JP2014075537A - Semiconductor device - Google Patents

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JP2014075537A
JP2014075537A JP2012223268A JP2012223268A JP2014075537A JP 2014075537 A JP2014075537 A JP 2014075537A JP 2012223268 A JP2012223268 A JP 2012223268A JP 2012223268 A JP2012223268 A JP 2012223268A JP 2014075537 A JP2014075537 A JP 2014075537A
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grease
semiconductor
ridges
semiconductor device
wide
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JP5974797B2 (en
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Koji Nakanishi
浩二 中西
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Toyota Motor Corp
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Toyota Motor Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

PROBLEM TO BE SOLVED: To provide a semiconductor device formed by alternately arranging two or more semiconductor modules and cooling units via grease, and configured to have excellent assemblability between members, to effectively prevent drop of the grease, and to ensure long-term heat dissipation performance.SOLUTION: A semiconductor device 100 is formed by alternately arranging two or more semiconductor modules 10 and cooling units 20 having wide-width surfaces standing and facing each other, via heat-dissipating grease 30. When the wide-width surfaces 2a of the two facing semiconductor modules 10 are standing, protrusions 4B to be engaged with each other are provided in lower positions of the wide-width surfaces 2a, at least. Upper and lower protrusions of the adjacent semiconductor modules 10 are fixed to form a fixation part 6. On the fixation part 6, the cooling unit 20 is arranged via the grease 30.

Description

本発明は、2以上の半導体モジュールと2以上の冷却器が交互に配設されてなる半導体装置に関するものである。   The present invention relates to a semiconductor device in which two or more semiconductor modules and two or more coolers are alternately arranged.

IGBT(Insulated Gate Bipolar Transistor)等の半導体素子が封止樹脂体内に収容されて薄い半導体モジュール(パワーカードと称することもできる)を構成し、この半導体モジュールの有する左右もしくは上下の広幅面をそれぞれに固有の冷却器で冷却可能とした構成の半導体装置が一般に適用されている。半導体装置の構成は多岐に亘るが、半導体装置の搭載スペースの狭小化や高出力化に伴う発熱量の増大に対し、パワーカードを具備してその両面を冷却可能な構成の半導体装置は現在注目されている構造の半導体装置の一つである。   A semiconductor element such as an IGBT (Insulated Gate Bipolar Transistor) is housed in a sealing resin body to form a thin semiconductor module (also called a power card), and the left and right or upper and lower wide surfaces of the semiconductor module are respectively provided. A semiconductor device having a configuration that can be cooled by a unique cooler is generally used. Although there are a wide variety of semiconductor device configurations, a semiconductor device that is equipped with a power card and can cool both sides of the heat generation accompanying the narrowing of the mounting space of the semiconductor device and the increase in output is currently attracting attention. This is one of the semiconductor devices having the structure described above.

ここで、上記構成の従来の半導体装置を図4を参照して説明する。なお、図4aは、半導体モジュール(パワーカード)の斜視図であり、図4bは、2以上のパワーカードと2以上の冷却器を交互に配設して構成された半導体装置の側面図である。   Here, a conventional semiconductor device having the above configuration will be described with reference to FIG. 4A is a perspective view of a semiconductor module (power card), and FIG. 4B is a side view of a semiconductor device configured by alternately arranging two or more power cards and two or more coolers. .

図4aで示すように、半導体素子Sが封止樹脂体Pで封止されて全体が平面状をなし、半導体素子Sと不図示のボンディングワイヤで繋がれて外部へ接続される端子Tが突出してパワーカードPCが構成されるのが一般的である。このパワーカードPCの広幅面Wをたとえば鉛直方向(Z方向)に立設させ、2以上のパワーカードPCが立設した姿勢で、2つのパワーカードPC間にグリスGを介してやはり平面状でパワーカードPCよりも面積の小さな冷却器Cが配設されることで、図4bで示すような構成の半導体装置Dが構成される。   As shown in FIG. 4a, the semiconductor element S is sealed with a sealing resin body P to form a flat surface, and a terminal T connected to the semiconductor element S by a bonding wire (not shown) is projected. In general, a power card PC is configured. The wide surface W of the power card PC is erected in, for example, the vertical direction (Z direction), and in a posture in which two or more power cards PC are erected, it is also planar via the grease G between the two power card PCs. By disposing the cooler C having an area smaller than that of the power card PC, the semiconductor device D configured as shown in FIG. 4B is configured.

