JP2006016910A - Apparatus installing structure in clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To rationalize installation work of an apparatus into a clean room. <P>SOLUTION: This structure is provided for installing an apparatus 6 on a floor, by aiming at the clean room for constituting the floor by supporting and laying a large number of floor panels 3 on floor joists by columns 4, by densely juxtaposing a large number of floor joists 2 at an interval on beams 1. In a position for installing the apparatus, the apparatus is directly installed on a stand, by substantially adjusting its upper surface level to an upper surface level of a surrounding floor panel, by installing the frame-shaped stand 11 on the floor joists, by omitting laying of the floor panel. A joint box 16 is incorporated into the stand for connecting the apparatus installed on the stand and respective kinds of main pipes arranged in an undefloor space. A base isolation device 12 is interposed as a base isolation stand between the floor joists and the stand, to secure base isolation clearance 14 around the stand. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a structure for installing various devices in a clean room.

As is well known, precision parts such as semiconductors and liquid crystals, clean room floors as manufacturing facilities for precision equipment, etc. need to have air permeability mainly for the purpose of maintaining cleanliness. As shown in Document 1, it is common to provide beams and joists in a grid-like state and secure an opening for ventilation between the beams and joists.
JP 2003-56165 A

  FIG. 6 shows an example of a floor having such a structure. In this structure, a plurality of joists 2 made of steel are densely arranged side by side on a beam 1 having a large cross section, and air is passed over these joists 2. This is a structure in which a free access floor 5 having air permeability as a whole is configured by supporting and laying a floor panel 3 having a property by a support column 4.

  By the way, when various devices 6 are installed on the free access floor 5 as described above, it is fundamental that the support legs (adjustable feet) 7 of the devices are directly supported by the floor panel 3 as shown in the figure. However, recently, since the equipment 6 tends to be large and heavy, it may be difficult to stably support the load with the floor panel 3 itself, as shown in FIG. It is necessary to provide an auxiliary column 8 for supporting the floor panel 3 from below at the position of the support leg 7, and further to provide an auxiliary joist 9 between the joists 2 to support the auxiliary column 8. In addition to sacrificing the space for maintenance and inspection at the lower part of the floor, it is inevitable that the structure of the free access floor 5 is unnecessarily complicated and its construction is extremely complicated.

  Recently, there are cases where it is necessary to provide a large number of openings for passing piping in various places of the floor panel 3 for installation and maintenance of the equipment 6, and the equipment 6 is installed to prevent damage caused by an earthquake. There are many requests to support seismic isolation, but the conventional free access floor 5 as shown in Fig. 6 may not be able to cope with such cases sufficiently, and there are effective and appropriate improvement measures to enable it. It was desired.

  In view of the above circumstances, the present invention is directed to a clean room that constitutes a floor by laying a large number of joists on a beam at intervals and supporting and laying a large number of floor panels on the joists on a pillar. It is a structure for installing equipment on the floor. At the position where the equipment is to be installed, the floor panel is not installed and a frame-like frame is installed on the joist, and the upper surface level of the surrounding floor panel is set. It is characterized in that the equipment is installed directly on the pedestal, approximately matching the upper surface level.

  In the present invention, it is preferable that a joint box for connecting a device installed on the gantry and various main pipes provided in the underfloor space is incorporated in the gantry. It is also possible to install a base isolation device between the joists and the base, making the base a base isolation base. In that case, if seismic isolation clearance is secured between the base and the surrounding floor panel. good.

  According to the present invention, in a position where equipment is to be installed, the floor panel is omitted and the equipment is installed on a base installed on the joist, thereby stably supporting even a large and heavy equipment. Needless to say, it is possible to eliminate the troublesome construction work of requiring special reinforcement for the free access floor or forming an opening in the floor panel as in the past. The installation work can be performed very easily, and the cost can be reduced. Of course, since the gantry is frame-shaped, air permeability is not impaired. By laying floor panels at the same level around the frame, the function of the floor as a whole is impaired. No, it will not hinder the maintenance of the equipment.

