JP2014003079A - Substrate holding member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate holding member for a substrate tray used to store or transport a substrate made of a tabular object equipped with a functional layer on the surface of plasma and liquid crystal display panel members and so forth, which allows efficient storage and transportation without damaging or soiling the functional layer on the surface.SOLUTION: In a substrate tray which horizontally holds a substrate, made of a tabular object with a rectangular shape and rigidity, from its underside, a substrate holding member holds the substrate. The substrate holding member has protrusions on its upper and lower faces, thus allowing stable and efficient storage and transportation.

Description

The present invention provides a substrate tray for holding or transporting a plurality of substrates by holding a substrate made of a rectangular and rigid plate in a horizontal direction from the bottom and stacking the substrates in a vertical direction in multiple stages. The present invention relates to a substrate holding member for holding the substrate, which controls movement and movement to prevent scratches and dirt.

It is important to transport or store a substrate made of a plate-like material having a functional layer on its surface such as a flat panel member such as a plasma display panel or a liquid crystal display panel without being damaged or soiled.
Conventionally, when carrying and storing such substrates, in order to protect the substrates from scratches and breakage, box-shaped storage containers that can be stored in parallel at predetermined intervals so as not to contact each other have been used.
Under these circumstances, in recent years, particularly for flat panels for liquid crystal displays, it has been required to manufacture larger-sized color filter-formed substrates, which can further reduce transportation costs by further improving transportation efficiency for transportation and storage. There is a need for space saving storage locations.
However, in the transport using the storage container as described above, cracks and scratches are likely to occur due to vibration during transport, and it is very difficult to make the tray compact.

Many studies have been made to prevent cracks and scratches on the substrate, to prevent contamination of the substrate, and to carry and store the substrate at a higher density.

For example, in Japanese Patent Application Laid-Open No. 2006-168748 (Patent Document 1) and Japanese Patent Application Laid-Open No. 2010-120690 (Patent Document 2), in order to suppress the movement of the substrate, a substrate holding portion is formed in a frame body on the upper layer of the substrate. Then, the substrate is fixedly held on the substrate loaded on the substrate holding member in contact with the substrate holding portion. According to such a technique, it becomes possible to prevent the movement of the substrate, but problems such as substrate contamination at the contact portion, scratches, and cracking of the substrate due to stress generation at the contact portion due to vibration during transportation Therefore, stable substrate transfer has not been achieved.

Further, in order to prevent contamination, scratches, and cracks due to contact of the contact portion, Japanese Patent Application Laid-Open No. 2008-155959 (Patent Document 3) discloses a tapered substrate movement that contacts only when vibration occurs on the substrate. There has been proposed a method for preventing contamination, scratches, and cracks due to contact of the contact portion by using a limiting member. However, in this method, when the vibration of the substrate occurs, the position where the taper-shaped substrate movement restriction member contacts cannot be controlled, and there is a concern about the contamination of the functional layer formed on the substrate, the occurrence of scratches, When the movement of the substrate in the horizontal direction occurs, there is also a concern that when the vibration is generated due to the substrate being sandwiched between the tapered portions, cracking occurs due to stress.

JP 2006-168748 A JP 2010-120690 A JP 2008-155995 A

A substrate for holding a substrate in a substrate tray for holding or transporting a plurality of substrates by holding a substrate made of a rectangular and rigid plate in a horizontal direction from the bottom and stacking the substrates in a vertical direction in multiple stages. The present invention relates to a holding member. In particular, various plate-like materials (for example, glass and plastics) or members for flat display panels that are bent by their own weight, or plate-like materials such as metals, rare metals, or silicon, and plates that have been processed. A substrate holding member used for a substrate tray that can be stored or transported without damaging the substrate or soiling the surface thereof, It is another object of the present invention to provide a substrate tray using the substrate holding member.

The board | substrate holding member of this invention solves said subject by the means as described in each following aspect.

A first aspect of the present invention is a substrate for holding or transporting a plurality of substrates by holding a substrate made of a rectangular and rigid plate-like material in a horizontal direction from below and stacking the substrates in a vertical direction in multiple stages. In the tray, a substrate holding member that is fixed to a substrate support portion provided inside a frame body of the substrate tray and holds the substrate from the lower surface, wherein the substrate holding member includes at least a substrate holding portion and a movement A regulation unit, a substrate regulation unit, and a vibration control unit, wherein the substrate holding unit has a flat upper surface and is protruded and fixed from the upper surface of the substrate support unit, and the substrate holding unit is an upper surface of the substrate holding unit The movement restricting portion has a movement restricting surface that is a plane perpendicular to the flat upper surface of the substrate holding portion, the substrate restricting portion has a flat lower surface, Protruding and fixed from the lower surface of the substrate support, The plate restricting portion has the vibration control portion on the lower surface of the substrate restricting portion, and when the substrate tray is stacked in multiple stages in the vertical direction, the direction perpendicular to the movement restricting surface of the movement restricting portion is set in the X direction. As described above, the vibration control unit of the second substrate holding member positioned immediately above is fixed to the X direction side of the movement restricting surface of the first substrate holding member positioned on the lower side.

According to a second aspect of the present invention, there is provided the substrate holding member according to the first aspect, wherein at least one side of the vibration control unit on the X direction side has a thickness changing portion in which the thickness decreases. It is characterized by that.

According to a third aspect of the present invention, there is provided the substrate holding member according to any one of the first aspect and the second aspect, wherein the substrate tray is used in a state where the substrate tray is stacked in a vertical direction. The distance between the movement restricting surface of the first substrate holding member located on the lower side and the end portion in the X direction of the flat lower surface of the vibration control unit of the second substrate holding member located immediately above is held. It is characterized by being smaller than the width of the non-functional part located on the outer periphery of the substrate.

A fourth aspect of the present invention is the substrate holding member according to any one of the first aspect to the third aspect,
In a state where the substrate tray is used by being stacked in multiple stages in the vertical direction,
The distance between the flat upper surface of the substrate holding portion of the first substrate holding member and the flat lower surface of the substrate restricting portion of the second substrate holding member located immediately above is a,
The distance between the flat upper surface of the substrate holding portion of the substrate holding member and the upper surface of the movement control portion of the substrate holding member is b,
The distance between the flat lower surface of the substrate regulating portion of the substrate holding member and the lower surface of the vibration control portion of the substrate holding member is c,
The thickness of the substrate to be held is d,
When
b <a, b + c> ad, ac> d
The substrate holding portion, the movement restricting portion, the substrate restricting portion, and the vibration control portion are formed so as to satisfy all the relationships
It is characterized by.

