JP2014126762A - Substrate bonding apparatus and method of bonding substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus and a method capable of closing outer edges of a display substrate and a cover substrate and generating a vacuum space at a joint of the substrates even when a warped display substrate is bonded to the cover substrate.SOLUTION: An LCM support 13 includes a pressing member 132, a voice coil motor 131 and a displacement detection sensor 138. A control unit 14 controls a current value by which the voice coil motor 131 displaces the pressing member 132, on the basis of an amount of variation of the displacement of the voice coil motor 131. As a result, a closed space is generated at a joint between a display substrate 101 and a cover substrate 121, and the substrates are bonded together with a high degree of precision without generating an air bubble between the substrates.

Description

  The present invention relates to a substrate bonding apparatus and a substrate bonding method for bonding a display substrate such as an LCD (Liquid Crystal Display) module or an organic light emitting diode module to a cover substrate such as a substrate with a touch sensor or a protective substrate.

  The display unit of the display device is configured by providing a cover substrate such as a substrate with a touch sensor or a protective substrate on a polarizing plate provided on a display substrate such as an LCD module or an organic light emitting diode module. Such a display unit is produced through a process of attaching a cover substrate to a display substrate. In addition, an ultraviolet curable resin is widely used as an adhesive member used when the display substrate and the cover substrate (hereinafter also referred to as “both substrates”) are bonded together.

  In general, the process of attaching the cover substrate to the display substrate is performed in a vacuum environment in order to prevent bubbles from entering between the substrates. Patent Document 1 discloses a method for manufacturing a display device in which a display device (corresponding to “display substrate”) and a protective plate (corresponding to “cover substrate”) of a display device are bonded in a vacuum container. . This manufacturing method uses a vacuum vessel that can be evacuated. The vacuum vessel is in close contact with a base that supports the display substrate, a moving mechanism that supports and moves the cover substrate relative to the display substrate, and an adhesive resin is interposed between the display substrate and the cover substrate. A pressurizing member is provided for this purpose.

  In this manufacturing method, after the display substrate coated with the adhesive resin and the cover substrate are bonded together in a vacuum, the vacuum in the vacuum container is released. Then, the bonded display substrate and cover substrate are taken out from the vacuum container, and the display substrate and the cover substrate are accurately aligned in the alignment device. Thereafter, the fixing adhesive resin is cured by ultraviolet irradiation or the like, and the accurate positional relationship between the aligned display substrate and the cover substrate is fixed.

  According to this manufacturing method, both substrates are bonded together in a vacuum. Therefore, even when a gap is formed between the sealing adhesive resin and the cover substrate at the time of bonding, the sealing adhesive resin is sucked into this gap by releasing the vacuum, and the gap may be eliminated. it can.

  Patent Document 2 discloses an electrostatic chuck that performs electrostatic attraction as one of holding means for holding an object to be attracted corresponding to a display substrate and a cover substrate under vacuum. In this electrostatic chuck, an electrode that generates an electrostatic charge between a dielectric layer that adsorbs an object to be adsorbed and an elastic layer is fixed to a frame as an adsorption sheet. This technique makes it possible to adsorb and hold objects to be adsorbed with poor surface flatness, such as glass substrates with varying thickness.

International Publication No. 11/037035 JP 2007-294852 A

  By the way, the display substrate and the cover substrate may be slightly warped for structural reasons such as a plurality of members stacked and formed in a multilayer shape.

  Here, in the manufacturing method of the display device disclosed in Patent Document 1, if either the display substrate or the cover substrate is warped or bonded together with a shift between the two substrates, the display substrate And the outer edge of the cover substrate is closed, and a vacuum space cannot be formed at the joint location. In addition, when the two substrates are joined, the contact angle of the display substrate breaks the surface tension of the adhesive resin applied to the cover substrate, so that the thickness of the adhesive resin at the time of bonding cannot be made uniform, or the bonded display substrate The adhesive resin may protrude from the edge of the cover substrate.

  Further, the electrostatic chuck disclosed in Patent Document 2 enables suction and holding in the atmosphere and vacuum against slight undulations generated on the display substrate and the cover substrate. However, warpage occurring in a laminated structure of thin plates having different linear expansion coefficients tends to be large. For this reason, in the elastic layer holding an adsorbing sheet, it is considered that the warp remains, and there is a possibility that the adhesion at the time of electrostatic attraction cannot be ensured.

  The present invention has been made in view of the above circumstances, and an object thereof is to perform bonding of substrates with high accuracy.

In the present invention, a display substrate and a cover substrate are bonded together under a vacuum via an adhesive member.
First, the substrate holding unit arranged in the vacuum container holds the cover substrate or the display substrate, and the substrate support unit arranged in the vacuum vessel supports the display substrate or the cover substrate.
Next, the pressing member included in the auxiliary pressing portion disposed in the vacuum vessel supports at least the outer edge portion of the display substrate at the bonding position where the cover substrate and the display substrate are bonded together.
Next, the pressing member driving unit included in the auxiliary pressing unit moves the pressing member in the direction in which the display substrate approaches the cover substrate, and the displacement detecting unit included in the auxiliary pressing unit detects the displacement of the pressing member driving unit. Output the detection result.
And based on the variation | change_quantity of the displacement of the press member drive part calculated | required from the detection result of the displacement detection part, the press member drive part controls the electric current value which displaces a press member.

  In the above configuration, the pressing member included in the auxiliary pressing portion provided in the vacuum vessel presses the outer edge portion of the display substrate in the direction approaching the cover substrate, so even if the display substrates are warped, both substrates Generation | occurrence | production of the separation location which an outer edge part spaces apart can be prevented.

  According to the present invention, in the process of bonding the display substrate and the cover substrate, the substrate is bonded with high accuracy by controlling the current value for displacing the pressing member disposed on the outer edge of the display substrate. There is an effect that can be.

It is explanatory drawing which shows schematic structure of the display substrate which is one board | substrate bonded together by the board | substrate bonding apparatus which concerns on the 1st Embodiment of this invention. It is explanatory drawing which shows schematic structure of the cover board | substrate which is the other board | substrate bonded together by the board | substrate bonding apparatus which concerns on the 1st Embodiment of this invention. It is a figure which shows schematic structure of the board | substrate bonding apparatus which concerns on the 1st Embodiment of this invention. It is a figure which shows the example of arrangement | positioning of the LCM support which concerns on the 1st Embodiment of this invention. It is a figure which shows the detailed structural example of the LCM support which concerns on the 1st Embodiment of this invention. It is a figure which shows the control system of the LCM support which concerns on the 1st Embodiment of this invention. It is a block diagram which shows the control system in the board | substrate bonding apparatus which concerns on the 1st Embodiment of this invention. It is a flowchart of the control system of the voice coil motor which concerns on the 1st Embodiment of this invention. It is explanatory drawing which shows the relationship between the electric current value and change amount with respect to time passage of the voice coil motor which concerns on the 1st Embodiment of this invention. It is explanatory drawing which shows the operation example of the voice coil motor which concerns on the 1st Embodiment of this invention. It is a flowchart of the control system of the voice coil motor which concerns on the 2nd Embodiment of this invention. It is explanatory drawing which shows the relationship between the electric current value and the variation | change_quantity with respect to time passage of the voice coil motor which concerns on the 2nd Embodiment of this invention. It is a perspective view which shows the structural example of the LCM support which concerns on the modification of this invention.

