JP2014015989A - Base isolation structure, base isolation floor structure and clean room including the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a base isolation structure that enables clean and easy installation and in which a dead space resulting from the installation of the base isolation structure is reduced.SOLUTION: A base isolation structure includes: a first raceway fixed to a base isolation frame; a second raceway fixed to a construction; and a base isolation support member interposed between respective raceways, and the base isolation frame can move smoothly on a flat surface with respect to the construction. The base isolation structure includes a restoring and attenuating device that includes a viscoelastic sheet and a pair of binding parts held by sandwiching the viscoelastic sheet, and obtains restoration and attenuation effects by fixing one of the binding parts to the base isolation support member and fixing the other to the first raceway or the second raceway. The base isolation structure includes a spacing buffer support that has strength for supporting a predetermined load from a vertical direction, is collapsed for buffering, by a predetermined impact from a horizontal direction, and prevents interruption of the base isolation operation of the base isolation structure.

Description

  The present invention relates to a base isolation structure, a base isolation floor structure, and a clean room equipped with the base isolation structure.

In general, as a seismic isolation device for protecting precision equipment and the like, various devices have been proposed that have a restoration mechanism and a damping mechanism and can be isolated from vibrations in any direction on a plane.
For example, Patent Document 1 describes a technique related to a seismic isolation frame that prevents a fall of the installation object even when an installation object whose center of gravity is shifted is installed on the installation frame.
Further, Patent Document 2 describes a technology related to a base isolation base in which the base isolation effect does not decrease even for an earthquake with a large amplitude.
Furthermore, Patent Literature 3 describes a seismic isolation structure having a roller mechanism that rolls on a rail, and the outer dimensions of the seismic isolation device are not limited to the rail length.
On the other hand, manufacturing and measurement of semiconductor devices and electronic devices are performed in clean rooms with high cleanliness using precision instruments, etc., but seismic isolation of these clean rooms has various problems. Yes. Clean room earthquake countermeasures are “seismic resistance” for the same structure, and even if the rigidity of the building structure can be increased to withstand earthquakes, the equipment placed in the clean room is damaged by the earthquake, leading to product manufacturing. May lead to adverse effects of the device or damage to the device itself.

Japanese Patent Laid-Open No. 10-73146 JP-A-11-247925 JP 2003-130129 A

  In modern semiconductor manufacturing processes, the extremely high density of integrated circuits causes very small fine particles in the clean room and trace impurities in the gas released into the clean room to cause semiconductor defects. The cleanliness in such a clean room is affected not only by intruders from the outside, but also by chips and gas emitted during the construction of the clean room, and it is not easy to introduce a seismic isolation structure by a conventional construction method.

By the way, as shown in FIG. 1, the floor structure of a general clean room 11 is a double floor, and a plurality of posts (posts) 32 are predetermined on a slab 33 made of a foundation made of concrete or the like. The plurality of girder steel frames 30 are installed at a predetermined interval on them. Further, a plurality of steel joists 20 are installed on the girder steel frames 30 so as to be orthogonal to the girder steel frames 30, and a fixed gantry (access floor) 22 is laid by a support column 21 on them. It is common.
In the clean room 11, various precision manufacturing devices 10 are installed on the fixed mount 22.
By the way, in order to efficiently use the work space, it is important to be able to change the arrangement of the precision instruments 10 according to the change of the production line, but when adopting a general underfloor seismic isolation structure, There is a problem that the position of the seismic isolation function cannot be changed.

  Conventional seismic isolation structures are premised on construction on a flat surface such as under a concrete floor, and it is not easy to place a seismic isolation structure on a double floor in which steel joists 20 and girder steel frames 30 are assembled. .

Further, the conventional seismic isolation structure has a problem that a stroke portion provided to realize the seismic isolation structure becomes a dead space. The dead space in the conventional seismic isolation structure will be described with reference to FIG.
A base isolation base (base isolation floor) 50 on which a base isolation object is placed is fixed to a base isolation structure 80 having a mechanism for receiving vibration input from a building when an earthquake occurs through a column 21A, and is an XY plane in the figure. Moves with a fixed stroke on the top. On the other hand, the fixed base 22 is fixed to a building base or the like via a column 21A or the like, and therefore receives a vibration input as it is.

Here, when the vibration at the time of earthquake is input, the fixed base 22 vibrates integrally with the building, but the motion of the base isolation base 50 installed in the base isolation structure 80 is suppressed by the base isolation effect. . As a result, the base isolation frame 50 and the fixed base 22 move relative to each other, but for the purpose of not hindering this, a gap with a width L ₁ equal to the stroke of the base isolation structure 80 is provided between the base isolation base 50 and the fixed base 22. Gap 330 is provided. However, since the gap 330 is a dangerous groove for an operator who works on the fixed base 22, by providing the panel (gap cover) 23, the gap 330 is blocked so as not to be dropped.

The panel 23 is fixed to the base isolation frame 50 and moves relative to the fixed base 22 together with the base isolation frame 50 during vibration. Since the panel 23 needs to cover the gap even during this relative movement, the panel 23 needs to have an overlap width L ₂ equal to the stroke of the seismic isolation structure 80 on the fixed base 22. Requires at least L ₁ + L ₂ . In order to prevent the movement of the seismic isolation cradle 23 when vibration is generated, it is prohibited to place a heavy object in the portion of the width of L ₁ + L ₂ on the panel. Furthermore, in the above relative movement, in order not to inhibit the movement of the overlapping portion, it is not possible to place an object in the region indicated by L ₃ (≈L ₁ ≈L ₂ ) in FIG. Therefore, a dead space where a heavy object cannot be placed corresponding to three times the stroke of the seismic isolation structure 80 (L ₁ + L ₂ + L ₃ ) is created, the working space is limited, and the clean room is limited. There is a problem that it is not possible to effectively use the space.

  Furthermore, the conventional seismic isolation structure suppresses vibration caused by an earthquake by providing a seismic isolation mechanism that receives vibrations with a restoring device including a coil spring and a damping device including an oil damper. However, a rod-shaped damping device provided with an oil damper requires a rod length that is at least as long as the movable stroke, increases the installation space for the seismic isolation structure, and is difficult to install and remove.

  The present invention solves these problems and provides a structure in which a seismic isolation structure is provided on the joists in order to protect a production line and a precision instrument main body installed in a clean room from an earthquake.

In order to solve the above problems, a seismic isolation device of the present invention is supported horizontally by a plurality of joists installed horizontally, a plurality of pillars installed on the joists, and the plurality of pillars. The floor of the building is configured with a fixed mount, an installation hole is formed in a part of the fixed mount, a support column below the installation hole is abbreviated to form a movable space, and inside the installation hole A base isolation frame is installed with a moving space between its peripheral edge and the inner peripheral edge of the installation hole, and a plurality of first tracks extending in a direction perpendicular to the joists are installed at the bottom of the base isolation rack And a first guide slide mechanism that enables movement along the length direction of the first track at the intersection of the plurality of first tracks and the plurality of joists, and in the length direction of the joists. 2nd guide slide mechanism that enables movement along A base isolation support member is interposed between the first track and the joist to horizontally support the first track on the joist, and the base is supported by the length direction of the joist and the first track. It is characterized by being supported movably in the length direction via the seismic isolation bearing member.
By having a structure where the seismic isolation bearing member, the first track and the base isolation frame are stacked and installed in the movable space on the joist, it is easy to install and remove by stacking each member. Can provide a seismic isolation structure. Therefore, the seismic isolation structure of the present invention does not need to process each member at the time of construction, and clean construction that does not generate chips or gas at the site is possible. In addition, if you want to change the location of the seismic isolation object, remove the accumulated seismic isolation bearing member, the first track, and the seismic isolation frame one after another, and re-install the seismic isolation structure in another location. It becomes possible to move.

