JP2014137116A5 - - Google Patents

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Publication number
JP2014137116A5
JP2014137116A5 JP2013006575A JP2013006575A JP2014137116A5 JP 2014137116 A5 JP2014137116 A5 JP 2014137116A5 JP 2013006575 A JP2013006575 A JP 2013006575A JP 2013006575 A JP2013006575 A JP 2013006575A JP 2014137116 A5 JP2014137116 A5 JP 2014137116A5
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JP
Japan
Prior art keywords
magnetic bearing
sampling
bearing device
current
current detection
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Application number
JP2013006575A
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English (en)
Japanese (ja)
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JP2014137116A (ja
JP6131602B2 (ja
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Priority to JP2013006575A priority Critical patent/JP6131602B2/ja
Priority claimed from JP2013006575A external-priority patent/JP6131602B2/ja
Priority to CN201310680615.9A priority patent/CN103939387B/zh
Publication of JP2014137116A publication Critical patent/JP2014137116A/ja
Publication of JP2014137116A5 publication Critical patent/JP2014137116A5/ja
Application granted granted Critical
Publication of JP6131602B2 publication Critical patent/JP6131602B2/ja
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JP2013006575A 2013-01-17 2013-01-17 磁気軸受装置および真空ポンプ Active JP6131602B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013006575A JP6131602B2 (ja) 2013-01-17 2013-01-17 磁気軸受装置および真空ポンプ
CN201310680615.9A CN103939387B (zh) 2013-01-17 2013-12-12 磁性轴承装置及真空泵

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013006575A JP6131602B2 (ja) 2013-01-17 2013-01-17 磁気軸受装置および真空ポンプ

Publications (3)

Publication Number Publication Date
JP2014137116A JP2014137116A (ja) 2014-07-28
JP2014137116A5 true JP2014137116A5 (de) 2016-03-17
JP6131602B2 JP6131602B2 (ja) 2017-05-24

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ID=51187213

Family Applications (1)

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JP2013006575A Active JP6131602B2 (ja) 2013-01-17 2013-01-17 磁気軸受装置および真空ポンプ

Country Status (2)

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JP (1) JP6131602B2 (de)
CN (1) CN103939387B (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6387863B2 (ja) * 2015-03-05 2018-09-12 株式会社島津製作所 磁気軸受装置
JP6728821B2 (ja) * 2016-03-18 2020-07-22 株式会社島津製作所 磁気軸受式真空ポンプ
JP6695541B2 (ja) 2017-02-01 2020-05-20 株式会社島津製作所 磁気軸受制御装置および真空ポンプ
US10487875B2 (en) 2017-08-25 2019-11-26 Shimadzu Corporation Magnetic bearing device
JP7155531B2 (ja) * 2018-02-14 2022-10-19 株式会社島津製作所 磁気浮上制御装置および真空ポンプ
CN108757732B (zh) * 2018-08-06 2023-10-03 珠海格力电器股份有限公司 磁悬浮轴承控制设备、方法和存储介质
JP7164471B2 (ja) * 2019-03-15 2022-11-01 エドワーズ株式会社 制御装置、及び該制御装置を備えた真空ポンプ
IL310336A (en) * 2021-08-30 2024-03-01 Edwards Japan Ltd Magnetic bearing device and vacuum pump
CN114876954A (zh) * 2022-05-25 2022-08-09 山东明天机械集团股份有限公司 一种电磁轴承数据采集精度优化的系统和方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3220281B2 (ja) * 1993-04-30 2001-10-22 株式会社荏原製作所 磁気軸受装置
US5696412A (en) * 1993-10-20 1997-12-09 Iannello; Victor Sensor-less position detector for an active magnetic bearing
JP3701115B2 (ja) * 1998-02-12 2005-09-28 株式会社荏原製作所 磁気軸受制御装置
JP4284791B2 (ja) * 1999-11-11 2009-06-24 株式会社島津製作所 磁気浮上装置の制御装置および磁気浮上式ターボ分子ポンプ
JP4927000B2 (ja) * 2000-09-18 2012-05-09 エドワーズ株式会社 センサレスブラシレスモータの制御回路、センサレスブラシレスモータ装置、及び真空ポンプ装置
JP2003083330A (ja) * 2001-09-12 2003-03-19 Koyo Seiko Co Ltd 磁気軸受装置
JP4241223B2 (ja) * 2002-08-30 2009-03-18 株式会社島津製作所 磁気軸受装置
JP4089445B2 (ja) * 2003-01-22 2008-05-28 株式会社デンソー 半導体集積回路装置
KR20040082954A (ko) * 2003-03-19 2004-09-30 비오씨 에드워즈 가부시키가이샤 자기 베어링 장치 및 이 자기 베어링 장치를 탑재한 터보분자 펌프
EP1517042A1 (de) * 2003-09-17 2005-03-23 Mecos Traxler AG Magnetlagerung für eine Vakuumpumpe
JP4466526B2 (ja) * 2005-04-01 2010-05-26 株式会社島津製作所 磁気軸受装置
JP2006317419A (ja) * 2005-05-16 2006-11-24 Boc Edwards Kk 位置センサ及び該位置センサを搭載した磁気軸受装置
JP5045894B2 (ja) * 2006-05-09 2012-10-10 株式会社島津製作所 磁気軸受装置
JP4840328B2 (ja) * 2007-10-25 2011-12-21 住友電装株式会社 Ｐｗｍ制御方法及び装置、並びに、調光装置
JP5025505B2 (ja) * 2008-01-24 2012-09-12 株式会社荏原製作所 磁気軸受装置
JP5077059B2 (ja) * 2008-05-13 2012-11-21 株式会社明電舎 磁気軸受装置

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