<1. First Embodiment>
Hereinafter, the board | substrate bonding apparatus 1 which concerns on the 1st Embodiment of this invention is demonstrated with reference to FIGS. In addition, the same code | symbol is attached | subjected to the common member in each figure.

[Display board]
First, the display substrate 101 will be described with reference to FIG.
FIG. 1 is an explanatory diagram showing a schematic configuration of a display substrate 101 which is one substrate to be bonded by the substrate bonding apparatus 1.

The display substrate 101 is, for example, an LCD module (LCM: Liquid Crystal Display Module). The display substrate 101 includes a substrate body 102 that uses liquid crystal, a frame 103 that exposes one surface and accommodates the substrate body 102, and a polarizing plate 104 that is attached to one surface of the substrate body 102. .
The display substrate 101 may be an organic light emitting diode (OLED) module or other display module.

  The substrate body 102 is formed in a rectangular plate shape, and one surface serves as a display surface. The substrate body 102 is formed in a multilayer shape including a layer made of a black matrix formed by laminating a plurality of members into a rectangular frame shape (not shown). The contour of the inner periphery of this black matrix is substantially equal to the contour of the outer periphery of the polarizing plate 104. The black matrix is formed, for example, by sputtering metal chromium on the substrate body 102 and removing unnecessary portions by etching.

The frame 103 covers the four sides of the substrate body 102 and the other surface of the substrate body 102.
The polarizing plate 104 is formed in a rectangular shape and has a smaller outer contour than the substrate body 102. That is, the contour of the outer periphery of the polarizing plate 104 is formed to have a size approximately equal to the display area of the substrate body 102. The polarizing plate 104 side of the display substrate 101 is attached to a cover substrate 121 described later via an adhesive member, for example, an ultraviolet curable resin. The adhesive member is not limited to the ultraviolet curable resin. For example, other photocuring resins or thermosetting resins may be used.

[Cover substrate]
Next, the cover substrate 121 will be described with reference to FIG.
FIG. 2 is an explanatory diagram showing a schematic configuration of the cover substrate 121.

  The cover substrate 121 includes a substrate body 122 and a black matrix (BM) 123 provided on one surface of the substrate body 122. The substrate body 122 is formed in a rectangular plate shape. The outer peripheral contour of the cover substrate 121 is formed larger than the outer peripheral contour of the frame 103 in the display substrate 101.

  The contour of the outer periphery of the black matrix 123 is substantially equal to the contour of the outer periphery of the substrate body 122, and the contour of the inner periphery is substantially equal to the contour of the outer periphery of the polarizing plate 104 in the display substrate 101. The black matrix 123 is formed, for example, by sputtering metal chromium on one surface of the substrate body 122 and removing unnecessary portions by etching.

  In the present embodiment, a substrate with a touch sensor will be described as an example of the cover substrate 121. However, the cover substrate is not limited to a substrate with a touch sensor, and may be, for example, a protective substrate formed of a glass material. May be.

[Board bonding equipment]
FIG. 3 is a diagram showing a schematic configuration of the substrate bonding apparatus 1 according to the first embodiment of the present invention. FIG. 3A shows a schematic front sectional view of the substrate bonding apparatus 1, and FIG. 3B shows a schematic side sectional view.

  The substrate bonding apparatus 1 is accommodated in an accommodation space of an enclosure (not shown). The enclosure is used to prevent diffusion of an organic solvent or the like used in the substrate bonding apparatus 1.

  The substrate bonding apparatus 1 includes a fixed-side vacuum chamber 2, a movable-side vacuum chamber 3, a support frame 4, an XYθ stage 5, a Z moving stage (cover substrate) 6, a Z moving stage (display substrate) 7, a holding mechanism unit 8, A support mechanism unit 9 is provided. The substrate bonding apparatus 1 includes an exhaust port 11a, an intake port 11b, a pedestal 12, an LCM support 13, and an ultraviolet irradiation port 23.

  The support frame 4 supports a holding mechanism unit 8 as an example of a substrate holding unit through a Z moving stage (cover substrate) 6 so as to be movable in the vertical direction. An imaging unit (not shown) provided on the support frame 4 images both substrates, whereby the cover substrate 121 held by the holding mechanism unit 8 and the display substrate 101 supported by the support mechanism unit 9 as an example of the substrate support unit. It is possible to detect the center position, relative position, and relative deviation amount.

Here, a schematic operation example of the substrate bonding apparatus 1 will be described.
First, the support mechanism unit 9 fixes the display substrate 101 held by suction. Next, the holding mechanism unit 8 fixes the cover substrate 121 with a clamp. Thereafter, the Z moving stage (display substrate) 7 is raised, and the fixed-side vacuum chamber 2 and the movable-side vacuum chamber 3 are brought into close contact with each other. A seal member 22 made of rubber such as silicone rubber or urethane rubber is attached to the tip of the peripheral wall portion of the movable-side vacuum chamber 3. The seal member 22 comes into contact with and closely contacts the fixed-side vacuum chamber 2, and seals between the distal end portion of the peripheral wall portion and the fixed-side vacuum chamber 2. Thereby, the vacuum vessel 10 is formed. Thereafter, the intake port 11b is closed and the exhaust port 11a is evacuated to evacuate the interior of the vacuum vessel 10 to form a vacuum chamber.

  After the vacuum chamber reaches the target degree of vacuum, the Z movement stage (cover substrate) 6 is lowered and the cover substrate 121 and the display substrate 101 are bonded together. Then, the LCM support 13 as an example of the auxiliary pressing portion that supports the outer edge portion of the display substrate 101 is driven, and the outer edge portion of the display substrate 101 is pressed in the direction approaching the cover substrate 121. Thereby, the outer edge part of both board | substrates can be made into the closed state. Thereafter, even if the vacuum is released, the substrates can be bonded with high accuracy without generating bubbles between the substrates.

