JP2017125805A - Flaw defect checking device for sheet - Google Patents
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- 238000005286 illumination Methods 0.000 claims abstract description 130
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- 238000007689 inspection Methods 0.000 claims description 25
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- 229920006267 polyester film Polymers 0.000 description 1
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- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
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Abstract
Description
本発明は、フィルムなどのシートに発生する全ての方向のキズ欠点を検出するための検査装置に関する。 The present invention relates to an inspection apparatus for detecting scratch defects in all directions generated on a sheet such as a film.
フィルムなどのシートを連続的に製造する工程において、シートにキズ欠点が発生する場合があり問題となっている。 In the process of continuously producing sheets such as films, scratch defects may occur in the sheets, which is a problem.
このキズ欠点の発生メカニズムとして、搬送ロールに異物が付着し、フィルム表面に異物が押し付けられることによりキズ欠点が発生する場合と、フィルムにかかる張力やフィルムの走行速度が一定ではなく、フィルムと搬送ロールが擦れることによりキズ欠点が発生する場合が考えられる。 As a mechanism for the generation of the scratch defect, when a foreign object adheres to the transport roll and the foreign object is pressed against the film surface, the scratch defect occurs, and the tension applied to the film and the running speed of the film are not constant. There may be a case where a scratch defect is generated by rubbing the roll.
そのため、キズ欠点の形状として、前者の場合は、点状あるいはフィルム走行方向に長い形状であるのに対し、後者の場合は、フィルムと搬送ロールが擦れる方向により、フィルムの走行方向に対して、あらゆる方向に長い形状のキズ欠点が発生する。 Therefore, as the shape of the scratch defect, in the former case, it is a dot shape or a shape that is long in the film running direction, whereas in the latter case, the film and the transport roll rub against the running direction of the film, Scratches with long shapes occur in all directions.
このように、キズ欠点はフィルムの走行状態により、あらゆる角度に発生することが知られている。 As described above, it is known that scratch defects occur at all angles depending on the running state of the film.
このキズ欠点はユーザーの加工工程で問題となるために、キズ欠点を持つフィルムが製品として出荷されることを避けなければならない。 Since this scratch defect becomes a problem in the user's processing process, it must be avoided that a film having a scratch defect is shipped as a product.
従来、このようなキズ欠点の検査を行う場合、走行しているフィルムに対して、照明装置で光を照射し、フィルムにキズ欠点が存在する場合には、キズ欠点によって乱反射される散乱光をＣＣＤカメラ等で撮像し、撮像された画像を画像処理することによって、キズ欠点を検出していた。 Conventionally, when such a defect is inspected, the traveling film is irradiated with light by an illuminating device, and if there is a defect on the film, scattered light that is irregularly reflected by the defect is detected. A flaw defect has been detected by capturing an image with a CCD camera or the like and processing the captured image.
ここで、特許文献１にはフィルムに発生するキズ欠点をＣＣＤカメラにて自動で検査する装置が開示されている。 Here, Patent Document 1 discloses an apparatus for automatically inspecting a scratch defect generated on a film with a CCD camera.
特許文献１の欠点検査装置は、図２に示すように、フィルム２１の表面に照明光Ｌ１を照射する照明光源２４と、前記フィルム２１の表面に照射された照明光Ｌ１による反射光を検出するＣＣＤカメラ２５とから構成されており、前記照明光源２４の照明光Ｌ１は前記フィルム２１の表面に対して入射角度１５°〜４５°で照射され、前記ＣＣＤカメラ２５は前記フィルム２１での反射光Ｌ２のうち、前記フィルム２１に対して垂直方向に反射する反射光Ｌ３のみを検出することによって、前記フィルム２１に発生するキズ欠点２２を高感度に検出することができる。 As shown in FIG. 2, the defect inspection apparatus of Patent Document 1 detects an illumination light source 24 that irradiates the surface of the film 21 with illumination light L <b> 1 and reflected light from the illumination light L <b> 1 that is irradiated on the surface of the film 21. The illumination light L1 of the illumination light source 24 is irradiated at an incident angle of 15 ° to 45 ° with respect to the surface of the film 21, and the CCD camera 25 reflects the light reflected by the film 21. By detecting only the reflected light L3 reflected in the direction perpendicular to the film 21 among the L2, it is possible to detect the flaw defect 22 generated in the film 21 with high sensitivity.
特許文献２には、連続的に走行するシートに発生する前記シートに平行な角度のキズ欠点を高精度に検査できる検査装置が開示されている。 Patent Document 2 discloses an inspection apparatus capable of inspecting a scratch defect at an angle parallel to the sheet generated in a continuously traveling sheet with high accuracy.
特許文献２の欠点検査装置は、図３および図４に示すように、ライン状光源装置３２として複数の発光ダイオードを光軸が互いに平行になるように直線状に配列してなる発光ダイオード配列体を複数段に配設し、異なる角度にした前記発光ダイオード配列体から検査対象物３１の走行方向に平行なキズ欠点に対して光を照射することで、キズ欠点の長手方向の側面部で光が散乱することで前記キズ欠点を高感度に検出することができる。 As shown in FIGS. 3 and 4, the defect inspection apparatus of Patent Document 2 is a light emitting diode array in which a plurality of light emitting diodes are linearly arranged as line light source devices 32 so that their optical axes are parallel to each other. Are arranged in a plurality of stages, and light is emitted from the light emitting diode array having different angles to the flaw defect parallel to the traveling direction of the inspection object 31, so that light is emitted from the side surface in the longitudinal direction of the flaw defect. Scatter defects can be detected with high sensitivity.
さらに、特許文献３の欠点検査装置は、ライン状光源装置とライン状受光センサーを組合せることにより、シートに発生する前記シートの長手方向に平行な角度のキズ欠点をさらに高感度に検査できる検査装置が開示されている。 Further, the defect inspection apparatus disclosed in Patent Document 3 is an inspection that can inspect a defect with an angle parallel to the longitudinal direction of the sheet generated on the sheet with higher sensitivity by combining a line light source device and a line light receiving sensor. An apparatus is disclosed.
ライン状光照射手段から照射される光の光軸とライン状受光センサーであるライン状撮像手段の撮像軸とがなす角度によって、キズ欠点の検出感度は変化する。そのため、前記角度を最適な角度とすることで検出感度は大きく変化する。 The detection sensitivity of the flaw defect varies depending on the angle formed by the optical axis of the light emitted from the line-shaped light irradiating means and the imaging axis of the line-shaped imaging means that is a line-shaped light receiving sensor. Therefore, the detection sensitivity changes greatly by setting the angle to an optimum angle.