  A fifth aspect of the present invention is the substrate holding member according to any one of the first to fourth aspects, wherein at least one groove is formed in the vibration control unit. It is characterized by that.

A sixth aspect of the present invention is the substrate holding member according to any one of the first to fourth aspects,
At least one groove extending between the vibration control unit and the substrate regulating unit is formed.

  A seventh aspect of the present invention is the substrate holding member according to any one of the first to fourth aspects, wherein at least one groove is formed in the movement restricting portion. It is characterized by that.

  An eighth aspect of the present invention is the substrate holding member according to any one of the first to fourth aspects, wherein the groove extending between the movement restricting portion and the substrate holding portion is at least one. It is characterized by being formed.

  A ninth aspect of the present invention is the substrate holding member according to any one of the first to fourth aspects, wherein at least one groove is formed in the vibration control unit. In addition, at least one groove is formed in the movement restricting portion.

  A tenth aspect of the present invention is the substrate holding member according to any one of the first to fourth aspects, wherein at least one groove is formed in the vibration control unit. In addition, at least one groove extending between the movement restricting portion and the substrate holding portion is formed.

  An eleventh aspect of the present invention is the substrate holding member according to any one of the first to fourth aspects, wherein at least one groove extending between the vibration control unit and the substrate regulation unit is provided. And at least one groove is formed in the movement restricting portion.

  A twelfth aspect of the present invention is the substrate holding member according to any one of the first to fourth aspects, wherein at least one groove extending between the vibration control unit and the substrate regulation unit is provided. And at least one groove extending between the movement restricting portion and the substrate holding portion is formed.

  A thirteenth aspect of the present invention is the substrate holding member according to any one of the fifth to twelfth aspects, wherein a bottom of the groove is formed in an arc shape. To do.

  A fourteenth aspect of the present invention is the substrate holding member according to any one of the first to thirteenth aspects, wherein the vibration control unit is detachable. And

  A fifteenth aspect of the present invention is the substrate holding member according to any one of the first to thirteenth aspects, wherein the movement restricting portion is detachable. And

  A sixteenth aspect of the present invention is the substrate holding member according to any one of the first to thirteenth aspects, wherein the vibration control unit is detachably fabricated, and The movement restricting portion is made detachable.

  A seventeenth aspect of the present invention is the substrate holding member according to any one of the first to sixteenth aspects, wherein the substrate holding member has flexibility. And

  An eighteenth aspect of the present invention is the substrate holding member according to any one of the first to seventeenth aspects, wherein the substrate holding member is formed of a thermoplastic resin. Features.

  A nineteenth aspect of the present invention is a substrate tray, wherein the movement restricting surface of the substrate holding member according to any one of the first to eighteenth aspects is an end face of the substrate to be held. The substrate holding member is fixed so as to be in parallel with each other.

  A twentieth aspect of the present invention is the substrate tray according to the nineteenth aspect, between the movement restricting surfaces of the substrate holding members fixed to the substrate support portions on two opposite sides of the substrate tray. The substrate holding member is fixed so that the distance is larger than the width of the substrate to be held.

  A twenty-first aspect of the present invention is the substrate tray according to any one of the nineteenth aspect to the twenty-first aspect, and any one of the first to eighteenth aspects. The substrate holding member described is fixed along the shape of the substrate support portion of the substrate tray.

  A twenty-second aspect of the present invention is the substrate tray according to any one of the nineteenth aspect to the twenty-first aspect, wherein at least a pair of opposing two sides of the substrate to be held are It is characterized in that it is held in a state of being bent vertically downward from both sides toward the center.

  A twenty-third aspect of the present invention is the substrate tray according to any one of the nineteenth to twenty-second aspects, wherein each side of the frame body of the substrate tray has a first A plurality of substrate holding members according to any one of the eighteenth to eighteenth aspects are attached at intervals.

  A twenty-fourth aspect of the present invention is the substrate tray according to the twenty-third aspect, wherein at least one pair of opposing sides of the four sides of the frame body of the substrate tray is in relation to one side. Of the plurality of fixed substrate holding members, at least two or more of the substrate holding members are formed such that the movement restricting portion and the vibration control portion are detachable.

The substrate holding member of the present invention is a substrate tray for holding or transporting a plurality of substrates by holding a substrate made of a rectangular and rigid plate in a horizontal direction from the lower side and stacking the substrates in a vertical direction in multiple stages. The substrate is fixed to a substrate support provided inside the frame of the substrate tray, and holds the substrate from the lower surface.
Due to vibration during transportation or storage, not only vertical vibration but also horizontal movement occurs on the substrate. In order to prevent such movement, Japanese Patent Laid-Open No. 2006-168748 (Patent Document 1), Japanese Patent Application Laid-Open No. 2010-120690 (Patent Document 2), Japanese Patent Application Laid-Open No. 2008-155959 (Patent Document 3) The substrate is fixed by using a contact material to the substrate, or the movement of the substrate is regulated by using a tapered substrate holding member. The use of the abutting material causes the substrate to become dirty and scratched, and because the substrate is fixed, there is a possibility that stress at the time of vibration is generated in the fixing portion and the substrate is damaged. In addition, in the tapered substrate holding member, the movement of the substrate in the horizontal direction is restricted by gradually narrowing the upper and lower gaps, but the substrate is sandwiched in the wedge-shaped gap formed by the tapered portion. As a result, the substrate is fixed, stress is concentrated when vibration is generated, and the substrate may be damaged.

