JP2014067807A - 窒化物系化合物半導体素子およびその製造方法 - Google Patents
窒化物系化合物半導体素子およびその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 74
- 150000001875 compounds Chemical class 0.000 title claims abstract description 32
- 150000004767 nitrides Chemical class 0.000 title claims abstract description 32
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 7
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 62
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 61
- 239000001301 oxygen Substances 0.000 claims abstract description 61
- 239000002131 composite material Substances 0.000 claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 11
- -1 nitride compound Chemical class 0.000 claims description 20
- 230000005533 two-dimensional electron gas Effects 0.000 claims description 15
- 239000007789 gas Substances 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 8
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 7
- 229910001882 dioxygen Inorganic materials 0.000 claims description 7
- 230000005669 field effect Effects 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims description 3
- 238000010030 laminating Methods 0.000 claims description 3
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims 2
- 238000005121 nitriding Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 200
- 230000005684 electric field Effects 0.000 description 21
- 238000005259 measurement Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 9
- 239000000203 mixture Substances 0.000 description 9
- 229910002704 AlGaN Inorganic materials 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 230000007774 longterm Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/201—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys
- H01L29/205—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds including two or more compounds, e.g. alloys in different semiconductor regions, e.g. heterojunctions
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Abstract
【解決手段】基板と、前記基板上に形成され、窒化物系化合物半導体からなる第1層と、前記第1層よりも格子定数が小さく、アルミニウムを含む窒化物系化合物半導体からなる第2層とが積層された複合層を複数層含むバッファ層と、前記バッファ層上に形成された半導体動作層と、前記半導体動作層上に形成された複数の電極と、を備え、前記第2層の少なくとも一つは酸素が添加されている窒化物系化合物半導体素子。
【選択図】図1
Description
図1は、本発明の実施の形態1に係る窒化物系化合物半導体素子であるショットキーバリアダイオード(Schottky Barrier Diode:SBD)の模式的な断面図である。図2は、図1に示すSBDの上面図である。
図10は、本発明の実施の形態2に係る窒化物系化合物半導体素子であるSBDの模式的な断面図である。図11は、図10に示すSBDのバッファ層80の構成を説明する図である。
20 介在層
30、80 バッファ層
31、32、33、34、35、36、81 複合層
31a、32a、33a、34a、35a、36a、81a 第1層
31b、32b、33b、34b、35b、36b、81b 第2層
40 電子走行層
50 電子供給層
60 アノード電極
70 カソード電極
P1、P2、P3 プローブ針
T1、T2、T3 時間
Claims (10)
- 基板と、
前記基板上に形成され、窒化物系化合物半導体からなる第1層と、前記第1層よりも格子定数が小さく、アルミニウムを含む窒化物系化合物半導体からなる第2層とが積層された複合層を複数層含むバッファ層と、
前記バッファ層上に形成された半導体動作層と、
前記半導体動作層上に形成された複数の電極と、
を備え、前記第2層の少なくとも一つは酸素が添加されていることを特徴とする窒化物系化合物半導体素子。 - 前記第1層はGaNからなり、前記第2層はAlNからなることを特徴とする請求項1に記載の窒化物系化合物半導体素子。
- 前記第2層の酸素濃度は1×1019cm−3以上であることを特徴とする請求項1または2に記載の窒化物系化合物半導体素子。