特許文献３の欠点検査装置は、図５に示すように、複数の点光源が一列に並んだライン状光照射手段４３からシート４１の幅方向に傾いた光が照射され、前記シート４１に発生したキズ欠点により散乱した光をライン状撮像手段４４で受光することにより、キズ欠点を検出することができる。ここで、撮像手段として、一般的なラインセンサカメラではなくライン状受光センサーを用いることで、ライン状光照射手段４３から照射される光の光軸と前記ライン状受光センサーであるライン状撮像手段４４の撮像軸とがなす角度を全幅に亘り一定とすることが可能となる。そのため、シート４１の全幅に亘り、前記シート４１に発生する前記シートの長手方向に平行なキズ欠点を高感度に検出することが可能となる。 As shown in FIG. 5, the defect inspection apparatus of Patent Document 3 is irradiated with light inclined in the width direction of the sheet 41 from a line-shaped light irradiation unit 43 in which a plurality of point light sources are arranged in a line, and is generated on the sheet 41. By receiving the light scattered by the scratch defect by the line-shaped imaging means 44, the scratch defect can be detected. Here, by using a line-shaped light receiving sensor instead of a general line sensor camera as the image pickup means, the optical axis of the light emitted from the line-shaped light irradiation means 43 and the line-shaped imaging means which is the line-shaped light receiving sensor. The angle formed by the 44 imaging axes can be made constant over the entire width. Therefore, it is possible to detect a scratch defect generated in the sheet 41 parallel to the longitudinal direction of the sheet 41 with high sensitivity over the entire width of the sheet 41.
しかしながら、特許文献１の技術は照明光源２４の長手方向に対して平行な方向に発生したキズ欠点に対しては高感度な検出が可能だが、それ以外の方向のキズ欠点に関しては、検出感度が低下する。 However, although the technique of Patent Document 1 can detect defects with high sensitivity for defects generated in a direction parallel to the longitudinal direction of the illumination light source 24, the detection sensitivity for defects in other directions is low. descend.
つまり、キズ欠点における照明光源２４から照射させた光の散乱光は、フィルム２１表面のキズ欠点の角度によって異なり、フィルム２１表面においてキズ欠点の長手方向に垂直な方向に散乱光が最も発生する。 That is, the scattered light of the light emitted from the illumination light source 24 at the scratch defect varies depending on the angle of the scratch defect on the surface of the film 21, and the scattered light is most generated in the direction perpendicular to the longitudinal direction of the scratch defect on the film 21 surface.
すなわち、特許文献１の方法では、ＣＣＤカメラ２５が受光する散乱光は、キズ欠点の角度によって異なり、キズ欠点の角度が照明光源２４の長手方向と直角の方向に近づくほど少なくなる。 That is, in the method of Patent Document 1, the scattered light received by the CCD camera 25 varies depending on the angle of the scratch defect, and decreases as the scratch defect angle approaches the direction perpendicular to the longitudinal direction of the illumination light source 24.
また、特許文献２の技術は、ライン状光源装置３２の長手方向と直角な方向のキズ欠点に対しては高感度な検出が可能だが、それ以外の方向のキズ欠点に関しては検出感度が低下する。 In addition, the technique of Patent Document 2 enables highly sensitive detection for a defect in a direction perpendicular to the longitudinal direction of the line light source device 32, but the detection sensitivity decreases for a defect in the other direction. .
ライン状光源装置３２は図４に示すように、発光ダイオードの配列体３Ａ、３Ｂから光が発せられ、検査対象物３１の幅方向に対して、斜めから、光軸がクロスするように照射される。そのため、前記キズ欠点の長手方向の削れた斜面に光が照射されることにより、散乱光が発生し、前記キズ欠点を検出することができる。 As shown in FIG. 4, the line light source device 32 emits light from the light emitting diode arrays 3 </ b> A and 3 </ b> B, and is irradiated obliquely with respect to the width direction of the inspection object 31 so that the optical axes cross. The For this reason, when light is irradiated onto the inclined surface of the scratch defect in the longitudinal direction, scattered light is generated and the scratch defect can be detected.
しかし一方で、ライン状光源装置３２の長手方向と平行な方向のキズ欠点に関しては、前記発光ダイオード３Ａ、３Ｂから照射された光軸に対しては散乱光の発生が少なく、前記キズ欠点を検出することができない。 However, on the other hand, with respect to scratch defects in the direction parallel to the longitudinal direction of the line light source device 32, the generation of scattered light is small with respect to the optical axis irradiated from the light emitting diodes 3A and 3B, and the scratch defects are detected. Can not do it.
また、特許文献３の技術は、図５に示すように、受光装置としてライン状光撮像手段４４を用いることにより、特許文献２での課題である検査対象物であるシート４１の中央と端部の感度差を無くすことができている。 Further, as shown in FIG. 5, the technique of Patent Document 3 uses a line-shaped optical imaging unit 44 as a light receiving device, so that the center and end portions of a sheet 41 that is an inspection object which is a problem in Patent Document 2 are used. The difference in sensitivity can be eliminated.
しかし、ライン状光照射手段４３から発せられる斜光照明では、ライン状照射手段４３の長手方向に直角な方向のキズ欠点に対しては高感度に検出可能であるが、それ以外の方向のキズ欠点に関しては検出感度が低下する。 However, the oblique illumination emitted from the line-shaped light irradiating means 43 can detect with high sensitivity the flaw defect in the direction perpendicular to the longitudinal direction of the line-shaped irradiating means 43, but the flaw defect in the other direction. As for, the detection sensitivity decreases.
このように、フィルムなどのシートに発生するキズ欠点を検出するための従来の検査装置では、キズ欠点の角度によって検出感度が変化し、一定基準で検査ができない。 Thus, in the conventional inspection apparatus for detecting a flaw defect generated on a sheet such as a film, the detection sensitivity changes depending on the angle of the flaw defect, and the inspection cannot be performed on a constant basis.
本発明は、前記従来の課題を解決するもので、連続走行するシート表面に発生する全ての方向のキズ欠点を一定基準で検出するためのキズ欠点検査装置を提供する。 The present invention solves the above-described conventional problems, and provides a defect inspection apparatus for detecting defect defects in all directions generated on the surface of a continuously running sheet on a constant basis.