  The ultraviolet rays emitted from the ultraviolet irradiation port 23 are irradiated from the side onto an ultraviolet curable resin interposed between the display substrate 101 and the cover substrate 121 by a reflection mirror (not shown). Thereby, the display substrate 101 and the cover substrate 121 can be temporarily fixed, and the display substrate 101 and the cover substrate 121 can be prevented from being relatively displaced.

[LCM support]
Next, a schematic configuration of the LCM support 13 will be described with reference to FIGS.
FIG. 4 is an explanatory view showing an arrangement example of the LCM support 13.
Four LCM supports 13 are provided at each of the four corners of the base 12, which are positions corresponding to the four corners of the display substrate 101 held by the holding mechanism unit 8 or supported by the support mechanism unit 9. Since these LCM supports 13 are disposed at positions slightly away from the four corners of the support mechanism unit 9, it is easy to press the outer edge portion of the display substrate 101. And the pressing member 132 (refer FIG. 5 mentioned later) arrange | positioned at the front-end | tip of the LCM support 13 can press each of the four corners of the display board 101 shown with a broken line in the figure with predetermined force.

FIG. 5 is a diagram showing a detailed configuration of the LCM support 13.
The LCM support 13 is provided inside the vacuum container 10 and includes a pressing member 132 that presses at least the outer edge portion of the display substrate 101 at a bonding position where the cover substrate 121 and the display substrate 101 are bonded together, and a pressing member driving unit. . As this pressing member driving unit, a voice that moves the pressing member 132 in accordance with the amount of current supplied from the servo driver 16 and the direction of the current, and moves the pressing member 132 in the direction in which the display substrate 101 approaches the cover substrate 121. A coil motor 131 is used. The LCM support 13 includes a displacement detection sensor 138 that detects the displacement of the voice coil motor 131 and outputs a displacement detection sensor value.

  The voice coil motor 131 includes a coil 133, a magnet 134 disposed around the coil 133, and a shaft 135. The shaft 135 is made of, for example, iron and has a base portion 136 and a cylindrical portion 137. The base portion 136 is formed in a substantially circular flat plate shape, and the columnar portion 137 extends from a substantially central portion of the base portion 136 in the Z-axis direction. The cylindrical portion 137 is inserted inside the coil 133 along the central axis of the coil 133. A pressing member 132 is disposed at the tip of the cylindrical portion 137. The pressing member 132 is formed in a substantially cylindrical shape by an elastic member, for example, rubber or resin. And the front-end | tip part of the press member 132 is formed in the dome shape.

  When a current flows through the coil 133, the shaft 135 and the pressing member 132 move upward or downward in accordance with the amount and direction of the flowing current. One end of wiring (not shown) is connected to the voice coil motor 131. The other end of this wiring is connected to a servo driver 16 described later.

  In addition, a displacement detection sensor 138 installed on the upper surface of the base 12 is provided immediately below the base portion 136 as an example of a displacement detection portion that detects the displacement of the pressing member driving portion and outputs a detection result. As the displacement detection sensor 138, for example, an eddy current sensor is used. The displacement detection sensor 138 detects the displacement of the base 136 that moves together with the voice coil motor 131 by driving the voice coil motor 131 as the displacement of the voice coil motor 131, and outputs a displacement detection sensor value (an example of a detection result). .

FIG. 6 is an explanatory diagram showing a detailed configuration of the control system including the LCM support 13.
The operation of the LCM support 13 is controlled by the amount of current supplied from the control unit 14 via the servo driver 16. Then, the displacement detection sensor 138 outputs the displacement detection sensor value to the control unit 14 via the amplifier 18 and the A / D converter 17. In the present embodiment, the control unit 14 is a PLC (Programmable Logic Controller) control device.

  And the control part 14 controls the electric current value mn by which the voice coil motor 131 displaces the press member 132 based on the variation | change_quantity Cn of the displacement of the voice coil motor 131 calculated | required from the acquired displacement detection sensor value, and press member 132 is displaced (see FIG. 8 described later). Here, the change amount Cn is a relative value indicating a difference in position before and after the movement of the voice coil motor 131.

  The control unit 14 includes a CPU (Central Processing Unit) 141 and an input / output unit 142. Then, power is supplied from the power source 15 to the control unit 14. Further, the displacement detection sensor value converted into a digital signal by the A / D converter 17 is input to the CPU 141.

  The CPU 141 calculates the displacement of the voice coil motor 131 required for the voice coil motor 131. The CPU 141 sends each servo driver via the input / output unit 142 so as to move the voice coil motor 131 to the target displacement with the direction and amount of current determined based on the digital signal transmitted from the A / D converter 17. 16 outputs an instruction signal. The servo driver 16 drives the voice coil motor 131 in the vertical direction with the direction and amount of current instructed by the control unit 14 based on the instruction signal received from the control unit 14. When the voice coil motor 131 moves up, the pressing member 132 pushes up the display substrate 101, and when the voice coil motor 131 moves down, the pressing member 132 moves away from the display substrate 101. In this way, the CPU 141 can move the voice coil motor 131 to the target displacement amount via the servo driver 16.

  The displacement detection sensor 138 is installed on the upper surface of the pedestal 12 provided below the voice coil motor 131 and detects the displacement from the pedestal 12 to the base 136 of the voice coil motor 131. The displacement detection sensor 138 outputs a voltage that changes as the base portion 136 of the voice coil motor 131 moves in the vertical direction to the amplifier 18. In this embodiment, the output voltage of the displacement detection sensor 138 is minimized when the base 136 and the pedestal 12 are closest. Further, the output voltage increases as the base portion 136 rises and moves away from the pedestal 12, and becomes maximum when the base portion 136 and the pedestal 12 are farthest away.

  When the voice coil motor 131 is driven in the vertical direction, the amplifier 18 amplifies the voltage value (displacement detection sensor value) of the analog signal output from the displacement detection sensor 138. The A / D converter 17 converts the amplified voltage value into a digital signal, and the CPU 141 receives the digital signal. Then, the CPU 141 obtains the current position of the voice coil motor 131 from the digital signal.

  At the same time, the servo driver 16 sends the execution result when the voice coil motor 131 is moved to the CPU 141 via the input / output unit 142. The CPU 141 can accurately grasp the amount of displacement of the voice coil motor 131 by the feedback from the amplifier 18 and the feedback received from the servo driver 16, and can control the voice coil motor 131 with high accuracy. Thus, the voice coil motor 131 controlled with high precision by the CPU 141 can accurately move the pressing member 132. In the following description, the control unit 14 controls that the CPU 141 controls the displacement of the servo driver 16, the voice coil motor 131, and the pressing member 132 using a signal input / output via the input / output unit 142. Express as something to control.