このような構成の半導体装置Dでは、その供用にともなってグリスGが環境劣化したり、たとえばこの半導体装置Dが車両等に搭載される場合には車両の繰返し振動がグリスGに作用し、図4bで示すようにグリスGが垂れ落ちてしまい(X方向)、パワーカードPCと冷却器Cの間のグリスGが減少してパワーカードPCからグリスGを介して冷却器Cへ放熱される放熱性が悪化することが懸念される。   In the semiconductor device D having such a configuration, the environment of the grease G deteriorates as the semiconductor device D is used, or when the semiconductor device D is mounted on a vehicle or the like, repeated vibration of the vehicle acts on the grease G. As shown by 4b, the grease G hangs down (X direction), the grease G between the power card PC and the cooler C decreases, and heat is dissipated from the power card PC to the cooler C via the grease G. There is concern about the deterioration of sex.

そこで、図示する構成の半導体装置に関し、その供用にともなってグリスが垂れ落ち、半導体装置の放熱性が悪化するのを抑止することのできる構成の半導体装置の開発が急がれている。   Therefore, with respect to the semiconductor device having the configuration shown in the drawing, development of a semiconductor device having a configuration capable of preventing the grease from dripping with the service and preventing the heat dissipation of the semiconductor device from deteriorating has been urgently developed.

ここで、特許文献1には、1つの半導体モジュールを上下2つの熱吸収部材にて挟み込み、半導体モジュールと熱吸収部材の間に熱伝導性のグリスが介在した半導体モジュール実装構造が開示されている。   Here, Patent Document 1 discloses a semiconductor module mounting structure in which one semiconductor module is sandwiched between two upper and lower heat absorbing members, and thermally conductive grease is interposed between the semiconductor module and the heat absorbing member. .

特許文献1で開示される実装構造には多数の実施例が示されているが、いずれの実施例も1つの半導体モジュールを上下2つの熱吸収部材にて挟み込んだ構成であり、グリスの漏れを防止する構造を半導体モジュールと熱吸収部材の双方によって形成していることから、構造が複雑となり、組み付け手間が増加し易い。また、半導体モジュールと熱吸収部材がともに2以上の多層積層構造(図4で示す水平方向の多層配設構造を90度回転させた形態)となる場合に特許文献1で開示の構成を適用しようとすると、半導体モジュールと熱吸収部材の双方で相互の位置決めやグリスの漏れ防止構造を形成していることから各部材同士の組み付けに時間を要することはより一層顕著となる。したがって、特許文献1で開示の実装構造を適用して図4で示す従来の半導体装置の有する上記課題を解決しようとしても、効果的な課題解決には至らない。   Although many examples are shown in the mounting structure disclosed in Patent Document 1, each example has a configuration in which one semiconductor module is sandwiched between two upper and lower heat absorbing members, and leakage of grease is prevented. Since the structure to be prevented is formed by both the semiconductor module and the heat absorbing member, the structure becomes complicated and the assembly work is likely to increase. Further, when both the semiconductor module and the heat absorbing member have a multilayer structure of two or more (a form in which the horizontal multilayer structure shown in FIG. 4 is rotated by 90 degrees), the configuration disclosed in Patent Document 1 will be applied. Then, since both the semiconductor module and the heat absorbing member form a mutual positioning and grease leakage prevention structure, it takes much more time to assemble each member. Therefore, applying the mounting structure disclosed in Patent Document 1 to solve the above-described problem of the conventional semiconductor device shown in FIG. 4 does not lead to an effective solution.

特開2012−4358号公報JP 2012-4358 A

本発明は上記する問題に鑑みてなされたものであり、2以上の半導体モジュールと冷却器がグリスを介して交互に配設されてなる半導体装置に関し、良好な部材同士の組み付け性を有し、グリスの垂れ落ちが効果的に抑止されて長期に亘る放熱性を保証することのできる半導体装置を提供することを目的とする。   The present invention has been made in view of the problems described above, and relates to a semiconductor device in which two or more semiconductor modules and a cooler are alternately arranged via grease, and has a good assembly property between members. An object of the present invention is to provide a semiconductor device in which dripping of grease is effectively suppressed and heat dissipation over a long period can be guaranteed.

前記目的を達成すべく、本発明による半導体装置は、2以上の半導体モジュールと冷却器がそれぞれの広幅面を立設した姿勢で対向し、放熱性のグリスを介して交互に配設されてなる半導体装置であって、半導体モジュールの広幅面の面積は冷却体の広幅面の面積よりも大きくなっており、対向する2つの半導体モジュールの広幅面が立設した姿勢において、一方の広幅面の少なくとも下の位置と他方の広幅面の対応する少なくとも下の位置には、ともに係合する突条が設けてある、もしくは、一方の少なくとも下の位置には突条が設けてあって他方にはこの突条に係合する凹条が設けてあり、隣接する半導体モジュールのそれぞれの少なくとも下の位置の突条同士が固定され、もしくは下の位置の突条と凹条が固定されて固定部が形成され、該固定部の上にグリスを介して冷却器が配設されているものである。   In order to achieve the above object, a semiconductor device according to the present invention has two or more semiconductor modules and a cooler facing each other in a posture in which their respective wide surfaces are erected, and are alternately arranged via heat-dissipating grease. In the semiconductor device, the area of the wide surface of the semiconductor module is larger than the area of the wide surface of the cooling body, and in a posture in which the wide surfaces of the two opposing semiconductor modules are erected, at least one of the wide surfaces The lower position and at least the lower position corresponding to the other wide surface are provided with protrusions that engage with each other, or at least one lower position is provided with protrusions, and the other has this protrusion. A groove that engages with the protrusion is provided, and at least the lower protrusions of the adjacent semiconductor modules are fixed to each other, or the protrusion and the concave protrusion at the lower position are fixed to form a fixing portion. Is In which the cooler through the grease onto the fixed portion is disposed.

