JP2014175048A - 磁性材料間のギャップ - Google Patents
磁性材料間のギャップ Download PDFInfo
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- JP2014175048A JP2014175048A JP2014047620A JP2014047620A JP2014175048A JP 2014175048 A JP2014175048 A JP 2014175048A JP 2014047620 A JP2014047620 A JP 2014047620A JP 2014047620 A JP2014047620 A JP 2014047620A JP 2014175048 A JP2014175048 A JP 2014175048A
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3176—Structure of heads comprising at least in the transducing gap regions two magnetic thin films disposed respectively at both sides of the gaps
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/23—Gap features
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/23—Gap features
- G11B5/235—Selection of material for gap filler
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/23—Gap features
- G11B5/232—Manufacture of gap
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
- B81C1/00611—Processes for the planarisation of structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0102—Surface micromachining
- B81C2201/0105—Sacrificial layer
- B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0041—Photosensitive materials providing an etching agent upon exposure
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Heads (AREA)
Abstract
【解決手段】メインポール磁性材料層の上部に非磁性ギャップ材料層を蒸着する302ことと、非磁性ギャップ材料層の上部に犠牲材料層を蒸着する304ことと、犠牲材料層を完全に除去しないが、犠牲材料層の一部をエッチングする306ことと、エッチングされた犠牲層に追加の犠牲材料を蒸着する308こととによって実装する。
【選択図】図3
Description
処理ステップは、ディスクドライブ業界において使用される磁気記録ヘッド等、磁気素子を形成するためにしばしば使用される。磁気素子の性能は、他の磁気素子に対する配向および離間によって影響を受ける可能性がある。これは特に、磁気素子が相互により近接近して配置されると真実であり得る。
本技術の性質および利点のさらなる理解は、本明細書の残りの部分に記載される、図面への参照によって実現することができる。
Claims (20)
- 2つの磁性材料の間に一様なギャップを成形する方法であって、
メインポール磁性材料層の上部に非磁性ギャップ材料層を蒸着することと、
前記非磁性ギャップ材料層の上部に犠牲材料層を蒸着することと、
前記犠牲材料層を完全に除去しないが、前記犠牲材料層の一部をエッチングすることと、
前記エッチングされた犠牲層に追加の犠牲材料を蒸着することと、
を含む、方法。 - 前記犠牲層の上に前面シールド層を蒸着することをさらに含む、請求項1に記載の方法。
- 前記メインポール層と前記前面シールド層との間に実質的に一様なギャップを成形することをさらに含む、請求項2に記載の方法。
- 前記非磁性ギャップ層が、Al2O3を含む、請求項1に記載の方法。
- 前記非磁性ギャップ層が、ルテニウムを含む、請求項1に記載の方法。
- 前記犠牲層が、ルテニウムを含む、請求項1に記載の方法。
- 前記犠牲層が、NiRuを含む、請求項1に記載の方法。
- 前記犠牲層が、Crを含む、請求項1に記載の方法。
- 前記犠牲層材料が、前記メインポール材料とほぼ同じ磁気モーメントの磁気モーメントを備える、請求項1に記載の方法。
- 前記犠牲層材料が、非磁性シード材料を利用する、請求項1に記載の方法。
- メインポール磁性材料層と、
前記メインポール層の上部に非磁性ギャップ材料層と、
前記非磁性ギャップ材料層の上部にエッチングされた第1の犠牲材料層と、
前記エッチングされた犠牲材料層の上部に第2の犠牲材料層と、
を備える、装置。 - 前記犠牲層の上に前面シールド層をさらに備える、請求項11に記載の装置。
- 前記メインポール層と前記前面シールド層との間に実質的に一様なギャップをさらに備える、請求項12に記載の方法。
- 前記非磁性層が、Al2O3を含む、請求項11に記載の装置。
- 前記非磁性層が、ルテニウムを含む、請求項11に記載の装置。
- 前記第1の犠牲層が、ルテニウムを含む、請求項11に記載の装置。
- 前記第1の犠牲層が、NiRuを含む、請求項11に記載の装置。
- 前記第1の犠牲層が、Cuを含む、請求項11に記載の装置。
- 前記第1の犠牲層材料が、前記メインポール材料の磁気モーメントとほぼ同等の磁気モーメントを備える、請求項11に記載の装置。
- 前記第1の犠牲層材料が、非磁性シード材料を利用する、請求項11に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/796,951 | 2013-03-12 | ||
US13/796,951 US9214167B2 (en) | 2013-03-12 | 2013-03-12 | Main pole layer with at least tow sacrificial layers and a gap layer |
Publications (3)