[Control system for substrate bonding equipment]
Next, a control system of the substrate bonding apparatus 1 will be described with reference to FIG.
FIG. 7 is a block diagram showing a control system of the bonding apparatus 1.

  As shown in FIG. 7, the substrate bonding apparatus 1 includes a control unit 14. As described above, the control unit 14 includes the CPU 141, a ROM (Read Only Memory) that stores programs executed by the CPU 141, and a RAM (Random Access Memory) that is used as a work area of the CPU 141. The ROM and the RAM are assigned functions to the memory 25 used for the controller 14 to write or read data, values, and the like. As the memory 25, for example, a storage medium such as a RAM or an SSD (Solid State Drive) that can be accessed at high speed by the control unit 14 is used.

  The control unit 14 is electrically connected to the substrate holding unit 21, the XYθ stage 5, and the Z moving stages 6 and 7. The control unit 14 is electrically connected to the ultraviolet irradiation port 23, the pressure sensor 24, the exhaust valve 26, the intake valve 27, and the vacuum pump 28. Further, the servo driver 16 for each LCM support 13 and the A / D converter 17 are electrically connected.

  The holding mechanism unit 8 is controlled by the control unit 14 and holds the cover substrate 121. Further, the support mechanism unit 9 is controlled by the control unit 14 and holds the display substrate 101.

  The XYθ stage 5 is controlled by the control unit 14 and moves the movable-side vacuum chamber 3 in the X direction, the Y direction, and the θ direction. The Z moving stage (display substrate) 7 is controlled by the control unit 14 to move the movable-side vacuum chamber 3 in the Z direction. For example, the control unit 14 moves (lifts) the movable-side vacuum chamber 3 in the Z direction so as to contact the fixed-side vacuum chamber 2. As a result, the fixed-side vacuum chamber 2 and the movable-side vacuum chamber 3 form a vacuum container 10.

  The control unit 14 controls driving of the XYθ stage 5 and the Z moving stage (display substrate) 7 to move the movable side vacuum chamber 3 in the X direction, the Y direction, and the θ direction. Accordingly, the support mechanism unit 9 is moved in the X direction, the Y direction, and the θ direction, and the display substrate 101 is positioned with respect to the cover substrate 121. That is, the display substrate 101 and the cover substrate 121 are relatively positioned.

  The exhaust valve 26 and the intake valve 27 are controlled by the control unit 14 to close or open the exhaust port 11a and the intake port 11b. For example, the control unit 14 drives the exhaust valve 26 and the intake valve 27 to completely open the exhaust port 11a and the intake port 11b, and a small amount open state in which the open amount is small compared to the open state. Set to the fully closed state. Note that the opening amounts of the exhaust port 11a and the intake port 11b in the small amount open state can be arbitrarily set.

  The pressure sensor 24 is provided on the base 12. The pressure sensor 24 detects the pressure in the vacuum chamber in the vacuum vessel 10 formed by the fixed-side vacuum chamber 2 and the movable-side vacuum chamber 3 and outputs the pressure sensor value to the control unit 14.

  The vacuum pump 28 is controlled by the control unit 14 to suck air from the vacuum container 10 through the exhaust port 11a. Thereby, the vacuum container 10 is deaerated. Based on the pressure sensor value received from the pressure sensor 24, the control unit 14 drives the exhaust valve 26, the intake valve 27, and the vacuum pump 28 to set the vacuum chamber in the vacuum vessel 10 to a predetermined vacuum level. The predetermined degree of vacuum is set to a value lower than atmospheric pressure, for example, 10 to 100 Pa.

  The Z movement stage (cover substrate) 6 is controlled by the control unit 14 to move the substrate holding unit 21 in the Z direction. The control unit 14 lowers the substrate holding unit 21 holding the cover substrate 121 inside the vacuum vessel 10. Thus, in a vacuum state where the vacuum chamber is set to a predetermined degree of vacuum, the cover substrate 121 and the display substrate 101 supported by the support mechanism unit 9 are brought into contact with each other and disposed at the bonding position.

  The ultraviolet irradiation port 23 is controlled by the control unit 14 and irradiates ultraviolet rays from a side to a plurality of portions of the ultraviolet curable resin interposed between the bonded display substrate 101 and the cover substrate 121. Thereby, the ultraviolet curable resin is cured, and the bonded display substrate 101 and cover substrate 121 are temporarily fixed.

  Since detailed operation examples of the displacement detection sensor 138, the amplifier 18, the A / D converter 17, the servo driver 16, the voice coil motor 131, and the pressing member 132 have already been described above, description thereof will be omitted.

[First control method of voice coil motor]
Next, a control method of the voice coil motor 131 according to the first embodiment of the present invention will be described with reference to FIGS.
FIG. 8 is a flowchart of the control method of the voice coil motor 131.
FIG. 9 is an explanatory diagram showing the relationship between the current value and the amount of change over time of the voice coil motor 131.
FIG. 10 is an explanatory diagram showing an operation example of the voice coil motor 131. FIG. 10A shows an example of the current position and displacement of the voice coil motor 131, and FIG. 10B shows an example of the change amount of the displacement of the voice coil motor 131. 10C shows an example of the substrate contact point, FIG. 10D shows an example of the amount of change after the pressing member 132 contacts the display substrate 101, and FIG. 10E shows the outer edge portion of the display substrate 101 on the cover substrate 121. The example of the variation | change_quantity of the displacement of the voice coil motor 131 in the case of approaching is shown.

  In the first control method of the voice coil motor 131, the control unit 14 obtains a change amount Cn of the displacement of the voice coil motor 131, and the LCM until the change amount Cn becomes smaller than a predetermined change amount determination value B. A predetermined amount of current value (step value m) is added to the support 13. And the process which adds the electric current value (step value m) of predetermined amount to the electric current value mn instruct | indicated to the LCM support 13 by the frequency | count within the press control frequency V is continued. Note that the number of times of pressing control is a parameter indicating the number of times the pressing member 132 presses the display substrate 101 by driving the voice coil motor 131, and is set in advance by an operator from a touch panel (not shown). Hereinafter, a detailed processing example will be described.

  First, the control unit 14 instructs the servo driver 16 to move up the voice coil motor 131 (step S1). At this time, the variable n indicating the current position of the voice coil motor 131 is “1” which is an initial value. A variable V indicating the number of times of pressing control is “0” which is an initial value.

  Next, the servo driver 16 outputs a current value defined as the initial value A1 to the servo driver 16 in order to raise the voice coil motor 131 to the initial position (step S2). Then, after raising the voice coil motor 131, the servo driver 16 stops the voice coil motor 131 for a fixed time of a seconds (step S3). In this way, the servo driver 16 stops the voice coil motor 131, thereby eliminating the influence of vibration caused by the rising and stopping of the voice coil motor 131, and the displacement detection sensor 138 accurately detecting the displacement of the voice coil motor 131. Can do.