本発明の半導体装置は、広幅面を有するパワーカードからなる2以上の半導体モジュールと冷却器が、それぞれの広幅面を立設してグリスを介して交互に配設されたものにおいて、グリスの漏れ防止措置を対向する半導体モジュールの広幅面に設けておくものであり、半導体モジュールにのみグリスの漏れ防止措置を講じておくことで、部材の加工性や組み付け性を良好にしながら、グリスの漏れ防止性を保証することができるものである。   According to the semiconductor device of the present invention, in the case where two or more semiconductor modules each made of a power card having a wide surface and a cooler are provided with the respective wide surfaces standing and alternately arranged via grease, leakage of grease Preventive measures are provided on the wide surface of the opposing semiconductor module. Preventing grease from leaking while improving the workability and assembly of components by taking measures to prevent grease leakage only in the semiconductor module. It is possible to guarantee the sex.

2以上の半導体モジュールと冷却器が交互に配設されることから、たとえば2基の半導体モジュールがそれぞれの広幅面を鉛直方向に立設し、対向する2つの半導体モジュール間に形成された1箇所の隙間に1基の冷却器がグリスを冷却器の広幅面に塗布等された姿勢で介在する実施の形態や、10基の半導体モジュールがそれぞれの広幅面を鉛直方向に立設し、対向する2つの半導体モジュール間に形成された計9箇所の隙間にそれぞれ、冷却器がグリスを冷却器の広幅面に塗布等された姿勢で介在する実施の形態などを挙げることができる。   Since two or more semiconductor modules and coolers are alternately arranged, for example, two semiconductor modules are provided in a vertical direction with their respective wide surfaces standing vertically between two opposing semiconductor modules. An embodiment in which a single cooler is interposed in a gap between the semiconductor device in a posture in which grease is applied to the wide surface of the cooler or the like, and 10 semiconductor modules are vertically opposed to each wide surface. An embodiment in which a cooler interposes grease in a posture in which grease is applied to the wide surface of the cooler, etc., can be given in a total of nine gaps formed between two semiconductor modules.

冷却器の広幅面は半導体モジュールの広幅面よりも小さく設定されており、半導体モジュールの広幅面の少なくとも下の位置に設けられた突条もしくは凹条の間に冷却器が配設できるようになっている。   The wide surface of the cooler is set to be smaller than the wide surface of the semiconductor module, so that the cooler can be disposed between the protrusions or recesses provided at least below the wide surface of the semiconductor module. ing.

ここで、「広幅面」とは、半導体モジュールや冷却器が一般に平面状の直方体形状を呈している形態において、最も面積の広い対向した面のことを意味しており、その他の4面は幅が狭く、したがって相対的に面積が小さくなっている。なお、半導体モジュールや冷却器の形状は、平面状(薄い)の直方体(六面体)のほかにも、他の角柱体や平面状の円柱体や楕円体など、多様な形状形態のものが適用可能である。   Here, the “wide surface” means an opposing surface having the widest area in the form in which the semiconductor module or the cooler generally has a planar rectangular parallelepiped shape, and the other four surfaces have a width. Is narrow, and thus the area is relatively small. In addition to flat (thin) rectangular parallelepipeds (hexahedrons), semiconductor modules and coolers can be applied in various shapes such as other prisms, planar cylinders, and ellipsoids. It is.

2以上の半導体モジュールと冷却器は、それぞれの広幅面をたとえば鉛直に立設した姿勢で横方向に配設されて相互に組み付けられ、この組み付け態様で使用(設置)される形態のほかにも、このように組み付けられた半導体装置が90度回動した姿勢、すなわち、半導体モジュールと冷却器が鉛直方向に積層した状態で使用される形態もある。   The two or more semiconductor modules and the cooler are arranged in the horizontal direction in a posture in which the respective wide surfaces are erected vertically, for example, and are assembled to each other. There is also a form in which the semiconductor device assembled in this manner is used in a posture in which the semiconductor device is rotated by 90 degrees, that is, in a state where the semiconductor module and the cooler are stacked in the vertical direction.