Publication Number | Publication Date |
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JP2014175048A true JP2014175048A (ja) | 2014-09-22 |
JP2014175048A5 JP2014175048A5 (ja) | 2015-04-30 |
JP6066947B2 JP6066947B2 (ja) | 2017-01-25 |
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Application Number | Title | Priority Date | Filing Date |
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JP2014047620A Expired - Fee Related JP6066947B2 (ja) | 2013-03-12 | 2014-03-11 | 磁性材料間のギャップ |
Country Status (5)
Country | Link |
---|---|
US (2) | US9214167B2 (ja) |
EP (1) | EP2779165A3 (ja) |
JP (1) | JP6066947B2 (ja) |
KR (1) | KR101763198B1 (ja) |
CN (1) | CN104050986B (ja) |
Families Citing this family (2)
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---|---|---|---|---|
US9147407B2 (en) | 2013-03-12 | 2015-09-29 | Seagate Technology Llc | Write head having non-magnetic write gap seed layer, and method |
US9214167B2 (en) | 2013-03-12 | 2015-12-15 | Seagate Technology Llc | Main pole layer with at least tow sacrificial layers and a gap layer |
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US9299367B1 (en) | 2015-07-30 | 2016-03-29 | Headway Technologies, Inc. | Perpendicular magnetic recording (PMR) writer with minimized internal flux shunting |
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2013
- 2013-03-12 US US13/796,951 patent/US9214167B2/en not_active Expired - Fee Related
-
2014
- 2014-03-06 KR KR1020140026632A patent/KR101763198B1/ko active IP Right Grant
- 2014-03-11 CN CN201410086587.2A patent/CN104050986B/zh active Active
- 2014-03-11 JP JP2014047620A patent/JP6066947B2/ja not_active Expired - Fee Related
- 2014-03-12 EP EP14159148.7A patent/EP2779165A3/en not_active Withdrawn
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2015
- 2015-11-23 US US14/949,638 patent/US9922671B2/en active Active
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JPH0573839A (ja) * | 1991-09-12 | 1993-03-26 | Hitachi Ltd | 磁気デイスク装置 |
JPH11195206A (ja) * | 1997-12-26 | 1999-07-21 | Hitachi Metals Ltd | 磁気抵抗効果型薄膜磁気ヘッドおよびその製造方法 |
US6724569B1 (en) * | 2000-02-16 | 2004-04-20 | Western Digital (Fremont), Inc. | Thin film writer with multiplayer write gap |
JP2007087551A (ja) * | 2005-09-26 | 2007-04-05 | Alps Electric Co Ltd | 垂直磁気記録ヘッドの製造方法 |
JP2012133859A (ja) * | 2010-12-22 | 2012-07-12 | Hitachi Global Storage Technologies Netherlands Bv | 主磁極または遮蔽層を分離するギャップ層の膜成長のためのシード積層としてのNiCr |
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CN104050986B (zh) | 2018-06-19 |
KR101763198B1 (ko) | 2017-07-31 |
EP2779165A2 (en) | 2014-09-17 |
US9214167B2 (en) | 2015-12-15 |
EP2779165A3 (en) | 2015-03-25 |
US9922671B2 (en) | 2018-03-20 |
US20160078887A1 (en) | 2016-03-17 |
US20140268415A1 (en) | 2014-09-18 |
JP6066947B2 (ja) | 2017-01-25 |
KR20140111962A (ko) | 2014-09-22 |
CN104050986A (zh) | 2014-09-17 |
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