  The displacement of the voice coil motor 131 is read by the displacement detection sensor 138, and the displacement detection sensor 138 outputs the displacement detection sensor value. The control unit 14 receives the current position Dn of the voice coil motor 131 from the displacement detection sensor value via the amplifier 18 and the A / D converter 17 and stores it in the memory 25 (step S4). Then, the control unit 14 adds the number of times of pressing control V from “0”, which is an initial value, to “1”, and stores it in the memory 25. Note that the current position D1 of the voice coil motor 131 is obtained from the distance between the displacement detection sensor 138 and the base 136 by the control unit 14 (see FIG. 10A).

  Next, according to the instruction signal received from the control unit 14, the servo driver 16 determines whether the current value mn output to the voice coil motor 131 is greater than the current set value E preset by the operator from a touch panel (not shown). Judgment is made (step S5). A variable “m” included in the current value mn represents the number of times the step value m is added to the current value mn. The current setting value E is a maximum current value required for the voice coil motor 131 to rise to a height at which the pressing member 132 in contact with the display substrate 101 is expected to push up the cover substrate 121.

  The controller 14 starts from the initial value A1 and repeats the process of obtaining the change amount of the current position of the voice coil motor 131 every time the current value mn is increased to near the current set value E. When the current value mn by the instruction signal becomes larger than the current set value E, the servo driver 16 outputs a limit completion signal to the control unit 14 (step S6).

  The limit completion signal is a signal for stopping the increase in the current value mn output from the servo driver 16 to the voice coil motor 131 so that the current position Dn of the voice coil motor 131 is not changed. This Limit completion signal is used, for example, to prevent the voice coil motor 131 from being erroneously raised at a position where it does not contact the display substrate 101 installed in the support mechanism unit 9. The control unit 14 that has received the limit completion signal controls the servo driver 16 to keep the current position Dn of the voice coil motor 131 without changing the current value mn while maintaining the current value mn (step S15). For this reason, the voice coil motor 131 does not rise too much.

  In the determination process of step S5, if the current value mn is equal to or less than the current set value E, the servo driver 16 adds the step value m, which is a specified amount of change in current, to the current value mn, thereby obtaining the current value m. Find (n + 1). Then, the servo driver 16 outputs this current value m (n + 1) to the voice coil motor 131 (step S7). In this process, for example, a current value mn for raising the voice coil motor 131 to the current position D2 above the current position D1 of the voice coil motor 131 is output to the voice coil motor 131.

  The servo driver 16 stops the voice coil motor 131 for only b seconds, which is a fixed value, at the raised position (step S8). The voice coil motor 131 loops the processing from step S8 to S16 and stops for at least b seconds until the step value m is added to the current value mn again in step S7.

  After the voice coil motor 131 is displaced, the servo driver 16 outputs an operation completion signal indicating that the operation of the voice coil motor 131 is completed to the control unit 14 (step S9).

  Thereafter, the displacement detection sensor 138 reads the displacement of the voice coil motor 131 and outputs a displacement detection sensor value. Then, the control unit 14 amplifies the displacement detection sensor value by the amplifier 18 and performs A / D conversion by the A / D converter 17, obtains the current position Dn + 1 of the voice coil motor 131, and stores the current position Dn + 1 in the memory 25. (Step S10).

  Next, the control unit 14 subtracts the current position Dn from the current position Dn + 1 of the voice coil motor 131 stored in the memory 25 to obtain a displacement change amount Cn of the voice coil motor 131, and stores this change amount Cn in the memory 25. (Step S11). The change amount Cn is the difference between the current position Dn + 1 of the voice coil motor 131 and the position of the base 136 at the current position Dn. In FIG. 10B, the current position D1 of the voice coil motor 131 displaced by the servo driver 16 outputting the current value mn with the initial value A1 and the current position D1 of the voice coil motor 131 displaced by outputting the current value m (n + 1) are shown. An example of the change amount C1 of the current position D2 is shown.

  Next, the control unit 14 determines whether or not the change amount Cn is smaller than a change amount determination value B preset by an operator from a touch panel (not shown) (step S12). Here, the control unit 14 determines that the location where the display substrate 101 is pressed by the pressing member 132 is close to the cover substrate 121 when the change amount Cn is smaller than the predetermined change amount determination value B. To do. The control unit 14 increases the current value mn instructed to the LCM support 13 as the displacement change amount Cn of the voice coil motor 131 decreases. However, if the change amount Cn becomes smaller than the change amount determination value B, the current value mn is not increased any more, and the pressing member 132 does not press the display substrate 101 too much.

  In the control method of the voice coil motor 131 according to the first embodiment, after the initial value A1 is given to the voice coil motor 131, the number of times of pressing control of the voice coil motor 131 is specified up to 20 times. Even if the number of times of pressing control is 20 times or less, if the change amount Cn becomes smaller than the change amount determination value B, the control unit 14 determines that the display substrate 101 is sufficiently close to the cover substrate 121.

  For this reason, until the pressing member 132 contacts the display substrate 101, the voice coil motor 131 is displaced by a constant change amount Cn as long as the current value is constant. In this example, as shown in FIG. 9, the pressing member 132 is not in contact with the display substrate 101 until the number of times of pressing control is 6, and the change amount Cn is large. When the pressing member 132 contacts the display substrate 101, the apex position of the pressing member 132 or the vicinity thereof becomes a substrate contact point. FIG. 10C shows an example in which the pressing member 132 contacts the display substrate 101 at the current position D6.

  When the pressing member 132 comes into contact with the display substrate 101, the change amount Cn becomes small at the current value mn sent to the voice coil motor 131 when it is not in contact with the display substrate 101. This is because the movement of the pressing member 132 is limited by the repulsive force of the warping of the display substrate 101. FIG. 10D shows an example in which the change amount C7 is smaller than the change amount C1 shown in FIG. 10B due to the movement of the pressing member 132 being restricted by the display substrate 101.

  Therefore, the control unit 14 further adds a step value m to the current value mn, and outputs an instruction to increase the current value mn to the servo driver 16. If the pressing member 132 continues to push up the display substrate 101 thereafter, the change amount Cn becomes smaller than the change amount determination value B in the determination process of step S12, and the outer edge portions of the display substrate 101 and the cover substrate 121 are brought into close contact with each other. FIG. 10E shows an example in which the change amount C13 is smaller than the change amount determination value B. At this time, the control unit 14 determines that the display substrate 101 is close to the cover substrate 121 and the pressing member 132 cannot be raised.