The substrate holding member of the present invention secures the movable range of the substrate in the horizontal direction and the vertical direction without fixing the substrate, restricts the movable range, and stably holds the substrate. Since the substrate held by the substrate holding member of the present invention is not fixed, when vibration or the like occurs during storage or transportation, no stress is generated on the fixed portion that occurs if the substrate is fixed. The substrate can be prevented from being damaged.
The substrate holding member of the present invention is in contact with the substrate when vibration in the direction parallel to the substrate called the movement restricting portion occurs, and when the substrate in the vertical direction is called vibration control portion. It has a part to do. The movement restricting unit and the vibration control unit limit a movable range of the substrate when the substrate moves or the substrate vibrates.
Further, in a state where the substrate trays are used in a multi-tiered manner in the vertical direction, the movement regulating surface of the first substrate holding member and the flat lower surface of the vibration control unit of the second substrate holding member located immediately above the surface. It is designed to contact only the non-functional area that has not been subjected to functional surface processing, which is generally called the non-functional part located on the outer periphery of the substrate, when the vibration occurs. As a result, even when vibration or the like occurs, the function of the substrate is less likely to be impaired, and the substrate can be stored or transported stably without damage or contamination.

1A and 1B are schematic views of an example of an embodiment of a substrate holding member of the present invention, and FIG. 1C is a diagram of FIGS. 1A and 1B. It is the schematic of the top view which looked at the tray for substrates which has the board | substrate holding member of this invention from upper direction. FIGS. 2A and 2B are schematic views showing that a substrate is stacked on a substrate tray having a substrate holding member of the present invention, and the substrate is held in multiple stages. FIG. 3A is a schematic view of the substrate holding member of the present invention, and FIG. 3B is a diagram showing a state in which the substrate holding member of the present invention is fixedly inserted into the substrate tray in the B direction of FIG. It is the schematic of sectional drawing seen more. FIG. 4A is a schematic view in which substrate trays having the substrate holding member of the present invention are stacked. FIG. 4B is a schematic view of the dimensions of the substrate holding member of the present invention. FIG. 5A to FIG. 5D are schematic views of an example of the substrate holding member in which the groove of the present invention is formed as viewed from the direction A in FIG. FIG. 6A to FIG. 6D are schematic views of an example of the substrate holding member in which the groove of the present invention is formed as viewed from the direction A in FIG. FIG. 5 is a schematic view showing how the substrate holding member of the present invention can be attached and detached. FIG. 8A and FIG. 8B are schematic views of the substrate holding member of the present invention fixed to the substrate support portion as viewed from the inside of the substrate tray. FIG. 9A and FIG. 9B are schematic views of the substrate holding member formed with the groove of the present invention fixed to the substrate support portion as viewed from the inside of the substrate tray. It is the schematic of a mode that the board | substrate holding member of this invention is fixed to a board | substrate support part. FIG. 11 is a schematic view in which a substrate tray on which a substrate holding member of the present invention is fixed is stacked on a substrate support portion formed obliquely to hold a substrate. FIG. 12 is a schematic view of an example of a state in which the substrate holding member of the present invention is fixed to the substrate support portion. FIG. 13 is a schematic view of an example of a state in which the substrate holding member of the present invention is fixed to the substrate support portion. FIG. 14 is a schematic view of an example of a state in which the substrate holding member of the present invention is fixed to the substrate support portion. FIG. 15 is a schematic view of an example of a state in which the substrate holding member of the present invention is fixed to the substrate support portion.

Hereinafter, embodiments of a substrate holding member of the present invention will be described with reference to the drawings.
FIG. 1 shows an outline of an example of an embodiment of a substrate tray 11 having a substrate holding member 14 of the present embodiment. FIG. 1A is a schematic diagram of an example of an embodiment of the substrate tray 11 in which the substrate support portions 13 supported on the four sides of the frame body 12 support the end portions of the substrate 111 in a straight line. In FIG. 1B, the substrate support portion 13 fixed to one opposite two sides of the four sides of the frame body 12 supports both ends of the substrate 111 in a straight line, and the other of the four sides of the frame body 12. It is the schematic of one example of embodiment of the board | substrate tray 11 which bends the board | substrate support part 13 fixed to two opposing sides to a perpendicular direction lower side, and supports the both ends of the board | substrate 111. Although not shown, the substrate tray 11 is configured so that the substrate support portion 13 fixed to the four sides is bent downward in the vertical direction in order to stably hold the substrate 111, thereby It may be the substrate tray 11 that supports the substrate. Further, when the substrate support portion 13 is bent downward in the vertical direction, the frame body 12 that supports the bent substrate support portion 13 is a straight line and the substrate support portion 13 is bent downward in the vertical direction. It may be. The shape of the bending may be an arc or a parabola, and the difference in height between the end and the center of the bent substrate 111 is appropriately designed according to the substrate size.

  FIG.1 (c) is the schematic of the top view which looked at the tray 11 for board | substrates of Fig.1 (a) and FIG.1 (b) from upper direction. Note that. Although not shown in the schematic diagrams of FIGS. 1A, 1B, and 1C, the substrate tray 11 having the substrate holding member 14 of this embodiment is a relative position between the substrate trays 11 positioned above and below. In order to keep the relative positional relationship constant, it may have a fitting function that makes the relative positional relationship of the substrate trays 11 positioned above and below constant when a plurality of sheets are stacked. (The fitting function referred to here is to have a function of fitting each other.) The fitting function can be fixed stably, and the relative positional relationship between the substrate trays 11 positioned above and below can be determined. Any shape can be used as long as it can be kept constant. Furthermore, you may have parts, such as a handle part for using for machine conveyance.

  FIGS. 2A and 2B are schematic views in which the substrate tray 11 is stacked for transportation and storage. 2A shows a substrate tray 11 having four straight sides, and FIG. 2B shows a substrate support portion 13 fixed to two opposing sides of the four sides of the frame 12 in a straight line. For the substrate for supporting both ends of the substrate 111 by supporting the both ends of the substrate 111 and bending the substrate support part 13 fixed to the other two opposite sides of the frame 12 downward in the vertical direction. FIG. 3 is a schematic view in which a tray 11 is stacked on a carrier base 103. The substrate holding member 14 of this embodiment is fixed to the substrate tray 11 shown in FIG. 1, and the substrate tray 11 is used by being stacked in multiple stages as shown in FIG.