In the base isolation structure, a transfer plate may be interposed between the first track or the joist and the base isolation support member.
With such a structure, when the surface of the transfer plate is made smoother than the surface of the first track or joist, the movement of the seismic isolation bearing member on the track becomes smooth, and noise associated with the shaking of the member can be suppressed. . Further, when the transfer plate is hardened to increase the surface hardness, the creep phenomenon can be prevented, so that the track is not easily deformed and the seismic isolation support member can move smoothly on the track.

In the seismic isolation structure having the transfer plate, a configuration in which a buffer material is interposed between the first track or the joist and the transfer plate may be adopted.
By having such a structure, it is possible to suppress vibration noise when the seismic isolation bearing member moves on the transfer plate and self-excited vibrations such as the first track and joists. In addition, when the adhesive layer is provided on both sides of the buffer material and the release paper is peeled off and fixed by adhesion at the time of construction, the construction can be easily performed without using a fixing member when attaching the transfer plate.

A restoration / damping device provided in the seismic isolation structure, comprising: a rope body made of a viscoelastic body; and a pair of bundling parts individually holding both ends of the rope body; One is fixed to the seismic isolation bearing member, the other is fixed to the first track or joist, and the pair of bundling portions are applied with a restoring force in a state where they are separated from the natural length of the cable body, It is characterized in that no restoring force is applied in a state where the pair of bundling portions are closer than the natural length of the striatum.
A cord body made of a viscoelastic body exerts a restoring force when stretched longer than the natural length, but does not generate a restoring force when it is bent shorter than the natural length. For this reason, if the rope body is fixed between the base isolation bearing member and joist or between the base isolation bearing member and the first track, the rope body expands and contracts only within the range in which the base isolation bearing member moves during an earthquake. By doing so, the restoring force which returns a seismic isolation bearing member to an original position can be generated. Therefore, since no member moves outside the range in which the seismic isolation support member moves, a space-saving configuration can be achieved.
On the other hand, in the long rod-shaped damping device provided with the oil damper, since the long rod is arranged under the floor, the moving space of the damping device becomes large, which is not realistic.
In addition, the connection between the restoration damping device and the seismic isolation structure can be made prior to construction.In that case, it is not necessary to adjust the restoration damping device at the construction site, and bolt fastening, etc. is not necessary and can be easily constructed. is there.

In the seismic isolation structure, the restoration damping device is provided at both ends of the seismic isolation bearing member along the first trajectory, and the seismic isolation support member is provided at both ends of the seismic isolation bearing member along the joist. A restoration attenuation device is provided.
In the structure in which each viscoelastic strip is provided on both sides of the seismic isolation bearing member, the seismic isolation bearing member moves in any of the four directions, the longitudinal direction along the first track and the longitudinal direction along the joist. As a result, the base isolation frame can be isolated from vibrations in any direction along the horizontal plane.

The above-mentioned seismic isolation structure is a gap buffer stand provided in the moving space, comprising a top plate, an installation surface, and a three-dimensional spacer interposed between them and protruding from the peripheral edge of the top plate. A plurality of protrusions having inclined surfaces are formed on one or both of the top plate lower surface and the installation surface, and the three-dimensional spacer is crushed by relative movement at the time of vibration input of the base isolation frame and the fixed frame. The three-dimensional spacer is provided between the top plate and the installation surface, between the projections, and is provided so as to contact the lower surface of the top plate and the upper surface of the installation surface,
By the relative movement of the seismic isolation frame and the fixed frame at the time of vibration input, the crushed three-dimensional spacer rides on the inclined surface of the protrusion and widens the space between the top plate and the installation surface.
When the fixed base and the base isolation frame come close to each other due to relative movement between the fixed base and the base isolation base during an earthquake, the three-dimensional spacer is crushed by the fixed base and the base isolation base, and the top plate moves upward. By having a structure, the stationary base, the base isolation base, and the top plate can be installed flush with each other, and the gap due to the moving space provided at the peripheral edge of the base isolation base in the work space can be filled without any steps. It becomes possible.
In addition, since the seismic isolation frame and the gap buffer frame are separated, and the top of the gap buffer frame can move freely during an earthquake, it is possible to reduce the dead space where heavy objects of the conventional structure cannot be placed The work space can be used effectively. In addition, the shock caused by vibration during an earthquake can be buffered by the buffering action when the three-dimensional spacer is crushed.

The gap buffer frame, wherein when the protrusion and the three-dimensional spacer are displaced in the horizontal direction due to relative movement during vibration input of the base isolation frame and the fixed frame, the inclined surface of the protrusion A gap buffering pedestal characterized in that the space between the top plate and the installation surface that is spread on the board is at least equal to or greater than the thickness of the top plate.
When the fixed base and the base isolation frame come close to each other due to the relative movement of the fixed base and the base isolation base during an earthquake, the three-dimensional spacer is crushed between the fixed base and the base isolation base, and the top plate is By having a structure that is lifted by a height higher than the thickness of the base plate, the top plate of the base isolation frame is excluded from the movement space and does not hinder the movement of the base isolation frame.

The base isolation floor structure of the present invention is characterized in that the base isolation structure includes the restoration damping device and the gap buffer base.
By providing the above-described seismic isolation structure with the above-described restoration damping device and the above-described gap buffer mount, the seismic isolation that exhibits the operational effects of the above-described restoration damping device and the above-described gap buffer mounts. A floor structure can be provided.

The clean room of the present invention is characterized by comprising the above-mentioned seismic isolation floor structure.
By providing the above-mentioned base isolation floor structure in a clean room, the effect of the base isolation floor structure described above can be obtained.

  According to the present invention, there is no need to process each member at the time of construction, and it is possible to perform a clean construction that does not generate chips or gas at the site, and the seismic isolation structure that can easily change the seismic isolation target location. It is to provide. Further, according to the present invention, it is possible to provide a seismic isolation structure that realizes a seismic isolation structure without damaging the work space by using the joist under the structure floor as the first track and effectively utilizing the underfloor space. Is possible. Furthermore, according to the present invention, it is possible to fill the gap due to the moving space provided in the peripheral portion of the base isolation frame in the work space without any step, and to use it as a movable space work space, and to provide a limited clean area. It can be used effectively.