半導体モジュールの2つの広幅面の下の対応位置にともに突条が設けられた形態、2つの広幅面の下の対応位置のみならず上の対応位置にもともに突条が設けられた形態、2つの広幅面の上の位置に突条が設けられ、下の位置に凹条が設けられた形態などがある。たとえば、冷却器を挟んだ2つの半導体モジュールの対向するそれぞれの広幅面において、双方の広幅面から上下ともに突条が突出し、双方の突条同士が単に突き合わされて固定されたり、係合されたり、あるいは接着されることで少なくとも下の位置に固定部が形成され、この少なくとも下の位置に形成された固定部の上にグリスとともに冷却器が配設される。なお、本明細書において「固定」とは、突条同士が単に突き合わされた形態、突条同士の先端が係合したり突条と凹条が係合している形態、突条同士が接着されたり一方の広幅面の突条が他方の広幅面に接着している形態などを包含するものである。   A form in which ridges are provided at both corresponding positions under the two wide surfaces of the semiconductor module, a form in which ridges are provided at both the corresponding positions under the two wide surfaces as well as the corresponding positions above the two wide surfaces. There is a form in which a protrusion is provided at a position above one wide surface and a recess is provided at a position below. For example, on each of the opposing wide surfaces of two semiconductor modules sandwiching a cooler, protrusions protrude from the upper and lower sides of both wide surfaces, and both protrusions are simply abutted and fixed or engaged. Alternatively, a fixing portion is formed at least at a lower position by bonding, and a cooler is disposed together with grease on the fixing portion formed at least at the lower position. In this specification, “fixed” refers to a form in which the ridges are simply abutted, a form in which the ends of the ridges are engaged or a protrusion and a recess are engaged, and the protrusions are bonded to each other. Or a shape in which a protrusion on one wide surface is bonded to the other wide surface.

なお、対向する一方の広幅面の下の位置からは長い突条が張り出し、他方の広幅面の対応する下の位置にはこの突条の先端が入り込む凹条が設けられ、双方の突条と凹条が係合することで固定部が形成される形態などであってもよい。また、一方の広幅面の下の位置のみならず上の位置からも長い突条が張り出している形態においては、他方の広幅面の対応する上下の位置にこれらの突条の先端が入り込む凹条がそれぞれ設けられ、双方の突条と凹条が係合することで上下の固定部が形成される形態となる。   A long ridge protrudes from a position below one of the opposing wide surfaces, and a concave ridge into which the tip of this ridge enters is provided at a corresponding lower position on the other wide surface. The form etc. in which a fixing | fixed part is formed by a concave line engaging may be sufficient. Further, in a form in which long ridges protrude from not only the position below one of the wide surfaces but also from the position above, the ridges in which the tips of these ridges enter the corresponding upper and lower positions of the other wide surface. Are provided, and the upper and lower fixed portions are formed by engaging both the protrusions and the recesses.

いずれの形態の固定部を具備する半導体装置であっても、少なくとも下方の固定部にてグリスが下方に垂れ落ちるのを抑止することができ、長期に亘る半導体装置の放熱性を保証することができる。   Even in a semiconductor device having any type of fixing portion, grease can be prevented from dripping downward at least at the lower fixing portion, and heat dissipation of the semiconductor device can be ensured over a long period of time. it can.

なお、「固定部」の形態としては、広幅面の下の位置にのみ固定部が存在する形態、上下の位置に固定部が存在している形態のほか、上下に加えて左右にも固定部が存在し、たとえば矩形枠状の固定部にてグリスが下方のみならず左右から漏れることをも防止できる形態を挙げることができる。   In addition to the form in which the fixed part exists only at the position below the wide surface, the form in which the fixed part exists at the upper and lower positions, and the fixed part on the left and right in addition to the upper and lower. For example, there can be mentioned a mode in which grease can be prevented from leaking not only from the lower side but also from the left and right at the rectangular frame-shaped fixing part.

本発明の半導体装置によれば、グリスや冷却器を挟み込む半導体モジュールにのみ固定構造(およびグリスの漏れ防止構造)を構成する突条や凹条を設けたことから、特に組み付けられる半導体モジュールと冷却器の基数が増加した場合に、その良好な組み付け性(高い製造効率)が顕著となる。   According to the semiconductor device of the present invention, since the protrusions and recesses constituting the fixing structure (and the grease leakage prevention structure) are provided only in the semiconductor module that sandwiches the grease and the cooler, the semiconductor module and cooling that are particularly assembled. When the cardinal number of the vessel is increased, the good assemblability (high production efficiency) becomes remarkable.

