge is necessary. Therefore, there is a problem that the entire facility becomes complicated and large.

一方、特許文献2に開示されている被験体の厚さ測定方法では、厚さを測定しようとする被験体を突出した湾曲体表面に位置づけ、前記被験体における湾曲体と被験体との接触部に測定対象断面が観測可能となる性質を有する照明光を照射するとともに、前記接触部における湾曲体の略接線方向から被験体を観測し、被験体の測定対象断面を透過又は反射した光によって被験体の厚さを測定することを特徴としている。   On the other hand, in the method for measuring the thickness of a subject disclosed in Patent Document 2, the subject whose thickness is to be measured is positioned on the protruding curved body surface, and the contact portion between the curved body and the subject in the subject. Is irradiated with illumination light having such a property that the cross section of the measurement object can be observed, and the subject is observed from the substantially tangential direction of the curved body at the contact portion, and is examined by light transmitted or reflected through the cross section of the measurement object. It is characterized by measuring body thickness.

特開2001−226005号公報JP 2001-226005 A 特開平2−297007号公報JP-A-2-297007

しかしながら、上記の特許文献2では、特に被験体の光透過率が高い場合に、測定対象断面と周囲環境との境界を峻別することが困難になる。さらに、湾曲体(ローラ)の材質や形状によって、検出感度が低下し易く、誤検出が惹起されるという問題がある。   However, in Patent Document 2 described above, it is difficult to distinguish the boundary between the measurement object cross section and the surrounding environment, particularly when the light transmittance of the subject is high. Furthermore, there is a problem that the detection sensitivity tends to be lowered depending on the material and shape of the curved body (roller), and erroneous detection is caused.

この種の課題は、透明フイルムの搬送時に限定されるものではなく、その他、シート状の透明ガラス体やウエブ状の透明ガラス体を搬送するシステムにも該当する。   This type of problem is not limited to the time of transporting the transparent film, but also applies to a system for transporting a sheet-like transparent glass body or a web-like transparent glass body.

本発明は、このような課題を考慮してなされたものであり、搬送されている光透過性部材のエッジ位置を容易且つ高精度に検出することができ、しかも設置レイアウト性を向上させることが可能なエッジ位置検出装置及びエッジ位置検出方法を提供することを目的とする。   The present invention has been made in consideration of such problems, and can easily and accurately detect the edge position of the light transmissive member being conveyed, and can improve the installation layout. It is an object of the present invention to provide a possible edge position detection apparatus and edge position detection method.

本発明に係るエッジ位置検出装置は、搬送されている光透過性部材に検査光を照射し、前記光透過性部材の内部に沿って前記検査光を伝播させる投光機構と、前記投光機構から前記検査光が直接照射される照射領域の外部に配置されるとともに、前記光透過性部材の内部を伝播した前記検査光が、該光透過性部材のエッジ部から外部に散乱する散乱光を検出する受光機構と、検出された前記散乱光に基づいて、前記光透過性部材の前記エッジ部の位置を検出する機構と、を備えている。   An edge position detection apparatus according to the present invention includes a light projecting mechanism that irradiates a light transmitting member being conveyed with inspection light and propagates the inspection light along the inside of the light transmitting member, and the light projecting mechanism. The inspection light that is disposed outside the irradiation region directly irradiated with the inspection light from the edge of the light transmissive member is scattered from the edge portion of the light transmissive member to the outside. A light receiving mechanism for detecting, and a mechanism for detecting the position of the edge portion of the light transmissive member based on the detected scattered light.

また、このエッジ位置検出装置では、光透過性部材に検査光を照射する際に、前記光透過性部材に密着して湾曲搬送するローラ部材を備えることが好ましい。   Further, this edge position detection device preferably includes a roller member that is curvedly conveyed in close contact with the light transmissive member when the light transmissive member is irradiated with the inspection light.

さらに、本発明に係るエッジ位置検出方法は、光透過性部材を搬送しながら、前記光透過性部材に検査光を照射し、前記光透過性部材の内部に沿って前記検査光を伝播させる工程と、前記光透過性部材の内部を伝播した前記検査光が、該光透過性部材のエッジ部から外部に散乱する散乱光を検出する工程と、前記検出された前記散乱光に基づいて、前記光透過性部材の前記エッジ部の位置を検出する工程と、を有している。   Furthermore, in the edge position detection method according to the present invention, the step of irradiating the light transmissive member with inspection light while propagating the light transmissive member and propagating the inspection light along the inside of the light transmissive member. And the step of detecting the scattered light scattered outside from the edge portion of the light transmissive member, the inspection light propagating through the light transmissive member, and based on the detected scattered light, Detecting the position of the edge portion of the light transmissive member.

さらにまた、このエッジ位置検出方法では、光透過性部材は、ローラ部材に密着して湾曲搬送されながら、検査光が照射されることが好ましい。   Furthermore, in this edge position detection method, it is preferable that the light transmissive member is irradiated with inspection light while being bent and conveyed in close contact with the roller member.

本発明によれば、例えば、ウエブ状又はシート状の光透過性部材に照射された検査光は、前記光透過性部材の内部に沿って伝播された後、該光透過性部材のエッジ部から外部に散乱している。このため、受光機構は、エッジ部からの散乱光を検出することにより、前記エッジ部の位置を容易且つ正確に検出することができる。   According to the present invention, for example, the inspection light irradiated on the web-like or sheet-like light transmissive member is propagated along the inside of the light transmissive member, and then from the edge portion of the light transmissive member. Scattered outside. For this reason, the light receiving mechanism can easily and accurately detect the position of the edge portion by detecting the scattered light from the edge portion.