  Further, by incorporating a joint box for pipe connection into the gantry, the pipe connection work for the equipment can be easily performed. Furthermore, by providing a base isolation device with a base isolation device interposed between the base and the joists, it is possible to obtain a base isolation effect on the equipment and effectively prevent a fall or damage during an earthquake.

  One embodiment of the present invention is shown in FIGS. This embodiment is an application example when equipment is installed in a clean room where the floor is configured as a free access floor. However, the installation of the floor panel is omitted in the equipment installation position, and a base for equipment installation is installed there. The main aim is to install it above.

  That is, in this embodiment, as a floor structure of the clean room, a large number of joists 2 are laid on the beam 1 in the same manner as the conventional structure shown in FIG. The free access floor 5 having a configuration in which the floor panel 3 is laid down is adopted, but the floor panel 3 is not laid on the entire floor surface including the equipment installation space as in the prior art, but the equipment 6 The installation of the floor panel 3 and the installation of the column 4 are omitted for the position where the floor is to be installed, and the frame 11 is installed on the joist 2 so that the upper surface level matches the upper surface level of the surrounding floor panel 3. The device 6 is installed on the gantry 11.

  The gantry 11 is formed in a frame shape capable of directly supporting all of a large number of support legs (adjustable feet) 7 while forming a shape that matches the outer contour of the device 6 by connecting steel materials such as H-shaped steel vertically and horizontally. It is a thing. The gantry 11 is seismically isolated and supported on the joists 2 by a large number (12 in the illustrated example) of seismic isolation devices 12, and although not shown, a restoring mechanism such as a spring is provided on the lower surface side of the gantry 11. And a vibration damping mechanism such as a damper, and a stopper mechanism for restricting excessive amplitude more than expected, and this gantry 11 functions as a seismic isolation gantry as it is. By installing the device 6, the horizontal vibration of the device 6 during an earthquake can be sufficiently suppressed and quickly damped.

  Various types of seismic isolation devices 12 for constructing such a base isolation frame have been put into practical use, but in the illustrated example, they can roll in all directions on a circular support plate 13 installed on the joist 2. As the seismic isolation device 12 of such a type, for example, a device described in JP-A-2002-237690 can be suitably used. As shown in the figure, it is necessary to secure a predetermined seismic isolation clearance 14 between the gantry 11 and the surrounding floor panel 3, but when it is necessary to close the seismic isolation clear run 14 What is necessary is just to attach a flooring so that the horizontal vibration of the mount frame 11 is not restrained, and if necessary, an expansion joint may be provided there.

  As shown in FIGS. 3 to 4, a joint box 16 having a large number of pipe joints 15 is incorporated in the gantry 11. That is, in general, various main pipes are provided as ancillary facilities in the underfloor space (utility floor) of a clean room. Conventionally, branch pipes from these main pipes are directly connected to the equipment after the equipment is installed. However, since such pipe connection work is not always easy, in this embodiment, a joint box 16 manufactured in advance according to the specifications of the device 6 is incorporated in a suitable place of the gantry 11 and is shown in FIG. As shown, the branch pipe 18 from the main pipe 17 is connected in advance to the joint box 16 when the mount 11 is installed on the joist 2. As a result, when the device 6 is installed on the gantry 11, it is only necessary to connect the secondary pipe 19 on the device 6 side to the joint box 16, and therefore the piping work after the device is installed quickly and easily. Is possible.

  In order to install the device 6 with the above structure, the type and form of the device 6 to be installed, the total weight, the position and number of the support legs 7, the required support load for each support leg 7, the required seismic isolation performance, etc. In consideration thereof, a gantry 11 corresponding to the gantry 11 is manufactured in advance, and the gantry 11 may be installed on the joist 2 via the seismic isolation device 12 at the same time as or after the laying work of the floor panel 3. . At that time, if there is a restriction on the carry-in route of the gantry 11, the gantry 11 is divided into a plurality of sizes as necessary, and the size is set so as to be able to be carried in individually. You can connect to. In addition, a joint box 16 corresponding to the device 6 installed on the gantry 11 is manufactured in advance and incorporated in the gantry 11 in advance, or is installed after the gantry 11 is installed, and a branch pipe 18 from the main pipe 17 is connected thereto. Keep it.