It is explanatory drawing of an example of the floor structure of a clean room. It is a front view showing the whole floor which is an embodiment of the seismic isolation structure of the present invention. It is a perspective view of the seismic isolation bearing member of this embodiment. It is a disassembled perspective view of the seismic isolation structure of this embodiment. It is a disassembled front view of the seismic isolation structure of this embodiment. It is a perspective view of the seismic isolation structure of this embodiment. It is a front view of the seismic isolation structure of this embodiment. It is a graph showing the relationship between the deformation | transformation amount and reaction force of the viscoelastic body with which the seismic isolation structure of this embodiment is equipped. It is a mimetic diagram of a restoration attenuation device of this embodiment. It is a perspective view of the restoration attenuation device of this embodiment. It is a perspective view of a seismic isolation structure provided with the restoration attenuation device of this embodiment. FIG. 12 (a), FIG. 12 (b), and FIG. 12 (c) show the state of each phase when a vibration input is given to the seismic isolation structure including the restoration damping device of the present embodiment. It is a schematic diagram to represent. It is explanatory drawing of the example of installation of a fixed mount frame and a base isolation frame in a prior art. It is an exploded view of the buffer stand for gaps of this embodiment. FIG. 15A shows a structure of a three-dimensional spacer provided in the gap buffering pedestal of this embodiment and a cross-shaped structure as a component thereof, and FIG. 15A shows a cruciform structure provided for the gap buffering pedestal of this embodiment. FIG. 15B is an explanatory diagram of the cross-shaped structure, FIG. 15C is an explanatory diagram of a three-dimensional spacer in which the cross-shaped structures are arranged at equal intervals, and FIG. 15D is the three-dimensional structure. It is explanatory drawing showing the state by which the spacer was crushed. FIG. 16A shows a top plate (or a bottom plate) used in the gap buffer frame of this embodiment, FIG. 16A is a plan view, and FIG. 16B is a side view. In the buffer stand of this embodiment, it is explanatory drawing of the relationship between a solid spacer, a top plate, and a baseplate. It is a front view in each state when obtained. It is explanatory drawing of the example of installation of the buffer mount for gaps in this embodiment. FIG. 19 (a), FIG. 19 (b), FIG. 19 (c), and FIG. 19 (d) show the state of each phase when vibration input is given to the entire seismic isolation structure of this embodiment. It is a schematic diagram showing. It is a schematic diagram of the modification 1 of the buffer frame for gaps in this embodiment. It is a mimetic diagram of modification 2 of a buffering stand for gaps in this embodiment.

(Clean room floor structure)
The floor structure of one embodiment of a clean room to which the seismic isolation structure of the present invention is applied will be described.
FIG. 1 shows an example of a floor structure of a clean room to which the present invention is applied. The clean room 11 constructed as a part of the building 12 has a double floor, and a plurality of posts 32 having a height of 2 to 6 m are built on a slab 33 made of a concrete structure or the like, and a plurality of posts 32 are formed on the posts 32. Are installed at a pitch of approximately 6 m. Further, a plurality of joists 20 made of H-steel having a cross section of about 100 mm × 100 mm are installed on the girder steel frames 30 at intervals of 600 mm so as to be orthogonal to the girder steel frames 30. A pillar 21 having a height of about 100 mm to 500 mm is erected on the joists 20, and a utility space 31 having a predetermined height for piping and wiring is provided.
Further, a floor structure in which a floor material for a clean room of about 600 mm square made of a perforated plate and grating for realizing air suction is laid as the fixed base 22 is formed on these columns 21.
In addition, the height of the post 32 described here, the pitch of the girder steel frame 30, the size of the joists 20, the pitch, and the like are merely examples, and can be appropriately set according to the size and scale of the clean room 11 to be installed.

(Seismic isolation structure)
Next, the seismic isolation structure 80 of the first embodiment of the present invention applied to the floor structure on which the above-described fixed mount 22 is laid will be described with reference to FIG.
In FIG. 2, the precision device 10 that is a seismic isolation object is illustrated by a two-dot chain line for the sake of explanation. In the following description, the right direction in FIG. 2 is described as + X direction, the back direction in FIG. 2 is defined as + Y direction, and the upper direction of the seismic isolation structure (that is, the upper direction in FIG. 2) is described as + Z direction.

  In the clean room 11 having the seismic isolation structure of this embodiment, a plurality of joists 20 are installed horizontally on a plurality of horizontally installed large beam steel frames 30, and a fixed gantry (fixed floor, access floor) 22 is formed of the joists 20. It is installed on a plurality of support columns 21 erected on the top. An operator of the clean room 11 mainly performs work on the fixed mount 22.

A rectangular installation hole 13 is formed in a part of the fixed base 22 of the clean room 11, a support column 21 below the installation hole 13 is formed, and the support column 21 below the installation hole 13 is omitted to form a movable space 13A. Has been. A base isolation structure 50 is installed inside the installation hole 13 to form a base isolation structure 80.
In the embodiment shown in FIG. 2, the base isolation frame 50 is a rectangular structure slightly smaller than the installation hole 13, and a moving space 13 a is provided between the base isolation frame 50 and the inner peripheral edge of the peripheral installation hole 13. , 14b are formed. The upper surface of the base isolation frame 50 and the upper surface of the fixed frame 22 are flush with each other. On the seismic isolation rack 50, the precision device 10 that is a seismic isolation object can be installed in the clean room 11.

  Here, the base isolation frame 50 is fixed to the first track 90 made of H-steel on the lower surface 50c, and the first track 90 is installed on the base isolation support member 100. A method for fixing the base isolation frame 50 and the first track 90 is fixed by general welding. However, for example, bolt fixing may be performed and assembly may be performed at the time of construction. The seismic isolation pedestal 50 has a structure in which panels for installing the precision device 10 are connected to each other by welding on a structure in which steel materials are assembled in a cross beam shape. In this embodiment, it is a cross-girder structure, and a step is provided by providing an edge 50d at the peripheral portion in order to install a gap buffer frame 300 described later.

  The seismic isolation bearing member 100 has a mechanism that can freely move relative to the first track 90 in the Y direction of FIG. 2 by a predetermined stroke, thereby fulfilling the seismic isolation function in the Y direction. Next, since the seismic isolation bearing member 100 is installed with the joist 20 as the second track and has a mechanism that can freely move relative to the X direction in FIG. 2 by a predetermined stroke, it performs the seismic isolation function in the X direction. be able to. The structure and operation of the seismic isolation bearing member 100 will be described in detail later.

The seismic isolation structure 80 can move within the range of the moving space (13a, 14b, etc. in the figure) when the seismic isolation support member 100 performs a seismic isolation function and the seismic isolation rack 50 moves on the XY plane.
As described above, the seismic isolation structure 80 of the present embodiment is characterized in that the joist 20 that is a clean room floor structure member is effectively used to form the second track.

Next, the structure of the seismic isolation bearing member 100 provided in the seismic isolation structure 80 of this embodiment will be described. FIG. 3 is a perspective view of the seismic isolation bearing member 100.
The seismic isolation support member 100 includes a roller mechanism 104 including a shaft 101, two bearings 102 installed at both ends of the shaft 101, and a housing 103 that supports an outer ring thereof by a holding portion 103d. The bearing 102 is a rolling bearing in which a rolling element is interposed between the inner ring and the outer ring.

  A shaft 101a is formed near both ends of the shaft 101, the inner ring of the bearing 102 is inserted from the end of the shaft 101 to the vicinity of the flange 101a, and the bearing 102 is attached to both ends of the shaft 101 by fitting. Yes. In the seismic isolation bearing member 100, the housing 103 has a concave groove 103a corresponding to each track width, and the seismic isolation bearing member 100 is separated from the trajectory together with the plate near the both ends of the shaft 101. Derailment can be prevented.