しかも、エッジ位置検出装置は、光透過性部材に検査光を照射する投光機構と、前記光透過性部材のエッジ部から外部に散乱する散乱光を検出する受光機構とを備えている。従って、例えば、蛍光灯やLED照明等の投光器と、CCDカメラ(集光レンズを備えた)等の受光器を用いることにより、容易に広い範囲を検査することができ、検査範囲(検査距離及び検査幅を含む)が拡大し、検出器をエッジ位置に追従して移動させる機構が不要になる。   In addition, the edge position detection device includes a light projecting mechanism that irradiates the light transmissive member with inspection light, and a light receiving mechanism that detects scattered light scattered outside from the edge portion of the light transmissive member. Therefore, for example, by using a projector such as a fluorescent lamp or LED illumination and a light receiver such as a CCD camera (having a condensing lens), a wide range can be easily inspected. (Including the inspection width) is enlarged, and a mechanism for moving the detector following the edge position becomes unnecessary.

特に、投光機構と受光機構とを近接して配置するスペースがなくても、前記投光機構と前記受光機構とは、互いに離間してそれぞれ個別のスペースに良好に配置することができる。これにより、エッジ位置検出装置は、設置レイアウト性の向上が図られる。   In particular, even if there is no space in which the light projecting mechanism and the light receiving mechanism are arranged close to each other, the light projecting mechanism and the light receiving mechanism can be satisfactorily arranged in separate spaces apart from each other. Thereby, the edge position detection apparatus can improve the installation layout.

本発明の第1の実施形態に係るエッジ位置検出装置の概略構成説明図である。1 is a schematic configuration explanatory diagram of an edge position detection device according to a first embodiment of the present invention. 前記エッジ位置検出装置を構成する投光機構及び受光機構の配置状態の説明図である。It is explanatory drawing of the arrangement | positioning state of the light projection mechanism and light reception mechanism which comprise the said edge position detection apparatus. 前記投光機構の配置状態の説明図である。It is explanatory drawing of the arrangement | positioning state of the said light projection mechanism. 透明ウエブの内部を伝播する検査光の説明図である。It is explanatory drawing of the inspection light which propagates the inside of a transparent web. 前記受光機構の他の配置状態の説明図である。It is explanatory drawing of the other arrangement | positioning state of the said light-receiving mechanism. 前記受光機構による撮影画像である。It is a picked-up image by the said light-receiving mechanism. 本発明の第2の実施形態に係るエッジ位置検出装置の概略構成説明図である。It is schematic structure explanatory drawing of the edge position detection apparatus which concerns on the 2nd Embodiment of this invention. 本発明の第3の実施形態に係るエッジ位置検出装置の概略構成説明図である。It is schematic structure explanatory drawing of the edge position detection apparatus which concerns on the 3rd Embodiment of this invention. 本発明の第4の実施形態に係るエッジ位置検出装置の概略構成説明図である。It is schematic structure explanatory drawing of the edge position detection apparatus which concerns on the 4th Embodiment of this invention.

図1に示すように、本発明の第1の実施形態に係るエッジ位置検出装置10は、ウエブ処理システム12に組み込まれる。   As shown in FIG. 1, the edge position detection apparatus 10 according to the first embodiment of the present invention is incorporated in a web processing system 12.

ウエブ処理システム12は、透明な長尺フイルムである透明ウエブ(光透過性部材)14が巻回された巻き戻しローラ16を備える。巻き戻しローラ16から巻き戻される透明ウエブ14は、第1ガイドローラ18a及び第2ガイドローラ18bに掛け渡された後、折り返しローラ部材(ローラ部材)20に送られる。折り返しローラ部材20の下流には、透明ウエブ14を巻き取る巻き取りローラ22が配置される。透明ウエブ14は、例えば、ラミネートフイルム等の他、各種合成樹脂製フイルムやガラス製フイルム等が使用され、特に光透過率が高い程、好ましい。   The web processing system 12 includes a rewinding roller 16 around which a transparent web (light transmissive member) 14 which is a transparent long film is wound. The transparent web 14 to be rewound from the rewound roller 16 is passed over the first guide roller 18a and the second guide roller 18b, and then sent to the folding roller member (roller member) 20. A take-up roller 22 for winding the transparent web 14 is disposed downstream of the folding roller member 20. As the transparent web 14, for example, various synthetic resin films, glass films and the like are used in addition to a laminate film, and the higher the light transmittance, the more preferable.

第1ガイドローラ18a及び第2ガイドローラ18bは、透明ウエブ14の搬送方向に交差する幅方向の位置(エッジ位置)を調整するために、例えば、傾動可能に構成される。巻き取りローラ22には、巻き取り用モータ24が連結される。   The first guide roller 18a and the second guide roller 18b are configured to be tiltable, for example, in order to adjust the position in the width direction (edge position) intersecting the transport direction of the transparent web 14. A winding motor 24 is connected to the winding roller 22.