  For this reason, the control unit 14 instructs the servo driver 16 to maintain the current current value mn and maintain the position of the voice coil motor 131, that is, not to change the position of the pressing member 132 (step). S15). The servo driver 16 outputs a current of the same amount as the current instructed to the voice coil motor 131, and the pressing member 132 stops without changing the current position.

  On the other hand, when the change amount Cn is greater than or equal to the change amount determination value B in the determination process of step S12, the control unit 14 determines that the display substrate 101 is not flattened with the current amount instructed last time (FIG. 10D). reference). For this reason, the control unit 14 determines that the outer edge portion of the display substrate 101 is not close to the cover substrate 121.

  Further, the control unit 14 determines whether or not the number of times of pressing control has reached a predetermined number V (for example, 20 times) (step S13). If the number of times of pressing control has reached the predetermined number V, the process moves to step S15, and control is performed without changing the position of the voice coil motor 131.

  Here, in the determination process of step S13, if the number of times of pressing control is less than the predetermined number, the control unit 14 increments the variables n and V by “1”, respectively (step S14). The increased value of the variable n is sent from the control unit 14 to the servo driver 16.

  Then, the control unit 14 instructs the servo driver 16 to move up the voice coil motor 131 (step S16). For this reason, the servo driver 16 outputs more current to the voice coil motor 131 than the current passed in the previous pressing control, and pushes up the pressing member 132. And the control part 14 transfers a process to step S5, and repeats the process after step S5.

  As described above, the servo driver 16 adds the step value m, which is a fixed value, to the current value mn, and repeats the process of raising the voice coil motor 131 a plurality of times. Thereby, each pressing member 132 contacts the outer edge portions of the four corners of the display substrate 101 and pushes these four corners upward. Then, the servo driver 16 increases the current value mn output to the voice coil motor 131 to the current set value E. As the current value mn increases, the voice coil motor 131 rises and the force applied by the pressing member 132 to the display substrate 101 also increases. However, when the pressing member 132 contacts the display substrate 101, the change amount Cn becomes small. For this reason, the control unit 14 obtains the number of times of pressing control, the amount of change Cn, and the current value mn, and causes the pressing member 132 to push up the display substrate 101 with an appropriate pressing force, and the cover substrate 121 causes the outer edge portion of the display substrate 101 to move. Can be adhered.

  In the substrate bonding apparatus 1 according to the first embodiment described above, the LCM supports 13 provided inside the vacuum vessel 10 are installed at the four corners of the display substrate 101. The LCM support 13 presses the outer edge portion of the display substrate 101 corresponding to the bonding position of the cover substrate 121 and the display substrate 101 in a direction approaching the cover substrate 121. For this reason, even if the display substrate 101 is warped, it is possible to prevent the occurrence of a separation portion where the outer edge portions of the two substrates are separated from each other, and a stable closed space can be formed between the two substrates. Note that even when a gap is formed between the two substrates when the two substrates are bonded together, the adhesive member is sucked into the gap by releasing the vacuum, and bubbles are generated between the two substrates by eliminating the gap. I won't let you.

  When controlling the LCM support 13, the control unit 14 uses the current value output from the servo driver 16 to the voice coil motor 131, the current position Dn of the voice coil motor 131, and the press control frequency V as control parameters. . When the control unit 14 accurately controls the LCM support 13, even if a gap is generated inside the outer edge portion between the display substrate 101 and the cover substrate 121 in which the ultraviolet curable resin is interposed, the display substrate 101 and the cover substrate 121. The outer edge portion of each can be brought into contact with each other to make the gap a closed space. With this closed space, the display substrate 101 and the cover substrate 121 can be bonded with high accuracy without generating bubbles between the two substrates. Further, by controlling the pressing by the pressing member 132 with a minimum force, the four corners of the outer edge portion of the display substrate 101 can be brought close to the cover substrate 121, and the ultraviolet curable resin applied between the two substrates protrudes. Can be prevented.

  Further, the servo driver 16 increases the voice coil motor 131 little by little by adding the step value m to the current value mn until the current value mn reaches the current set value E. The voice coil motor 131 can easily change the displacement of the voice coil motor 131 by increasing or decreasing the step value m. Further, the control unit 14 obtains the change amount Cn from the displacement of the voice coil motor 131 every time the voice coil motor 131 rises. Therefore, the control unit 14 can accurately grasp the displacement of the voice coil motor 131 even when the current value mn slightly increases or decreases. Further, the control unit 14 does not push up the pressing member 132 by comparing the change amount Cn and the change amount determination value B.

<2. Second Embodiment>
[Second control method of voice coil motor]
Next, a control method of the voice coil motor 131 according to the second embodiment of the present invention will be described with reference to FIGS.
FIG. 11 is a flowchart of the control method of the voice coil motor 131.
FIG. 12 is an explanatory diagram showing the relationship between the current value and the amount of change of the voice coil motor 131 over time.

  In the second control method of the voice coil motor 131, the control unit 14 sets a predetermined amount of current to the current value mn instructed to the LCM support 13 until a predetermined current set value E1 to E3 (see FIG. 12) is exceeded. Add a value (step value m). The control unit 14 obtains a displacement change amount Cn of the voice coil motor 131 every time the current value mn exceeds the current set values E1 to E3, and the change amount Cn is smaller than a predetermined change amount determination value B. Until it becomes, the process of adding a predetermined amount of current value (step value m) to the current value mn instructing the LCM support 13 is continued. This process is performed with the number of times within the press control frequency V. The current setting values E1 to E3 are all values set in advance from a touch panel (not shown) based on an operator's rule of thumb. The current set value E1 is a value assumed that the pressing member 132 operated by the voice coil motor 131 is in contact with the display substrate 101, and the current set value E2 is assumed that the outer edge portion of the display substrate 101 is in contact with the cover substrate 121. Is the value to be The current setting value E3 is a value that is assumed that the pressing member 132 pushes up to the cover substrate 121. Normally, the control unit 14 fixes the current value mn when the current value mn exceeds the current set value E2. Hereinafter, a detailed processing example will be described.

  In the flowchart in FIG. 11, the processing from step S21 to S24 is the same as the processing from step S1 to S4 in the control method of the voice coil motor 131 according to the first embodiment described above, and therefore detailed description will be given. Omitted.

  After step S24, based on the instruction signal received from the control unit 14, it is determined whether the current value mn output from the servo driver 16 to the voice coil motor 131 is greater than the current setting value En (step S25). The current set value En changes to a large value in the order of E1, E2, and E3. The control unit 14 repeats the process of starting the initial value A1 and increasing the current value mn to near the current set value E1.

