JP2014152339A - Sample holder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sample holder in which substrate holding members may be mounted on a mounting surface stably when the substrate holding members are mounted and removed repeatedly.SOLUTION: A sample holder stored in a plasma treatment apparatus has a plurality of substrate holding members comprising: a substrate plate having a mounting surface extended vertically for mounting the substrate to be treated; annular shanks structured so that cylindrical cavities are formed in their respective interior; an outer shell part consisting of a head part having a cross sectional area larger than those of the shanks; and a core part of columnar shape disposed in close contact with the inner walls of the shanks of the outer shell part, in which a part of the shanks are embedded in the mounting surface and the substrate is supported by the shanks at gaps between the head parts of the substrate holding members and the mounting surface.

Description

  The present invention relates to a sample holder on which a substrate to be processed is mounted and stored in a plasma processing apparatus.

  In the manufacturing process of a semiconductor device, a plasma processing apparatus is used for processes such as film formation, etching, and ashing because of high-precision process control. For example, as a film forming apparatus, a plasma chemical vapor deposition (CVD) film forming apparatus is known in which a plasma is formed between a cathode electrode and an anode electrode constituting parallel plates to perform a film forming process.

  The substrate processing method of the plasma CVD film forming apparatus is roughly classified into a single wafer type that processes substrates one by one and a batch type that processes a plurality of substrates simultaneously. The solar cell has a small substrate size of about 125 mm to 156 mm, and the cost applied to each substrate is small, so that it is necessary to increase the number of substrates processed per unit time. For this reason, a batch type is often used in a film forming apparatus for a solar cell. In particular, in order to improve the processing efficiency, it is effective to increase the number of substrates that can be processed at the same time using a sample holder on which the substrates are mounted vertically (see, for example, Patent Document 1).

JP 2002-75884 A

  In order to mount the substrate vertically on the sample holder, for example, a method of forming a pin hole on the surface of the sample holder on which the substrate is mounted and using a metal pin press-fitted into the pin hole as a substrate support can be used. However, it is necessary to periodically clean the sample holder. For example, it is necessary to remove the metal pin from the sample holder every time the hydrofluoric acid is washed. By repeating such press-fitting and removing of the metal pin, the pin hole of the sample holder widens, and there is a problem that the metal pin does not adhere to the mounting surface and easily comes off.

  In view of the above problems, an object of the present invention is to provide a sample holder in which a substrate support can be stably mounted on a mounting surface even when the substrate support is repeatedly attached and detached.

  According to one aspect of the present invention, there is provided a sample holder stored in a plasma processing apparatus, wherein (a) a substrate plate on which a substrate to be processed is mounted extends in a vertical direction, and (b) a cylinder inside. A shaft portion configured in an annular shape so as to form a hollow shape, an outer shell portion composed of a head having a wider cross-sectional area than the shaft portion, and an inner wall of the shaft portion of the outer shell portion are arranged in close contact with each other A plurality of substrate supports, each of which has a cylindrical core portion and a portion of the shaft portion embedded in the mounting surface, and the substrate is supported by the shaft portion with a gap between the head of the substrate support and the mounting surface. A sample holder to be placed is provided.

  ADVANTAGE OF THE INVENTION According to this invention, even if it repeats attachment and removal of a board | substrate support tool, the sample holder with which a board | substrate support tool is stably mounted | worn can be provided.

It is typical sectional drawing which shows the structure of the sample holder which concerns on embodiment of this invention. It is a typical top view showing composition of a sample holder concerning an embodiment of the present invention. It is a schematic diagram which shows the example which mounted the board | substrate in the sample holder which concerns on embodiment of this invention. It is a mimetic diagram for explaining a substrate support of a sample holder concerning an embodiment of the present invention. It is a schematic diagram for demonstrating the method to attach a board | substrate support tool to the sample holder which concerns on embodiment of this invention (the 1). It is a schematic diagram for demonstrating the method to attach a board | substrate support tool to the sample holder which concerns on embodiment of this invention (the 2). It is a schematic diagram for demonstrating the method to attach a board | substrate support tool to the sample holder which concerns on embodiment of this invention (the 3). It is sectional drawing which shows the structure of the substrate support tool of the sample holder which concerns on embodiment of this invention. It is a schematic diagram which shows the other example of the sample holder which concerns on embodiment of this invention.

  Embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals. However, it should be noted that the drawings are schematic. Further, the embodiment described below exemplifies an apparatus and a method for embodying the technical idea of the present invention, and the embodiment of the present invention has the following structure and arrangement of components. It is not something specific. The embodiment of the present invention can be variously modified within the scope of the claims.

  A sample holder 10 according to an embodiment of the present invention is a sample holder stored in a plasma processing apparatus, and a substrate plate on which a mounting surface 110 on which a substrate to be processed is mounted extends vertically as shown in FIG. 11 and a substrate support 20 disposed on the mounting surface 110. The substrate support 20 includes a shaft portion 211 formed in an annular shape so as to form a cylindrical cavity therein, an outer shell portion 21 including a head portion 212 having a cross-sectional area wider than that of the shaft portion 211, and an outer shell. It consists of a cylindrical core part 22 arranged in close contact with the inner wall of the shaft part 211 of the part 21. As shown in FIG. 1, a part of the shaft portion is embedded in the mounting surface 110.