上記課題を解決する本発明のキズ欠点検査装置は、連続搬送されるシートのキズ欠点を検査するシートのキズ欠点検査装置であって、
前記シートの一方の面側から光を照射する長尺の光照射手段と、
前記シートの前記光照射手段が設置された面側に設置され、光照射手段から照射されて前記シートで反射された照射光を受光する受光手段、もしくは前記シートの前記光照射手段が設置された面側とは反対の面側に設置され、光照射手段から照射されて前記シートを透過した照射光を受光する受光手段と、
前記受光手段が受光した照射光の強度に応じた信号値から前記シートの表面に発生したキズ欠点部分を検出する画像処理手段と、を備え、
前記光照射手段は、第一のライン状照明と、第一のライン状照明を挟んで、第一のライン状照明の長手方向と平行に配置された第二および第三のライン状照明とで構成されており、
前記第一のライン状照明は、複数の点光源が直線状に配列された配列体が複数平行に並んで構成され、１つの配列体を構成する複数の点光源は、それぞれの照射光軸が互いに平行になるように配列されており、
前記複数の配列体には、前記第一のライン状照明の長手方向に垂直な平面に対し、照射光がこの平面の一方の面側から他方の面側へ向かうように照射光軸が傾いた第一の配列体と、照射光が前記平面の前記他方の面側から前記一方の面側へ向かうように照射光軸が傾いた第二の配列体の２つが少なくとも有り、
前記第二のライン状照明は、その長手方向の光量分布が均一な直線状の照射光を照射し、
前記第三のライン状照明は、その長手方向の光量分布が均一な直線状の照射光を照射し、
前記光照射手段の長手方向から見て、前記第一の配列体、第二の配列体、第二のライン状照明および前記第三のライン状照明のそれぞれの照射光軸は、前記シート面で交差している。
The scratch defect inspection apparatus of the present invention that solves the above-mentioned problems is a scratch defect inspection apparatus for sheets that inspects scratch defects of continuously conveyed sheets,
A long light irradiation means for irradiating light from one side of the sheet;
A light receiving unit that is installed on the surface side of the sheet where the light irradiation unit is installed and receives irradiation light irradiated from the light irradiation unit and reflected by the sheet, or the light irradiation unit of the sheet is installed. A light receiving unit that is installed on the surface side opposite to the surface side, receives the irradiation light irradiated from the light irradiation unit and transmitted through the sheet;
Image processing means for detecting a flaw defect portion generated on the surface of the sheet from a signal value corresponding to the intensity of irradiation light received by the light receiving means, and
The light irradiating means includes a first linear illumination and second and third linear illuminations arranged in parallel with the longitudinal direction of the first linear illumination across the first linear illumination. Configured,
The first line-shaped illumination is composed of a plurality of array elements in which a plurality of point light sources are arranged in a straight line, and the plurality of point light sources constituting one array body have their respective irradiation optical axes. Arranged in parallel to each other,
In the plurality of arrays, the irradiation optical axis is inclined with respect to a plane perpendicular to the longitudinal direction of the first linear illumination so that the irradiation light is directed from one surface side to the other surface side of the plane. There are at least two of the first array and the second array whose irradiation optical axis is inclined so that the irradiation light is directed from the other surface side of the plane to the one surface side,
The second linear illumination irradiates linear irradiation light with a uniform light amount distribution in the longitudinal direction,
The third line illumination irradiates linear irradiation light with a uniform light amount distribution in the longitudinal direction,
When viewed from the longitudinal direction of the light irradiation means, the irradiation optical axes of the first array, the second array, the second line illumination, and the third line illumination are respectively on the sheet surface. Crossed.
本発明の検査装置では、連続走行するシート表面に発生する全ての方向のキズ欠点を一定基準で検出することができる。 In the inspection apparatus of the present invention, it is possible to detect scratch defects in all directions generated on the surface of a continuously running sheet on a constant basis.
以下、本発明の実施の形態について図面を参照しながら説明する。なお、本発明はこの実施の形態によって限定はされない。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. The present invention is not limited by this embodiment.
図１は本発明の実施の形態を示す図である。図１において、１は被検査体である連続的に搬送されるシート、２は光照射手段、３は前記光照射手段２内の第一のライン状照明、４は前記光照射手段２内の第二のライン状照明、５は前記光照射手段２内の第三のライン状照明、６は受光手段、７は画像処理手段である。 FIG. 1 is a diagram showing an embodiment of the present invention. In FIG. 1, 1 is a continuously conveyed sheet that is an object to be inspected, 2 is a light irradiation means, 3 is a first line-shaped illumination in the light irradiation means 2, and 4 is in the light irradiation means 2. The second line illumination 5 is a third line illumination in the light irradiation means 2, 6 is a light receiving means, and 7 is an image processing means.
シート１としては、連続的に搬送され、光を透過もしくは反射するフィルム等であれば特に限定されない。例えばポリエチレンテレフタレートフィルム等のポリエステルフィルムなどのような無色透明なフィルムが好適に用いられる。 The sheet 1 is not particularly limited as long as it is a film that is continuously conveyed and transmits or reflects light. For example, a colorless and transparent film such as a polyester film such as a polyethylene terephthalate film is preferably used.
光照射手段２はシート１の一方の面側に配設され、シート１に対して光を照射する。光照射手段は、図６に示すように、第一のライン状照明３、第二のライン状照明４、第三のライン状照明５の３つのライン状照明から構成されている。 The light irradiation means 2 is disposed on one side of the sheet 1 and irradiates the sheet 1 with light. As shown in FIG. 6, the light irradiating means is composed of three line-shaped illuminations of a first line-shaped illumination 3, a second line-shaped illumination 4, and a third line-shaped illumination 5.
第一のライン状照明３は、光ファイバの出射端をライン状に配列して、その出射角度を幅方向に一定に調整したもので、斜め方向への照射が可能となっている。また、このライン状に配列された光ファイバの配列体が少なくとも２列ある。そして、配列体の１つは、第一のライン状照明の長手方向に垂直な平面に対し、照射光がこの平面の一方の面側から他方の面側へ向かうように照射光軸が傾いた第一の配列体８であり、配列体のもう１つは、第一のライン状照明の長手方向に垂直な同じ平面に対し、照射光がこの平面の前記他方の面側から前記一方の面側へ向かうように照射光軸が傾いた第二の配列体９である。第一のライン状照明３としては、例えば、発光部から発光した光を各配列体に光ファイバで導くことで実現可能である。また、各配列体に発光ダイオードを設置すること、ライン状ＬＥＤ照明の前方に遮光部材を配設することでも実現可能である。 The first line-shaped illumination 3 is configured such that the emission ends of the optical fibers are arranged in a line and the emission angle is adjusted to be constant in the width direction, and irradiation in an oblique direction is possible. In addition, there are at least two rows of optical fiber arrays arranged in a line. One of the arrays is inclined with respect to a plane perpendicular to the longitudinal direction of the first linear illumination so that the irradiation light axis is directed from one surface side to the other surface side of the plane. The other one of the arrays is the first plane 8 with respect to the same plane perpendicular to the longitudinal direction of the first line-shaped illumination, and the irradiated light is transmitted from the other plane side of the plane to the one plane. It is the 2nd array body 9 in which the irradiation optical axis inclined so that it might go to the side. The first line-shaped illumination 3 can be realized, for example, by guiding the light emitted from the light emitting unit to each array with an optical fiber. It can also be realized by installing a light emitting diode in each array, and disposing a light blocking member in front of the line LED illumination.