  A rectangular block type housing 103 has a groove 103a extending in the Y direction in FIG. 3 at the center of the upper surface thereof, and two grooves are formed so as to extend in the width direction (X direction in FIG. 3) of the groove 103a. A shaft 101 is arranged. A round hole type holding portion 103d is formed on the thick bearing walls 103c and 103c formed at both ends in the width direction of the concave groove 103a, and the bearing 102 is included in the holding portion 103d. The shaft 101 between the bearings 102 and 102 is supported by the bearings 102 and 102 so that the upper part of the peripheral surface protrudes slightly above the inner bottom surface 103f of the concave groove 103a.

  In addition, a storage groove 103e that is larger than the opening of the holding portion 103d on the concave groove 103a side and can accommodate the gutter plate 101a is formed in the opening on the concave groove 103a side of the holding portion 103d. By storing the saddle plate 101a in the storage groove 103e, the saddle plate 101a fits along the inner surface of the concave groove 103a, and the seismic isolation bearing member 100 slides along the first track 90 without derailment by the concave groove 103a. can do.

  A lower concave groove 103a extending in the X direction in FIG. 3 is formed in the center of the lower surface of the housing 103, and two shafts are formed so as to extend in the groove direction (Y direction in FIG. 3) of the concave groove 103a. 101 is arranged. Bearings 102 are housed in thick bearing walls 103c and 103c on both sides of the concave groove 103a on the lower side. The configuration of the lower bearing 102, the two shafts 101, and the bearing holding portion 103d is the same as that of the bearing 102, the shaft 101, and the bearing holding portion 103d on the upper side of the housing 103. The detailed explanation is omitted because the only difference is the difference.

Further, two roller mechanisms 104 are arranged in parallel on the upper portion of the housing 103 to constitute a slide mechanism 105a that realizes a uniaxial movement in the Y direction. Similarly, a slide mechanism 105 b that realizes uniaxial movement in the X direction is configured by arranging two roller mechanisms 104 in parallel at the bottom of the housing 103. However, in the present embodiment, one slide mechanism 105a, 105b is constituted by two roller mechanisms 104, respectively, but an appropriate number is determined according to the weight of the seismic isolation object and the load resistance of the bearing, shaft, etc. The roller mechanism 104 may be arranged as a set of slide mechanisms.
Accordingly, a mechanism for receiving vibrations at the time of vibration on the XY plane, which is added from the upper side and the lower side of the seismic isolation bearing member 100 together with each axis track, is configured.

  Next, the seismic isolation structure 80 provided with the seismic isolation bearing member 100 will be further described with reference to FIGS. FIG. 4 is a diagram showing a state in which the seismic isolation structure 80 in the present embodiment shown in FIG. 6 is disassembled. FIG. 5 is a diagram showing a state in which the seismic isolation structure 80 in the present embodiment shown in FIG. 7 is disassembled. As shown in these figures, the seismic isolation bearing member 100 is provided between the first track 90 and the joist (second track) 20.

  Here, as shown in FIG. 4, the first track is made of H-shaped steel, and two flanges 90a, 90a made of steel and a web 90b are integrated into the H-shape. The joist 20 is also made of H-shaped steel, and the two flanges 20a and 20a and the web 20b are integrated into the H-shape.

Furthermore, as shown in FIGS. 4 to 7, a transfer plate 114 and a buffer material 115 are interposed between the base isolation bearing member 100 and the first track 90 and between the base isolation bearing member 100 and the joist 20. .
The transfer plate 114 is formed with locking pieces 114b rising at right angles as shown in FIG. 4 on both sides in the width direction of the rectangular steel plate 114a, and has an inverted U-shaped cross section as shown in FIG. This inverted U-shaped cross section is set slightly wider than the width of the flange 20a (or flange 90a) of the joist 20 (or first track 90) as shown in FIG. It is possible to prevent the plate 114 from falling off the joist (or the first track 90).

In the present embodiment, since the widths of the upper and lower flanges 90a and the flanges 20a of the first track 90 and the joists 20 are equal, the transfer plate 114 and the cushioning material 115 are respectively installed on the first track 90 and the joists 20. However, when the flanges 90a and 20a have different widths, the widths of the locking pieces 114b raised on both end faces of the transfer plate 114 are set accordingly. Must be used.
Similarly, with respect to the concave groove 103a of the seismic isolation support member 100 provided for the purpose of preventing derailment and the saddle plate 101a provided to the shaft 101, the distance between both wall surfaces 103b of the concave portion is as shown in FIG. The width of the transfer plate 114 needs to be slightly wider, and needs to be set appropriately according to the width of the transfer plate 114.

  By interposing the transfer plate 114 between the seismic isolation bearing member 100 and the first track 90 or between the seismic isolation bearing member 100 and the joist 20, the motion of the seismic isolation bearing member 100 on the track becomes smooth. For this reason, the surface roughness of the rolling surface 114c of the transfer plate 114 on which the seismic isolation bearing member 100 moves is appropriately regulated, and a hardened steel material is used for the purpose of preventing creep. It is preferable.

The buffer material 115 is provided with an adhesive layer on both sides, and the release paper is peeled off and fixed by adhesion at the time of construction. It is preferable to use rubber or elastomer resin as the material, because the elastic material is used to compensate for minute irregularities between the joist 20 and the transfer plate 114 or between the first track 90 and the transfer plate 114. This is because it can be firmly bonded. At the same time, vibration sound when the seismic isolation bearing member 100 moves along the transfer plate 114 and self-excited vibrations such as the first track 90 and the joists 20 can be suppressed.
The buffer material 115 is sized to fit within the first track 90 or the installation surface of the joist 20 and the transfer plate 114, but the entire surface is not necessarily bonded as long as the adhesive force can be maintained.

  As described above, the seismic isolation structure 80 of the present embodiment stacks the cushioning material 115, the transfer plate 114, the seismic isolation support member 100, the transfer plate 114, the cushioning material 115, and the first track 90 on the joists 20 in order. It is composed of that. In this embodiment, since it is configured by stacking these members, it is possible to perform clean construction without the need for processing that generates chips or gas during construction on the clean room floor. Moreover, it can be easily constructed by stacking, and when it is removed, it is only necessary to remove it in the order of stacking, so that the removal is easy. For this reason, the position of the base isolation frame (base isolation floor) 50 and the fixed frame base (fixed floor) 22 can be easily exchanged when it is desired to change the installation location of the precision instrument in the clean room.

(Restoration damping device)
In the present embodiment, in order to perform restoration and damping with respect to vibration, a restoration damping device using a viscoelastic body having a damping action and an elastic action is used. FIG. 8 is a graph showing the relationship between the amount of deformation and the reaction force of the sheet-like viscoelastic body used in this embodiment. A viscoelastic body given a displacement generates a reaction force in proportion to the displacement. However, when the displacement is released, hysteresis damping (hysteresis) is exhibited, and vibration energy is absorbed by this hysteresis damping. For the viscoelastic body, materials with appropriate damping and elastic characteristics can be selected according to the weight of the seismic isolation object, the amplitude of vibration input, etc. For example, elastomer resin or rubber can be adopted. it can. Further, the shape does not need to be a sheet shape shown in the present embodiment, and may be a string shape or a tape shape as an example. More specifically, a hyper gel sheet (trade name) manufactured by Exeal Corporation can be used.