  Since the frame body 12 of the substrate tray 11 in FIG. 1 is used by being laminated at the time of transportation or storage, strength is required, and a metal material is generally used. A material formed of glass fiber, carbon fiber and resin may be used, but a metal is preferable because it is liable to cause scratches at the time of laminating or transporting and causes foreign matters. In particular, it is preferable to use an aluminum alloy such as duralumin having both strength and lightness in order to reduce the weight during multi-layer lamination. Further, the substrate support portion 13 supported by the frame body 12 may be joined to the frame body 12 by welding or the like. However, in view of strength, ease of manufacture, etc., the frame body is formed by extrusion molding or the like. It is preferable to make it simultaneously with Twelve.

It is important that the substrate holding member 14 has flexibility in order to absorb manufacturing errors and the like when being fixed to the substrate support portion 13, particularly the curved substrate support portion. Furthermore, since the substrate holding member 14 has flexibility, damage due to vibration or the like during use can be reduced.

For the substrate holding member 14, a thermoplastic resin is used in consideration of ease of molding, a function as a vibration buffering material, a small amount of foreign matter generation, scratching prevention, contamination prevention to the substrate 111, and the like. Since the substrate holding member 14 is formed of a thermoplastic resin, the substrate holding member 14 can be formed by injection molding, which is much larger than the method of manufacturing the substrate holding member 14 by cutting. It becomes possible to produce a large number of the substrate holding members 14 without incurring extra costs. Furthermore, by being made of resin, it is possible to reduce damage to the substrate 111. Of the thermoplastic resins, particularly preferred are polyamide resins such as polyethylene (PE), polypropylene (PP), nylon 66 and nylon 610, polyether ether ketone (PEEK) and polyimide. In addition, as long as it has the same function, the material of the board | substrate holding member 14 is not limited to these. Further, when the movement restricting portion 31 or the vibration control portion 32 is made detachable, the material forming the movement restricting portion 31 and the vibration control portion 32 is not only the thermoplastic resin but also UPE that can be molded by cutting. Engineering plastics such as (ultra high molecular weight polyethylene), PEEK (polyether ether ketone), PPS (polyphenylene sulfide), MC nylon, POM (polyacetal, acetal resin), and phenol resin may be used. As a result of studying cutting suitability and flexibility as a material for forming the movement restricting portion 31 and the vibration control portion 32, it was confirmed that UPE (ultra high molecular weight polyethylene) is preferable. In addition, as long as it has the same function, the material of the movement control part 31 and the vibration control part 32 is not limited to these.

FIG. 3A is a schematic view of the substrate holding member of the present embodiment. As shown in FIG. 3A, the substrate holding member 14 of this embodiment includes a substrate holding portion 14a, a substrate restricting portion 14b, a movement restricting portion 31 fixed to the upper surface of the holding portion 14a, and the substrate restricting portion. The vibration control part 32 fixed to the lower surface of 14b is provided. Since the upper surface of the substrate holding portion 14a is flat, the material of the substrate holding member 14 can be prevented from being transferred to the substrate 111 to be held, and the scratch to the substrate 111 held by the substrate holding member 14 can be prevented. It becomes possible. Further, since the lower surface of the substrate restricting portion 14b is flat, it is possible to reduce the contact between the substrate 111 held by the occurrence of substrate vibration and the lower surface of the substrate restricting portion 14b when used in multiple stages. This makes it possible to reduce damage to the substrate 111 held by the substrate holding member 14.

As shown in FIG. 3A, the movement restricting portion 31 fixed to the upper surface of the substrate holding portion 14a has a movement restricting surface 35 that is a plane perpendicular to the flat upper surface of the substrate holding portion. The substrate holding member 14 is preferably fixed to the substrate tray so that the movement regulating surface 35 and the end surface of the substrate 111 to be held are parallel to each other. The movement restricting surface 35 is a flat surface formed inside the frame of the movement restricting portion 31, and when the substrate 111 is moved in the horizontal direction due to vibration or the like, it contacts the end surface of the substrate 111 and restricts the movable range. To do. When movement of the substrate 111 held in the horizontal direction occurs and the movement restriction surface 35 and the substrate 111 come into contact with each other, the movement restriction surface 35 is flat and the substrate 111 on which the movement restriction surface 35 is held. By being fixed to the substrate tray so as to be parallel to the end surface of the substrate, the contact is not made by a point but by a line or a surface. This makes it possible to prevent stress concentration at the time of contact and prevent damage to the substrate. Further, the movement restricting portion 31 is preferably a rectangular parallelepiped as shown in FIG. 3, but the movement restricting portion 31 only needs to have the movement restricting surface 35 and is not limited to a rectangular parallelepiped. Further, the upper surface of the movement restricting portion 31 is used to stably avoid contact with the upper substrate holding member 14 when the substrate trays 11 are stacked in a vertical direction in multiple stages, and more densely. In order to load the tray, it is preferable that the tray is flat. This is because the contact between the substrate holding members causes the generation of foreign matter and causes the foreign matter to adhere to the substrate.

FIG. 3B is a schematic diagram of a cross-sectional view of the substrate holding member of the present embodiment, as seen from the direction B in FIG. As shown in FIG. 3B, the vibration control unit 32 has a flat lower surface 38 of the vibration control unit. When the substrate 111 to be held moves in the vertical direction and the vibration control unit 32 and the substrate 111 come into contact with each other, the bottom surface of the vibration control unit 32 is flat, so that the contact is made at a line contact point instead of a point contact. Instead of contact, contact with a line or contact with a surface. As a result, it is possible to prevent stress concentration at the time of contact, and it is possible to suppress damage to the substrate, generation of foreign matter, contamination due to transfer of the material of the holding member, and the like. The flat lower surface may be formed in parallel with the flat lower surface 37 of the substrate restricting portion, and the thickness of the vibration control portion 32 is the inner side of the frame 13 to which the substrate restricting portion 14b is fixed. You may form diagonally so that thickness may reduce toward.

When the direction perpendicular to the movement restricting surface 35 of the movement restricting portion 31 is the X direction, at least one side on the X direction side of the vibration control portion has a thickness changing portion where the thickness decreases. Good. The thickness changing portion 39 of the vibration control unit is a part that makes the thickness of the vibration control unit 32 zero without having a convex corner on the outside, such as an arc shape or an elliptical arc shape in cross section. . The thickness changing unit 39 of the vibration control unit makes contact with a corner portion of the vibration control unit 32 when a vertical movement occurs on the substrate 111 held and the vibration control unit 32 and the substrate 111 come into contact with each other. This is to prevent the substrate from being damaged by contact with the corners and concentration of stress. Further, the thickness changing portion 39 is formed on the X direction side of the vibration control portion 32 in FIG. 3A, for example. However, the thickness changing portion 39 is not only on the X direction side but also on the side in the other direction. Providing the changing portion 39 is also effective for suppressing breakage of the substrate due to contact with the corner portion and concentration of stress.