エッジ位置検出装置10は、搬送されている透明ウエブ14に検査光LINを照射し、前記透明ウエブ14の内部に沿って前記検査光LINを伝播させる投光機構26(図1〜図3参照)と、前記投光機構26から前記検査光LINが直接照射される照射領域Sの外部に配置されるとともに、前記透明ウエブ14の内部を伝播した前記検査光LINが、該透明ウエブ14のエッジ部14eから外部に散乱する散乱光LOUTを検出する受光機構28(図1及び図2参照)と、検出された前記散乱光LOUTに基づいて、前記透明ウエブ14の前記エッジ部14eの位置を検出するエッジ位置検出回路(機構)30と、を備える。 The edge position detection device 10 irradiates the inspection light L IN on the transported transparent web 14 and propagates the inspection light L IN along the inside of the transparent web 14 (FIGS. 1 to 3). a reference), together with the inspection light L iN from the light emitting mechanism 26 is arranged outside the irradiation area S to be irradiated directly, the inspection light L iN propagates inside the said transparent web 14, the transparent web A light receiving mechanism 28 (see FIGS. 1 and 2) that detects scattered light L OUT scattered from the edge portion 14e of the 14 and the edge portion of the transparent web 14 based on the detected scattered light L OUT. And an edge position detection circuit (mechanism) 30 for detecting the position of 14e.

なお、図1に示すように、投光機構26から照射される検査光LINは、折り返しローラ部材20等で反射することにより反射光(散乱光)LREFを発生させる。このため、受光機構28は、好ましくは、折り返しローラ部材20等からの反射光LREFを受光しない位置に配置されることが必要である。 Incidentally, as shown in FIG. 1, the inspection light L IN emitted from the light projecting system 26 generates a reflected light (scattered light) L REF by reflecting by the return roller member 20 or the like. For this reason, the light receiving mechanism 28 is preferably arranged at a position where it does not receive the reflected light L REF from the folding roller member 20 or the like.

投光機構26及び受光機構28は、透明ウエブ14の一方のエッジ部14eに対応して設けてもよく、又は、前記透明ウエブ14の両側のエッジ部14e、14eに対応して設けてもよい。   The light projecting mechanism 26 and the light receiving mechanism 28 may be provided corresponding to one edge portion 14e of the transparent web 14, or may be provided corresponding to the edge portions 14e, 14e on both sides of the transparent web 14. .

図1に示すように、投光機構26は、光源、例えば、発光ダイオード(LED)26aを備える。発光ダイオード26aの光路上には、拡散板26b及び集光レンズ26cが配設される。投光機構26は、透明ウエブ14の面方向に対して所定の角度α1゜だけ傾斜するとともに、前記透明ウエブ14の幅方向に長尺な長方形状を有する(図2及び図3参照)。   As shown in FIG. 1, the light projecting mechanism 26 includes a light source, for example, a light emitting diode (LED) 26a. A diffusion plate 26b and a condenser lens 26c are disposed on the optical path of the light emitting diode 26a. The light projecting mechanism 26 is inclined by a predetermined angle α1 ° with respect to the surface direction of the transparent web 14 and has a long rectangular shape in the width direction of the transparent web 14 (see FIGS. 2 and 3).

図4に示すように、透明ウエブ14内での検査光LINの臨界角θcは、ウエブ屈折率n1及び空気屈折率n2とすると、θc゜=sin-1(n2/n1)となる。検査光LINは、臨界角θc゜よりも大きな角度で入射することにより、透明ウエブ14の内部で全反射して伝播することができ、前記検査光LINを遠くまで導光することが可能になる。 As shown in FIG. 4, the critical angle θc of the inspection light L IN of a transparent web within 14, when the web refractive index n1 and refractive index of air n2, the θc ° = sin -1 (n2 / n1) . When the inspection light L IN is incident at an angle larger than the critical angle θc °, the inspection light L IN can be totally reflected and propagated inside the transparent web 14, and the inspection light L IN can be guided far away. become.

透明ウエブ14の内部で検査光LINを全反射させて伝播(導光)させるために、角度α1゜(=90゜−θc゜)は、小さい方が好ましく、略0゜に近似することが好ましい。投光機構26は、透明ウエブ14の照射面に可及的に近接して配置されることが好ましく、また、ウエブ幅方向の寸法W(図2参照)は、検査幅に応じて設定されることが好ましく、例えば、数百mmの照射範囲を有する。 To propagate by total reflection of the inspection light L IN inside the transparent web 14 (light guide), the angle α1 ° (= 90 ° -θc °) is, it is preferably less, be substantially 0 ° approximated preferable. The light projecting mechanism 26 is preferably arranged as close as possible to the irradiation surface of the transparent web 14, and the dimension W in the web width direction (see FIG. 2) is set according to the inspection width. Preferably, for example, it has an irradiation range of several hundred mm.

図3に示すように、投光機構26は、透明ウエブ14のエッジ部14eに平行な方向から前記エッジ部14e側に傾斜する。投光機構26からの検査光LINは、エッジ部14eに平行な方向に対して所定の角度α2°だけ傾斜して配置される。投光機構26から導出された検査光LINは、透明ウエブ14内を伝播してエッジ部14eから外方に散乱し易いからである。 As shown in FIG. 3, the light projecting mechanism 26 is inclined toward the edge portion 14 e from a direction parallel to the edge portion 14 e of the transparent web 14. Inspection light L IN from the light projecting system 26 is arranged to be inclined at a predetermined angle [alpha] 2 ° with respect to a direction parallel to the edge portion 14e. Inspection light L IN derived from the light projecting system 26 is because it propagates through the transparent web 14 scattered from the edge portion 14e outward easily.