  Although details will be described later, pressure is applied to the inner wall of the shaft portion 211 outward by the core portion 22 pushed into the cavity inside the shaft portion 211. For this reason, the outer wall of the shaft portion 211 is pressed against the substrate plate 11, and the substrate support 20 cannot be easily detached from the mounting surface 110.

  As shown in FIG. 2, a plurality of substrate supports 20 are arranged on the mounting surface 110. In the example illustrated in FIG. 2, the substrate support 20 is disposed at positions corresponding to the lower end surface and the left and right end surfaces with respect to the substrate disposed at the mounting position 111 defined by the rectangular area. As a result, the lower side, the right side, and the left side of the substrate are respectively supported by the substrate support 20 and the substrate is fixed on the mounting surface 110. Note that the number of substrate supports 20 is not limited to three, and the number and location of the substrate supports 20 can be arbitrarily set so that the substrate is stably disposed on the mounting surface 110.

  As shown in FIG. 3, the substrate 1 is fixed on the mounting surface 110 by being supported by the shaft portion 211 through a gap between the head 212 of the substrate support 20 and the mounting surface 110. For this reason, the length t of the shaft portion 211 exposed on the mounting surface 110 is set to be equal to the thickness of the substrate 1.

  FIG. 4 shows the structure of a mounting tool 200 for attaching the substrate support 20 to the mounting surface 110. The mounting tool 200 has a structure in which a shaft 220 having a core portion 22 disposed at the tip is inserted into an internal cavity of the outer shell portion 21 including a shaft portion 211 and a head portion 212. The shaft 220 has a structure in which the core portion 22, the constricted portion 221, and the lead-out portion 222 are connected, and the lead-out portion 222 is provided in the internal cavity of the outer shell portion 21 before the substrate support 20 is attached to the mounting surface 110. Is arranged. The diameter d2 of the lead-out portion 222 is thinner than the diameter d1 of the core portion 22, and the constricted portion 221 is formed to be thinner than the lead-out portion 222. More specifically, the diameter d2 of the lead-out portion 222 is smaller than the diameter of the internal cavity of the outer shell portion 21, and the diameter d1 of the core portion 22 is slightly thicker than the diameter of the internal cavity of the outer shell portion 21. Below, the example of the method of attaching the board | substrate support tool 20 to the mounting surface 110 is demonstrated.

  First, as shown in FIG. 5, a through hole 100 having an opening on the mounting surface 110 is formed in the substrate plate 11. The diameter of the through hole 100 is set to be approximately equal to the diameter of the shaft portion 211 of the substrate support 20.

  Next, as shown in FIG. 6, the mounting tool 200 is inserted into the through hole 100 formed in the substrate plate 11 from the mounting surface 110 side so that the core portion 22 protrudes from the surface on the opposite side of the substrate plate 11. Since the diameter of the through hole 100 is approximately equal to the diameter of the shaft portion 211, the mounting tool 200 is held on the mounting surface 110 in a stable posture, and the shaft 220 of the mounting tool 200 is in the surface normal direction of the mounting surface 110. Stretch. At this time, the tip of the shaft portion 211 is located in the through hole 100. The position of the outer shell portion 21 is set so that the length t of the shaft portion 211 exposed between the head portion 212 and the mounting surface 110 is equal to the thickness of the substrate 1.

  Then, the drawer portion 222 is pulled in the direction of the arrow in FIG. 6, that is, the surface normal direction of the mounting surface 110 without changing the position of the outer shell portion 21. At this time, as shown in FIG. 7, the shaft 220 is moved so that the core portion 22 stays inside the shaft portion 211. Thereafter, by cutting the shaft 220 at the constricted portion 221, the substrate support 20 is attached to the mounting surface 110 as shown in FIG.

  As already described, the diameter d1 of the core portion 22 is set to be slightly thicker than the diameter of the internal cavity of the outer shell portion 21. For example, as shown in FIG. 8, when the diameter of the inner cavity of the outer shell portion 21 is 1.65 mm, the diameter d1 of the core portion 22 is about 1.75 mm, and the diameter d2 of the lead portion 222 is about 1.45 mm. Set to Thus, as shown in FIG. 7, when the core portion 22 is pushed into the internal cavity of the outer shell portion 21, the core portion 22 is inserted into the inner cavity so that the internal cavity of the outer shell portion 21 is expanded. Is done. For example, the diameter of the outer diameter of the shaft portion 211 increases from 2.4 mm to about 2.6 mm. As a result, the outer wall of the shaft portion 211 is in close contact with the inner wall of the through hole 100, and the shaft portion 211 is always firmly pressed against the substrate plate 11. For this reason, the sample holder 10 in which the substrate support 20 is not easily detached from the mounting surface 110 can be realized.

