JP2014051430A - シリコン単結晶の製造方法 - Google Patents
シリコン単結晶の製造方法 Download PDFInfo
- Publication number
- JP2014051430A JP2014051430A JP2013176704A JP2013176704A JP2014051430A JP 2014051430 A JP2014051430 A JP 2014051430A JP 2013176704 A JP2013176704 A JP 2013176704A JP 2013176704 A JP2013176704 A JP 2013176704A JP 2014051430 A JP2014051430 A JP 2014051430A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- silicon
- ring
- single crystal
- melting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
- C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/08—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/08—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone
- C30B13/10—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone with addition of doping materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/16—Heating of the molten zone
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
【解決手段】本発明は、シリコン単結晶の製造方法に関し、この方法は、シリコンプレートを誘導加熱するステップと、シリコンプレート上の粒状シリコンを溶融させるステップと、溶融させたシリコンを、プレートの中央部のフロー導管を通して、シリコン単結晶が結晶化する場所である相境界に供給するステップと、プレートを誘導加熱するステップの前に、プレートの上にありプレートよりも抵抗率が低いシリコンリングを誘導加熱するステップと、リングを溶融させるステップとを含む。
【選択図】図1
Description
本発明は、シリコン単結晶の製造方法に関し、この方法は、シリコンプレートを誘導加熱するステップと、シリコンプレート上の粒状シリコンを溶融させるステップと、溶融させたシリコンを、プレートの中央部のフロー導管を通して、シリコン単結晶が結晶化する場所である相境界に供給するステップとを含む。
本発明に従い、図1に示される特徴を有する装置を用いて、シリコン単結晶を製造した。
Claims (6)
- シリコン単結晶の製造方法であって、
シリコンプレートを誘導加熱するステップと、
前記シリコンプレート上の粒状シリコンを溶融させるステップと、
溶融させたシリコンを、前記プレートの中央部のフロー導管を通して、シリコン単結晶が結晶化する場所である相境界に供給するステップとを含み、
前記プレートを誘導加熱するステップの前に、前記プレートの上にあり前記プレートよりも抵抗率が低いシリコンリングを誘導加熱し、
前記リングを溶融させることを特徴とする、方法。 - 前記リングの抵抗率は80mΩcm以下である、請求項1に記載の方法。
- 前記プレートの抵抗率は1Ωcm以上である、請求項1または2に記載の方法。
- 前記リングの外径は前記プレートの外径よりも小さい、請求項1から3のいずれか1項に記載の方法。
- 前記リングの内径は前記フロー導管の内径と同一である、請求項1から4のいずれか1項に記載の方法。
- 前記リングの厚みは前記プレートの厚みよりも小さい、請求項1から5のいずれか1項に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102012215677A DE102012215677B3 (de) | 2012-09-04 | 2012-09-04 | Verfahren zum Herstellen eines Einkristalls aus Silizium |
DE102012215677.1 | 2012-09-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014051430A true JP2014051430A (ja) | 2014-03-20 |
JP5666666B2 JP5666666B2 (ja) | 2015-02-12 |
Family
ID=48948289
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013176704A Expired - Fee Related JP5666666B2 (ja) | 2012-09-04 | 2013-08-28 | シリコン単結晶の製造方法 |
Country Status (10)
Country | Link |
---|---|
US (1) | US9410262B2 (ja) |
EP (1) | EP2703525B1 (ja) |
JP (1) | JP5666666B2 (ja) |
KR (1) | KR101532836B1 (ja) |
CN (1) | CN103668435B (ja) |
DE (1) | DE102012215677B3 (ja) |
DK (1) | DK2703525T3 (ja) |
MY (1) | MY160009A (ja) |
SG (1) | SG2013066311A (ja) |
TW (1) | TWI542740B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014210936B3 (de) * | 2014-06-06 | 2015-10-22 | Siltronic Ag | Vorrichtung und Verfahren zur Herstellung eines Kristalls aus Halbleitermaterial |
DE102015215858B4 (de) * | 2015-08-20 | 2019-01-24 | Siltronic Ag | Verfahren zur Wärmebehandlung von Granulat aus Silizium, Granulat aus Silizium und Verfahren zur Herstellung eines Einkristalls aus Silizium |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09142988A (ja) * | 1995-10-12 | 1997-06-03 | Wacker Siltronic G Fuer Halbleitermaterialien Ag | シリコン単結晶の生成方法及び装置 |
JP2011102234A (ja) * | 2009-11-11 | 2011-05-26 | Siltronic Ag | 粒体の包囲溶融によりシリコンから単結晶を製作するための方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2922078B2 (ja) * | 1993-03-17 | 1999-07-19 | 株式会社トクヤマ | シリコンロッドの製造方法 |
US6251182B1 (en) | 1993-05-11 | 2001-06-26 | Hemlock Semiconductor Corporation | Susceptor for float-zone apparatus |
DE10204178B4 (de) * | 2002-02-01 | 2008-01-03 | Siltronic Ag | Verfahren und Vorrichtung zum Herstellen eines Einkristalls aus Halbleitermaterial |
DE10220964B4 (de) * | 2002-05-06 | 2006-11-02 | Pv Silicon Forschungs- Und Produktions Ag | Anordnung zur Herstellung von Kristallstäben mit definiertem Querschnitt und kolumnarer polykristalliner Struktur mittels tiegelfreier kontinuierlicher Kristallisation |
