JP2014116403A5 - - Google Patents

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JP2014116403A5
JP2014116403A5 JP2012268340A JP2012268340A JP2014116403A5 JP 2014116403 A5 JP2014116403 A5 JP 2014116403A5 JP 2012268340 A JP2012268340 A JP 2012268340A JP 2012268340 A JP2012268340 A JP 2012268340A JP 2014116403 A5 JP2014116403 A5 JP 2014116403A5
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Japan
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detection
mark
reference member
exposure
projection optical
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JP2012268340A
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Japanese (ja)
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JP2014116403A (ja
JP6102230B2 (ja
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JP2012268340A 2012-12-07 2012-12-07 露光装置及び露光方法、並びにデバイス製造方法 Active JP6102230B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012268340A JP6102230B2 (ja) 2012-12-07 2012-12-07 露光装置及び露光方法、並びにデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012268340A JP6102230B2 (ja) 2012-12-07 2012-12-07 露光装置及び露光方法、並びにデバイス製造方法

Publications (3)

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JP2014116403A JP2014116403A (ja) 2014-06-26
JP2014116403A5 true JP2014116403A5 (cg-RX-API-DMAC7.html) 2015-12-03
JP6102230B2 JP6102230B2 (ja) 2017-03-29

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JP2012268340A Active JP6102230B2 (ja) 2012-12-07 2012-12-07 露光装置及び露光方法、並びにデバイス製造方法

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JP (1) JP6102230B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111965948B (zh) * 2015-09-30 2023-06-27 株式会社尼康 曝光装置、曝光方法、平面显示器的制造方法、及元件制造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1068604A (ja) * 1996-08-27 1998-03-10 Canon Inc 光干渉計測方法およびそれを用いた光干渉計測装置
JP4746987B2 (ja) * 2002-12-05 2011-08-10 ケーエルエー−テンカー コーポレイション 散乱計測を用いてオーバレイ誤差を検出する装置および方法
CN101385121B (zh) * 2006-02-21 2011-04-20 株式会社尼康 图案形成装置及图案形成方法、移动体驱动系统及移动体驱动方法、曝光装置及曝光方法、以及组件制造方法
SG170010A1 (en) * 2006-02-21 2011-04-29 Nikon Corp Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure appararus and method, and device manufacturing method
EP2071613B1 (en) * 2006-09-01 2019-01-23 Nikon Corporation Exposure method and apparatus
SG168488A1 (en) * 2009-07-16 2011-02-28 Asml Netherlands Bv Position calibration of alignment heads in a multi-head alignment system
NL2005092A (en) * 2009-07-16 2011-01-18 Asml Netherlands Bv Object alignment measurement method and apparatus.

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