FIG. 4A is a schematic cross-sectional view of a state in which substrate trays having substrate holding members of this embodiment are stacked and holding a substrate. As shown in FIGS. 4A and 11, the substrate tray 11 on which the substrate 111 is placed is placed on the flat upper surface 36 of the substrate holding portion 14 a and is used for storage or transportation. The substrate tray on which the substrate 111 is placed is used in multiple stages as shown in FIG.

4A shows a state of the AA ′ cross section, the BB ′ cross section of FIG. 1A, and the CC ′ cross section of FIG. 1B in which the substrate support portion 13 is formed horizontally. Show. FIG. 11 shows a cross section taken along the line D-D ′ of FIG. 1B in which the substrate support portion 13 is formed obliquely. As shown in FIG. 4A and FIG. 11, the substrate control unit sets the direction perpendicular to the movement restriction surface 35 of the movement restriction unit in the X direction when the substrate trays are stacked in multiple stages in the vertical direction. As described above, the substrate holding member is arranged such that the vibration control unit 32 of the second substrate holding member 14 positioned immediately above the movement regulating surface 35 of the first substrate holding member 14 positioned on the lower side is positioned on the X direction side. 14 is designed and manufactured. Accordingly, when the substrate trays 11 are stacked in multiple stages, it is possible to prevent the substrate holding members 14 located above and below from contacting each other, to suppress the generation of foreign matters and the like, and to prevent foreign matters from adhering to the substrate. it can. Further, the substrate holding member 14 secures a movable range of the substrate 111 in the horizontal direction and the vertical direction without fixing the substrate 111, restricts the movable range, and stably holds the substrate 111. Is possible.

As shown in FIG. 4A, when the substrate support portion 13 is formed horizontally, the vibration control portion is located on the X direction side from the extended surface EE ′ of the movement restricting surface 35 when the substrate holding member 14 is manufactured. 32 is prepared. As shown in FIG. 11, when the substrate support portion 13 is formed obliquely, the distance between the extension surface FF ′ of the movement restricting surface 35 and the vibration control portion 32 is an angle at which the substrate support portion is formed. Design and manufacture accordingly.

When the substrate tray 11 having the substrate holding member 14 of this embodiment is stacked and used by being fixed on the X direction side from the extended surface of the movement restricting surface 35, the movement of the substrate holding member 14 located on the lower side is used. It is possible to prevent the restricting portion 31 and the vibration control portion 32 of the substrate holding member 14 positioned immediately above from coming into contact with each other, thereby preventing foreign matter from being generated due to contact between the substrate holding members. Since foreign matter adversely affects the substrate, it is important to prevent the occurrence of foreign matter.

FIG. 4B is a schematic view of the dimensions of the substrate holding member of this embodiment. As shown in FIG. 4B, in a state where the substrate trays are used in multiple stages in the vertical direction, the flat upper surface of the substrate holding portion of the first substrate holding member is positioned directly above it. The distance between the flat bottom surface of the substrate restricting portion of the second substrate holding member and a distance between the flat top surface of the substrate holding portion of the substrate holding member and the top surface of the movement control portion of the substrate holding member. b, the distance between the flat lower surface of the substrate regulating portion of the substrate holding member and the lower surface of the vibration control portion of the substrate holding member is c, the thickness of the substrate to be held is d,
When
b <a, b + c> ad, ac> d
The substrate holding part, the movement restricting part, the substrate restricting part, and the vibration control part are formed so as to satisfy all the relations, thereby preventing contact between the substrate holding members 14 positioned above and below, and contacting Occurrence of foreign matters that are sometimes generated is suppressed, and contamination of the substrate 111 that is held by foreign matters can be prevented. Furthermore, the deformation of the substrate holding member 14 due to the contact is suppressed, and it becomes possible to prevent the substrate from being damaged due to the substrate being caught in the deformed portion.

Due to the relationship of b <a, the movement restricting portion 31 of the substrate holding member 14 of the first substrate tray 11 positioned on the lower side in a multi-layered state, and the second substrate tray positioned immediately above it The flat lower surface 37 of the substrate restricting portion of the substrate holding member 14 is not in contact with the substrate holding member 14, and it is possible to suppress the generation of foreign matters.

Due to the relationship of b + c> ad, the movement restricting portion 31 of the substrate holding member 14 of the first substrate tray 11 located in the lower multi-tiered state and the second portion located immediately above the movement restricting portion 31. Since the distance between the substrate holding member 14 and the vibration control unit 32 is smaller than the thickness of the substrate 111 held, the substrate held at the interval can be easily prevented from being sandwiched, and the substrate 111 is damaged. The prevention effect is improved. In order to more reliably prevent the substrates held at the interval from being sandwiched, it is more preferable to design and manufacture the substrate holding member 14 so as to satisfy the relationship b + c> a.

Due to the positional relationship of a-c> d, the vibration control unit 32 and the substrate 111 do not come into contact with each other at normal times when no vibration is generated, so that it is possible to reduce the contamination and damage of the substrate 111 due to the contact. Become.
The numerical values of a, b, c, and d are appropriately designed according to the interval between the substrate trays 11 stacked in multiple stages, the thickness of the substrate support portion, and the like.

In the substrate holding member 14, the distance between the movement restriction surfaces 35 of the substrate holding member 14 fixed to the substrate support portions 13 on the two opposite sides of the substrate tray 11 is larger than the width of the substrate 111 to be held. This is fixed to the substrate tray 11. By being fixed in this manner, the substrate 111 can be held on the substrate tray 11 in a state having a movable region without fixing the substrate 111 even in the horizontal direction. When the sides of the substrate support member 13 are formed to be curved, between the movement regulating surfaces 35 of the substrate holding member 14 fixed to the substrate support portions 13 on the two opposite sides of the substrate tray 11. The distance is calculated along the curvature.