以上の説明から理解できるように、本発明の半導体装置によれば、グリスや冷却器を挟み込む半導体モジュールに対して双方を固定してグリスの漏れ防止を図る固定部構成要素(突条や凹条)を設けたことにより(半導体モジュール以外の冷却器には設けない構成)、半導体モジュール間におけるグリスが付与された冷却器の位置決めを含む半導体モジュールの良好な組み付け性と高いグリスの漏れ防止性を備えた半導体装置となる。   As can be understood from the above description, according to the semiconductor device of the present invention, the fixing portion component (protrusion or recess) that prevents leakage of grease by fixing both to the semiconductor module sandwiching the grease or the cooler. ) (A configuration that is not provided in a cooler other than a semiconductor module) provides good assembly of the semiconductor module including the positioning of the cooler provided with grease between the semiconductor modules, and high leakage prevention of the grease. The semiconductor device is provided.

本発明の半導体装置を構成する半導体モジュールの実施の形態の斜視図である。It is a perspective view of an embodiment of a semiconductor module constituting a semiconductor device of the present invention. 本発明の半導体装置の実施の形態の側面図である。It is a side view of an embodiment of a semiconductor device of the present invention. (a)、(b)はともに、半導体モジュールの他の実施の形態を組み付け姿勢の側面図で示した図である。(A), (b) is the figure which showed other embodiment of the semiconductor module with the side view of the assembly | attachment attitude | position. (a)は従来の半導体装置を構成する半導体モジュールの実施の形態の斜視図であり、(b)は従来の半導体装置の側面図である。(A) is a perspective view of embodiment of the semiconductor module which comprises the conventional semiconductor device, (b) is a side view of the conventional semiconductor device.

以下、図面を参照して本発明の半導体装置の実施の形態を説明する。なお、図示例はパワーカードからなる半導体モジュールの広幅面の上下に突条もしくは凹条が設けられた形態であるが、たとえば上下の突条と連続した左右の突条をさらに備え、双方の突条同士が組み付けられて枠状の固定部を形成し、この枠状の固定部にてグリスと冷却器を完全に閉塞する形態や、広幅面の下のみに突条や凹条から形成された固定部が存在する形態など、図示例以外の固定部の形態であってもよいことは勿論のことである。   Hereinafter, embodiments of a semiconductor device of the present invention will be described with reference to the drawings. The illustrated example is a form in which ridges or recesses are provided on the upper and lower sides of the wide surface of the semiconductor module made of a power card, but for example, it further includes left and right ridges continuous with the upper and lower ridges. The strips are assembled to form a frame-shaped fixing portion, and the grease and the cooler are completely closed by this frame-shaped fixing portion, or formed from protrusions and recesses only under the wide surface. Needless to say, the fixing portion may have a form other than the illustrated example, such as a form in which the fixing part exists.

(半導体モジュールおよび半導体装置の実施の形態)
図1は本発明の半導体装置を構成する半導体モジュールの実施の形態の斜視図であり、図2は本発明の半導体装置の実施の形態の側面図である。
(Embodiments of semiconductor module and semiconductor device)
FIG. 1 is a perspective view of an embodiment of a semiconductor module constituting the semiconductor device of the present invention, and FIG. 2 is a side view of the embodiment of the semiconductor device of the present invention.

図1で示す半導体モジュール10はパワーカードとも称され、平面状の半導体素子1が扁平な直方体に成形された封止樹脂体2で封止され、外部と通じる端子3が封止樹脂体2から突出し、端子3と半導体素子1が不図示のボンディングワイヤ等で接続されてその全体が構成されている。   A semiconductor module 10 shown in FIG. 1 is also referred to as a power card. A planar semiconductor element 1 is sealed with a sealing resin body 2 formed into a flat rectangular parallelepiped, and terminals 3 communicating with the outside are connected to the sealing resin body 2. The terminal 3 and the semiconductor element 1 are connected by a bonding wire (not shown) or the like to constitute the whole.

パワーカードはたとえばHV車等のPCU(パワーコントロールユニット)に適用されるデバイスであり、その両面を図示例のように冷却する構造を採用したことで、半導体装置100の温度上昇を効果的に抑制でき、その結果として電力供給の増大を図ることができる。   A power card is a device that is applied to a PCU (Power Control Unit) such as an HV vehicle. By adopting a structure that cools both sides as in the illustrated example, the temperature rise of the semiconductor device 100 is effectively suppressed. As a result, the power supply can be increased.

ここで、半導体素子1はIGBT(絶縁ゲートバイポーラトランジスタ)やMOSFET(電界効果トランジスタ)などの素子を銅素材のリードフレーム等の基板にはんだ接合して構成されている。既述するように半導体モジュール10が両面冷却されることから、その寸法(チップサイズ)も小さくすることができ、装置全体の小型化を図ることができる。   Here, the semiconductor element 1 is configured by soldering an element such as an IGBT (Insulated Gate Bipolar Transistor) or a MOSFET (Field Effect Transistor) to a substrate such as a copper lead frame. As described above, since the semiconductor module 10 is cooled on both sides, the dimensions (chip size) can be reduced, and the entire apparatus can be reduced in size.

