JP2014059194A5 - - Google Patents
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- Publication number
- JP2014059194A5 JP2014059194A5 JP2012203836A JP2012203836A JP2014059194A5 JP 2014059194 A5 JP2014059194 A5 JP 2014059194A5 JP 2012203836 A JP2012203836 A JP 2012203836A JP 2012203836 A JP2012203836 A JP 2012203836A JP 2014059194 A5 JP2014059194 A5 JP 2014059194A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- inspected
- measurement probe
- laser beam
- probe microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims 61
- 238000005259 measurement Methods 0.000 claims 17
- 238000000034 method Methods 0.000 claims 6
- 230000001678 irradiating effect Effects 0.000 claims 4
- 238000007689 inspection Methods 0.000 claims 2
- 230000000644 propagated effect Effects 0.000 claims 2
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012203836A JP2014059194A (ja) | 2012-09-18 | 2012-09-18 | 走査プローブ顕微鏡およびこれを用いた試料の観察方法 |
| PCT/JP2013/065316 WO2014045646A1 (ja) | 2012-09-18 | 2013-06-03 | 走査プローブ顕微鏡およびこれを用いた試料の観察方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012203836A JP2014059194A (ja) | 2012-09-18 | 2012-09-18 | 走査プローブ顕微鏡およびこれを用いた試料の観察方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014059194A JP2014059194A (ja) | 2014-04-03 |
| JP2014059194A5 true JP2014059194A5 (https=) | 2014-12-25 |
Family
ID=50340978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012203836A Pending JP2014059194A (ja) | 2012-09-18 | 2012-09-18 | 走査プローブ顕微鏡およびこれを用いた試料の観察方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2014059194A (https=) |
| WO (1) | WO2014045646A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2716849C1 (ru) * | 2019-07-15 | 2020-03-17 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Рязанский государственный радиотехнический университет имени В.Ф. Уткина" | Сканирующий зонд атомно-силового микроскопа с разделяемым телеуправляемым нанокомпозитным излучающим элементом на основе апконвертирующих и магнитных наночастиц структуры ядро-оболочка |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2704601B2 (ja) * | 1993-04-12 | 1998-01-26 | セイコーインスツルメンツ株式会社 | 走査型近視野原子間力顕微鏡、及びその顕微鏡に使用されるプローブ、及びそのプローブの製造方法 |
| JP2003053699A (ja) * | 2001-08-10 | 2003-02-26 | Nikon Corp | ピンホール製造方法及び測定装置 |
| JP3760196B2 (ja) * | 2002-06-27 | 2006-03-29 | 独立行政法人科学技術振興機構 | 赤外光集光装置 |
-
2012
- 2012-09-18 JP JP2012203836A patent/JP2014059194A/ja active Pending
-
2013
- 2013-06-03 WO PCT/JP2013/065316 patent/WO2014045646A1/ja not_active Ceased
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