  The movement restricting surface 35 is a vibration that occurs when the substrate trays 11 are stored or transported in multiple stages in the vertical direction, and when the substrate 111 to be held moves in the horizontal direction, the held substrate 111 is held. In order to reduce the stress generated at the time of contact between the movement regulating surface 35 and the end surface of the held substrate 111 as much as possible, the horizontal movement of the held substrate 111 is restricted. Further, it is preferable to make line contact rather than point contact and surface contact rather than line contact, and it is preferable that the movement restricting surface 35 is formed perpendicular to the substrate holding portion 14a. The movement restricting surface 35 is fixed to the substrate support portion 13 so as to be parallel to the end surface of the substrate 111 to be held, so that the end surface of the substrate 111 to be held can be brought into surface contact with the substrate 111 due to stress concentration. The possibility of damage can be reduced. In the present specification, “vertical” as used in the present specification is used in such a manner that it is almost vertical visually, “parallel” is substantially parallel visually, and “vertical” is almost vertical visually.

  The vibration control unit 32 is held only when vertical movement occurs in the held substrate 111 due to vibration when the substrate trays 11 are stored or transported in the vertical direction in multiple stages. The substrate 111 that is held in contact with the substrate 111 is restricted from moving and vibrating in the vertical direction. Without vibrating the held substrate 111 freely, the vibration control unit 32 regulates the vertical movement and vibration of the end of the held substrate 111 to control the vibration of the entire substrate 111. Thus, the damage prevention effect of the substrate 111 is improved. Further, since the vibration regulating portion 32 and the substrate 111 are not in contact with each other at normal times when no vibration is generated, it is possible to reduce contamination and damage to the substrate 111 due to contact.

In general, a substrate made of a plate having a functional layer on its surface is processed on one surface of the substrate. The substrate tray of this embodiment stores or transports a processed substrate or stores or transports an unprocessed substrate with a processed surface facing upward. The processed substrate generally has a functional part from the center, and the end part is a non-functional part.
When a substrate having a functional part from the center and having a non-functional part at the end as described above is stored or transported, it is necessary to protect the functional part from scratches and dirt. In this embodiment, as shown in FIGS. 4A and 11, the movement of the first substrate holding member 14 located on the lower side in a state where the substrate trays are used in a multi-tiered manner in the vertical direction. A non-function in which the distance 41 between the regulating surface 35 and the end in the X direction of the flat lower surface 38 of the vibration control unit of the second substrate holding member located immediately above the regulating surface 35 is located on the outer periphery of the held substrate 111. By designing and manufacturing the substrate holding member 14 so as to be smaller than the width 81 of the portion, and fixing the substrate holding member 14 to the substrate support portion 13, a substrate having a functional portion at the center and a non-functional portion at the end is provided. It is possible to protect the functional part from scratches and dirt.

Since the substrate holding member 14 has the above-described structure, when the substrate 111 is stored or transported using the substrate tray 11, the vibration control unit 32 and the substrate 111 held by the vibration in the vertical direction are used. Even when contact with the functional unit 112 occurs, it is possible to avoid contact between the functional unit 112 of the substrate 111 that has been surface-treated and the vibration control unit 32, and the functional unit 112 may be scratched or stained. Prevention becomes possible.

  12 to 15 are schematic views of an example of a method for fixing the substrate holding member 14 of the present embodiment to the substrate tray 11. FIG. 12 shows that the board holding member 14a having the movement control part 31 having the fitting part 123 having the positioning function is provided on the board holding member 14 from the upper side of the board support part 13 and the fitting part having the positioning function. 12 is a schematic view of a method of fitting a substrate regulating portion 14b having a vibration control portion 32 having 123 formed thereon from below and fixing it to an opening formed in the substrate support portion 13. FIG. The fitting part 123 having a positioning function may be formed by dividing the positioning part 124 and the fitting part 123 as shown in FIG. FIG. 13 shows a flexible hinge part including a board holding part 14a having a movement control part 31 in which a fitting part 123 is formed and a board regulating part 14b having a vibration control part 32 in which a fitting part 123 is formed. 5 is a schematic view of a method of fixing the substrate holding member 14 integrally formed via a bend to the opening formed in the substrate support portion 13 by bending the hinge portion from above and below. FIG. 14 shows that the substrate holding member 14 having the substrate holding portion 14a having the substrate control portion 31 and the substrate regulating portion 14b having the vibration control portion 32 is integrally formed and fitted into the opening of the substrate support portion 13. It is the schematic of the method of fixing. As shown in FIG. 14, a groove for fitting is formed around the substrate holding member 14. FIG. 15 is a schematic view of a method for inserting and fixing the integrally formed substrate holding member 14 into the cutout portion of the substrate support portion 13. As shown in FIG. 15, a groove for fitting is formed around the substrate holding member 14.

Although not shown in the figure, the substrate holding portion 14a, the member including the substrate regulating portion 14b, and the vibration control portion 40 may be attached to the substrate supporting portion 13 using an adhesive or the like. Good. Further, in order to obtain positional accuracy, a counterbore may be formed on the substrate support portion 13 and pasted using an adhesive or the like. The method for fixing the substrate holding member 14 to the substrate support portion 13 is not limited to the method described above as long as the positional accuracy and the fixing strength are satisfied.

  As shown in FIGS. 8 and 9, the substrate holding member 14 of the present embodiment has a flat surface if the substrate support portion 13 to which the substrate holding member 14 is fixed is a flat surface, and a curved surface if the curved surface. It is fixed along the shape of the substrate support part 13. As the substrate 111 increases in size, the substrate 111 is curved in a state in which at least a pair of two opposing sides are curved vertically downward from both sides of the side toward the center in order to stably store or transport the substrate 111. A substrate tray 11 that holds the sheet from the lower side is often used. Since the substrate holding member 14 is fixed along the shape of the substrate support portion 13, the substrate holding member 14 can be used in the substrate tray 11 that holds the substrate 111 from the lower side in a curved state. Become. Further, when the fixing is performed, a gap may be generated due to a manufacturing error or the like of the substrate holding member 14 and the substrate support portion 13, and the substrate holding member 14 is flexible in order to absorb such a manufacturing error. It is important to have Further, the flexibility of the substrate holding member 14 is that the substrate holding member 14 may be damaged due to stress when the frame 12 or the substrate support 13 after being fixed is deformed due to vibration, change with time, or the like. This is effective to prevent the fixed part from coming off.