第二のライン状照明４は、前記シート１の走行方向に対して第一のライン状照明３の下流側に設置されており、前記シート１の幅方向に平行な線状の照明であり、幅方向に均一な指向性の高い光を前記シート１の幅に対して照射する。 The second line-shaped illumination 4 is installed on the downstream side of the first line-shaped illumination 3 with respect to the traveling direction of the sheet 1, and is a linear illumination parallel to the width direction of the sheet 1, Light with high directivity that is uniform in the width direction is applied to the width of the sheet 1.
第三のライン状照明５は、前記シート１の走行方向に対して第一のライン状照明３の上流側に設置されており、前記第二のライン状照明４と同様に、前記シート１の幅方向に平行な線状の照明であり、幅方向に均一な指向性の高い光を前記シート１の幅に対して照射する。 The third line-shaped illumination 5 is installed on the upstream side of the first line-shaped illumination 3 with respect to the traveling direction of the sheet 1, and similarly to the second line-shaped illumination 4, It is linear illumination parallel to the width direction, and irradiates light with high directivity uniform in the width direction to the width of the sheet 1.
第二のライン状照明４および第三のライン状照明５としては、ＬＥＤや蛍光灯、ハロゲンやメタルハライド照明を伝送ロッドや光ファイバから照射するものなどを用いることができる。 As the second line illumination 4 and the third line illumination 5, it is possible to use an LED, a fluorescent lamp, a lamp that irradiates a halogen or metal halide illumination from a transmission rod or an optical fiber, and the like.
また、図７に示すように、第一のライン状照明３の第一の配列体８、第二の配列体９、第二のライン状照明４および第三のライン状照明５のそれぞれの照射光軸は、前記シート１面上で交差する必要がある。 Moreover, as shown in FIG. 7, each irradiation of the 1st array 8 of the 1st line-shaped illumination 3, the 2nd array 9, the 2nd line-shaped illumination 4, and the 3rd line-shaped illumination 5 The optical axes need to intersect on the sheet 1 surface.
さらに、前記光照射手段２の長手方向に垂直かつ前記シート１面に平行な方向から見た、前記第一のライン状照明３の第一の配列体８の各点光源の照射光軸と前記シート１面の垂線とのなす角度（鋭角）θ１１、および前記第二の配列体９の各点光源の照射光軸と前記シート１面の垂線とのなす角度（鋭角）θ１２、ならびに、前記光照射手段２の長手方向から見た、前記第二のライン状照明４の照射光軸と前記シート１面の垂線とのなす角度（鋭角）θ２、および前記第三のライン状照明５の照射光軸と前記シート１面の垂線とのなす角度（鋭角）θ３が、θ１１＝θ１２＝θ２＝θ３を満たすことが好ましい。 Furthermore, the irradiation optical axis of each point light source of the first array 8 of the first line-shaped illumination 3 as seen from the direction perpendicular to the longitudinal direction of the light irradiation means 2 and parallel to the surface of the sheet 1 An angle (acute angle) θ11 formed with a perpendicular to the sheet 1 surface, an angle (acute angle) θ12 formed between an irradiation optical axis of each point light source of the second array 9 and a perpendicular to the surface of the sheet 1, and the light The angle (acute angle) θ2 formed between the irradiation optical axis of the second linear illumination 4 and the perpendicular of the surface of the sheet 1 and the irradiation light of the third linear illumination 5 as seen from the longitudinal direction of the irradiation means 2 It is preferable that an angle (acute angle) θ3 formed by the axis and the perpendicular of the surface of the sheet 1 satisfies θ11 = θ12 = θ2 = θ3.
受光手段６は、シート１に発生したキズ欠点による散乱光を受光するように配設されることが好ましいのであり、光照射手段２から照射されシート１で直接透過もしくは正反射された光を受光することは好ましくない。ここで、シート１に発生したキズ欠点によって散乱された光を受光するためには、光照射手段２と受光手段６の位置関係が重要である。 The light receiving means 6 is preferably arranged so as to receive scattered light due to scratch defects generated in the sheet 1, and receives light emitted from the light irradiating means 2 and directly transmitted or specularly reflected by the sheet 1. It is not preferable to do. Here, in order to receive the light scattered by the flaw defect generated in the sheet 1, the positional relationship between the light irradiation means 2 and the light receiving means 6 is important.
この位置関係について図８、図９を用いて説明する。図８はシート１の走行方向側から見た概略図を示しており、図９はシート１の幅方向側から見た概略図を示している。また、図８、図９はそれぞれ、（Ａ）にキズ欠点が発生していない場合の光軸の概略図を示しており、（Ｂ）にキズ欠点が発生した場合の散乱光の概略図を示している。 This positional relationship will be described with reference to FIGS. FIG. 8 shows a schematic view seen from the traveling direction side of the seat 1, and FIG. 9 shows a schematic view seen from the width direction side of the seat 1. FIG. 8 and FIG. 9 show schematic views of the optical axis when no flaw defect occurs in (A), and (B) shows a schematic diagram of scattered light when a flaw defect occurs. Show.
図８（Ａ）に示すように、受光手段６は第一のライン状照明３から照射され、シート１を透過した光を受光しないように配設することが重要であり、第一のライン状照明３からの光軸の角度θ１１、θ１２より受光手段６の画角の半値角の値を小さくすることで実現できる。また同様に、図９（Ａ）に示すように、受光手段６は第二のライン状照明４の光軸の角度θ２、第三のライン状照明５の光軸の角度θ３より受光手段６の画角の半値角の値を小さくすることで実現できる。 As shown in FIG. 8A, it is important that the light receiving means 6 is disposed so as not to receive the light irradiated from the first line-shaped illumination 3 and transmitted through the sheet 1. This can be realized by making the half-value angle of the angle of view of the light receiving means 6 smaller than the angles θ11 and θ12 of the optical axis from the illumination 3. Similarly, as shown in FIG. 9 (A), the light receiving means 6 has an optical axis angle θ 2 of the second linear illumination 4 and an optical axis angle θ 3 of the third linear illumination 5. This can be realized by reducing the half-value angle of the angle of view.
前記シート１にキズ欠点が発生した場合は、図８（Ｂ）、図９（Ｂ）に示すように、前記キズ欠点に光照射手段２から光を照射した場合、散乱光が発生し、受光手段６で散乱光を受光することにより、キズ欠点を明欠点として検出することができる。 When a scratch defect is generated in the sheet 1, as shown in FIGS. 8B and 9B, when the scratch defect is irradiated with light from the light irradiation means 2, scattered light is generated and received. By receiving the scattered light with the means 6, it is possible to detect a flaw defect as a bright defect.
また、反射光学系の場合は、図９において受光手段６をシート１面において光照射手段２と同じ面側に設置し、第一のライン状照明３と第二のライン状照明４の間で第一のライン状照明３の近傍に配設、もしくは第一のライン状照明３と第三のライン状照明５の間で第一のライン状照明３の近傍に配設することで実現することができる。 In the case of a reflective optical system, in FIG. 9, the light receiving means 6 is installed on the same surface side as the light irradiating means 2 on the sheet 1 surface, and between the first line-shaped illumination 3 and the second line-shaped illumination 4. Realizing by arranging in the vicinity of the first line-shaped illumination 3 or by arranging in the vicinity of the first line-shaped illumination 3 between the first line-shaped illumination 3 and the third line-shaped illumination 5. Can do.
