JP2014082368A - ボンディングワイヤ - Google Patents
ボンディングワイヤ Download PDFInfo
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- JP2014082368A JP2014082368A JP2012229868A JP2012229868A JP2014082368A JP 2014082368 A JP2014082368 A JP 2014082368A JP 2012229868 A JP2012229868 A JP 2012229868A JP 2012229868 A JP2012229868 A JP 2012229868A JP 2014082368 A JP2014082368 A JP 2014082368A
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Abstract
【解決手段】Al又はAl合金からなる芯線と、当該芯線を被覆する被覆層Aとを有するボンディングワイヤであって、前記被覆層Aを構成する金属はRh、Pd、Cu又はそれらの合金からなることを特徴とするボンディングワイヤ。これら金属を用いた被覆層A形成により、安価に製造でき、ダイスを用いた伸線時にワイヤ削れによる摩耗粉を発生させることがない。被覆層Aの外側にさらに被覆層Bを有し、被覆層Bを構成する金属が、Au、Ag、Cu又はそれらの合金からなる。被覆層Bを有することにより、ダイス摩耗を防止しワイヤボンディング時の接合強度を向上させる。
【選択図】なし
Description
(1)Al又はAl合金からなる芯線と、当該芯線を被覆する被覆層Aとを有するボンディングワイヤであって、前記被覆層Aを構成する金属はRh、Pd、Cu又はそれらの合金からなることを特徴とするボンディングワイヤ。
(2)前記被覆層Aの外側にさらに被覆層Bを有し、被覆層Bを構成する金属が、Au、Ag、Cu又はそれらの合金からなることを特徴とする上記(1)に記載のボンディングワイヤ。
(3)線径が50μm以上であることを特徴とする上記(1)又は(2)に記載のボンディングワイヤ。
Claims (3)
- Al又はAl合金からなる芯線と、当該芯線を被覆する被覆層Aとを有するボンディングワイヤであって、前記被覆層Aを構成する金属はRh、Pd、Cu又はそれらの合金からなることを特徴とするボンディングワイヤ。
- 前記被覆層Aの外側にさらに被覆層Bを有し、被覆層Bを構成する金属が、Au、Ag、Cu又はそれらの合金からなることを特徴とする請求項1に記載のボンディングワイヤ。
- 線径が50μm以上であることを特徴とする請求項1又は2に記載のボンディングワイヤ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2012229868A JP2014082368A (ja) | 2012-10-17 | 2012-10-17 | ボンディングワイヤ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012229868A JP2014082368A (ja) | 2012-10-17 | 2012-10-17 | ボンディングワイヤ |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017073574A (ja) * | 2017-01-25 | 2017-04-13 | 日鉄住金マイクロメタル株式会社 | ボンディングワイヤ |
CN111326491A (zh) * | 2020-02-13 | 2020-06-23 | 河南理工大学 | 一种镀金键合铝线及其制备方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6097655A (ja) * | 1983-11-02 | 1985-05-31 | Hitachi Ltd | ボンデイング用ワイヤ |
JPS61160958A (ja) * | 1985-01-09 | 1986-07-21 | Toshiba Corp | 半導体素子用ボンデイング線 |
JPH01255233A (ja) * | 1988-04-05 | 1989-10-12 | Kobe Steel Ltd | 複合ボンディングワイヤ |
JPH01255236A (ja) * | 1988-04-05 | 1989-10-12 | Kobe Steel Ltd | 複合ボンディングワイヤ |
JPH0260240U (ja) * | 1988-10-26 | 1990-05-02 | ||
JPH08236565A (ja) * | 1995-01-10 | 1996-09-13 | Texas Instr Inc <Ti> | メッキしたボンディングワイヤ及びそれを用いて形成した相互接続 |
JP2007123597A (ja) * | 2005-10-28 | 2007-05-17 | Nippon Steel Materials Co Ltd | 半導体装置用ボンディングワイヤ |
JP2009531870A (ja) * | 2006-03-27 | 2009-09-03 | フェアチャイルド・セミコンダクター・コーポレーション | 金属コーティングワイヤを用いた半導体デバイス及び電気部品の製造 |
-
2012
- 2012-10-17 JP JP2012229868A patent/JP2014082368A/ja active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6097655A (ja) * | 1983-11-02 | 1985-05-31 | Hitachi Ltd | ボンデイング用ワイヤ |
JPS61160958A (ja) * | 1985-01-09 | 1986-07-21 | Toshiba Corp | 半導体素子用ボンデイング線 |
JPH01255233A (ja) * | 1988-04-05 | 1989-10-12 | Kobe Steel Ltd | 複合ボンディングワイヤ |
JPH01255236A (ja) * | 1988-04-05 | 1989-10-12 | Kobe Steel Ltd | 複合ボンディングワイヤ |
JPH0260240U (ja) * | 1988-10-26 | 1990-05-02 | ||
JPH08236565A (ja) * | 1995-01-10 | 1996-09-13 | Texas Instr Inc <Ti> | メッキしたボンディングワイヤ及びそれを用いて形成した相互接続 |
JP2007123597A (ja) * | 2005-10-28 | 2007-05-17 | Nippon Steel Materials Co Ltd | 半導体装置用ボンディングワイヤ |
JP2009531870A (ja) * | 2006-03-27 | 2009-09-03 | フェアチャイルド・セミコンダクター・コーポレーション | 金属コーティングワイヤを用いた半導体デバイス及び電気部品の製造 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017073574A (ja) * | 2017-01-25 | 2017-04-13 | 日鉄住金マイクロメタル株式会社 | ボンディングワイヤ |
CN111326491A (zh) * | 2020-02-13 | 2020-06-23 | 河南理工大学 | 一种镀金键合铝线及其制备方法 |
CN111326491B (zh) * | 2020-02-13 | 2022-11-25 | 河南理工大学 | 一种镀金键合铝线及其制备方法 |
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