  Since the installation work of the gantry 11 has been completed, the apparatus installation work can be performed only by installing the device 6 on the gantry 11 at an appropriate time and connecting the secondary pipe 19 on the device side to the joint box 16. Complete.

  As described above, the floor panel 3 is omitted at the position where the equipment is to be installed, the base 11 is installed on the joist 2, and the equipment 6 is directly installed on the base 11, so that the large and heavy equipment 6 is installed. However, it is needless to say that stable support is possible, and special reinforcement is performed on the free access floor 5 as in the conventional case where the device 6 is installed on the floor panel 3. In addition, the installation work of the gantry 11 and the device 6 can be performed very easily without the need for troublesome construction work such as forming an opening with respect to the floor panel 3.

  Of course, although the gantry 11 is installed in place of the floor panel 3, the gantry 11 has a frame shape, so that the air permeability of the gantry itself is naturally secured, and the floor panel 3 is usually laid around the gantry 11. Therefore, the function as the free access floor 5 is not impaired at all, and the maintenance of the device 6 can be performed without any trouble.

  Further, the gantry 11 can be easily manufactured without the need for cost because it is possible to assemble a simple steel material into a frame shape. Since 3 can be omitted, the cost for floor construction can be reduced.

  Furthermore, by incorporating the joint box 16 for pipe connection into the gantry 11, the pipe connection work for the device 6 can be easily performed. In addition, since the seismic isolation device 12 can be interposed between the gantry 11 and the joists 2 without any trouble as described above, the seismic isolation effect on the device 6 can be obtained and the earthquake It is possible to effectively prevent the fall and damage at the time.

  Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications and applications are possible. For example, in the above embodiment, the seismic isolation device 12 is interposed between the gantry 11 and the joist 2 so as to function as a seismic isolation gantry. It may be installed directly on the joist 2 and fixed to the joist 2 by bolt fastening or the like, and in that case, the column 4 that supports the floor panel 3 is omitted and is attached to the mount 11 as shown in the figure. The floor panel may be supported by a fixed angle or the like. Furthermore, if the joint box 16 is unnecessary depending on the specifications of the device 6, it can be omitted.

It is sectional drawing which shows the installation structure of the apparatus which is embodiment of this invention. FIG. FIG. It is a figure which shows an example of a joint box same as the above. It is sectional drawing which shows the installation structure of the apparatus which is other embodiment of this invention. It is a figure which shows an example of the installation structure of the apparatus in the conventional general clean room.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Beam 2 joist 3 Floor panel 4 Support column 5 Free access floor 6 Equipment 7 Support leg 11 Mount 12 Seismic isolation device 13 Support plate 14 Seismic isolation clearance 15 Piping joint 16 Joint box 17 Main piping 18 Branch pipe 19 Secondary side piping

Claims (3)

To install a large number of joists on the beam at intervals and to install equipment on the floor for a clean room that constitutes a floor by laying a large number of floor panels supported by pillars on the joists Structure,
At the position where the equipment should be installed, the installation of the floor panel is omitted and the frame-like pedestal is installed on the joist so that the upper surface level substantially matches the upper surface level of the surrounding floor panel, and the device is directly mounted on the pedestal. Equipment installation structure in a clean room characterized by installation. The equipment installation structure in the clean room according to claim 1,
Equipment installation structure in a clean room, characterized in that a joint box for connecting equipment installed on the gantry and various main pipes provided in the underfloor space is incorporated in the gantry. It is the installation structure of the apparatus in the clean room according to claim 1 or 2,
Equipment installation structure in a clean room characterized by installing a base isolation device between the joist and the base to make the base a base isolation base and securing a base isolation clearance between the base and the surrounding floor panel.

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