JP2014059194A - 走査プローブ顕微鏡およびこれを用いた試料の観察方法 - Google Patents

走査プローブ顕微鏡およびこれを用いた試料の観察方法 Download PDF

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Publication number
JP2014059194A
JP2014059194A JP2012203836A JP2012203836A JP2014059194A JP 2014059194 A JP2014059194 A JP 2014059194A JP 2012203836 A JP2012203836 A JP 2012203836A JP 2012203836 A JP2012203836 A JP 2012203836A JP 2014059194 A JP2014059194 A JP 2014059194A
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JP
Japan
Prior art keywords
sample
inspected
measurement probe
light
sample holder
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Pending
Application number
JP2012203836A
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English (en)
Japanese (ja)
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JP2014059194A5 (https=
Inventor
Toshihiko Nakada
俊彦 中田
Takehiro Tachizaki
武弘 立▲崎▼
Masahiro Watanabe
正浩 渡辺
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Hitachi Ltd
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Hitachi Ltd
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Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2012203836A priority Critical patent/JP2014059194A/ja
Priority to PCT/JP2013/065316 priority patent/WO2014045646A1/ja
Publication of JP2014059194A publication Critical patent/JP2014059194A/ja
Publication of JP2014059194A5 publication Critical patent/JP2014059194A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/12—Fluid environment
    • G01Q30/14—Liquid environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G01Q70/12—Nanotube tips

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP2012203836A 2012-09-18 2012-09-18 走査プローブ顕微鏡およびこれを用いた試料の観察方法 Pending JP2014059194A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012203836A JP2014059194A (ja) 2012-09-18 2012-09-18 走査プローブ顕微鏡およびこれを用いた試料の観察方法
PCT/JP2013/065316 WO2014045646A1 (ja) 2012-09-18 2013-06-03 走査プローブ顕微鏡およびこれを用いた試料の観察方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012203836A JP2014059194A (ja) 2012-09-18 2012-09-18 走査プローブ顕微鏡およびこれを用いた試料の観察方法

Publications (2)

Publication Number Publication Date
JP2014059194A true JP2014059194A (ja) 2014-04-03
JP2014059194A5 JP2014059194A5 (https=) 2014-12-25

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JP2012203836A Pending JP2014059194A (ja) 2012-09-18 2012-09-18 走査プローブ顕微鏡およびこれを用いた試料の観察方法

Country Status (2)

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JP (1) JP2014059194A (https=)
WO (1) WO2014045646A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2716849C1 (ru) * 2019-07-15 2020-03-17 Федеральное государственное бюджетное образовательное учреждение высшего образования "Рязанский государственный радиотехнический университет имени В.Ф. Уткина" Сканирующий зонд атомно-силового микроскопа с разделяемым телеуправляемым нанокомпозитным излучающим элементом на основе апконвертирующих и магнитных наночастиц структуры ядро-оболочка

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07174542A (ja) * 1993-04-12 1995-07-14 Seiko Instr Inc 走査型近視野原子間力顕微鏡、及びその顕微鏡に使用されるプローブ、及びそのプローブの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003053699A (ja) * 2001-08-10 2003-02-26 Nikon Corp ピンホール製造方法及び測定装置
JP3760196B2 (ja) * 2002-06-27 2006-03-29 独立行政法人科学技術振興機構 赤外光集光装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07174542A (ja) * 1993-04-12 1995-07-14 Seiko Instr Inc 走査型近視野原子間力顕微鏡、及びその顕微鏡に使用されるプローブ、及びそのプローブの製造方法

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WO2014045646A1 (ja) 2014-03-27

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