受光機構28は、例えば、CCDカメラが使用されるが、その他、赤外線カメラやフォトトランジスタ等の光検出器を用いてもよい。受光機構28の光路上には、集光レンズ32が配置されるとともに、この光路は、透明ウエブ14の検査面に直交する方向から角度α3゜だけ傾斜する。なお、受光機構28は、図1中、二点鎖線で示すように、検査面に直交する方向に光路を一致させて配置することもできる。その他、受光機構28は、照射領域Sの外部で且つ反射光LREFを受光する位置を避けた位置であれば、任意の位置に設置することができる。 For example, a CCD camera is used as the light receiving mechanism 28, but an optical detector such as an infrared camera or a phototransistor may be used. A condensing lens 32 is disposed on the optical path of the light receiving mechanism 28, and this optical path is inclined by an angle α3 ° from a direction orthogonal to the inspection surface of the transparent web 14. In addition, the light receiving mechanism 28 can also be arrange | positioned by making an optical path correspond in the direction orthogonal to a test | inspection surface, as shown by the dashed-two dotted line in FIG. In addition, the light receiving mechanism 28 can be installed at an arbitrary position as long as it is outside the irradiation region S and avoids the position where the reflected light L REF is received.

図2に示すように、受光機構28は、透明ウエブ14のエッジ部14eに沿って光軸が設定される。受光機構28の撮像範囲は、エッジ部14eを含んで透明ウエブ14の端縁部から折り返しローラ部材20の一部に亘っている。なお、図5に示すように、受光機構28の光軸は、エッジ部14eに対して角度α4゜だけ傾斜してもよい。その際、撮像面が傾斜するため、画像の補正処理が必要である。   As shown in FIG. 2, in the light receiving mechanism 28, the optical axis is set along the edge portion 14 e of the transparent web 14. The imaging range of the light receiving mechanism 28 extends from the edge of the transparent web 14 to a part of the folding roller member 20 including the edge 14e. As shown in FIG. 5, the optical axis of the light receiving mechanism 28 may be inclined by an angle α4 ° with respect to the edge portion 14e. At this time, since the imaging surface is inclined, an image correction process is necessary.

図1に示すように、エッジ位置検出回路30は、コントローラ34の機能として設けられる。コントローラ34は、巻き取り用モータ24の駆動制御を含めてウエブ処理システム12全体の制御を行う。コントローラ34は、ローラ傾動回路36としての機能を有し、前記ローラ傾動回路36は、第1ガイドローラ18a及び第2ガイドローラ18bを傾動させ、透明ウエブ14のエッジ部14eの位置を調整する。   As shown in FIG. 1, the edge position detection circuit 30 is provided as a function of the controller 34. The controller 34 controls the entire web processing system 12 including drive control of the winding motor 24. The controller 34 has a function as a roller tilt circuit 36, and the roller tilt circuit 36 tilts the first guide roller 18 a and the second guide roller 18 b to adjust the position of the edge portion 14 e of the transparent web 14.

次に、このように構成されるエッジ位置検出装置10の動作について、本実施形態に係るエッジ位置検出方法との関連で、以下に説明する。   Next, the operation of the edge position detection apparatus 10 configured as described above will be described below in relation to the edge position detection method according to the present embodiment.

図1に示すように、予め、巻き戻しローラ16から透明ウエブ14の先端が引き出され、この先端が第1ガイドローラ18a、第2ガイドローラ18b及び折り返しローラ部材20に掛け渡しされた後、巻き取りローラ22に固定される。   As shown in FIG. 1, after the leading end of the transparent web 14 is drawn out from the rewinding roller 16 in advance, the leading end is passed over the first guide roller 18a, the second guide roller 18b, and the folding roller member 20, and then the winding is performed. It is fixed to the take-up roller 22.

次いで、コントローラ34の作用下に、巻き取り用モータ24が駆動されると、前記巻き取り用モータ24が連結された巻き取りローラ22が矢印方向に回転する。このため、巻き取りローラ22に先端が固定された透明ウエブ14は、巻き戻しローラ16から繰り出されて前記巻き取りローラ22に巻き取られる。   Next, when the winding motor 24 is driven under the action of the controller 34, the winding roller 22 connected to the winding motor 24 rotates in the direction of the arrow. For this reason, the transparent web 14 whose tip is fixed to the take-up roller 22 is fed from the rewind roller 16 and taken up by the take-up roller 22.

上記のように、透明ウエブ14を搬送しながら、投光機構26から前記透明ウエブ14に検査光LINが照射される。検査光LINは、図4に示すように、透明ウエブ14の内部を全反射して伝播(導光)する。その際、図3に示すように、投光機構26は、透明ウエブ14のエッジ部14eに平行な方向から前記エッジ部14e側に傾斜している。従って、透明ウエブ14の内部を伝播する検査光LINは、エッジ部14e側に向かって進み易くなり、前記エッジ部14eから外部に散乱して散乱光LOUTが発生する。 As described above, the inspection light LIN is irradiated from the light projecting mechanism 26 to the transparent web 14 while conveying the transparent web 14. As shown in FIG. 4, the inspection light L IN is totally reflected and propagates (guides light) inside the transparent web 14. At that time, as shown in FIG. 3, the light projecting mechanism 26 is inclined toward the edge portion 14 e from a direction parallel to the edge portion 14 e of the transparent web 14. Accordingly, the inspection light L IN propagating through the transparent web 14 easily travels toward the edge portion 14e, and is scattered outside from the edge portion 14e to generate scattered light L OUT .