- 前記第2層の酸素濃度は1×1020cm−3より小さいことを特徴とする請求項1〜3のいずれか一つに記載の窒化物系化合物半導体素子。
- 少なくとも前記電極間に電圧を印加したときに最も高い電圧が掛かる前記複合層の第2層には酸素が添加されていることを特徴とする請求項1〜4のいずれか一つに記載の窒化物系化合物半導体素子。
- 前記複合層のうち少なくとも1つにおける前記第1層の前記第2層との界面には2次元電子ガスが発生していることを特徴とする請求項1〜5のいずれか一つに記載の窒化物系化合物半導体素子。
- 前記2次元電子ガスが発生している複合層のうち最も前記半導体動作層に近い位置にある前記複合層の第2層には酸素が添加されていることを特徴とする請求項6に記載の窒化物系化合物半導体素子。
- 電界効果トランジスタまたはショットキーバリアダイオードであることを特徴とする請求項1〜7のいずれか一つに記載の窒化物系化合物半導体素子。
- 基板上に、窒化物系化合物半導体からなる第1層と前記第1層よりも格子定数が小さく、アルミニウムを含む窒化物系化合物半導体からなる第2層とが積層された複合層を複数層含むバッファ層を形成する工程と、
前記バッファ層上に半導体動作層を形成する工程と、
前記半導体動作層上に複数の電極を形成する工程と、を含み、
前記バッファ層を形成する工程は、前記第2層の少なくとも1層に酸素を添加する工程を含むことを特徴とする窒化物系化合物半導体素子の製造方法。 - 前記バッファ層を形成する工程は、MOCVD法により前記第1層と前記第2層を形成し、該MOCVD法にてエピタキシャル成長させる際に用いる原料ガスに、酸素ガスおよび酸素を含むガスの少なくとも一方を混合することによって、前記第2層の少なくとも1層に酸素を添加する工程を含むことを特徴とする請求項9に記載の窒化物系化合物半導体素子の製造方法。
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JP2012210942A JP5667136B2 (ja) | 2012-09-25 | 2012-09-25 | 窒化物系化合物半導体素子およびその製造方法 |
US13/938,653 US8884393B2 (en) | 2012-09-25 | 2013-07-10 | Nitride compound semiconductor device and manufacturing method thereof |
CN201310288724.6A CN103681832A (zh) | 2012-09-25 | 2013-07-10 | 氮化物系化合物半导体元件及其制造方法 |
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JP2016100471A (ja) * | 2014-11-21 | 2016-05-30 | 住友電気工業株式会社 | 半導体装置及び半導体装置の製造方法 |
WO2021024670A1 (ja) * | 2019-08-08 | 2021-02-11 | 住友化学株式会社 | 窒化物半導体基板 |
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CN105336579B (zh) * | 2015-09-29 | 2018-07-10 | 安徽三安光电有限公司 | 一种半导体元件及其制备方法 |
CN108428619A (zh) * | 2018-03-16 | 2018-08-21 | 英诺赛科(珠海)科技有限公司 | 氮化物外延层及其制备方法 |
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JP2005158889A (ja) * | 2003-11-21 | 2005-06-16 | Sanken Electric Co Ltd | 半導体素子形成用板状基体及びこの製造方法及びこれを使用した半導体素子 |
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US7786550B2 (en) * | 2003-03-06 | 2010-08-31 | Panasonic Corporation | P-type semiconductor and semiconductor hetero material and manufacturing methods thereof |
JP5624940B2 (ja) * | 2011-05-17 | 2014-11-12 | 古河電気工業株式会社 | 半導体素子及びその製造方法 |
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US5011A (en) * | 1847-03-13 | V boring-machine | ||
US9020A (en) * | 1852-06-15 | Improved machine for peaking sheet-metal tubes | ||
JP2005158889A (ja) * | 2003-11-21 | 2005-06-16 | Sanken Electric Co Ltd | 半導体素子形成用板状基体及びこの製造方法及びこれを使用した半導体素子 |
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JP2009289956A (ja) * | 2008-05-29 | 2009-12-10 | Furukawa Electric Co Ltd:The | 半導体電子デバイス |
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JP2016100471A (ja) * | 2014-11-21 | 2016-05-30 | 住友電気工業株式会社 | 半導体装置及び半導体装置の製造方法 |
WO2021024670A1 (ja) * | 2019-08-08 | 2021-02-11 | 住友化学株式会社 | 窒化物半導体基板 |
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US8884393B2 (en) | 2014-11-11 |
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