JP2014173901A5 - - Google Patents

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Publication number
JP2014173901A5
JP2014173901A5 JP2013044715A JP2013044715A JP2014173901A5 JP 2014173901 A5 JP2014173901 A5 JP 2014173901A5 JP 2013044715 A JP2013044715 A JP 2013044715A JP 2013044715 A JP2013044715 A JP 2013044715A JP 2014173901 A5 JP2014173901 A5 JP 2014173901A5
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JP
Japan
Prior art keywords
light
wavelength
light source
unit
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013044715A
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English (en)
Japanese (ja)
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JP2014173901A (ja
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Publication date
Application filed filed Critical
Priority to JP2013044715A priority Critical patent/JP2014173901A/ja
Priority claimed from JP2013044715A external-priority patent/JP2014173901A/ja
Priority to US14/196,900 priority patent/US20140253723A1/en
Publication of JP2014173901A publication Critical patent/JP2014173901A/ja
Publication of JP2014173901A5 publication Critical patent/JP2014173901A5/ja
Pending legal-status Critical Current

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JP2013044715A 2013-03-06 2013-03-06 計測装置及び物品の製造方法 Pending JP2014173901A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013044715A JP2014173901A (ja) 2013-03-06 2013-03-06 計測装置及び物品の製造方法
US14/196,900 US20140253723A1 (en) 2013-03-06 2014-03-04 Measurement apparatus and method of manufacturing article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013044715A JP2014173901A (ja) 2013-03-06 2013-03-06 計測装置及び物品の製造方法

Publications (2)

Publication Number Publication Date
JP2014173901A JP2014173901A (ja) 2014-09-22
JP2014173901A5 true JP2014173901A5 (enExample) 2016-04-14

Family

ID=51487386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013044715A Pending JP2014173901A (ja) 2013-03-06 2013-03-06 計測装置及び物品の製造方法

Country Status (2)

Country Link
US (1) US20140253723A1 (enExample)
JP (1) JP2014173901A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016157349A1 (ja) * 2015-03-30 2016-10-06 株式会社日立製作所 形状計測方法およびその装置
CN119468878B (zh) * 2024-10-17 2025-07-25 联佳科技(苏州)有限公司 飞机舱门垂直轴的同轴度检测装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07286828A (ja) * 1994-04-19 1995-10-31 Kobe Steel Ltd 管内検査装置
JPH11101624A (ja) * 1997-09-29 1999-04-13 Hitachi Ltd 欠陥評価装置およびその方法並びに半導体の製造方法
EP1126412B1 (en) * 2000-02-16 2013-01-30 FUJIFILM Corporation Image capturing apparatus and distance measuring method
JP2002333305A (ja) * 2001-05-08 2002-11-22 Nikon Corp 干渉測定装置および横座標計測方法
JP3975892B2 (ja) * 2002-05-02 2007-09-12 富士ゼロックス株式会社 位置計測システム
JP5084398B2 (ja) * 2007-08-24 2012-11-28 キヤノン株式会社 測定装置、測定方法、及び、プログラム

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