図1及び図2に示すように、受光機構28は、透明ウエブ14のエッジ部14eを含んで検査部位の撮像を行っている。これにより、受光機構28は、エッジ部14eからの散乱光LOUTを撮影し、図6に示すような撮影画像が得られる。図6では、エッジ部14eからの散乱光LOUTにより、前記エッジ部14eが他の部位に比べて明るく表示される。このため、エッジ位置検出回路30では、受光機構28の撮影画面に基づいて、透明ウエブ14のエッジ部14eの位置を検出することができる。特に、エッジ位置検出回路30では、透明ウエブ14の外側から内側に向かって(図6中、矢印M方向)サーチすることにより、エッジ部14eを確実に検出することが可能になる。 As shown in FIGS. 1 and 2, the light receiving mechanism 28 images the examination region including the edge portion 14 e of the transparent web 14. Accordingly, the light receiving mechanism 28 images the scattered light L OUT from the edge portion 14e, and a captured image as shown in FIG. 6 is obtained. In FIG. 6, the edge portion 14e is displayed brighter than other portions due to the scattered light L OUT from the edge portion 14e. Therefore, the edge position detection circuit 30 can detect the position of the edge portion 14 e of the transparent web 14 based on the photographing screen of the light receiving mechanism 28. In particular, the edge position detection circuit 30 can reliably detect the edge portion 14e by searching from the outside to the inside of the transparent web 14 (in the direction of arrow M in FIG. 6).

エッジ位置検出回路30によりエッジ部14eの位置が検出されると、透明ウエブ14の幅方向の位置調整が必要か否かが判断される。そして、コントローラ34では、透明ウエブ14の搬送路補正が必要であると判断されると、ローラ傾動回路36を介して第1ガイドローラ18a及び第2ガイドローラ18bが傾動され、前記透明ウエブ14のエッジ部14eの位置が調整される。   When the position of the edge portion 14e is detected by the edge position detection circuit 30, it is determined whether or not the position adjustment of the transparent web 14 in the width direction is necessary. When the controller 34 determines that the conveyance path correction of the transparent web 14 is necessary, the first guide roller 18a and the second guide roller 18b are tilted via the roller tilt circuit 36, and the transparent web 14 The position of the edge portion 14e is adjusted.

このように、第1の実施形態では、透明ウエブ14に照射された検査光LINは、前記透明ウエブ14の内部に沿って伝播された後(図4参照)、該透明ウエブ14のエッジ部14eから外部に散乱している。このため、受光機構28による検査位置(エッジ部14eに対向する位置)には、周囲の部材に対して光を照射するものが存在しないので、該周囲の部材からの反射光(散乱光)がない。 Thus, in the first embodiment, the inspection light L IN irradiated to the transparent web 14, after being propagated along the inside of the transparent web 14 (see FIG. 4), the edge portion of the transparent web 14 14e is scattered outside. For this reason, since there is no object that irradiates the surrounding member with light at the inspection position (position facing the edge portion 14e) by the light receiving mechanism 28, reflected light (scattered light) from the surrounding member is not present. Absent.

従って、透明ウエブ14のエッジ部14e以外のノイズ信号がなくなる。これにより、受光機構28は、エッジ部14eからの散乱光LOUTを検出することにより、透明ウエブ14の周囲の部材、例えば、折り返しローラ部材20の形状や材質に影響されることがなく、前記エッジ部14eの位置を容易且つ正確に検出することができるという効果が得られる。 Accordingly, noise signals other than the edge portion 14e of the transparent web 14 are eliminated. As a result, the light receiving mechanism 28 detects the scattered light L OUT from the edge portion 14e, so that the light receiving mechanism 28 is not affected by the shape or material of the member around the transparent web 14, for example, the folding roller member 20. The effect that the position of the edge part 14e can be detected easily and accurately is obtained.

一方、光の伝播(導光)を用いない検出方法では、投光器から光透過性部材に照射された検査光は、周囲の部材(例えば、密着させている湾曲ローラ)にも照射され、散乱して受光器により受光されてしまう。このため、エッジ部以外のノイズ信号を発生させるとともに、部材によって散乱の仕方が変化して影響が異なり易くなる。   On the other hand, in the detection method that does not use light propagation (light guide), the inspection light applied to the light-transmitting member from the projector is also applied to the surrounding members (for example, the curved roller in close contact) and scattered. Is received by the receiver. For this reason, noise signals other than those at the edge portions are generated, and the influence of the scattering is easily changed depending on the member.

しかも、検査光LINは、臨界角θc゜よりも大きな角度で入射することにより、透明ウエブ14の内部で全反射して伝播することができる。これにより、検査光LINを遠くまで導光することが可能になり、強度なエッジ信号が得られるという利点がある。 Moreover, the inspection light L IN can be propagated by being totally reflected inside the transparent web 14 by being incident at an angle larger than the critical angle θc °. As a result, it is possible to guide the inspection light LIN far, and there is an advantage that a strong edge signal can be obtained.