The restoring attenuation device in this embodiment is shown in FIGS. FIG. 9 is a model diagram, and is shown as a schematic form in which the shape of the binding hardware 221 and 231 shown in FIG. 10 is partially omitted.
As shown in the figure, the restoration damping device 200 has a bundling portion 220 and a bundling portion 230 at both ends of the viscoelastic sheet 210. Further, the viscoelastic sheet 210 can be selected in an appropriate number according to the necessary restoring force. In particular, when a plurality of sheets are used, the viscoelastic body sheet 210 and the bundling section 230 at both ends have a viscoelastic body. It is preferable to interpose the insertion plate 201 between the sheets 210. By inserting the insertion plate 201, it is possible to prevent unnecessary frictional force from acting between the viscoelastic sheet 210. The frictional force depends on environmental parameters such as temperature and dust adhesion, and complicates the restoring characteristics and damping characteristics. By eliminating this, the characteristics can be easily controlled.

  In the bundling portions 220 and 230, the viscoelastic sheet 210 is fixed by a fixing bolt 240 and a fixing nut 250 to which a fastening force is applied and sandwiched. At this time, it is preferable not to directly fasten with the seating surfaces of the fixing bolt 240 and the fixing nut 250, but to be clamped on a wider surface via the insertion plate 201 or the binding metal 221 (or the binding metal 231).

  Furthermore, as shown in FIG. 10, in this embodiment, the viscoelastic body sheet 210 is held in each binding portion by two fixing bolts 240 and fixing nuts 250. What is necessary is just to fix in an appropriate location according to the width. In addition, the length A and thickness of the viscoelastic sheet 210 are appropriately set with respect to the amplitude of the vibration input at the time of the assumed earthquake.

As shown in FIG. 10, the bundling bracket (the seismic isolation support member fixing side) 221 forms a mounting piece 221c that stands up at right angles to the fastening piece 221b that fastens the viscoelastic sheet 210, and the mounting piece 221c The four fixed holes 221a are fixed to the seismic isolation bearing member 100 by bolting.
Similarly, the bundling bracket (track fixed side) 231 is formed in an inverted U shape by forming two mounting pieces 231c and 231c that stand vertically downward and are opposed to the fastening piece 231b that fastens the viscoelastic sheet 210, respectively. Thus, the fixing pieces 231c and 231c are fixed to the transfer plate 114 installed on the first track 90 or the joists 20 by bolts through the fixing holes 231a formed in the mounting pieces 231c and 231c.

FIG. 11 shows an example in which the restoration damping device 200 is provided in the seismic isolation structure 80 in the present embodiment. In the following description, as indicated by the coordinate system in FIG. 11, the diagonally lower left direction in FIG. 11 is described as + X direction, the diagonally downward right direction in FIG. 2 is defined as + Y direction, and the upward direction in FIG. To do.
The restoration damping device 200 is provided in the + X direction, the −X direction, the + Y direction, and the −Y direction with the seismic isolation bearing member 100 as a center.
In FIG. 11, the joist 20 and the first track 90 are not shown, but the joist 20 is installed under the transfer plate 114 arranged along the + X direction and the −X direction, and the + Y direction and −Y The first track 90 is installed on the transfer plate 114 arranged along the direction.

A transfer plate 114 fixed to the joist 20 with buffer material 115 having adhesive layers formed on both sides is installed on the joist 20, and the seismic isolation support member 100 is installed on the transfer plate 114 so as to be movable. Further, a transfer plate 114 is movably installed on the seismic isolation support member 100, and the transfer plate 114 is fixed to the first track 90 by a cushioning material 115 having an adhesive layer on both sides to constitute a seismic isolation structure 80. ing.
As shown in FIG. 11, each restoration damping device 200 places the seismic isolation bearing member 100 in four directions (+ X direction, −X direction, + Y direction, −Y direction) of the seismic isolation support member 100 with respect to the base isolation structure 80. It arrange | positions so that it may each surround, and it fixes to the seismic isolation bearing member 100 and the transfer board 114, respectively. By being configured in this way, it is possible to give a restoring effect and a damping effect to vibration on the XY plane. Further, when the restoration damping device 200 is installed in the seismic isolation structure 80, it is attached in a natural length state in which the viscoelastic sheet 210 is not stretched. Therefore, the connection part with the binding metal fitting 231 provided on the transfer plate 114 is provided at an appropriate location matching the length A of the viscoelastic sheet 210, and the distance between the binding part 220 and the binding part 230 is made equal to the length A. .

  As described above, the connection between each restoration damping device 200 and the seismic isolation structure 80 is fastening with bolts, but these may be performed in advance prior to construction. In that case, it is not necessary to make adjustments during construction of the seismic isolation structure 80, and it is not necessary to fasten bolts during construction.

  FIGS. 12A, 12B, and 12C show the states of the respective phases when vibration input in the X direction due to an earthquake or the like is input to the seismic isolation structure 80 including the restoration damping device 200 described in FIG. . 11 shows a state where the + X direction in FIG. 11 is arranged on the right side in FIG. 12 and the Y direction is viewed from the −Y direction. 12A shows a steady state, FIG. 12B shows a state where the seismic isolation bearing member 100 is displaced in the + X direction, and FIG. 12C shows a state where it is displaced in the −X direction.

As described above, in FIG. 12A in the steady state, each viscoelastic sheet 210 is installed with the original natural length A, and there is no stress or deflection. As shown in FIG. 12 (b), when providing the X direction of the vibration input to the seismic isolation structure 80, the seismic isolation bearing member 100 has a displacement x ₁ to the steady state. Thus, in the left side of the restoring damping apparatus 200 _l, the distance between the clamps bundling unit 220 and the bundling unit 230 is separated acts tensile stress A + _{x 1,} and the viscoelastic sheet 210. This tensile stress becomes a restoring force in the −X direction in the seismic isolation structure 80, and works to return the seismic isolation bearing member 100 to the center line O. Further, when the viscoelastic sheet 210 returns to the original length A, hysteresis loss occurs and the vibration energy is attenuated.
On the other hand, in FIG. 12 (b) right restoration damping device 200 _r, the bundling unit 220 and the bundling unit 230 close, because the distance between the clamps is the _{A-x 1,} the viscoelastic sheet 210 deflects, restoring damping The device _200r does not generate a restoring force.

12 seismic isolation structure 80 (a) showing a steady state is vibrating in the X direction input, after mutations in the seismic isolation bearing member 100 is + X direction as shown in FIG. 12 (b), the restoration damping apparatus 200 _l acts restoring force of, while attenuating further via the state of FIG. 12 (a), the inertial force, the seismic isolation bearing member 100 has a displacement x ₂ in the -X direction as shown in FIG. 12 (c). In this case, the distance between the clamps is the A-x _2, since the viscoelastic sheet 210 deflects, the restoring force is not generated. On the other hand the distance between the clamps of the restoration damping device 200 _r to generate a restoring force by A + x _2, and the tensile stress.