  Further, the substrate holding member 14 of this embodiment may be formed with a groove 101 in the X direction perpendicular to the movement restricting surface 35. The groove 101 improves the flexibility of the substrate holding member 14 in a direction parallel to the movement restricting surface 35 and the flat upper surface 36 of the substrate holding portion (direction B in FIG. 3A). Since the flexibility of the substrate holding member 14 is improved by the groove 101, the durability and fixing stability of the substrate holding member 14 against vibration during storage or transport of the substrate 111 are further improved. Furthermore, as shown in FIG. 9 (b), at least a pair of opposing two sides is held from the lower side of the substrate 111 in a state of being bent vertically downward from both sides of the side toward the center. With respect to the substrate holding member 14 fixed to the curved substrate support portion 13, the flexibility at the time of fixing the substrate holding member 14 to the substrate support portion 13 is improved.

  The shape of the groove 101 can be designed as appropriate. However, in order to cope with stress such as vibration and stress due to fixation to a curved portion, the shape having no corner portion where stress is concentrated, in particular, the bottom portion of the groove 101 is In addition, it is preferably formed in a shape having no corners. Furthermore, the bottom of the groove 101 is more preferably formed in an arc shape. This is because when the corner portion is provided, stress concentration occurs when stress due to vibration or the like is generated in the substrate holding member 14, which may cause damage. The substrate holding member 14 that does not have corners, and more preferably is formed in an arc shape, is less likely to be damaged even if stress is generated. The size of the groove 101 is appropriately determined in consideration of material strength, flexibility, and the like.

An example in which the groove 101 is formed is shown in FIGS. 5 (a) to 5 (d) and FIGS. 6 (a) to 6 (b).
The groove 101 may be formed in the vibration control unit, or may be formed across the vibration control unit 32 and the board regulating unit 14b.
The groove 101 may be formed in the movement control unit 31 or may be formed across the movement control unit 31 and the substrate holding unit 14a.
As described above, the groove 101 is formed between the members, so that the flexibility of the substrate holding member 14 is further improved, and the substrate holding member 14 is resistant to vibration during storage or transport of the substrate 111. The durability and the stability of fixing are further improved.

  Further, although not clearly shown in the drawing, the substrate holding member 14 of this embodiment is all chamfered in an arc shape in order to prevent scratches, breakage, etc. of the held base material 111. It is preferable to have a different shape. The chamfer size is appropriately designed, but is preferably about R0.5 to R3.

  The substrate holding member 14 of the present embodiment holds a substrate 111 made of a rectangular and rigid plate-like material in the horizontal direction from the lower side of the substrate 111 and is stacked in multiple stages in the vertical direction so that the plurality of the substrates 111 are stacked. In the substrate tray 11 for storing or transporting the substrate, the substrate holding member 14 is fixed to a substrate supporting portion provided inside the frame of the substrate tray 11 and holds the substrate 111 from the lower surface. The movable region of the substrate 111 is ensured in the horizontal direction and the vertical direction without fixing the substrate 111, and the movable region is restricted, thereby stably holding the substrate 111. By holding the substrate 111 according to this method, the substrate 111 can be moved freely. With this degree of freedom, it is possible to prevent stress concentration from occurring at the substrate fixing portion when vibrations occur, compared to when the substrate 111 is fixed and transported, stored, and the like. Can be prevented.

  In order to secure the movable range of the substrate 111 and to regulate the movable range in a state where the substrate tray 11 is used in a multi-tiered manner in the vertical direction, the substrate tray 11 is fixed to a pair of opposing two sides. In the opposed substrate holding member 14, the distance between the movement restricting surface 35 of one substrate holding member 14 and the movement restricting surface 35 of the other substrate holding member 14 is larger than the width of the substrate 111 to be held. The substrate holding member 14 is fixed to the substrate support portion 13. The distance is appropriately designed depending on the size of the substrate 111 to be held. The distance is expressed as “width of the substrate 111 + X of the movement control surface of the first substrate holding member located on the lower side and the flat lower surface of the vibration control unit of the second substrate holding member located immediately above the surface. It is preferably designed to be “less than or equal to the distance from the end of the direction”. With this design, when the movement of the substrate 111 occurs, the substrate 111 can be stably held without being detached from the flat lower surface 38 of the vibration control unit. Further, when the substrate 111 is curved and held in a curved shape, the distance is not a linear distance but a curved distance along the curve of the held substrate 111. As described above, the distance between the movement restricting surfaces 35 of the opposing substrate holding members 14 depends on the size of the substrate 111 to be held.

  On the other hand, when the size of the substrate 111 is changed, or when the movement restricting portion 31 or the vibration control portion 32 needs to be replaced due to damage or the like, the movement restricting portion 31 and the substrate holding portion 14a. Are integrally formed, or the vibration control unit 32 and the substrate restricting part 14b are integrally formed, and the movement restricting part 31 and the substrate holding part 14a are integrally formed, or the vibration control is integrally formed. It is necessary to newly create or replace the part 32 and the board restricting part 14b. For this reason, costs such as time and cost required for replacement increase. As shown in FIG. 7, the movement restricting portion 31 and the vibration control portion 32 are replaced by making the substrate holding member 14 in a form that allows the movement restricting portion 31 and the vibration control portion 32 to be detachable. By doing so, it becomes possible to cope with preparations for changing the substrate size, and it is possible to significantly reduce costs such as time and cost required for replacement. FIG. 5A shows an example of the substrate holding member of the present embodiment in which the movement restricting portion 31 and the substrate holding portion 14a are integrally formed and the vibration control portion 32 is made detachable. FIG. 5B is an example of the substrate holding member of this embodiment in which the vibration control unit 32 and the substrate regulating unit 14b are integrally formed and the movement regulating unit 31 is detachably formed. FIG. 5B is an example of the substrate holding member of the present embodiment in which the movement restricting unit 31 and the vibration control unit 32 are made detachable.