特に、非常に透過率が高い透明ウエブ14に対しても、高S/N比が得られる。従って、安定したエッジ部14eの検出処理が、良好に遂行されるという利点がある。   In particular, a high S / N ratio can be obtained even for the transparent web 14 having a very high transmittance. Therefore, there is an advantage that the stable detection process of the edge portion 14e is performed satisfactorily.

しかも、透明ウエブ14は、検査光LINが照射される際に、折り返しローラ部材20に密着しており、前記透明ウエブ14にカールやうねり等の変形が発生することを可及的に抑制することが可能になる。その上、ローラ部材20は、遮光機能を有しており、検査光LINが受光機構28に照射されることを一層確実に阻止することができる。 In addition, the transparent web 14 is in close contact with the folding roller member 20 when the inspection light LIN is irradiated, and it is possible to suppress the occurrence of deformation such as curling and undulation in the transparent web 14 as much as possible. It becomes possible. Moreover, the roller member 20 has a light shielding function, it is possible to inspection light L IN is further reliably prevented from being irradiated to the light receiving mechanism 28.

さらに、投光機構26は、光源として、例えば、発光ダイオード26aを用いるとともに、受光機構28は、例えば、CCDカメラ(集光レンズ32を備えた)を用いている。これにより、容易に広い範囲を検査することができ、検査範囲(検査距離及び検査幅を含む)が拡大し、投光機構26と受光機構28とは、互いに離間して配置することが可能になる。   Further, the light projecting mechanism 26 uses, for example, a light emitting diode 26a as a light source, and the light receiving mechanism 28 uses, for example, a CCD camera (having a condensing lens 32). As a result, a wide range can be easily inspected, the inspection range (including the inspection distance and inspection width) is expanded, and the light projecting mechanism 26 and the light receiving mechanism 28 can be arranged apart from each other. Become.

特に、投光機構26と受光機構28とを近接して配置するスペースがなくても、前記投光機構26と前記受光機構28とは、互いに離間してそれぞれ個別のスペースに良好に配置することができる。このため、エッジ位置検出装置10では、設置レイアウトの自由度が向上し、省スペース化が容易に図られるという効果が得られる。さらにまた、エッジ位置の検査範囲(検査距離及び検査幅を含む)を拡大することができ、例えば、検出器を前記エッジ位置に追従して移動させる機構が不要になり、構成の簡素化及び小型化が容易に図られる。   In particular, even if there is no space for the light projecting mechanism 26 and the light receiving mechanism 28 to be arranged close to each other, the light projecting mechanism 26 and the light receiving mechanism 28 should be spaced apart from each other and placed in separate spaces. Can do. For this reason, in the edge position detection apparatus 10, the freedom degree of installation layout improves and the effect that a space saving is achieved easily is acquired. Furthermore, the inspection range (including the inspection distance and inspection width) of the edge position can be expanded, and for example, a mechanism for moving the detector following the edge position becomes unnecessary, and the configuration is simplified and compact. Can be easily achieved.

図7に示すように、本発明の第2の実施形態に係るエッジ位置検出装置40は、ウエブ処理システム42に組み込まれる。なお、第1の実施形態に係るウエブ処理システム12と同一の構成要素には、同一の参照符号を付して、その詳細な説明は省略する。また、以下に説明する第3以降の実施形態においても同様に、その詳細な説明は省略する。   As shown in FIG. 7, the edge position detection device 40 according to the second embodiment of the present invention is incorporated in a web processing system 42. Note that the same components as those in the web processing system 12 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. Similarly, in the third and subsequent embodiments described below, detailed description thereof is omitted.

ウエブ処理システム42は、透明ウエブ14の搬送路上に沿って第1折り返しローラ部材(ローラ部材)44aと第2折り返しローラ部材(ローラ部材)44bと互いに離間して配置する。第1折り返しローラ部材44aに対応して受光機構28が配置される一方、第2折り返しローラ部材44bに対応して投光機構26が配置される。   The web processing system 42 is disposed along the conveyance path of the transparent web 14 so as to be separated from the first folding roller member (roller member) 44a and the second folding roller member (roller member) 44b. The light receiving mechanism 28 is disposed corresponding to the first folding roller member 44a, while the light projecting mechanism 26 is disposed corresponding to the second folding roller member 44b.

受光機構28は、投光機構26から検査光LINが直接照射される照射領域Sの外部に配置される。なお、第1折り返しローラ部材44a及び第2折り返しローラ部材44bは、検査光LINの通過を阻止する遮光機能を有するため、投光機構26と受光機構28との設置位置や設置角度等の自由度が向上する。 The light receiving mechanism 28 is disposed outside the irradiation region S where the inspection light LIN is directly irradiated from the light projecting mechanism 26. Note that the first folding roller member 44a and the second folding roller member 44b have a light shielding function for preventing the inspection light LIN from passing through, so that the installation position and the installation angle of the light projecting mechanism 26 and the light receiving mechanism 28 can be freely set. The degree is improved.