  As described above, when the restoration damping device 200 is installed between the seismic isolation bearing member 100 and the joist 20, or between the seismic isolation bearing member 100 and the first track 90, the binding portion 220 of the restoration damping device 200 and Of course, when the bundling portion 230 is separated, the viscoelastic sheet 210 bends, so that any member does not move outward in the horizontal direction of the moving range of the seismic isolation support member 100. Therefore, since no member moves outside the range in which the seismic isolation support member moves, a space-saving configuration can be achieved.

  In the present embodiment, as described with reference to FIG. 11, the restoration attenuation device 200 is also installed in the + Y direction and the −Y direction in FIGS. 11 and 12. Therefore, the restoring attenuation effect in the + X direction and the −X direction described above also works in the + Y direction and the −Y direction, and the restoring damping effect can be exhibited with respect to vibration input in any direction on the XY plane.

(Gap buffer stand)
In the present embodiment, the gap buffer base 300 provided in the seismic isolation structure 80 will be described below.
As shown in FIG. 2, the gap buffer gantry 300 includes a gap buffer gantry 300, the seismic isolation frame 50, and the fixed gantry 22 in the moving space 13 a between the seismic isolation frame 50 and the fixed gantry 22. Installed to be flush. In order to secure an installation location, a stepped edge 50d is provided on the four peripheral edges of the base isolation frame 50, and the gap buffer frame 300 is installed thereon. In the present embodiment, the edge 50d is formed of a steel member assembled in a cross beam shape.

As shown in the exploded view of FIG. 14, the gap buffer base 300 has a structure in which a three-dimensional spacer 310 is sandwiched between a top plate 320a having a thickness t and a bottom plate 320b. The three-dimensional spacer 310 is configured by regularly arranging a plurality of cross-shaped structures 312. A plurality of hemispherical protrusions 321 regularly arranged at equal intervals are formed on the lower surface of the top plate 320a, and a plurality of hemispherical protrusions 321 are formed on the upper surface of the bottom plate 320b.
In the present embodiment, the top plate 320a and the bottom plate 320b are the same, but are arranged upside down.

  In the present embodiment, the edge 50d of the base isolation frame 50 at the installation location is not a flat surface but is formed of a steel frame assembled in a cross-girder shape, and therefore, a bottom plate 320b is provided to secure a flat surface, and the upper surface thereof is installed on the installation surface 340. And However, for example, when the installation location is a flat surface, the three-dimensional spacer 310 may be disposed and the bottom plate 320b may be omitted by using the upper surface of the edge 50d of the base isolation frame 50 as the installation surface 340. This form will be described later as a first modification with reference to FIG.

  FIGS. 15A and 15B show the structure of the cross-shaped structure 312 and FIGS. 15C and 15D show the behavior when an impact is applied to the three-dimensional spacer 310. FIG. In FIGS. 15C and 15D, the right side is the + X direction, the upper side is the + Y direction, and the upper surface side is the + Z direction, as shown by the coordinate system in the drawing.

  FIG. 15A is an exploded view of the cross-shaped structure 312. The cross-shaped structure 312 is composed of two rectangular plates 311 having a substantially rectangular shape with a long side length p and a short side length h and a plate thickness w. The rectangular plate 311 is provided with a slit 313 having a depth d extending from one side at the center of the long side, and there is a relationship of d ≧ h / 2 between the depth d and the length h of the short side. The two rectangular plates 311 can form a cross-shaped cross-shaped structure 312 by crossing and assembling the slits 313 (see FIG. 15B).

  The cross-shaped structure 312 can be self-supporting, and as shown in the schematic view of FIG. 15C, the three-dimensional spacer 310 is configured by arranging the cross-shaped structures 312 in a self-supporting state at regular intervals and in a lattice shape. The cross-shaped structure 312 is not only capable of self-supporting, but also has a predetermined strength against the force from the Z direction in FIG. 15 (c). In proportion to the quantity, the strength in the Z direction increases. Therefore, it is important to arrange a number of cross-shaped structures 312 according to the required strength.

  In addition, the three-dimensional spacer 310 is squeezed in response to an impact from the X direction in the drawing, and the three-dimensional spacer 310 is crushed, and the crossing angle of the rectangular plate 311 constituting the cross-shaped structure 312 changes to change the impact. It can be absorbed (see FIG. 15 (d)). As a result, the three-dimensional spacer 310 contracts in the X direction and extends in the Y direction. FIG. 15D shows the behavior when an impact is applied from the X direction. Similar results are obtained for the impact from the Y direction, and the rectangular plate 311 is viewed from the oblique direction. If it is an impact, the impact can be absorbed by being crushed. Therefore, when installing the gap buffer frame 300, it is preferable to arrange the three-dimensional spacer 310 so that the rectangular plate 311 is inclined with respect to the impact direction.

16A is a plan view of the top plate 320a or the bottom plate 320b, and FIG. 16B is a side view of the top plate 320a or the bottom plate 320b.
Protruding portions 321 are arranged on the top plate 320a at triangular lattice positions with gaps v at equal intervals q. Here, the interval q between the protruding portions 321 and the rectangular plate 311 constituting the cross-shaped structure 312 are arranged. The long side length p has a relation of q≈p / 2, and the thickness w of the rectangular plate 311 and the gap v of the protrusion have a relation of v≈w. Accordingly, as shown in FIG. 17, the three-dimensional spacer 310 and the top plate 320 a can be positioned along the gap between the protrusions 321 by matching the planar positions of the three-dimensional spacer 310 and the top plate 320 a.

  At the time of positioning, an adhesive may be applied to the contact portion between the three-dimensional spacer 310 and the top plate 320a in order to prevent the three-dimensional spacer 310 and the top plate 320a from coming off easily. However, since the adhesive surface needs to be easily peeled when a lateral impact is applied to the three-dimensional spacer 310, an adhesive having a weak adhesive force in the shear direction must be selected.

  The protrusion 321 of the top plate 320a has a hemispherical shape having a height s, and has a gentle inclined surface 321a with respect to the flat plate plane portion 322 of the top plate 320a. However, the protrusion 321 does not necessarily have a hemispherical shape, as long as it has a gentle inclined surface with respect to the plate flat surface portion 322 and can position the three-dimensional spacer 310 as described above. For example, the protrusion 321 may be a pyramid shape or a cone shape.

  A protrusion 321 having the same configuration as that of the top plate 320a is formed on the bottom plate 320b, and the three-dimensional spacer can be positioned by matching the planar positions of the three-dimensional spacer 310 and the bottom plate 320b. At this time, it is possible to prevent the three-dimensional spacer 310 and the top plate 320a from being detached in a steady state by applying an adhesive having a weak adhesive force in the shear direction to the contact portion between the three-dimensional spacer 310 and the bottom plate 320b. Similar to the protrusions formed on the top plate 320a, the protrusions 321 formed on the bottom plate 320b can have various shapes.