また、封止樹脂体2はエポキシ樹脂やポリイミド等のマトリックス樹脂に、シリカやアルミナ、窒化ホウ素、窒化ケイ素、炭化ケイ素等の放熱性の無機フィラーが含有された樹脂材から成形される。   The sealing resin body 2 is molded from a resin material containing a heat-dissipating inorganic filler such as silica, alumina, boron nitride, silicon nitride, or silicon carbide in a matrix resin such as epoxy resin or polyimide.

図示するように、扁平な直方体の半導体モジュール10は、対向する2つの広幅面2aを有しており、それぞれの広幅面2aの上下位置において、水平方向に延びる突条4A,4Bを有している。   As shown in the figure, the flat rectangular parallelepiped semiconductor module 10 has two wide surfaces 2a facing each other, and has protrusions 4A and 4B extending in the horizontal direction at the upper and lower positions of the respective wide surfaces 2a. Yes.

半導体装置を構成する2以上の半導体モジュール10は、図1で示すように広幅面2aを立設させた状態で使用(たとえば車両内に設置)される。   The two or more semiconductor modules 10 constituting the semiconductor device are used (for example, installed in a vehicle) with the wide surface 2a erected as shown in FIG.

半導体装置100は、図2で示すように複数の半導体モジュール10がそれらの広幅面2aを立設した状態で上方の突条4A,4A同士、および下方の突条4B,4B同士が係合もしくは接着等によって固定されて上下の固定部5,6が形成される。なお、図示を省略するが、突条同士が係合して固定部を形成する形態においては、突条の先端が相互に係合可能に段状を呈している形態、一方の突条の先端に突起があり、他方の突条の先端に凹溝があって双方が嵌り込む形態など、突条同士の係合形態は多様である。   In the semiconductor device 100, as shown in FIG. 2, the upper protrusions 4A and 4A and the lower protrusions 4B and 4B are engaged with each other in a state where the plurality of semiconductor modules 10 have their wide surfaces 2a upright. The upper and lower fixing portions 5 and 6 are formed by being bonded or the like. In addition, although illustration is abbreviate | omitted, in the form which protrusions engage and form a fixing | fixed part, the form which the front-end | tip of a protrusion is exhibiting the step form so that engagement is mutually possible, the front-end | tip of one protrusion There are various forms of engagement between the protrusions, such as a protrusion having a protrusion, a groove at the tip of the other protrusion, and both being fitted.

そして、この固定部5,6の形成に当たり、グリス30,30が広幅面に塗布等された冷却器20が上下の突条4A,4B間に配設され、次いで突条4A,4A同士、および下方の突条4B,4B同士が組み付けられて固定部5,6が形成されることで半導体装置100が製造される。   And in forming this fixing | fixed part 5 and 6, the cooler 20 by which the grease 30 and 30 were apply | coated etc. to the wide surface is arrange | positioned between the upper and lower protrusions 4A and 4B, and then the protrusions 4A and 4A, The semiconductor device 100 is manufactured by assembling the lower protrusions 4B and 4B to form the fixing portions 5 and 6.

ここで、冷却器20は、ヒートシンクのほか、内部に蛇行流路等の冷却還流流路が形成された機器などからなり、後者の形態では、水やアンモニアのほか、エチレングリコール系の不凍液を混入した水、フロリナート等のフッ化炭素系冷媒、メタノール、アルコール、アセトンなどの冷媒が還流して半導体モジュール10からの放熱をクーリングすることになる。   Here, the cooler 20 includes a heat sink and a device in which a cooling reflux channel such as a meandering channel is formed. In the latter form, in addition to water and ammonia, an ethylene glycol antifreeze is mixed. Thus, a fluorinated carbon-based refrigerant such as water or fluorinate, or a refrigerant such as methanol, alcohol, or acetone is circulated to cool the heat released from the semiconductor module 10.

冷却器30の広幅面(不図示)は半導体モジュール10の広幅面2aよりも小さく、上下に設けられた突条4A,4B間に冷却器30が配設できるように設計されている。   The wide surface (not shown) of the cooler 30 is smaller than the wide surface 2a of the semiconductor module 10, and is designed so that the cooler 30 can be disposed between the protrusions 4A and 4B provided above and below.

製造された半導体装置100は、図2で示すように各半導体モジュール10の広幅面2aが立設した状態(図示例のように鉛直方向に立設した状態のほか、斜め方向に立設した状態も含む)でたとえば車両ボディーの適所に配設される。   The manufactured semiconductor device 100 is in a state in which the wide surface 2a of each semiconductor module 10 is erected as shown in FIG. 2 (in a state where it is erected in an oblique direction in addition to a state where it is erected in the vertical direction as in the illustrated example) For example, it is disposed at an appropriate position on the vehicle body.

