JP2014173901A - 計測装置及び物品の製造方法 - Google Patents

計測装置及び物品の製造方法 Download PDF

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Publication number
JP2014173901A
JP2014173901A JP2013044715A JP2013044715A JP2014173901A JP 2014173901 A JP2014173901 A JP 2014173901A JP 2013044715 A JP2013044715 A JP 2013044715A JP 2013044715 A JP2013044715 A JP 2013044715A JP 2014173901 A JP2014173901 A JP 2014173901A
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JP
Japan
Prior art keywords
light
wavelength
light source
imaging
unit
Prior art date
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Pending
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JP2013044715A
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English (en)
Japanese (ja)
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JP2014173901A5 (enExample
Inventor
Tsuyoshi Yamazaki
剛資 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2013044715A priority Critical patent/JP2014173901A/ja
Priority to US14/196,900 priority patent/US20140253723A1/en
Publication of JP2014173901A publication Critical patent/JP2014173901A/ja
Publication of JP2014173901A5 publication Critical patent/JP2014173901A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2509—Color coding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/954—Inspecting the inner surface of hollow bodies, e.g. bores
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2013044715A 2013-03-06 2013-03-06 計測装置及び物品の製造方法 Pending JP2014173901A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013044715A JP2014173901A (ja) 2013-03-06 2013-03-06 計測装置及び物品の製造方法
US14/196,900 US20140253723A1 (en) 2013-03-06 2014-03-04 Measurement apparatus and method of manufacturing article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013044715A JP2014173901A (ja) 2013-03-06 2013-03-06 計測装置及び物品の製造方法

Publications (2)

Publication Number Publication Date
JP2014173901A true JP2014173901A (ja) 2014-09-22
JP2014173901A5 JP2014173901A5 (enExample) 2016-04-14

Family

ID=51487386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013044715A Pending JP2014173901A (ja) 2013-03-06 2013-03-06 計測装置及び物品の製造方法

Country Status (2)

Country Link
US (1) US20140253723A1 (enExample)
JP (1) JP2014173901A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016157349A1 (ja) * 2015-03-30 2016-10-06 株式会社日立製作所 形状計測方法およびその装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119468878B (zh) * 2024-10-17 2025-07-25 联佳科技(苏州)有限公司 飞机舱门垂直轴的同轴度检测装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07286828A (ja) * 1994-04-19 1995-10-31 Kobe Steel Ltd 管内検査装置
JPH11101624A (ja) * 1997-09-29 1999-04-13 Hitachi Ltd 欠陥評価装置およびその方法並びに半導体の製造方法
JP2002333305A (ja) * 2001-05-08 2002-11-22 Nikon Corp 干渉測定装置および横座標計測方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1126412B1 (en) * 2000-02-16 2013-01-30 FUJIFILM Corporation Image capturing apparatus and distance measuring method
JP3975892B2 (ja) * 2002-05-02 2007-09-12 富士ゼロックス株式会社 位置計測システム
JP5084398B2 (ja) * 2007-08-24 2012-11-28 キヤノン株式会社 測定装置、測定方法、及び、プログラム

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07286828A (ja) * 1994-04-19 1995-10-31 Kobe Steel Ltd 管内検査装置
JPH11101624A (ja) * 1997-09-29 1999-04-13 Hitachi Ltd 欠陥評価装置およびその方法並びに半導体の製造方法
JP2002333305A (ja) * 2001-05-08 2002-11-22 Nikon Corp 干渉測定装置および横座標計測方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016157349A1 (ja) * 2015-03-30 2016-10-06 株式会社日立製作所 形状計測方法およびその装置

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Publication number Publication date
US20140253723A1 (en) 2014-09-11

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