  As described above, in the sample holder 10, the opening of the through hole 100 is formed on the mounting surface 110. However, since the through hole 100 is sealed by the substrate support 20, no hollow discharge due to the opening of the through hole 100 is generated.

  In the sample holder 10 shown in FIG. 1, even when the substrate support 20 is removed from the mounting surface 110 when the sample holder is cleaned, and a new substrate support 20 is attached to the mounting surface 110 after cleaning, it is press-fitted like a metal pin. There is no need and the substrate support 20 can be stably fixed to the mounting surface 110. That is, even if the diameter of the hole formed in the mounting surface 110 is slightly widened, the shaft portion 211 is strongly pressed against the substrate plate 11 by the core portion 22, so that the substrate support 20 has sufficient strength to support the substrate 1. Fixed to the mounting surface 110.

  Furthermore, management of the length t of the shaft portion 211 exposed on the mounting surface 110 is facilitated, and assemblability is improved. Further, the cost reduction can be realized by the mass production effect of the substrate support 20.

  In the operation of attaching the substrate support 20 to the mounting surface 110, a series of operations such as attaching the mounting tool 200 to the through hole 100, inserting the core portion 22 into the inner cavity of the outer shell portion 21, and cutting the shaft 220 are dedicated. Can be done using a riveter. In order to remove the substrate support 20 from the mounting surface 110, for example, the head 212 may be pulled with a force of about 3 kg. A special tool can also be used for removing the substrate support 20 from the mounting surface 110. For this reason, the attachment and removal operations of the substrate support 20 can be performed without depending on the skill and experience of the operator. Thereby, an accuracy error can be suppressed.

  A metal material such as an aluminum (Al) material or a stainless steel (SUS) material can be used as the material of the substrate support 20. In consideration of the high temperature of the sample holder 10 in the processing step, a SUS material can be suitably used for the substrate support 20. However, the material of the substrate support 20 is not limited to SUS, and any material having heat resistance that does not deform at the temperature of the processing step can be used. Considering the case where the processing step is performed at about 700 ° C., it is preferable that the substrate support 20 is made of a material having heat resistance of 700 ° C. or higher.

  Al material or SUS material can be used as the material of the substrate plate 11, but a carbon material should be used in consideration of the fact that the film forming process may be performed at a high temperature of, for example, 450 ° C. or higher. Is preferred. Alternatively, a conductive ceramic may be employed for the sample holder 10.

  As shown in FIG. 9, a boat-type sample holder 10 in which a plurality of substrate plates 11 are arranged in parallel along the surface normal direction of the mounting surface 110 can be employed. Each bottom portion of the substrate plate 11 is fixed by a fixing plate 101. In FIG. 9, illustration of the substrate support 20 is omitted. By using the boat type sample holder 10 having a plurality of mounting surfaces 110, the number of substrates 1 that can be processed in one film forming process can be increased, and as a result, the overall processing time can be shortened. it can.

  As described above, according to the sample holder 10 according to the embodiment of the present invention, the sample on which the substrate support 20 is stably attached to the mounting surface 110 even when the attachment and removal of the substrate support 20 are repeated. A holder can be provided. For example, the number of times the substrate support 20 is attached and removed until the sample holder 10 is replaced is usually 12 times. However, in the sample holder 10, the substrate support can be supported even if the attachment and removal are performed 24 times. The tool 20 could be attached to the mounting surface 110 with sufficient strength.

  As mentioned above, although this invention was described by embodiment, it should not be understood that the description and drawing which form a part of this indication limit this invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art. That is, it goes without saying that the present invention includes various embodiments not described herein. Therefore, the technical scope of the present invention is defined only by the invention specifying matters according to the scope of claims reasonable from the above description.

DESCRIPTION OF SYMBOLS 1 ... Substrate 10 ... Sample holder 11 ... Substrate plate 20 ... Substrate support 21 ... Outer shell part 22 ... Core part 100 ... Through-hole 101 ... Fixed plate 110 ... Mounting surface 111 ... Mounting position 200 ... Mounting tool 211 ... Shaft part 212 ... head 220 ... shaft 221 ... constriction 222 ... drawer

Claims (4)

A sample holder stored in a plasma processing apparatus,
A substrate plate on which a mounting surface for mounting a substrate to be processed extends vertically;
A shaft portion configured in an annular shape so as to form a cylindrical cavity inside, an outer shell portion comprising a head having a wider cross-sectional area than the shaft portion, and an inner wall of the shaft portion of the outer shell portion A plurality of substrate supports in which a part of the shaft portion is embedded in the mounting surface, and a gap between the head of the substrate support and the mounting surface A sample holder, wherein the substrate is arranged supported by the shaft portion.   The sample holder according to claim 1, wherein the substrate support is made of a material having heat resistance of 700 ° C. or higher.   The sample holder according to claim 1, wherein the substrate support is stainless steel.   The sample holder according to claim 1, wherein the sample holder has a plurality of mounting surfaces.

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