半導体装置100の供用後、半導体モジュール10,10間に介在するグリス30は、環境劣化や車両から受ける繰返し振動によって下方に垂れ落ちて装置の放熱性を悪化させる懸念がある。しかしながら、図示する半導体装置100では、グリス30の下方に対向する半導体モジュール10,10から伸びた突条4B,4Bにて形成された固定部6が存在していることから、この固定部6がグリスの漏れ防止措置となり、半導体モジュール10からの熱をグリス30を介して冷却器20へ放熱する際の放熱面積が維持されることから、長期に亘る装置の放熱性を保証することができる。   After the semiconductor device 100 is put into service, the grease 30 interposed between the semiconductor modules 10 and 10 may drop down due to environmental degradation or repeated vibrations received from the vehicle, thereby deteriorating the heat dissipation of the device. However, in the semiconductor device 100 shown in the figure, the fixing portion 6 formed by the protrusions 4B and 4B extending from the semiconductor modules 10 and 10 facing the lower side of the grease 30 is present. This is a grease leakage prevention measure, and since the heat radiation area when the heat from the semiconductor module 10 is radiated to the cooler 20 via the grease 30 is maintained, the heat radiation performance of the device over a long period can be guaranteed.

また、上下の固定部5,6が半導体モジュール10に設けられた突条4A,4Bのみによって形成されること、すなわち、半導体モジュールと冷却器の双方によって固定部が形成されるものでないことから、固定部の形成に際して半導体モジュール10,10の位置決めが精緻かつ容易であり、固定作業自体も容易なものとなる。このことは、図示例のように、多数の半導体モジュール10を組付けて半導体装置100が製造される場合において、製造時間の短縮効果に顕著に現れることになる。   Further, since the upper and lower fixing parts 5 and 6 are formed only by the protrusions 4A and 4B provided on the semiconductor module 10, that is, the fixing parts are not formed by both the semiconductor module and the cooler. The positioning of the semiconductor modules 10 and 10 is precise and easy when the fixing portion is formed, and the fixing operation itself is easy. This significantly appears in the effect of shortening the manufacturing time when the semiconductor device 100 is manufactured by assembling a large number of semiconductor modules 10 as in the illustrated example.

(半導体モジュールの他の実施の形態)
図3a、bは、半導体モジュールの他の実施の形態を組み付け姿勢の側面図で示した図である。
(Another embodiment of the semiconductor module)
3a and 3b are diagrams showing another embodiment of the semiconductor module in a side view of the assembly posture.

図3aで示す半導体モジュール10Aは、一方の広幅面2aに上下の凹条7A,7Bを有し、他方の広幅面2aに半導体モジュール10よりも張り出し長の長い上下の突条4A’4B’を有したものである。図示するように一方の半導体モジュール10Aの上下の凹条7A,7Bに他方の半導体モジュール10Aの上下の突条4A’4B’が嵌り込んで上下の固定部5A,6Aが形成され、固定部5A,6Aの間に不図示のグリスと冷却器が配設される。   A semiconductor module 10A shown in FIG. 3a has upper and lower concave stripes 7A and 7B on one wide surface 2a, and upper and lower protrusions 4A'4B 'that are longer than the semiconductor module 10 on the other wide surface 2a. I have it. As shown in the drawing, the upper and lower protrusions 4A'4B 'of the other semiconductor module 10A are fitted into the upper and lower recesses 7A and 7B of one semiconductor module 10A to form the upper and lower fixing portions 5A and 6A. , 6A are provided with a grease and a cooler (not shown).

一方、図3bで示す半導体モジュール10Bは、一方の広幅面2aに上方の凹条7Aと下方の突条4B”を有し、他方の広幅面2aに上方の突条4A’と下方の凹条7Bを有したものである。図示するように一方の半導体モジュール10Bの凹条7Aに他方の半導体モジュール10Bの突条4A’が嵌り込んで上方の固定部5Aが形成され、他方の半導体モジュール10Bの凹条7Bに一方の半導体モジュール10Bの突条4B”が嵌り込んで下方の固定部6Bが形成される。   On the other hand, the semiconductor module 10B shown in FIG. 3b has an upper groove 7A and a lower protrusion 4B ″ on one wide surface 2a, and an upper protrusion 4A ′ and a lower groove on the other wide surface 2a. As shown in the figure, the protrusion 4A 'of the other semiconductor module 10B is fitted into the recess 7A of one semiconductor module 10B to form an upper fixing portion 5A, and the other semiconductor module 10B is formed. The protrusion 4B ″ of one semiconductor module 10B is fitted into the recess 7B to form the lower fixing portion 6B.