US20130112134A1 (en) * | 2009-02-23 | 2013-05-09 | Giga Industries, Inc. | Method and Systems for Characterization and Production of High Quality Silicon |
DE102009051010B4 (de) | 2009-10-28 | 2012-02-23 | Siltronic Ag | Vorrichtung zur Herstellung eines Einkristalls aus Silizium durch Umschmelzen von Granulat |
DE102010006724B4 (de) * | 2010-02-03 | 2012-05-16 | Siltronic Ag | Verfahren zur Herstellung eines Einkristalls aus Silizium unter Verwendung von geschmolzenem Granulat |
JP2012056826A (ja) * | 2010-09-13 | 2012-03-22 | Sumco Corp | シリコンインゴットの電磁鋳造方法 |
-
2012
- 2012-09-04 DE DE102012215677A patent/DE102012215677B3/de not_active Withdrawn - After Issue
-
2013
- 2013-08-07 EP EP13179560.1A patent/EP2703525B1/de not_active Not-in-force
- 2013-08-07 DK DK13179560T patent/DK2703525T3/en active
- 2013-08-19 US US13/969,818 patent/US9410262B2/en active Active
- 2013-08-28 JP JP2013176704A patent/JP5666666B2/ja not_active Expired - Fee Related
- 2013-09-02 TW TW102131508A patent/TWI542740B/zh not_active IP Right Cessation
- 2013-09-03 CN CN201310398585.2A patent/CN103668435B/zh not_active Expired - Fee Related
- 2013-09-03 MY MYPI2013003236A patent/MY160009A/en unknown
- 2013-09-03 SG SG2013066311A patent/SG2013066311A/en unknown
- 2013-09-04 KR KR1020130105828A patent/KR101532836B1/ko active IP Right Grant
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09142988A (ja) * | 1995-10-12 | 1997-06-03 | Wacker Siltronic G Fuer Halbleitermaterialien Ag | シリコン単結晶の生成方法及び装置 |
JP2011102234A (ja) * | 2009-11-11 | 2011-05-26 | Siltronic Ag | 粒体の包囲溶融によりシリコンから単結晶を製作するための方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI542740B (zh) | 2016-07-21 |
MY160009A (en) | 2017-02-15 |
EP2703525A1 (de) | 2014-03-05 |
KR20140031149A (ko) | 2014-03-12 |
JP5666666B2 (ja) | 2015-02-12 |
SG2013066311A (en) | 2014-04-28 |
CN103668435B (zh) | 2016-06-29 |
EP2703525B1 (de) | 2014-12-10 |
US20140060421A1 (en) | 2014-03-06 |
DE102012215677B3 (de) | 2013-10-10 |
DK2703525T3 (en) | 2015-03-09 |
US9410262B2 (en) | 2016-08-09 |
TW201410929A (zh) | 2014-03-16 |
CN103668435A (zh) | 2014-03-26 |
KR101532836B1 (ko) | 2015-06-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5070737B2 (ja) | Cz法により製造したシリコン結晶棒を原料としたfz単結晶シリコンの製造方法 | |
US10233562B2 (en) | Method for producing single crystal, and method for producing silicon wafer | |
KR101953788B1 (ko) | 단결정 제조 방법 | |
US10358740B2 (en) | Crystal growing systems and methods including a passive heater | |
JP6299543B2 (ja) | 抵抗率制御方法及び追加ドーパント投入装置 | |
US10227710B2 (en) | Manufacturing method of silicon monocrystal | |
CN103215633A (zh) | 一种多晶硅的铸锭方法 | |
CN101580962A (zh) | 改进的直拉单晶炉加热器结构 | |
JP5666666B2 (ja) | シリコン単結晶の製造方法 | |
CN104746134B (zh) | 采用补偿硅料的n型单晶硅拉制方法 | |
KR102413304B1 (ko) | 에피택셜 실리콘 웨이퍼의 제조 방법 | |
JP2010070404A (ja) | シリコン融液形成装置 | |
JP6119642B2 (ja) | 半導体単結晶の製造方法 | |
TW201012983A (en) | Method for growing silicon single crystal | |
JP6427179B2 (ja) | 冷却または加熱装置用n型半導体素子を製造する方法 | |
JP5201730B2 (ja) | Fz法シリコン単結晶の製造方法 | |
JPS63303894A (ja) | シリコン単結晶育成方法 | |
JP2012180244A (ja) | 半導体単結晶の製造装置および製造方法 | |
JP5365617B2 (ja) | 半導体単結晶製造装置及び半導体単結晶の製造方法 | |
JP2019514836A (ja) | 単結晶シリコンの半導体ウェハを製造するための方法、単結晶シリコンの半導体ウェハを製造するための装置および単結晶シリコンの半導体ウェハ | |
JP2004224582A (ja) | 単結晶の製造方法 | |
KR101425933B1 (ko) | 단결정 실리콘 잉곳 제조장치 | |
JP2010030860A (ja) | シリコン単結晶の育成方法 | |
KR101205616B1 (ko) | 단결정 잉곳 제조방법 | |
JPH07206578A (ja) | 不純物を添加する半導体単結晶の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140611 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140617 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20141111 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20141210 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5666666 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees | ||
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |