JP2014010965A5 - - Google Patents

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Publication number
JP2014010965A5
JP2014010965A5 JP2012145599A JP2012145599A JP2014010965A5 JP 2014010965 A5 JP2014010965 A5 JP 2014010965A5 JP 2012145599 A JP2012145599 A JP 2012145599A JP 2012145599 A JP2012145599 A JP 2012145599A JP 2014010965 A5 JP2014010965 A5 JP 2014010965A5
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JP
Japan
Prior art keywords
cooling
sample
cooling source
cylindrical member
holder
Prior art date
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Application number
JP2012145599A
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English (en)
Japanese (ja)
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JP5732006B2 (ja
JP2014010965A (ja
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Publication date
Application filed filed Critical
Priority claimed from JP2012145599A external-priority patent/JP5732006B2/ja
Priority to JP2012145599A priority Critical patent/JP5732006B2/ja
Priority to US14/410,235 priority patent/US9543112B2/en
Priority to CN201380033422.2A priority patent/CN104380426B/zh
Priority to DE112013003012.8T priority patent/DE112013003012B4/de
Priority to KR1020147032399A priority patent/KR101665221B1/ko
Priority to PCT/JP2013/065427 priority patent/WO2014002700A1/ja
Publication of JP2014010965A publication Critical patent/JP2014010965A/ja
Publication of JP2014010965A5 publication Critical patent/JP2014010965A5/ja
Publication of JP5732006B2 publication Critical patent/JP5732006B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012145599A 2012-06-28 2012-06-28 試料冷却ホルダー及び冷却源容器 Active JP5732006B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2012145599A JP5732006B2 (ja) 2012-06-28 2012-06-28 試料冷却ホルダー及び冷却源容器
KR1020147032399A KR101665221B1 (ko) 2012-06-28 2013-06-04 시료 냉각 홀더 및 냉각원 용기
CN201380033422.2A CN104380426B (zh) 2012-06-28 2013-06-04 试料冷却支架以及冷却源容器
DE112013003012.8T DE112013003012B4 (de) 2012-06-28 2013-06-04 Kryo-Probenhalter und Dewargefäss
US14/410,235 US9543112B2 (en) 2012-06-28 2013-06-04 Specimen cryo holder and dewar
PCT/JP2013/065427 WO2014002700A1 (ja) 2012-06-28 2013-06-04 試料冷却ホルダー及び冷却源容器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012145599A JP5732006B2 (ja) 2012-06-28 2012-06-28 試料冷却ホルダー及び冷却源容器

Publications (3)

Publication Number Publication Date
JP2014010965A JP2014010965A (ja) 2014-01-20
JP2014010965A5 true JP2014010965A5 (https=) 2015-04-30
JP5732006B2 JP5732006B2 (ja) 2015-06-10

Family

ID=49782866

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012145599A Active JP5732006B2 (ja) 2012-06-28 2012-06-28 試料冷却ホルダー及び冷却源容器

Country Status (6)

Country Link
US (1) US9543112B2 (https=)
JP (1) JP5732006B2 (https=)
KR (1) KR101665221B1 (https=)
CN (1) CN104380426B (https=)
DE (1) DE112013003012B4 (https=)
WO (1) WO2014002700A1 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6312811B2 (ja) * 2014-04-03 2018-04-18 株式会社日立ハイテクノロジーズ クライオステーションシステム
WO2016056096A1 (ja) 2014-10-09 2016-04-14 株式会社日立ハイテクノロジーズ 荷電粒子線装置、電子顕微鏡、試料の観察方法
JP6515320B2 (ja) * 2014-11-19 2019-05-22 日本製鉄株式会社 試料ホルダー及び透過型電子顕微鏡による観察方法
EP3032564A1 (en) * 2014-12-11 2016-06-15 FEI Company Improved cryogenic specimen holder for a charged particle microscope
DE102015100727A1 (de) 2015-01-20 2016-07-21 Leica Mikrosysteme Gmbh Probentransfereinrichtung
WO2017098574A1 (ja) 2015-12-08 2017-06-15 株式会社日立ハイテクノロジーズ アンチコンタミネーショントラップおよびその制御方法、ならびに荷電粒子線装置
JP6127191B1 (ja) * 2016-10-03 2017-05-10 株式会社メルビル 試料ホルダー
JP6698134B2 (ja) 2017-10-30 2020-05-27 ガタン インコーポレイテッドＧａｔａｎ，Ｉｎｃ． クライオトランスファーホルダ及びワークステーション
CN111837007A (zh) * 2017-11-15 2020-10-27 可口可乐公司 用于快速冷却包装食品产品的系统和方法
NL2020235B1 (en) * 2018-01-05 2019-07-12 Hennyz B V Vacuum transfer assembly
CN113345784B (zh) * 2020-02-18 2023-06-02 中国科学院物理研究所 一种低温原位样品杆
CN112885687B (zh) * 2021-04-15 2025-04-18 厦门超新芯科技有限公司 一种透射电镜冷冻样品杆
US12123816B2 (en) * 2021-06-21 2024-10-22 Fei Company Vibration-free cryogenic cooling
JP7734404B2 (ja) * 2021-10-05 2025-09-05 株式会社メルビル ステージ
JP2024017051A (ja) * 2022-07-27 2024-02-08 日本電子株式会社 試料ホルダーおよび荷電粒子線装置
US12548731B2 (en) * 2022-09-30 2026-02-10 Fei Company Systems and methods for transferring a sample
JP7824658B2 (ja) * 2023-06-23 2026-03-05 株式会社ドキュメンタリーチャンネル 走査電子顕微鏡用の試料冷却装置
WO2025141822A1 (ja) * 2023-12-27 2025-07-03 株式会社日立ハイテク 荷電粒子線装置、試料冷却機構、及び連続断面加工観察方法

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US4833330A (en) * 1987-11-03 1989-05-23 Gatan Inc. Anticontaminator for transmission electron microscopes
JP2774884B2 (ja) 1991-08-22 1998-07-09 株式会社日立製作所 試料の分離方法及びこの分離方法で得た分離試料の分析方法
US5274237A (en) * 1992-04-02 1993-12-28 North American Philips Corporation Deicing device for cryogenically cooled radiation detector
JPH0739729U (ja) * 1993-12-28 1995-07-18 幾代 渡辺 真空断熱装置
DE69739785D1 (de) 1996-12-23 2010-04-08 Fei Co Partikel-optisches Gerät mit Niedertemperatur-Probenhalter
US5753924A (en) * 1997-03-12 1998-05-19 Gatan, Inc. Ultra-high tilt specimen cryotransfer holder for electron microscope
JPH10275582A (ja) 1997-03-28 1998-10-13 Jeol Ltd 電子顕微鏡等の試料加熱・冷却装置
JPH1196953A (ja) 1997-09-18 1999-04-09 Hitachi Ltd 冷却試料観察装置
US6414322B1 (en) * 1999-01-25 2002-07-02 Micron Technology, Inc. Sample mount for a scanning electron microscope
US6410925B1 (en) 2000-07-31 2002-06-25 Gatan, Inc. Single tilt rotation cryotransfer holder for electron microscopes
JP2007039106A (ja) * 2005-08-04 2007-02-15 Sii Nanotechnology Inc 弾性材料を使用した薄板状小片ホルダ
CN201348980Y (zh) * 2008-12-23 2009-11-18 南京师范大学 扫描电镜样品台专用复合型支架
JP5250470B2 (ja) * 2009-04-22 2013-07-31 株式会社日立ハイテクノロジーズ 試料ホールダ，該試料ホールダの使用法、及び荷電粒子装置
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JP5512450B2 (ja) * 2010-07-29 2014-06-04 株式会社日立ハイテクノロジーズ イオンミリング装置

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