このようにいずれの形態であっても、下方の固定部6A,6Bにてグリスの下方への漏れが防止され、長期に亘る装置の放熱性を保証することができる。また、固定部5A,6A,6Bの形成が容易であることもまた半導体モジュール10と同様である。   Thus, in any form, leakage of grease downward is prevented by the lower fixing portions 6A and 6B, and the heat dissipation of the device over a long period can be ensured. In addition, as with the semiconductor module 10, the fixing portions 5A, 6A, and 6B can be easily formed.

さらに、図示を省略するが、図1,2で示す半導体装置において、上方の固定部5を廃し、下方の固定部6のみを具備するとともにこの下方の固定部6の上にグリス30が塗布された冷却器20が配設されている半導体装置であってもよく、この形態によっても下方の固定部にてグリスの下方への漏れを防止することができる。   Further, although not shown, in the semiconductor device shown in FIGS. 1 and 2, the upper fixing portion 5 is eliminated, only the lower fixing portion 6 is provided, and grease 30 is applied on the lower fixing portion 6. In addition, the semiconductor device in which the cooler 20 is disposed may be used, and also in this form, it is possible to prevent the grease from leaking downward in the lower fixing portion.

以上、本発明の実施の形態を図面を用いて詳述してきたが、具体的な構成はこの実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲における設計変更等があっても、それらは本発明に含まれるものである。   The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to this embodiment, and there are design changes and the like without departing from the gist of the present invention. They are also included in the present invention.

1…半導体素子、2…封止樹脂体、2a…広幅面、3…端子、4A、4A’、4B、4B’、4B”…突条、7A,7B…凹条、5,5A,6,6A,6B…固定部、10,10A,10B…半導体モジュール、20…冷却器、30…グリス、100…半導体装置   DESCRIPTION OF SYMBOLS 1 ... Semiconductor element, 2 ... Sealing resin body, 2a ... Wide surface, 3 ... Terminal, 4A, 4A ', 4B, 4B', 4B "... Projection, 7A, 7B ... Concave, 5, 5A, 6, 6A, 6B ... fixed part, 10, 10A, 10B ... semiconductor module, 20 ... cooler, 30 ... grease, 100 ... semiconductor device

Claims (2)

2以上の半導体モジュールと冷却器がそれぞれの広幅面を立設した姿勢で対向し、放熱性のグリスを介して交互に配設されてなる半導体装置であって、
半導体モジュールの広幅面の面積は冷却体の広幅面の面積よりも大きくなっており、
対向する2つの半導体モジュールの広幅面が立設した姿勢において、一方の広幅面の少なくとも下の位置と他方の広幅面の対応する少なくとも下の位置には、ともに係合する突条が設けてある、もしくは、一方の少なくとも下の位置には突条が設けてあって他方にはこの突条に係合する凹条が設けてあり、
隣接する半導体モジュールのそれぞれの少なくとも下の位置の突条同士が固定され、もしくは下の位置の突条と凹条が固定されて固定部が形成され、該固定部の上にグリスを介して冷却器が配設されている半導体装置。
A semiconductor device in which two or more semiconductor modules and a cooler are opposed to each other in a posture in which each wide surface is erected, and are alternately arranged via heat-dissipating grease,
The area of the wide surface of the semiconductor module is larger than the area of the wide surface of the cooling body,
In a posture in which the wide surfaces of the two opposing semiconductor modules are erected, protrusions that engage with each other are provided at least at a position below one of the wide surfaces and at least a corresponding position on the other wide surface. Or, at least one of the positions below is provided with a protrusion, and the other is provided with a recess that engages with this protrusion,
At least the lower ridges of the adjacent semiconductor modules are fixed to each other, or the lower ridges and the concave ridges are fixed to form a fixed part, and cooling is performed on the fixed part via grease. A semiconductor device in which a container is disposed.
広幅面の下の位置のみならず上の位置にも突条もしくは凹条が設けられ、さらに上下の突条もしくは凹条に連続するように広幅面の左右の位置にも突条もしくは凹条が設けてあり、
半導体モジュール同士が組み付けられた際に、上下の位置の突条同士、もしくは突条と凹条同士が固定されるとともに、左右の位置の突条同士、もしくは突条と凹条同士が固定されて枠状をなす固定部が形成され、冷却器とグリスがこの固定部で完全に閉塞されている請求項1に記載の半導体装置。
The ridges or ridges are provided not only at the position below the wide surface but also at the upper position, and the ridges or ridges are also formed at the left and right positions of the wide surface so as to be continuous with the upper and lower ridges or grooves. Provided,
When semiconductor modules are assembled together, the ridges at the top and bottom positions, or the ridges and the recesses are fixed, and the ridges at the left and right positions, or the ridges and the recesses are fixed. The semiconductor device according to claim 1, wherein a fixing portion having a frame shape is formed, and the cooler and the grease are completely closed by the fixing portion.
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