  As described above, the three-dimensional spacer 310 is crushed against an impact from a predetermined direction. At this time, according to the movement of the three-dimensional spacer 310 being crushed, the three-dimensional spacer 310 slides on the inclined surface 321a of the protrusion 321 provided on the top plate 320a and the bottom plate 320b. Thereby, the three-dimensional spacer 310 is pushed upward by the height s of the protrusion with respect to the bottom plate 320b, and similarly the top plate 320a is pushed up by the height s of the protrusion 321 with respect to the three-dimensional spacer 310. Therefore, the top plate 320a is pushed up by 2 s with respect to the bottom plate 320b. (Strictly speaking, even if the cruciform structure 312 is crushed and the protrusion 321 is slid, the cruciform structure 312 does not reach the hemispherical apex of the protrusion 321; (Slightly less than 2s)

  Here, in the present embodiment, the relationship between the height s of the protrusion 321 and the plate thickness t is 2s> t. Therefore, when an impact is applied to the cross-shaped structure 312 from a predetermined direction, the top plate 320a is pushed upward by a thickness t or more of the plate itself. As a result, the gap buffer pedestal 300 provided in the moving space between the base isolation frame 50 and the fixed gantry 22 has a top plate 320a on the top and a thickness t of the top plate 320a more than the thickness t according to the collapse of the three-dimensional spacer 310 during the earthquake. It is lifted and excluded from the horizontal movement space of the base isolation frame 50, and the relative movement between the base isolation frame 50 and the fixed frame 22 is not hindered.

  In the present embodiment, the top plate 320a and the bottom plate 320b have protrusions 321. However, if the protrusions 321 are provided on one of the top plates 320a and 320b, the same effect can be obtained. Can do. However, the relationship between the thickness t of the top plate 320a and the height s of the protrusion 321 must be s> t. As a result, the top plate 320a can be lifted upward in accordance with the collapse of the three-dimensional spacer 310 during an earthquake, and the relative movement between the base isolation frame 50 and the fixed frame 22 is not hindered.

FIG. 18 shows a state in which the gap buffering base 300 is installed on the edge 50d of the base isolation base (base isolation floor) 50 in this embodiment. At this time, the three-dimensional spacer 310 is positioned between the top plate 320a and the bottom plate 320b.
Here, FIG. 13 shows the structure of the gap portion of the seismic isolation structure in the prior art, and the present embodiment will be described below in comparison with this. In FIG. 13 and FIG. 18, it is assumed that the vibration input due to the earthquake has a problem only in the left-right direction in the figure. By receiving this vibration input, the seismic isolation frame 50 and the fixed frame 22 are moved relative to each other in the left-right direction.

In the conventional seismic isolation structure shown in FIG. 13, a movable stroke of the seismic isolation structure is provided between the seismic isolation base 50 and the fixed base 22 so as not to disturb the relative movement of the base isolation base 50 and the fixed base 22. equal or gap 330 of length L ₁ is provided. The gap 330 is covered with the panel 23 so that there is no danger to the operator. The panel 23 is fixed to the base isolation frame 50 and operates integrally with the base isolation frame 50 when vibration is input due to an earthquake. Since the panel 23 bends by its own weight, the panel 23 has an overlapping portion with the fixed mount 22, and is supported by the fixed mount 22 at the overlapping portion. At the end of the panel 23, the fixed gantry 22 and the panel 23 are stepped by the thickness of the panel 23. Even when the base isolation frame 50 and the fixed base 22 are separated from each other by the above-described relative motion, the panel 23 needs to be supported by the base isolation base 22, so the length of the overlapping portion of the panel 23 and the base isolation base 22 is long. is L _2, it is necessary to equal or greater length of the movable stroke of the aforementioned relative motion. Since the panel 23 is supported by the fixed mount 22 as described above, a heavy object is disposed on the panel 23 so that the seismic isolation structure can smoothly move relative to the vibration input due to the earthquake. I can't. In addition, since the relative motion described above is not hindered, it is not possible to place an object in the region L ₃ that is the movable range of the panel 23. Here, L ₁ ≒ L ₂ ≒ L ₃ ≒ Movement stroke of seismic isolation structure In the conventional seismic isolation structure, there is a dead space that cannot place three times the movable stroke of the seismic isolation structure. Will be born.

On the other hand, in the present embodiment, by referring to FIG. 18, the gap buffering pedestal 300 is installed on the edge 50 d of the base isolation base 50 having a step. After installation, the floor surface of the base isolation frame 50 and the floor surface of the fixed frame 22 are flush with the top surface of the top plate 320a of the gap buffer frame 300. The width of the step provided on the base isolation frame 50 is equal to the movable stroke in the left-right direction of the base isolation structure 80 and is l ₁ .

Due to the relative movement of the base isolation frame 50 and the fixed frame 22, the top plate 320 a rides on the fixed frame 22. This operation will be described later with reference to FIG. 19, wherein in order not to inhibit this behavior, was banned be installed things top plate 320a region having the same width as l ₂ on the fixed frame 22 An area is required. Also in the region l ₁ , an object cannot be placed because it does not hinder the operation of riding on the fixed mount 22. Therefore, in this embodiment, an area where l ₁ + l ₂ cannot be installed is necessary, and l ₁ ≒ l ₂ ≒ movable stroke of the seismic isolation structure, so install an object having a width twice the movable stroke. A dead space that cannot be created is born.

  As described above, the dead space becomes 2/3 as compared with the conventional seismic isolation structure, and the work space can be efficiently used by the technique described in the present invention. In addition, since there is no step in the work space, it is possible to eliminate dangers such as a worker hitting.

FIGS. 19A to 19D show the behavior of the gap buffering pedestal 300 with respect to vibration during an earthquake when the seismic isolation structure 80 includes the gap buffering pedestal 300 in the present embodiment.
In FIG. 19, as indicated by the coordinate system in the figure, the right direction in the figure is the + X direction, the direction toward the back side of the paper in the figure is the + Y direction, and the upward direction in the figure is the + Z direction. Further, the initial position of the seismic isolation structure 80 in a steady state is represented by a center line O.

  FIG. 19A shows a steady state in which the gap buffering base 300 is installed on the edge 50 d of the base isolation base (base isolation floor) 50 of the base isolation structure 80. At this time, the three-dimensional spacer 310 is positioned by the top plate 320a or the bottom plate 320b. Moreover, the top plate 320a is installed without a step difference from the base isolation frame 50 and the fixed frame 22.

  As shown in FIG. 19B, when the vibration in the X direction acts on the seismic isolation structure 80 during the earthquake, the base isolation structure 80 is displaced in the −X direction. Along with this, the three-dimensional spacer 310 provided in the gap buffer frame 300 is crushed, and at that time, it absorbs vibrational energy and provides a damping action. At the same time, when the three-dimensional spacer 310 rides on the slopes of the protrusions 321 of the top plate 320a and the bottom plate 320b, the top plate 320a is pushed up by a thickness t or more and rides on the fixed base 22. Accordingly, the gap buffering pedestal 300 does not hinder the relative movement of the fixed gantry 22 and the seismic isolation pedestal 50 due to the seismic isolation effect of the seismic isolation structure 80.

  FIG. 19 (c) shows a steady state of FIG. 19 (a) seismic isolation structure 80, which is subjected to X-direction vibration due to an earthquake. The force is applied, and the seismic isolation structure 80 returns to the center line O, and is further displaced in the + X direction due to inertia. At this time, as before, the three-dimensional spacer 310 of the gap base isolation frame provided on the edge 50d of the base isolation frame 50 is crushed, and at the same time, the three-dimensional spacer 310 is formed on the inclination of the protrusions 321 of the top plate 320a and the bottom plate 320b. By riding on, the top plate 320a is pushed up by a thickness t or more and rides on the fixed base 22.