受光手段６として、連続走行するシート１を検査する場合、ラインセンサカメラを用いることが好ましいが、受光素子を二次元に配列したエリアセンサカメラや光電子増倍管などを用いてもよい。しかし、ラインセンサカメラやエリアセンサカメラを用いる場合は、検査視野の中央と端部での受光軸の角度が異なるために、視野位置によって、キズ欠点の検出感度が異なるという問題が発生する。そのため、これらカメラを用いる場合は、視野中央部のみを検査範囲として用いることが必要である。また、全視野範囲の検出感度を同じとするために、受光手段６として、複数の受光素子と結合用のレンズとが等間隔に連続的に並べられており、結合用のレンズが、等倍で受光手段の受光素子に結合を行うレンズを持つライン状のイメージセンサ（密着イメージセンサや近接イメージセンサとも呼ばれる）を用いることが好ましい。 When inspecting the continuously traveling sheet 1 as the light receiving means 6, it is preferable to use a line sensor camera, but an area sensor camera or a photomultiplier tube in which light receiving elements are arranged two-dimensionally may be used. However, when a line sensor camera or an area sensor camera is used, the angle of the light receiving axis at the center and the end of the inspection visual field is different, so that there is a problem that the detection sensitivity of the defect defect differs depending on the visual field position. Therefore, when using these cameras, it is necessary to use only the center of the visual field as the inspection range. Further, in order to make the detection sensitivity in the entire visual field range the same, as the light receiving means 6, a plurality of light receiving elements and coupling lenses are continuously arranged at equal intervals. It is preferable to use a line-shaped image sensor (also referred to as a contact image sensor or a proximity image sensor) having a lens that is coupled to the light receiving element of the light receiving means.
画像処理手段７は、受光手段６の出力信号を受信し、受光手段６が受光した光量の変化を検出することで、シート１表面のキズ欠点の有無を検査する。受光手段６からは、受光手段６が受光した光量に応じたアナログまたはデジタル信号が出力される。アナログ信号が出力される場合は、画像処理手段７内でデジタル信号に変換される。画像処理手段７はデジタル信号を検出して平均化処理、微分処理などの画像処理を実行し、所定のしきい値を超えるものをシート１の表面のキズ欠点として抽出する。このキズ欠点の抽出は画像処理ボードなどのハードで実行するものと、パソコンなどのソフトで実行するものがあるが、ハードでの処理のほうが高速で処理できるため、好ましい。 The image processing unit 7 receives the output signal of the light receiving unit 6 and detects a change in the amount of light received by the light receiving unit 6 to inspect the surface of the sheet 1 for scratch defects. The light receiving means 6 outputs an analog or digital signal corresponding to the amount of light received by the light receiving means 6. When an analog signal is output, it is converted into a digital signal in the image processing means 7. The image processing means 7 detects a digital signal, executes image processing such as averaging processing and differentiation processing, and extracts those exceeding a predetermined threshold as scratch defects on the surface of the sheet 1. This defect defect extraction can be performed by hardware such as an image processing board or by software such as a personal computer. However, hardware processing is preferable because it can be processed at high speed.
次に、本発明によってシート１の同じ幅方向位置に周期的に発生するキズ欠点を検出する原理について説明する。 Next, the principle of detecting flaw defects periodically generated at the same position in the width direction of the sheet 1 according to the present invention will be described.
光照射手段２が照射する光をシート１に照射させ、シート１を透過もしくは反射した光のうち、受光手段６は直接透過光もしくは正反射光を受光せず、キズ欠点による散乱光のみを受光することにより、キズ欠点部の光量は正常部より多くなり、画像処理手段７では明部となる。そして、この明部を２値化することにより、明欠点として検出される。 Of the light transmitted through or reflected by the sheet 1, the light receiving means 6 does not receive the directly transmitted light or specularly reflected light, but only the scattered light due to the flaw defect. As a result, the amount of light at the scratch defect portion becomes larger than that at the normal portion, and the image processing means 7 becomes a bright portion. Then, by binarizing this bright part, it is detected as a bright defect.
また、キズ欠点は、その発生原因のほとんどが搬送ロールであるため、搬送ロールの一部に異物が付着した際に、搬送ロールに付着した異物の幅方向位置と、同じ位置にキズ欠点が発生し、搬送ロールが回転していることにより、搬送ロール周期で継続的に発生するという特徴がある。また、シート１が延伸される工程やシート１の走行の蛇行によって、様々な角度のキズ欠点が発生するという特徴がある。 Also, scratch defects are mostly caused by the transport roll, so when a foreign object adheres to a part of the transport roll, the scratch defect occurs at the same position as the width direction position of the foreign object attached to the transport roll. However, since the transport roll is rotating, it is generated continuously in the transport roll cycle. Further, there is a feature that scratch defects at various angles are generated by the process of stretching the sheet 1 and the meandering of the traveling of the sheet 1.
ここで、キズ欠点の角度による検出感度の違いについて図１０を用いて説明する。 Here, the difference in detection sensitivity depending on the angle of the scratch defect will be described with reference to FIG.
図１０はシート１の走行方向に対するキズ欠点１０の角度が０°と９０°の時に第二のライン状照明に相当する光照射手段４を用いてシート１に光を照射し、その透過光のうち受光手段６に受光される散乱光量の違いを示す図である。 FIG. 10 shows that when the scratch defect 10 has an angle of 0 ° and 90 ° with respect to the traveling direction of the sheet 1, the sheet 1 is irradiated with light using the light irradiation means 4 corresponding to the second line-shaped illumination, and the transmitted light is It is a figure which shows the difference in the amount of scattered light received among the light-receiving means 6.
キズ欠点１０による散乱光は、シート１面において、キズ欠点１０の長手方向に対して垂直な方向に散乱光が多く発生する。 Scattered light due to the scratch defect 10 generates a lot of scattered light in the direction perpendicular to the longitudinal direction of the scratch defect 10 on the surface of the sheet 1.
そのため、図１０（Ａ）に示すシート１の走行方向に対するキズ欠点１０の角度が０°の場合、受光手段６の受光軸はキズ欠点１０による散乱光と直角の角度となるため、受光手段６で受光される光量は最も小さくなる。 Therefore, when the angle of the scratch defect 10 with respect to the traveling direction of the sheet 1 shown in FIG. 10A is 0 °, the light receiving axis of the light receiving means 6 is at an angle perpendicular to the scattered light due to the scratch defect 10. The amount of light received at is the smallest.