このように構成される第2の実施形態では、第2折り返しローラ部材44bの外周面に密着して湾曲搬送されている透明ウエブ14に、投光機構26から検査光LINが照射される。透明ウエブ14の内部を伝播する検査光LINは、エッジ部14eから外部に散乱して散乱光LOUTが発生する。 In the second embodiment configured as described above, the inspection light LIN is irradiated from the light projecting mechanism 26 onto the transparent web 14 that is curved and conveyed in close contact with the outer peripheral surface of the second folding roller member 44b. The inspection light L IN propagating through the transparent web 14 is scattered outside from the edge portion 14e to generate scattered light L OUT .

従って、第1折り返しローラ部材44aに対応して配置されている受光機構28は、前記第1折り返しローラ部材44aの外周面に密着して湾曲搬送されている透明ウエブ14のエッジ部14eの位置を検出することができる。これにより、透明ウエブ14のエッジ部14eの位置を容易且つ正確に検出することができる等、上記の第1の実施形態と同様の効果が得られる。   Therefore, the light receiving mechanism 28 disposed corresponding to the first folding roller member 44a determines the position of the edge portion 14e of the transparent web 14 that is curved and conveyed in close contact with the outer peripheral surface of the first folding roller member 44a. Can be detected. As a result, the same effects as those of the first embodiment described above can be obtained, such as the position of the edge portion 14e of the transparent web 14 being easily and accurately detected.

図8に示すように、本発明の第3の実施形態に係るエッジ位置検出装置50は、ウエブ処理システム52に組み込まれる。   As shown in FIG. 8, the edge position detection device 50 according to the third embodiment of the present invention is incorporated in a web processing system 52.

ウエブ処理システム52は、巻き戻しローラ16と巻き取りローラ22との間に、第1パスローラ部材54と第2パスローラ部材56とが配置される。投光機構26は、第2パスローラ部材56の近傍に検査光LINを照射する位置に配置される一方、受光機構28は、第1パスローラ部材54の近傍又は前記第1パスローラ部材54に密着する透明ウエブ14のエッジ部14eに対応して配置される。第3の実施形態では、投光機構26と受光機構28との間に、パスローラが必ずしも必要ではない。 In the web processing system 52, a first pass roller member 54 and a second pass roller member 56 are disposed between the rewind roller 16 and the take-up roller 22. The light projecting mechanism 26 is disposed at a position where the inspection light LIN is irradiated in the vicinity of the second pass roller member 56, while the light receiving mechanism 28 is in close contact with the first pass roller member 54 or the first pass roller member 54. It arrange | positions corresponding to the edge part 14e of the transparent web 14. FIG. In the third embodiment, a pass roller is not necessarily required between the light projecting mechanism 26 and the light receiving mechanism 28.

受光機構28は、投光機構26から検査光LINが直接照射される照射領域Sの外部に配置される。受光機構28は、さらに投光機構26から照射された検査光LINが透明ウエブ14の表面で直接反射された反射光LREFを受光しない位置に配置される。 The light receiving mechanism 28 is disposed outside the irradiation region S where the inspection light LIN is directly irradiated from the light projecting mechanism 26. Receiving mechanism 28 is disposed further position not received directly reflected reflected light L REF in irradiated inspection light L IN is the surface of the transparent web 14 from the light projecting system 26.

このように構成される第3の実施形態では、透明ウエブ14のエッジ部14eの位置を容易且つ正確に検出することができる等、上記の第1及び第2の実施形態と同様の効果が得られる。   In the third embodiment configured as described above, the same effects as those of the first and second embodiments described above can be obtained, such as being able to easily and accurately detect the position of the edge portion 14e of the transparent web 14. It is done.

図9に示すように、本発明の第4の実施形態に係るエッジ位置検出装置60は、ウエブ処理システム62に組み込まれる。   As shown in FIG. 9, an edge position detection device 60 according to the fourth embodiment of the present invention is incorporated in a web processing system 62.

ウエブ処理システム62は、透明ウエブ14の搬送方向を反転させて搬送するために、パスローラ部材64a、64b、64c、64d、64e及び64fを備える。パスローラ部材64aに対向して投光機構26が配置される一方、パスローラ部材64fに対向して受光機構28が配置される。   The web processing system 62 includes pass roller members 64a, 64b, 64c, 64d, 64e, and 64f for transporting the transparent web 14 with its transport direction reversed. The light projecting mechanism 26 is disposed facing the pass roller member 64a, and the light receiving mechanism 28 is disposed facing the pass roller member 64f.

パスローラ部材64aとパスローラ部材64fとは、互いに近接して配置され、これらの間には、投光機構26及び受光機構28が配置される。投光機構26と受光機構28とは、互いに反対方向に向かって透明ウエブ14に対面する。   The pass roller member 64a and the pass roller member 64f are disposed close to each other, and the light projecting mechanism 26 and the light receiving mechanism 28 are disposed therebetween. The light projecting mechanism 26 and the light receiving mechanism 28 face the transparent web 14 in opposite directions.

このように構成される第4の実施形態では、投光機構26と受光機構28とが反対方向を向いて配置されており、透明ウエブ14のエッジ部14eの位置を容易且つ正確に検出することができる等、上記の第1〜第3の実施形態と同様の効果が得られる。   In the fourth embodiment configured as described above, the light projecting mechanism 26 and the light receiving mechanism 28 are arranged in opposite directions, and the position of the edge portion 14e of the transparent web 14 can be detected easily and accurately. The same effects as those of the first to third embodiments can be obtained.