  After the state of FIG. 19 (c), the seismic isolation structure 80 again passes through the center line O and has a displacement in the −X direction. However, at this time, the three-dimensional spacer 310 has already been crushed, and once it is crushed, it does not have a mechanism for restoring itself, and therefore does not exhibit a buffering effect again.

  FIG. 19D shows a state in which the relative motion between the seismic isolation gantry 50 and the fixed gantry 22 is reduced and stopped due to the damping effect of the gap buffer gantry 300 and the restoring damping device 200 after a while after the vibration is input due to the earthquake. . At this time, the three-dimensional spacer 310 provided on either the left or right gap buffer base 300 in FIG. 19 is also crushed.

  In FIG. 19, attention is paid to the action of the gap buffer base 300 with respect to vibration input in the X direction, but in the Y direction also in FIG. The same effect can be obtained by installing each.

In the present embodiment, the rectangular plate 311, the top plate 320a, and the bottom plate 320b are made of steel in view of strength, availability, and cost, and are preferably pressed.
In the present embodiment, the three-dimensional spacer 310 is a lattice-shaped structure group in which cross-shaped cross-shaped structures 312 are regularly arranged. However, in the present invention, the structure of the present embodiment is merely an example, and it is only necessary to have a structure that can be crushed while exerting a buffering action against an impact from the side.
Further, in the present embodiment, the gap buffering pedestal 300 is installed on the edge 50d which is the step portion of the seismic isolation pedestal 50, but the step is on the fixed gantry 22 and is installed on the edge of the fixed gantry. However, the same effect can be obtained.
In addition, in this embodiment, the top plate 320a rides on the fixed base 22 by the relative movement of the base isolation frame 50 and the fixed base 22, but when the base isolation structure 80 is installed near the wall, the top plate 320a In order to ride on the base isolation frame 50, the width l ₂ where the object of FIG. 18 cannot be installed may be set on the side of the base isolation frame.

20 and 21 show a first modification and a second modification of the present embodiment, respectively, and correspond to FIG. In addition, about the same form as the above-mentioned embodiment, the same code | symbol is attached | subjected and demonstrated.
(Modification 1)
As shown in FIG. 20, it is possible to install the gap buffering pedestal 300 with the upper surface of the edge 50 d of the seismic isolation pedestal 50 as the installation surface 340. In the case where the protrusion 321 is not formed on the installation surface 340 as shown in the figure, as described above, the height of the protrusion formed on the 320a must be equal to or greater than the plate thickness of 320a. However, the installation surface 340 which is the upper surface of the edge 50d of the base isolation frame 50 may have a protrusion.

(Modification 2)
As shown in FIG. 21, the gap buffer mount 50 may be provided with an edge 22 d provided on the fixed mount 22 so as to form a step. This is because the action of the gap buffering pedestal is due to the relative movement of the fixed gantry 22 and the seismic isolation pedestal 50, and it does not matter which of them is the main motion.

DESCRIPTION OF SYMBOLS 10 ... Precision equipment 11 ... Clean room 12 ... Building 13 ... Installation hole 13A ... Moveable space 14a ... Move space 14b ... Move space 20 ... joist (second track) )
21 ... post 22 ... fixed mount (fixed floor, access floor)
30 ... Large beam steel 31 ... Utility space 32 ... Post (post)
33 ... Slab 50 ... Seismic isolation frame (base isolation floor)
80 ... Seismic isolation structure 90 ... First track 100 ... Seismic isolation bearing member 101 ... Shaft 102 ... Bearing 103 ... Housing 103a ... Groove 104 ... Roller mechanism 105a ... first guide slide mechanism 105b ... second guide slide mechanism 114 ... transfer plate 115 ... buffer material 200 ... restoration damping device 201 ... insertion plate 210 ... viscoelastic body Sheet (viscoelastic strip)
220 ... Bundling part (Seismic isolation bearing fixed side)
221 ... Bundling bracket 230 ... Bundling part (track fixed side)
231 ... Bundling fitting 300 ... Gap buffer frame 310 ... Three-dimensional spacer 311 ... Rectangular plate 312 ... Cross-shaped structure 313 ... Slit 320a ... Top plate 320b ... Bottom plate 321 ... Projection 340 ... Installation surface

Claims (9)

The floor of the building is configured with a plurality of joists installed horizontally, a plurality of pillars installed on these joists, and a fixed gantry supported horizontally by these pillars,
An installation hole is formed in a part of the fixed mount, a column below the installation hole is abbreviated to form a movable space, and a seismic isolation mount is provided on the inner side of the installation hole and an inner periphery of the installation hole. A plurality of first tracks extending in the direction orthogonal to the joists are installed at the bottom of the base isolation frame,
Movement along the length direction of the joists at the upper portion of the first guide slide mechanism that enables movement along the length direction of the first tracks at the intersections of the plurality of first tracks and the joists A seismic isolation support member interposed between the first track and the joist and horizontally supporting the first track on the joist.
The base isolation structure, wherein the base isolation frame is movably supported through the base isolation bearing member in the length direction of the joists and the length direction of the first track.   The base isolation structure according to claim 1, wherein a transfer plate is interposed between the first track or the joist and the base isolation support member.   The seismic isolation structure according to claim 2, wherein a buffer material is interposed between the first track or the joist and the transfer plate. A restoration damping device provided in the seismic isolation structure according to claim 1, comprising: a rope body made of a viscoelastic body; and a pair of bundling portions that individually hold both ends of the rope body; One of the binding portions is fixed to the seismic isolation bearing member, and the other is fixed to the first track or the joist,
Restoring force is applied when the pair of bundling portions are separated from the natural length of the striated body, and restoring force is not applied when the pair of tying portions are closer than the natural length of the striated body. A restoration attenuation device characterized by the following. In the base isolation structure according to claim 1, the restoring damping device according to claim 4 is provided at each end of the base isolation support member along the first track,
A base isolation structure, wherein the restoring damping device according to claim 4 is provided at each end of the base isolation bearing member along the joist. 2. The seismic isolation structure according to claim 1, wherein the gap buffering base is provided in the moving space, and is a three-dimensional structure that protrudes from the periphery of the top plate between the top plate, the installation surface, and the top plate. Consisting of spacers,
A plurality of protrusions having inclined surfaces are formed on one or both of the top plate lower surface and the installation surface,
The three-dimensional spacer has a structure that is crushed by relative movement at the time of vibration input of the base isolation frame and the fixed frame,
The three-dimensional spacer is provided between the top plate and the installation surface, so as to be in contact with the lower surface of the top plate and the upper surface of the installation surface, located between the protrusions.
The gap between the base plate and the installation surface is increased by the relative movement of the seismic isolation frame and the fixed frame during vibration input so that the crushed solid spacer rides on the inclined surface of the protrusion. Shock mount.   The gap buffering pedestal according to claim 6, wherein the protrusion and the three-dimensional spacer are shifted in a horizontal direction due to relative movement during vibration input between the seismic isolation pedestal and the fixed gantry. A gap buffering pedestal characterized in that the space between the top plate and the installation surface that is spread on the inclined surface of the section is at least equal to or greater than the thickness of the top plate.   A base-isolated floor structure comprising: the base-isolated structure according to claim 1; and the restoring damping device according to claim 4 and the shock absorber for gaps according to claim 6.   A clean room comprising the seismic isolation floor structure according to claim 8.

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