  In the determination process of step S25, if the current value mn is equal to or less than the current set value En, the servo driver 16 adds the step value m, which is a specified amount of change in the current, to the current value mn, so that the current value m ( n + 1). Then, the servo driver 16 outputs the current value m (n + 1) to the voice coil motor 131 (step S26).

  Then, the servo driver 16 stops the voice coil motor 131 at a position where the voice coil motor 131 is raised for a fixed value of b seconds (step S27). The processes of steps S26 and S27 in NO of step S25 are repeated until the current value mn becomes larger than the current set value En. For example, as shown in FIG. 12, when the current value mn becomes larger than the current set value E1, the servo driver 16 performs the processing after YES in step S25.

  When the current value mn becomes larger than the current set value En, the servo driver 16 keeps the output to the voice coil motor 131 at the current value mn added by the command of the control unit 14 (step S28). For example, when the current value mn becomes larger than the current set value E1, it is indicated that the current value mn is the current value m1 as shown in FIG. Further, when the current value mn becomes larger than the current set value E2, it is indicated that the current value mn is the current value m2 as shown in FIG. Then, the servo driver 16 outputs an operation completion signal indicating that the operation of the voice coil motor 131 is completed to the control unit 14 (step S29).

  The displacement detection sensor 138 reads the displacement of the voice coil motor 131 and outputs a displacement detection sensor value. Then, the control unit 14 amplifies the displacement detection sensor value by the amplifier 18 and performs A / D conversion by the A / D converter 17, obtains the current position Dn + 1 of the voice coil motor 131, and stores the current position Dn + 1 in the memory 25. (Step S30).

  Next, the control unit 14 subtracts the current position Dn from the current position Dn + 1 of the voice coil motor 131 stored in the memory 25 to obtain a displacement change amount Cn of the voice coil motor 131, and stores this change amount Cn in the memory 25. (Step S31).

  Next, the control unit 14 determines whether or not the change amount Cn is smaller than the change amount determination value B (step S32). Here, in the control method of the voice coil motor 131 according to the second embodiment, after the initial value A1 is given to the voice coil motor 131, the pressing control of the voice coil motor 131 is performed up to three times as shown in FIG. Specify the number of times. If the change amount Cn is smaller than the change amount determination value B even if the number of times of pressing control is within 3, the control unit 14 determines that the outer edge portion of the display substrate 101 is sufficiently close to the cover substrate 121. Judgment.

  If it is determined in step S32 that the change amount Cn is smaller than the change amount determination value B, the control unit 14 may cause the outer edge portion of the display substrate 101 to approach the cover substrate 121 and raise the pressing member 132. Judge that it is not possible. At this time, the control unit 14 instructs the servo driver 16 to maintain the current value and maintain the position of the voice coil motor 131, that is, not to change the position of the pressing member 132 (step S35). ). The servo driver 16 outputs the same amount of current as the current instructed to the voice coil motor 131, and the pressing member 132 stops without changing its position.

  In the determination process of step S32, when the change amount Cn is greater than or equal to the change amount determination value B, the control unit 14 determines that the warp of the display substrate 101 is not flattened with the current amount instructed last time. For this reason, the control unit 14 determines that the outer edge portion of the display substrate 101 is not close to the cover substrate 121. And the control part 14 judges whether the press control frequency which shows the frequency | count that the press member 132 presses the display board 101 reached predetermined frequency V (for example, 3 times) (step S33). If the number of times of pressing control has reached the predetermined number of times V, the process moves to step S35, and control is performed without changing the position of the voice coil motor 131.

  In the determination process of step S33, if the number of times of pressing control is less than the predetermined number V, the control unit 14 increments the variables n and V by “1”, respectively (step S34). The increased value of the variable n is sent from the control unit 14 to the servo driver 16. By this processing, for example, the current setting value E1 is changed to E2 in the servo driver 16.

  Thereafter, the control unit 14 instructs the servo driver 16 to move up the voice coil motor 131 (step S36). For this reason, the servo driver 16 outputs a current larger than the current instructed to the voice coil motor 131 to push up the pressing member 132. And the control part 14 moves a process to step S25, and repeats the process after step S25.

  Thus, in the control method of the voice coil motor 131 according to the second embodiment, the current set values E1 to E3 are set in advance. Then, when the current value mn obtained by adding the step value m exceeds the current set values E1 to E3, the control unit 14 obtains a change amount Cn of the displacement of the voice coil motor 131, and determines the change amount Cn and the change amount determination. The value B is compared. In this way, the control unit 14 does not obtain the change amount Cn every time the voice coil motor 131 is displaced by adding the step value m to the current value mn, so that the outer edge portion of the display substrate 101 is placed on the cover substrate 121. The tact time until approaching can be shortened.

  Note that a current setting value for determining the change amount Cn may be set in detail (for example, E4 or more), and the number of times of pressing control may be repeated up to V times (for example, 20 times). Thereby, the closed state of the outer edge part of the display substrate 101 and the cover substrate 121 can be formed more stably. However, when increasing the number of times of pressing control, it is necessary to consider an increase in tact time.

<3. Modification>
In the above, the board | substrate bonding apparatus which concerns on this invention was demonstrated including the effect. However, the substrate bonding apparatus according to the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the invention described in the claims.

[Modification of LCM support]
FIG. 13 shows a modification of the LCM support 13. FIG. 13A shows an example in which the current position of the pressing member is controlled using a stepping motor, and FIG. 13B shows an example in which the current position of the pressing member is controlled using a strain gauge for the pressing member.

  In the substrate bonding apparatus 1 described above, the movement of the pressing member 132 is controlled using the voice coil motor 131 that is linearly driven. However, the movement of the pressing member can also be controlled using a stepping motor that is driven to rotate. Hereinafter, a configuration example of the LCM supports 30A and 30B using such a stepping motor will be described.

  An LCM support 30A shown in FIG. 13A includes a stepping motor 301, a shaft 302, an arm 303, and a pressing member 304. The stepping motor 301 is connected to the control unit 14 described above.

  The control unit 14 precisely controls the driving of the stepping motor 301. One end of a shaft 302 is attached to the stepping motor 301, and the shaft 302 is slightly rotated according to the driving of the stepping motor 301. The other end of the shaft 302 is attached to the arm 303. A pressing member 304 that presses the display substrate 101 is provided at the tip of the arm 303. For this reason, it becomes possible to move the pressing member 304 up and down by controlling the driving of the stepping motor 301.

  An LCM support 30B illustrated in FIG. 13B includes an arm 305 and a strain gauge 306 in addition to the stepping motor 301, the shaft 302, and the pressing member 304 included in the LCM support 30A described above. The stepping motor 301 and the strain gauge 306 are connected to the control unit 14 described above.

  An elastic body such as a thin leaf spring is used for the arm 305. A strain gauge 306 is provided at a connection portion between the arm 305 and the shaft 302. In the LCM support 30B, when the arm 305 rotates and the pressing member 304 rises and contacts the display substrate 101, the arm 305 is deformed downward and the strain gauge 306 is also deformed. Based on the deformation amount of the strain gauge 306, the control unit 14 can determine how much the pressing member 304 is pushing up the outer edge of the display substrate 101.

[Other variations]
In the substrate bonding apparatus 1, the LCM support 13 is provided at the four corners of the display substrate 101. However, the arrangement position and the form of the LCM support 13 are not limited to the above-described embodiments, and can be appropriately changed within a range in which the occurrence of a location where the outer edge of the display substrate 101 and the cover substrate 121 is separated can be prevented. is there. For example, the LCM support 13 may be arranged on the long side of the display substrate 101 in addition to the four corners of the display substrate 101. In addition, the LCM support 13 is arranged at a position corresponding to a pair of corners diagonally located among the four corners of the display substrate 101 held by the holding mechanism unit 8 or supported by the support mechanism unit 9. May be.

  Further, in the control of the LCM support 13 according to the present embodiment, not only the control based on the current direction and the current amount but also the position control may be combined. For example, the upper surface position of the XYθ stage 5 of the display substrate 101 is stored, and the LCM support 13 is raised to that position. Next, the amount of current supplied to the voice coil motor 131 may be controlled to control the pressing member 132 to apply a force to the display substrate 101.

  Step m may be increased or decreased depending on the situation. For example, the step m may be increased until the pressing member 132 contacts the display substrate 101, and the step m may be decreased after the pressing member 132 contacts the display substrate 101. As a result, the control unit 14 can shorten the tact time and perform highly accurate substrate bonding.

  Further, the pressing member 132 may be configured by an elastic body such as a spring and an air cylinder set so as not to press the display substrate 101 beyond a predetermined pressure.

  In this embodiment, the displacement detection sensor 138 detects the displacement up to the base 136 of the voice coil motor 131 with reference to the pedestal 12 provided below the voice coil motor 131. However, it is also possible to attach the displacement detection sensor 138 to the upper part of the voice coil motor 131 and cause the displacement detection sensor 138 to detect the displacement with respect to the display substrate 101 so that the control unit 14 controls the voice coil motor 131.

  In the present embodiment, the mode in which the ultraviolet curable resin is applied to the cover substrate 121 has been described. However, the ultraviolet curable resin may be applied to the display substrate 101 on the polarizing plate 104 side.

  DESCRIPTION OF SYMBOLS 1 ... Board | substrate bonding apparatus, 2 ... Fixed side vacuum chamber, 3 ... Movable side vacuum chamber, 13 ... LCM support, 14 ... Control part, 101 ... Display board, 121 ... Cover board, 132 ... Press member, 138 ... Displacement detection Sensor, 141 ... CPU

Claims (8)

In a substrate laminating apparatus for laminating a display substrate and a cover substrate under a vacuum via an adhesive member,
A vacuum vessel;
A substrate holding part disposed in the vacuum vessel and holding the cover substrate or the display substrate;
A substrate support part disposed in the vacuum vessel and supporting the display substrate or the cover substrate;
A pressing member that is provided in the vacuum container and presses at least an outer edge portion of the display substrate at a bonding position where the cover substrate and the display substrate are bonded to each other; and the display substrate approaches the cover substrate An auxiliary pressing unit having a pressing member driving unit that moves the pressing member, and a displacement detection unit that detects a displacement of the pressing member driving unit and outputs a detection result;
A control unit that controls a current value by which the pressing member driving unit displaces the pressing member based on a displacement change amount of the pressing member driving unit obtained from a detection result of the displacement detecting unit. apparatus. The control unit adds a predetermined amount of current value to the current value instructed to the auxiliary pressing unit until a change amount of displacement of the pressing member driving unit becomes smaller than a predetermined change amount determination value, The board | substrate bonding apparatus of Claim 1 which continues the process which adds the said predetermined amount of electric current value to the said electric current value instruct | indicated to the said auxiliary | assistant press part by the frequency | count within the frequency | count of the press control which a member presses the outer edge part of the said display board. . The control unit adds a predetermined amount of current value to the current value instructed to the auxiliary pressing unit until a predetermined current set value is exceeded, and the pressing member is driven each time the current value exceeds the current set value. The amount of change in the displacement of the portion is obtained, and the auxiliary pressing portion is operated within the number of times of pressing control that the pressing member presses the outer edge portion of the display substrate until the amount of change becomes smaller than a predetermined amount of change determination value. The board | substrate bonding apparatus of Claim 1. The process which adds the said predetermined amount of electric current value to the said electric current value instruct | indicated is continued. The substrate bonding apparatus according to claim 2, wherein the control unit increases the current value instructed to the auxiliary pressing unit as a change amount of displacement of the pressing member driving unit decreases. The pressing member driving unit is a voice coil motor that moves the pressing member in accordance with the amount of current and the direction of current supplied from the control unit via a servo driver,
The board | substrate bonding apparatus of Claim 4. The said displacement detection part detects the displacement of the base in which the said voice coil motor is installed as a displacement of the said pressing member drive part. The said auxiliary | assistant press part is each arrange | positioned in the position corresponding to the four corners of the said display substrate hold | maintained at the said board | substrate holding part, or supported by the said board | substrate support part. Substrate bonding equipment. The auxiliary pressing part is respectively held at a position corresponding to a pair of corners located diagonally among the four corners of the display substrate held by the substrate holding part or supported by the substrate support part. The substrate bonding apparatus according to any one of claims 1 to 5. In the substrate bonding method in which the display substrate and the cover substrate are bonded together under a vacuum via an adhesive member,
A substrate holding unit disposed in a vacuum vessel holds the cover substrate or the display substrate;
A substrate support portion disposed in the vacuum vessel supports the display substrate or the cover substrate;
A step of supporting at least an outer edge portion of the display substrate at a bonding position where the pressing member included in the auxiliary pressing portion disposed in the vacuum vessel bonds the cover substrate and the display substrate;
A step of moving the pressing member in a direction in which the display substrate is close to the cover substrate by a pressing member driving unit included in the auxiliary pressing unit;
A step of detecting a displacement of the pressing member driving unit by the displacement detecting unit of the auxiliary pressing unit and outputting a detection result;
And a step of controlling a current value by which the pressing member driving unit displaces the pressing member based on a change amount of displacement of the pressing member driving unit obtained from a detection result of the displacement detecting unit. .

Images