また、図１０（Ｂ）に示すシート１の走行方向に対するキズ欠点１０の角度が９０°の場合、受光手段６の受光軸はキズ欠点１０による散乱光と平行の角度となるため、受光手段６で受光される光量は最も大きくなる。 Further, when the angle of the scratch defect 10 with respect to the traveling direction of the sheet 1 shown in FIG. 10B is 90 °, the light receiving axis of the light receiving means 6 is an angle parallel to the scattered light due to the scratch defect 10. The amount of light received at is the largest.
このように、シート１の走行方向に対するキズ欠点１０の角度によって、検出感度は大きく異なる。 Thus, the detection sensitivity varies greatly depending on the angle of the scratch defect 10 with respect to the traveling direction of the seat 1.
そのため、本装置では、前記のように、光照射手段２の構成として、第一のライン状照明と第二のライン状照明、第三のライン状照明を組み合わせることによって、キズ欠点の角度によらず一定の基準で検出することができる。 Therefore, in the present apparatus, as described above, the light irradiation means 2 is configured by combining the first line-shaped illumination, the second line-shaped illumination, and the third line-shaped illumination, so as to depend on the angle of the scratch defect. Therefore, it can be detected on a constant basis.
この方法について図１１、図１２、図１３を用いて説明する。ここで、シート１の走行方向に対するキズ欠点の角度をθ、第一のライン状照明３、第二のライン状照明４および第三のライン状照明５のそれぞれにおいてキズ欠点で発生した散乱光量の合計をxとする。 This method will be described with reference to FIG. 11, FIG. 12, and FIG. Here, the angle of the scratch defect with respect to the traveling direction of the sheet 1 is θ, the amount of scattered light generated by the scratch defect in each of the first line-shaped illumination 3, the second line-shaped illumination 4, and the third line-shaped illumination 5. Let the total be x.
図１１は、シート１の走行方向に平行な方向に発生したキズ欠点に対して、第一のライン状照明３、第二のライン状照明４および第三のライン状照明５のそれぞれから光を照射した場合に発生する散乱光と、それらを足し合わせた光を受光する受光手段６の受光量を示している。 FIG. 11 shows light from each of the first line-shaped illumination 3, the second line-shaped illumination 4, and the third line-shaped illumination 5 with respect to a scratch defect generated in a direction parallel to the traveling direction of the seat 1. The amount of light received by the light receiving means 6 that receives the scattered light generated when irradiated and the light obtained by adding them is shown.
シート１の走行方向に平行な方向に発生したキズ欠点に対して、第一のライン状照明３の光を照射した場合、キズ欠点の長手方向の削れた斜面に対して光が照射されるため、多くの散乱光が発生する。しかし、一方で、第二のライン状照明４と第三のライン状照明５から光を照射した場合は、キズ欠点の長手方向の斜面に対して照射される光が少ないため、散乱光は少なくなる。受光手段６で受光される散乱光は、前記第一のライン状照明３によるキズ欠点での散乱光と、前記第二のライン状照明４と前記第三のライン状照明５によるキズ欠点での散乱光とが足し合わされた光量となる。 When the light of the first line-shaped illumination 3 is applied to the scratch defect generated in the direction parallel to the traveling direction of the sheet 1, the light is irradiated to the sloped surface of the scratch defect in the longitudinal direction. A lot of scattered light is generated. However, on the other hand, when light is emitted from the second line-shaped illumination 4 and the third line-shaped illumination 5, the amount of scattered light is small because the amount of light emitted to the longitudinal slope of the scratch defect is small. Become. Scattered light received by the light receiving means 6 is scattered light due to scratch defects caused by the first line-shaped illumination 3 and scratch defects caused by the second line-shaped illumination 4 and the third line-shaped illumination 5. The amount of light is the sum of the scattered light.
また、図１２は、シート１の走行方向に垂直な方向に発生したキズ欠点に対して、第一のライン状照明３、第二のライン状照明４および第三のライン状照明５のそれぞれから光を照射した場合に発生する散乱光と、それらを足し合わせた光を受光する受光手段６の受光量を示している。
シート１の走行方向に垂直な方向に発生したキズ欠点に対して、第一のライン状照明３の光を照射した場合、キズ欠点の長手方向の削れた斜面に対して照射される光が少ないため、散乱光は少なくなる。しかし、一方で、第二のライン状照明４と第三のライン状照明５から光を照射した場合は、キズ欠点の長手方向の斜面に対して、光が照射されるため多くの散乱光が発生する。前記の通り、受光手段６で受光される散乱光は、前記第一のライン状照明３によるキズ欠点での散乱光と、前記第二のライン状照明４と前記第三のライン状照明５によるキズ欠点での散乱光とが足し合わされた光量となる。
Moreover, FIG. 12 shows from each of the 1st line-shaped illumination 3, the 2nd line-shaped illumination 4, and the 3rd line-shaped illumination 5 with respect to the crack defect which generate | occur | produced in the direction perpendicular | vertical to the running direction of the sheet | seat 1. The amount of light received by the light receiving means 6 that receives the scattered light generated when light is irradiated and the light obtained by adding them is shown.
When the light of the first line-shaped illumination 3 is applied to the scratch defect generated in the direction perpendicular to the traveling direction of the sheet 1, the amount of light irradiated to the longitudinally cut slope of the scratch defect is small. Therefore, the scattered light is reduced. However, on the other hand, when light is irradiated from the second line-shaped illumination 4 and the third line-shaped illumination 5, a large amount of scattered light is generated because the light is irradiated to the slope in the longitudinal direction of the scratch defect. Occur. As described above, the scattered light received by the light receiving means 6 is scattered by the flaw defect caused by the first line-shaped illumination 3, the second line-shaped illumination 4, and the third line-shaped illumination 5. The amount of light is the sum of the scattered light at the scratch defect.
さらに、図１３は、シート１の走行方向に対して斜め方向に発生したキズ欠点に対して、第一のライン状照明３、第二のライン状照明４および第三のライン状照明５のそれぞれから光を照射した場合に発生する散乱光と、それらを足し合わせた光を受光する受光手段６の受光量を示している。 Furthermore, FIG. 13 shows each of the first line-shaped illumination 3, the second line-shaped illumination 4, and the third line-shaped illumination 5 with respect to a scratch defect generated in an oblique direction with respect to the traveling direction of the seat 1. 2 shows the amount of light received by the light receiving means 6 that receives the scattered light generated when the light is irradiated from and the light obtained by adding them.
