JP2014078656A - Housing cassette - Google Patents

Abstract

PROBLEM TO BE SOLVED: To facilitate handling even in a case where a plurality of tabular objects are housed in a housing cassette, in which the tabular objects are housed, and the casette becomes heavy.SOLUTION: A housing cassette 1 for housing a plurality of tabular objects includes: facing side plates 10; a ceiling plate 11 and a base plate 12 which couple the side plates 10; a plurality of storage racks 100 which are formed on the side plates and store a tabular object; and an opening 14 becoming a carry-in/out opening when the tabular object is put int/out. Wheels 15 are arranged at lower parts of the side plates 10 or outside the base plate 12, and the housing cassette 1 can move with rotation of the wheels 15. Since self-traveling is possible in the housing cassette 1 by arranging the wheels at the lower parts of the side plates 10 or outside the base plate 12, movement of the housing cassette 1 becomes smooth between a carrier and a processing device and handling becomes easy even if a workpiece is stored and weight becomes heavy.

Description

  The present invention relates to a storage cassette that stores a plate-like object.

  In the manufacturing process of a semiconductor device, a device for each integrated circuit is formed by dicing which cuts and separates a plate-like object in which a large number of integrated circuits are formed. A plate-like object to be processed is fixed to an annular frame via an adhesive tape, is accommodated in a transporting accommodation cassette, and is carried into a cutting device.

  This housing cassette generally has a configuration in which a pair of side plates having a plurality of horizontal grooves are opposed to each other, and a plurality of frames are inserted by inserting a frame along each groove from an insertion port on one end side of the groove. It is comprised so that the plate-shaped object of a sheet can be accommodated (for example, refer patent document 1).

  With respect to the storage cassette, the operator stores the plate-like object and places the storage cassette containing the plate-like object on the cassette stand of the processing apparatus, so that the plate-like object is formed by the function of the processing apparatus. It is taken out from the storage cassette and the plate-like object is processed.

JP-A-8-80989

  However, some workpieces are heavy due to their large size, thick thickness, weight of material, etc. When a plurality of these workpieces are stored in the storage cassette, the weight of the storage cassette becomes very heavy. Therefore, handling by the worker becomes very difficult, and there is also a risk of harming the health of the worker.

  The present invention has been made in view of the above points, and an object of the present invention is to enable easy handling of a storage cassette in which a workpiece is stored and becomes heavy.

  The present invention includes opposing side plates, a ceiling plate and a bottom plate that connect the side plates, a storage shelf that is formed in plural on the side plates and accommodates plate-like objects, and an opening that serves as a carry-in / out port when taking in and out the plate-like objects, And a storage cassette for storing a plurality of plate-like objects, wherein a wheel is disposed at the lower part of the side plate or outside the bottom plate and is movable by rotation of the wheel.

  Since the accommodation cassette according to the present invention can be self-propelled by disposing wheels on the lower part of the side plate or outside the bottom plate, even when the work piece is accommodated and the weight becomes heavy, the carriage and the processing device The storage cassette moves smoothly between the cassette mounting table and the handling is easy.

It is a perspective view which shows the example of a storage cassette and a to-be-processed object. It is a perspective view which shows the example of the accommodation cassette mounted in the trolley | bogie, and a processing apparatus. It is a side view which shows the state in which the trolley | bogie with which the accommodation cassette was mounted is located ahead of a processing apparatus. It is a side view which shows the state which moves an accommodation cassette to the cassette mounting means of a processing apparatus from a trolley | bogie. It is a side view which shows the state which mounted the accommodation cassette in the cassette mounting means of a processing apparatus.

  A storage cassette 1 shown in FIG. 1 is an example of an embodiment of the present invention. The storage cassette 1 includes two side plates 10 facing the side portions, and one ceiling is formed at the upper end portions of the two side plates 10. The plate 11 is connected, and one bottom plate 12 is connected to the lower ends of the two side plates 10.

  On the rear side (front side in FIG. 1) of the storage cassette 1, a back stopper 13 is formed which is formed of a plate member connected to the rear portions of the two side plates 10, the ceiling plate 11, and the bottom plate 12. On the other hand, the front side (the back side in FIG. 1) of the storage cassette 1 is configured to open at the opening 14, and the storage cassette 1 is formed in a box shape opened at the opening 14.

  Each of the two side plates 10 is formed with a plurality of storage shelves 100 for storing plate-like objects on the opposing inner surfaces. The plurality of storage shelves 100 are all formed in parallel, and the storage shelves 100 facing each other of the two side plates 10 are formed at the same height position.

  Two wheels 15 are disposed at the lower part of each side plate 10, and the accommodating cassette 1 has four wheels 15 at the lower part as a whole. The wheels 15 may be disposed outside the bottom plate 12. The housing cassette 1 can be moved in the horizontal direction by the rotation of the wheels 15. In addition, the ceiling plate 11 is formed with a grip 110 for an operator to hold when the storage cassette 1 is moved.

