JP2014115189A - テラヘルツ波計測装置 - Google Patents
テラヘルツ波計測装置 Download PDFInfo
- Publication number
- JP2014115189A JP2014115189A JP2012269473A JP2012269473A JP2014115189A JP 2014115189 A JP2014115189 A JP 2014115189A JP 2012269473 A JP2012269473 A JP 2012269473A JP 2012269473 A JP2012269473 A JP 2012269473A JP 2014115189 A JP2014115189 A JP 2014115189A
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- terahertz wave
- laser light
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- tolerance
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- 238000005259 measurement Methods 0.000 title claims abstract description 65
- 238000001514 detection method Methods 0.000 claims abstract description 131
- 238000006073 displacement reaction Methods 0.000 claims abstract description 42
- 230000003287 optical effect Effects 0.000 claims description 127
- 230000007423 decrease Effects 0.000 claims description 14
- 230000006866 deterioration Effects 0.000 claims description 7
- 238000004458 analytical method Methods 0.000 abstract description 42
- 239000000523 sample Substances 0.000 description 124
- 239000000758 substrate Substances 0.000 description 20
- 230000000694 effects Effects 0.000 description 14
- 238000001328 terahertz time-domain spectroscopy Methods 0.000 description 11
- 230000001678 irradiating effect Effects 0.000 description 10
- 238000001228 spectrum Methods 0.000 description 7
- 230000005284 excitation Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000003111 delayed effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000005404 monopole Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000001443 photoexcitation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
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- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012269473A JP2014115189A (ja) | 2012-12-10 | 2012-12-10 | テラヘルツ波計測装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012269473A JP2014115189A (ja) | 2012-12-10 | 2012-12-10 | テラヘルツ波計測装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014115189A true JP2014115189A (ja) | 2014-06-26 |
| JP2014115189A5 JP2014115189A5 (enExample) | 2015-12-17 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012269473A Pending JP2014115189A (ja) | 2012-12-10 | 2012-12-10 | テラヘルツ波計測装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2014115189A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101740020B1 (ko) | 2015-11-30 | 2017-05-26 | 목원대학교 산학협력단 | 테라헤르츠파를 이용한 절연유 열화도 측정 시스템 |
| CN116519626A (zh) * | 2023-06-25 | 2023-08-01 | 中国工程物理研究院流体物理研究所 | 用于太赫兹光谱和成像测量系统的信号检测电路及系统 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0377029A (ja) * | 1989-08-21 | 1991-04-02 | Fuji Electric Co Ltd | 二光束干渉計 |
| JPH04296641A (ja) * | 1991-03-26 | 1992-10-21 | Hochiki Corp | 光線式感知器 |
| JP2008203246A (ja) * | 2007-01-26 | 2008-09-04 | Topcon Corp | 光画像計測装置 |
| JP2012002798A (ja) * | 2010-05-18 | 2012-01-05 | Canon Inc | テラヘルツ波の測定装置及び測定方法 |
| JP2012145383A (ja) * | 2011-01-08 | 2012-08-02 | Canon Inc | テラヘルツ波装置及びその動作方法 |
-
2012
- 2012-12-10 JP JP2012269473A patent/JP2014115189A/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0377029A (ja) * | 1989-08-21 | 1991-04-02 | Fuji Electric Co Ltd | 二光束干渉計 |
| JPH04296641A (ja) * | 1991-03-26 | 1992-10-21 | Hochiki Corp | 光線式感知器 |
| JP2008203246A (ja) * | 2007-01-26 | 2008-09-04 | Topcon Corp | 光画像計測装置 |
| JP2012002798A (ja) * | 2010-05-18 | 2012-01-05 | Canon Inc | テラヘルツ波の測定装置及び測定方法 |
| JP2012145383A (ja) * | 2011-01-08 | 2012-08-02 | Canon Inc | テラヘルツ波装置及びその動作方法 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101740020B1 (ko) | 2015-11-30 | 2017-05-26 | 목원대학교 산학협력단 | 테라헤르츠파를 이용한 절연유 열화도 측정 시스템 |
| CN116519626A (zh) * | 2023-06-25 | 2023-08-01 | 中国工程物理研究院流体物理研究所 | 用于太赫兹光谱和成像测量系统的信号检测电路及系统 |
| CN116519626B (zh) * | 2023-06-25 | 2023-09-19 | 中国工程物理研究院流体物理研究所 | 用于太赫兹光谱和成像测量系统的信号检测电路及系统 |
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