シート１の走行方向に対して斜め方向に発生したキズ欠点に対して、第一のライン状照明３の光を照射した場合、キズ欠点の長手方向の削れた斜面に対して光が照射されるため、散乱光が発生する。しかし、図１１に示すシート１の走行方向に平行な方向に発生したキズ欠点と比較すると、キズ欠点の長手方向の削れた斜面に対して照射される光は少ないため、発生する散乱光はx(cos2θ)となる。また、第二のライン状照明４と第三のライン状照明５から光を照射した場合も、キズ欠点の長手方向の削れた斜面に対して光が照射されるため、散乱光が発生する。しかし、図１２に示すシート１の走行方向に対して垂直な方向に発生したキズ欠点と比較すると、キズ欠点の長手方向の削れた斜面に対して照射される光は少ないため、発生する散乱光はx(sin2θ)となる。そのため、受光手段６で受光される散乱光は、前記第一のライン状照明３によるキズ欠点での散乱光と前記第二のライン状照明４と前記第三のライン状照明５によるキズ欠点での散乱光とが足し合わされた光量xとなり、これらは図１１と図１２の場合とほぼ同じ量の散乱光となる。 When the light from the first line-shaped illumination 3 is applied to the scratch defect generated in the oblique direction with respect to the traveling direction of the sheet 1, the light is irradiated to the slope of the scratch defect in the longitudinal direction. Therefore, scattered light is generated. However, compared with the scratch defect generated in the direction parallel to the traveling direction of the sheet 1 shown in FIG. (cos 2 θ). Also, when light is irradiated from the second line illumination 4 and the third line illumination 5, the light is irradiated to the long-sided slope of the scratch defect, and thus scattered light is generated. However, compared with the scratch defect generated in the direction perpendicular to the traveling direction of the sheet 1 shown in FIG. 12, the scattered light is generated because less light is irradiated on the sloped surface of the scratch defect in the longitudinal direction. Is x (sin 2 θ). Therefore, the scattered light received by the light receiving means 6 is scattered light due to the scratch defect due to the first line-shaped illumination 3 and the scratch defect due to the second line-shaped illumination 4 and the third line-shaped illumination 5. The amount of scattered light and the amount of scattered light x are approximately the same amount of scattered light as in FIGS.
上記のように、本発明のキズ欠点検査装置では、シート１に発生するキズ欠点１０の角度によらず、ほぼ同じ量の散乱光が受光手段６で受光され、キズ欠点の角度によらず一定の基準で検出することができる。 As described above, in the scratch defect inspection apparatus of the present invention, almost the same amount of scattered light is received by the light receiving means 6 regardless of the angle of the scratch defect 10 generated in the sheet 1 and is constant regardless of the angle of the scratch defect. It is possible to detect on the basis of
［実施例］
図１の配置に従った装置を用いてキズ欠点の検査を実施した。フィルムとして、幅１０００ｍｍ、厚み５０μｍのＰＥＴフィルムを用い、同じ周期で発生したキズ欠点を１５度ずつ回転させ、ＰＥＴフィルムに貼り付け、フィルム搬送装置を用いて、１０ｍ／ｍｉｎでフィルムを走行させた。さらに光照射手段として、第一のライン状照明には光の出射角度θ１１が３０°の光ファイバを並べた配列体１と第一のライン状照明の長手方向に垂直な面に対して対称な角度となるように配設した配列体２を持つクロス斜光照明を用い、第二のライン状照明、第三のライン状照明として、白色の光を照射する直線型ＬＥＤ照明を用い、それぞれの光軸の角度θ２、θ３を３０°となるように設置した。また、第一のライン状照明の光軸と第二、第三のライン状照明の光軸は、フィルム面で交差するように設置し、フィルム面と光照射手段との距離を１５０ｍｍに設置した。
[Example]
Scratch defects were inspected using an apparatus according to the arrangement of FIG. As a film, a PET film having a width of 1000 mm and a thickness of 50 μm was used. Scratch defects generated at the same cycle were rotated by 15 degrees, adhered to the PET film, and the film was run at 10 m / min using a film transport device. . Further, as the light irradiating means, the first linear illumination is symmetrical with respect to the array 1 in which optical fibers having a light emission angle θ11 of 30 ° are arranged and a plane perpendicular to the longitudinal direction of the first linear illumination. Using the cross oblique illumination having the array 2 arranged at an angle, and using the linear LED illumination that emits white light as the second line illumination and the third line illumination, the respective lights The shaft angles θ2 and θ3 were set to be 30 °. Further, the optical axis of the first line illumination and the optical axis of the second and third line illuminations are installed so as to intersect each other on the film surface, and the distance between the film surface and the light irradiation means is set to 150 mm. .
撮像手段として、密着イメージセンサを用い、フィルムを挟んで、光照射手段の反対面に配設した。このとき、フィルム面と密着イメージセンサの受光軸のなす角度を９０°とし、フィルム面と密着イメージセンサの距離を１５ｍｍに設置した。 A contact image sensor was used as the imaging means, and was disposed on the opposite surface of the light irradiation means with a film interposed therebetween. At this time, the angle between the film surface and the light receiving axis of the contact image sensor was 90 °, and the distance between the film surface and the contact image sensor was set to 15 mm.
［比較例］
光照射手段として第一のライン状照明のみを用いた以外は実施例と同じ構成の装置でキズ欠点の検査を実施した。
[Comparative example]
Scratch defects were inspected using an apparatus having the same configuration as that of the example except that only the first linear illumination was used as the light irradiation means.
［実施例と比較例の対比］
図１４に、キズ欠点の角度による密着イメージセンサの受光量を示すレーダーチャートを示す。
第一のライン状照明、第二のライン状照明および第三のライン状照明を組み合わせた光照射手段を用いた実施例では、密着イメージセンサの受光量は、キズ欠点の角度によらずほぼ一定であることが確認できた。このように、実施例では連続走行するフィルムに発生する全ての方向のキズ欠点を一定基準で検出することができることが確認できた。
[Contrast between Example and Comparative Example]
FIG. 14 shows a radar chart showing the amount of light received by the contact image sensor according to the angle of the scratch defect.
In the embodiment using the light irradiation means combining the first line-shaped illumination, the second line-shaped illumination, and the third line-shaped illumination, the amount of light received by the contact image sensor is almost constant regardless of the angle of the scratch defect. It was confirmed that. Thus, it was confirmed in the Examples that scratch defects in all directions generated in a continuously running film can be detected on a constant basis.
クロス斜光照明のみの光照射手段を用いた比較例では、フィルムの走行方向に平行なキズ欠点の受光量は多いが、フィルムの走行方向に垂直なキズ欠点の受光量は少なくなっており、同じキズ欠点であっても発生する角度によって検出感度に差があることが確認できた。 In the comparative example using light irradiation means with only cross oblique illumination, the amount of received flaw defects parallel to the film traveling direction is large, but the amount of received flaw defects perpendicular to the film traveling direction is small, the same. It was confirmed that there was a difference in detection sensitivity depending on the generated angle even if it was a scratch defect.