  As a workpiece to be stored in the storage cassette 1, for example, there is a semiconductor wafer W shown in FIG. On the surface W1 of the semiconductor wafer W, a device D is formed by being partitioned by a cutting line S. As for the semiconductor wafer W, the back surface W2 is stuck to the adhesive tape T, and the annular frame F is stuck to the outer periphery of the adhesive tape T, so that the semiconductor wafer W is attached to the frame F via the adhesive tape T. It is in a state supported by. The semiconductor wafer W supported by the frame F in this way is carried into or out of the housing cassette 1 through the opening 14, and the opening 14 serves as a carry-in / out port for the semiconductor wafer W.

  As shown in FIG. 2, the storage cassette 1 is placed on the carriage 2 and conveyed to the processing device 3. The carriage 2 includes a placing table 20 on which the accommodation cassette 1 is placed, a wheel 21 disposed at a lower portion of the placing table 20, and a gripping portion 22 that is gripped when an operator moves the carriage 2. I have.

  The processing apparatus 3 shown in FIG. 2 is a cutting apparatus that cuts a workpiece, and includes a cassette mounting means 30 for mounting the storage cassette 1. On the far side in the Y-axis direction of the cassette mounting means 30, a loading / unloading port 31 is formed which serves as a path for unillustrated loading / unloading means for loading and unloading the workpiece with respect to the storage cassette 1. The back side in the Y-axis direction of the carry-in / out entrance 31 is an attachment / detachment region 32 in which the workpiece is attached to and detached from the holding table that holds the workpiece.

  The back side in the X-axis direction of the attachment / detachment region 32 is a processing region 33 where actual cutting is performed. Further, the back side in the Y-axis direction of the attachment / detachment region 32 is a cleaning region 34 for cleaning the workpiece after cutting.

  As shown in FIGS. 2 and 3, the storage cassette 1 in which the workpiece before processing is stored is mounted on the mounting table 20 of the carriage 2. The carriage 2 shown in FIG. 3 is provided with a stopper 23 that can be moved up and down with respect to the mounting table 20. By projecting the stopper 23 upward, it is possible to prevent the housing cassette 1 from being displaced and dropped. In the accommodation cassette 1 shown in FIGS. 3 to 5, wheels 15 are disposed outside the bottom plate 12.

  When cutting the workpiece stored in the storage cassette 1 using the processing device 3, first, as shown in FIG. 4, the carriage 2 on which the storage cassette 1 is mounted is placed on the cassette of the processing device 3. Move to the front of the means 30. Then, after the stopper 23 is lowered, the accommodation cassette 1 is moved onto the cassette mounting means 30 by pushing the accommodation cassette 1 toward the processing device 3.

  At this time, since the lower part of the storage cassette 1 is provided with the wheels 15, the movement can be performed smoothly and easily by the self-running of the storage cassette 1. In particular, when the size of the workpiece W shown in FIG. 1 is large, when the thickness of the workpiece W is thick, or when the material of the workpiece W is heavy, a plurality of such workpieces are accommodated. Since the storage cassette 1 becomes very heavy and it becomes difficult for the operator to handle the storage cassette 1, by rotating the wheel 15 and moving the storage cassette 1, the burden on the operator is greatly reduced and health is improved. There is no risk of harm.

  As shown in FIG. 5, in the case where stoppers 35 and 36 that can be raised and lowered in the vertical direction are provided before and after the cassette placing means 30 of the processing apparatus 3, the storage cassette 1 is placed on the cassette placing means 30. After being pushed, the stoppers 35 and 36 are protruded upward, and are fixed so that the accommodation cassette 1 is not displaced.

  When the accommodation cassette 1 is placed on the cassette placing means 30 in this way, the workpiece W is unloaded from the opening 14 and conveyed to the machining area 33, where the machining is performed, and then the cleaning area 34 is loaded. The workpiece is conveyed and cleaned.

  The cleaned workpiece is stored in the storage cassette 1 again. When all the workpieces are processed and stored in the storage cassette 1, the storage cassette 1 is moved to the mounting table 20 of the carriage 2 and is transported to the next step by the carriage 2. Even when the storage cassette 1 is moved to the mounting table 20 of the carriage 2, the movement of the storage cassette 1 can be performed smoothly and easily by the rotation of the wheel 15 provided at the lower portion of the storage cassette 1.

1: storage cassette 10: side plate 100: storage shelf 11: ceiling plate 110: gripping portion 12: bottom plate 13: back stop portion 14: opening portion 15: wheel 2: carriage 20: mounting table 21: wheel 22: gripping portion 3: Processing device 30: Cassette mounting means 31: Loading / unloading port 32: Attachment / detachment region 33: Processing region 34: Cleaning region 35, 36: Stopper W: Semiconductor wafer (plate-like object) W1: Front surface W2: Back surface D: Device S: Cutting Line T: Adhesive tape F: Frame

Claims (1)

At least a facing side plate, a ceiling plate and a bottom plate that connect the side plates, a storage shelf that is formed in plural on the side plate and accommodates a plate-like object, and an opening that serves as a carry-in / out port for loading and unloading the plate-like object A storage cassette for storing a plurality of plate-like objects,
An accommodation cassette, wherein wheels are disposed at a lower part of the side plate or outside the bottom plate and are movable by rotation of the wheels.

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