なお、本発明に係るエッジ位置検出装置は、上述の第1〜第4の実施形態に限らず、本発明の要旨を逸脱することなく、種々の構成を採り得ることはもちろんである。   Note that the edge position detection device according to the present invention is not limited to the above-described first to fourth embodiments, and various configurations can be adopted without departing from the gist of the present invention.

10、40、50、60…エッジ位置検出装置
12、42、52、62…ウエブ処理システム
14…透明ウエブ 14e…エッジ部
16…巻き戻しローラ 18a、18b…ガイドローラ
20、44a、44b…折り返しローラ部材
22…巻き取りローラ
24…巻き取り用モータ 26…投光機構
28…受光機構 30…エッジ位置検出回路
34…コントローラ 36…ローラ傾動回路
54、56、64a〜64f…パスローラ部材
DESCRIPTION OF SYMBOLS 10, 40, 50, 60 ... Edge position detection apparatus 12, 42, 52, 62 ... Web processing system 14 ... Transparent web 14e ... Edge part 16 ... Rewinding roller 18a, 18b ... Guide roller 20, 44a, 44b ... Folding roller Member 22 ... Winding roller 24 ... Winding motor 26 ... Light projection mechanism 28 ... Light receiving mechanism 30 ... Edge position detection circuit 34 ... Controller 36 ... Roller tilt circuits 54, 56, 64a to 64f ... Pass roller member

Claims (4)

搬送されている光透過性部材に検査光を照射し、前記光透過性部材の内部に沿って前記検査光を伝播させる投光機構と、
前記投光機構から前記検査光が直接照射される照射領域の外部に配置されるとともに、前記光透過性部材の内部を伝播した前記検査光が、該光透過性部材のエッジ部から外部に散乱する散乱光を検出する受光機構と、
検出された前記散乱光に基づいて、前記光透過性部材の前記エッジ部の位置を検出する機構と、
を備えることを特徴とするエッジ位置検出装置。
A light projecting mechanism that irradiates the light transmitting member being conveyed with inspection light and propagates the inspection light along the inside of the light transmitting member;
The inspection light, which is disposed outside the irradiation region directly irradiated with the inspection light from the light projecting mechanism, is scattered outside from the edge portion of the light transmission member. A light receiving mechanism for detecting scattered light,
A mechanism for detecting the position of the edge portion of the light transmissive member based on the detected scattered light;
An edge position detection apparatus comprising:
請求項1記載のエッジ位置検出装置において、
前記光透過性部材に前記検査光を照射する際に、該光透過性部材に密着して湾曲搬送するローラ部材を備えることを特徴とするエッジ位置検出装置。
The edge position detection apparatus according to claim 1,
An edge position detection apparatus comprising: a roller member that closely contacts and conveys the light transmissive member when the light transmissive member is irradiated with the inspection light.
光透過性部材を搬送しながら、前記光透過性部材に検査光を照射し、前記光透過性部材の内部に沿って前記検査光を伝播させる工程と、
前記光透過性部材の内部を伝播した前記検査光が、該光透過性部材のエッジ部から外部に散乱する散乱光を検出する工程と、
前記検出された前記散乱光に基づいて、前記光透過性部材の前記エッジ部の位置を検出する工程と、
を有することを特徴とするエッジ位置検出方法。
Irradiating the light transmissive member with inspection light while conveying the light transmissive member, and propagating the inspection light along the inside of the light transmissive member;
Detecting the scattered light scattered outside from the edge of the light transmissive member, the inspection light propagating through the light transmissive member;
Detecting the position of the edge portion of the light transmissive member based on the detected scattered light;
An edge position detection method comprising:
請求項3記載のエッジ位置検出方法において、
前記光透過性部材は、ローラ部材に密着して湾曲搬送されながら、検査光が照射されることを特徴とするエッジ位置検出方法。
The edge position detection method according to claim 3, wherein
An edge position detecting method, wherein the light transmitting member is irradiated with inspection light while being bent and conveyed in close contact with a roller member.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017116264A (en) * 2015-12-21 2017-06-29 日本電気硝子株式会社 Inspection method and inspection device of glass film laminate

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005300275A (en) * 2004-04-08 2005-10-27 Central Glass Co Ltd Method for detecting defect in transparent plate and its apparatus
JP2007163436A (en) * 2005-12-16 2007-06-28 Sharp Corp Gap-measuring device, gap-measuring method, and method of manufacturing roll-like body
JP2010223792A (en) * 2009-03-24 2010-10-07 Fujitsu Ltd Transparent object defect inspection method and defect inspecting apparatus
US20110001067A1 (en) * 2006-11-09 2011-01-06 The Board Of Regents For Oklahoma State University Fiber optic web edge sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005300275A (en) * 2004-04-08 2005-10-27 Central Glass Co Ltd Method for detecting defect in transparent plate and its apparatus
JP2007163436A (en) * 2005-12-16 2007-06-28 Sharp Corp Gap-measuring device, gap-measuring method, and method of manufacturing roll-like body
US20110001067A1 (en) * 2006-11-09 2011-01-06 The Board Of Regents For Oklahoma State University Fiber optic web edge sensor
JP2010223792A (en) * 2009-03-24 2010-10-07 Fujitsu Ltd Transparent object defect inspection method and defect inspecting apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017116264A (en) * 2015-12-21 2017-06-29 日本電気硝子株式会社 Inspection method and inspection device of glass film laminate

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