１ ：連続的走行するシート
２ ：光照射手段
３ ：第一のライン状照明
４ ：第二のライン状照明
５ ：第三のライン状照明
６ ：受光手段
７ ：画像処理手段
８ ：光ファイバの第一の配列体
９ ：光ファイバの第二の配列体
１０：キズ欠点
１１：受光手段の視野範囲
θ１１：第一のライン状照明の第一の配列体の光軸の出射角度
θ１２：第一のライン状照明の第二の配列体の光軸の出射角度
θ２：第二のライン状照明の光軸の出射角度
θ３：第三のライン状照明の光軸の出射角度
θ ：シートの走行方向に対するキズ欠点の角度
x ：キズ欠点で発生する散乱光量
２１：フィルム
２２：キズ欠点
２３：検査台
２４：照明光源
２５：ＣＣＤカメラ
Ｌ１：照明光
Ｌ２：反射光
Ｌ３：垂直反射光
３１：検査対象物
３２：ライン状光源装置
３３：発光ダイオード駆動装置
３４：モニタカメラ
３５：パーソナルコンピュータ
３Ａ、３Ｂ：発光ダイオードの配列体
３Ｃ：発光ダイオードの光軸
４１：シート
４２：直流電源
４３：ライン状光照射手段
４４：ライン状光撮像手段
４５：パーソナルコンピュータ
1: Continuously traveling sheet 2: Light irradiation means 3: First line illumination 4: Second line illumination 5: Third line illumination 6: Light receiving means 7: Image processing means 8: Optical fiber First array 9: Second optical fiber array 10: Scratch defect 11: Field of view range of light receiving means θ11: Optical axis emission angle θ12 of first array of first linear illumination θ12: First The output angle θ2 of the optical axis of the second array of linear illuminations: The output angle θ3 of the optical axis of the second linear illuminations θ3: The output angle θ of the optical axis of the third linear illuminations: The traveling direction of the sheet Angle of scratches against
x: Amount of scattered light generated due to flaws 21: Film 22: Scratches flaw 23: Inspection table 24: Illumination light source 25: CCD camera L1: Illumination light L2: Reflected light L3: Vertical reflected light 31: Inspection object 32: Line shape Light source device 33: Light-emitting diode drive device 34: Monitor camera 35: Personal computer 3A, 3B: Light-emitting diode array 3C: Light-emitting diode optical axis 41: Sheet 42: DC power supply 43: Line-shaped light irradiation means 44: Line-shaped Optical imaging means 45: personal computer
Claims (3)
前記シートの一方の面側から光を照射する長尺の光照射手段と、
前記シートの前記光照射手段が設置された面側に設置され、光照射手段から照射されて前記シートで反射された照射光を受光する受光手段、もしくは前記シートの前記光照射手段が設置された面側とは反対の面側に設置され、光照射手段から照射されて前記シートを透過した照射光を受光する受光手段と、
前記受光手段が受光した照射光の強度に応じた信号値から前記シートの表面に発生したキズ欠点部分を検出する画像処理手段と、を備え、
前記光照射手段は、第一のライン状照明と、第一のライン状照明を挟んで、第一のライン状照明の長手方向と平行に配置された第二および第三のライン状照明とで構成されており、
前記第一のライン状照明は、複数の点光源が直線状に配列された配列体が複数平行に並んで構成され、１つの配列体を構成する複数の点光源は、それぞれの照射光軸が互いに平行になるように配列されており、
前記複数の配列体には、前記第一のライン状照明の長手方向に垂直な平面に対し、照射光がこの平面の一方の面側から他方の面側へ向かうように照射光軸が傾いた第一の配列体と、照射光が前記平面の前記他方の面側から前記一方の面側へ向かうように照射光軸が傾いた第二の配列体の２つが少なくとも有り、
前記第二のライン状照明は、その長手方向の光量分布が均一な直線状の照射光を照射し、
前記第三のライン状照明は、その長手方向の光量分布が均一な直線状の照射光を照射し、
前記光照射手段の長手方向から見て、前記第一の配列体、第二の配列体、第二のライン状照明および前記第三のライン状照明のそれぞれの照射光軸は、前記シート面で交差する、シートのキズ欠点検査装置。 It is a sheet defect inspection apparatus for inspecting a defect defect of a continuously conveyed sheet,
A long light irradiation means for irradiating light from one side of the sheet;
A light receiving unit that is installed on the surface side of the sheet where the light irradiation unit is installed and receives irradiation light irradiated from the light irradiation unit and reflected by the sheet, or the light irradiation unit of the sheet is installed. A light receiving unit that is installed on the surface side opposite to the surface side, receives the irradiation light irradiated from the light irradiation unit and transmitted through the sheet;
Image processing means for detecting a flaw defect portion generated on the surface of the sheet from a signal value corresponding to the intensity of irradiation light received by the light receiving means, and
The light irradiating means includes a first linear illumination and second and third linear illuminations arranged in parallel with the longitudinal direction of the first linear illumination across the first linear illumination. Configured,
The first line-shaped illumination is composed of a plurality of array elements in which a plurality of point light sources are arranged in a straight line, and the plurality of point light sources constituting one array body have their respective irradiation optical axes. Arranged in parallel to each other,
In the plurality of arrays, the irradiation optical axis is inclined with respect to a plane perpendicular to the longitudinal direction of the first linear illumination so that the irradiation light is directed from one surface side to the other surface side of the plane. There are at least two of the first array and the second array whose irradiation optical axis is inclined so that the irradiation light is directed from the other surface side of the plane to the one surface side,
The second linear illumination irradiates linear irradiation light with a uniform light amount distribution in the longitudinal direction,
The third line illumination irradiates linear irradiation light with a uniform light amount distribution in the longitudinal direction,
When viewed from the longitudinal direction of the light irradiation means, the irradiation optical axes of the first array, the second array, the second line illumination, and the third line illumination are respectively on the sheet surface. Crossing defect inspection device for sheets.
ならびに、前記光照射手段の長手方向から見た、前記第二のライン状照明の照射光軸と前記シート面の垂線とのなす角度（鋭角）θ２、および前記第三のライン状照明の照射光軸と前記シート面の垂線とのなす角度（鋭角）θ３が、
θ１１＝θ１２＝θ２＝θ３を満たす、請求項１または２のシートのキズ欠点検査装置。 An angle (acute angle) θ11 formed between an irradiation optical axis of each point light source of the first array and a perpendicular of the sheet surface, as viewed from a direction perpendicular to the longitudinal direction of the light irradiation means and parallel to the sheet surface; And an angle (acute angle) θ12 formed by the irradiation optical axis of each point light source of the second array and the perpendicular of the sheet surface,
And the angle (acute angle) θ2 formed between the irradiation optical axis of the second linear illumination and the perpendicular of the sheet surface, as viewed from the longitudinal direction of the light irradiation means, and the irradiation light of the third linear illumination The angle (acute angle) θ3 formed by the axis and the perpendicular of the sheet surface is
The scratch defect inspection apparatus for a sheet according to claim 1 or 2, wherein θ11 = θ12 = θ2 = θ3 is satisfied.
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