  A method of detachably fixing the movement restricting unit 31 and the vibration control unit 32 can be appropriately designed such as a method using a fixing tool such as a screw or a method using fitting. In consideration of stress at the time of contact with the substrate 111, a method using a fixing tool such as a screw is preferable. In particular, when a fixing tool such as a screw is used, the position of the fixing hole (for example, a screw hole in the case of a screw) can be set without changing the movement restricting unit 31 and the vibration control unit 32 for changing the substrate size. It becomes possible to cope by changing. In order to cope with the exchange, it is possible to provide a plurality of fixing holes from the beginning, or to form a new fixing hole when replacement is necessary. By responding by changing the position of the fixing hole, it is not necessary to newly create the movement restricting unit 31 and the vibration control unit 32. As described above, since the movement restricting portion 31 and the vibration control portion 32 are made detachable, it becomes easy to cope with a change in the substrate size.

FIG. 10 is a schematic view in which the substrate holding member 14 is divided and formed into a substrate holding portion 14a, a movement restricting portion 31, a substrate restricting portion 14b, and a vibration control portion 32. As shown in FIG. 10A, the substrate holding portion 14a to which the movement restricting portion 31 is fixed is fixed from the upper surface of the substrate supporting portion 13, and the substrate restricting portion 14b to which the vibration control portion 32 is fixed is the substrate. It is fixed from the lower surface of the support part 13. Although not shown in FIG. 10A, the substrate holding portion 14a and the substrate regulating portion 14b have a fitting portion 123 and a positioning portion 124 as shown in FIG. It is fixed to the substrate support part 13 by the part 123 and the positioning part 124. The fitting part 123 may also serve as the positioning part 124. The shape of the positioning portion 124 and the positioning portion 124 may be designed as long as it can be stably fixed to the substrate support portion.

  Further, the substrate holding member 14 of the present embodiment may be attached to the substrate support portion 13 fixed to at least a pair of opposing two sides of the frame body 12. It is preferable to be fixed to the side. Furthermore, it is sufficient that at least one substrate holding member 14 having a size corresponding to the substrate 111 to be held is attached to one side. In addition, a plurality of the substrate holding members 14 may be attached to one side of the frame body 12 at intervals. Since a plurality of the substrate holding members 14 are attached at intervals, the size of the substrate holding member 14 is reduced, the manufacturing of the substrate holding member 14 is facilitated, and the substrate holding member 14 is attached to the substrate holding member 14. When replacement is necessary due to scratches or the like, it is possible to cope with the problem by replacing only the one having a problem as necessary.

Further, when the size of the substrate 111 to be held is changed to a small size, if a plurality of the substrate holding members 14 are attached at intervals, all the substrate holding members 14 may be replaced. However, it is possible to cope with only a part of the replacement. For example, when seven substrate holding members 14 are attached to each side, the substrate holding members at both ends of each side can be designed in a shape that matches the change in the substrate size and replaced with a new substrate holding member. Stable substrate storage or transportation is possible. In addition to the both ends of each side, both ends of each side and the central substrate holding member may be exchanged. If the movement restricting portion 31 and the vibration control portion 32 of the substrate holding member 14 are made possible, when the size of the substrate 111 to be held is changed to a small size, the entire substrate holding member 14 is replaced. Instead, it is possible to cope with the problem by exchanging the movement restricting portion 31 and the vibration control portion 32 or changing the fixed positions of the removable movement restricting portion 31 and the vibration control portion 32. For example, it is possible to cope with the problem by exchanging the movement restricting portion 31 and the vibration control portion 32 of the substrate holding member 14 at both ends of each side or at both ends and the central substrate holding member 14. As described above, when the change of the substrate size is dealt with by replacing some of the substrate holding members 14, when the substrate holding member 14 is first fixed to the substrate support portion 13, the substrate holding member 14 to be replaced is scheduled. For example, only the substrate holding members 14 that are detachably attached to the movement restricting portion 31 and the vibration control portion 32 are fixed to the both ends of each side or only the substrate holding members 14 at both ends and the center of each side, and other substrate holdings are made. The movement restricting portion 31 and the vibration control portion 32 may be integrally formed on the member 14 and the substrate holding member 14 that cannot be detached may be fixed. Thus, by reducing the number of substrate holding members 14 that need to be replaced, the efficiency of replacement work can be greatly increased.

The size and mounting interval of the substrate holding member 14 are appropriately designed according to the substrate size. Considering the ease of manufacture, the ease of replacement, and the like, the size of the substrate holding member 14 is set in a direction parallel to the movement regulating surface 35 and the flat upper surface 36 of the substrate holding portion (see arrow B in FIG. 3A). The width in the direction) is preferably about 15 cm-30 cm, and the width perpendicular to the movement restricting surface 35 is preferably about 3 cm-15 cm. The mounting interval is appropriately designed based on the size of the substrate 111 to be held and the size of the substrate holding member 14, but in order to increase the contact area with the substrate holding member 14 and perform stable storage or transportation, The design is made in such a range that the adjacent substrate holding members 14 can be prevented from coming into contact with each other. For example, in the case of a substrate tray 11 for a G6 size substrate (1,500 mm × 1,800 mm) for liquid crystal, it is preferable to design with about 8 on the long side and about 7 on the short side.

  Furthermore, the substrate tray 11 that holds a pair of opposing two sides of the four sides of the substrate tray 11 from the lower side of the substrate 111 in a state of being bent vertically downward from both sides of the side toward the center. , The substrate holding member 14 in which the groove 101 is not formed is fixed to a pair of opposing linear frames 12 on the two sides, and the substrate holding member 14 in which the groove 101 is formed is opposed to a pair. You may fix to the curved frame 12 of 2 sides.

  Regarding the response to the change of the substrate size, the substrate holding member 14 is newly produced by using the substrate holding member in which the movement restricting portion 31 and the vibration control portion 32 are detachably attached according to this embodiment. Without changing the movement restricting portion 31 and the vibration control portion 32, it is possible to cope with a change in the substrate size, and it is not necessary to newly prepare the substrate holding member 14, so that the cost is greatly increased. Reduction is possible.

  By using the substrate tray 11 to which the substrate holding member 14 of this embodiment is fixed, the tray can be made compact. In addition, by storing or transporting a color filter forming substrate for a display panel or an intermediate process substrate for producing the color filter forming substrate, the substrate can be stored or transported to prevent the substrate from being soiled or damaged. It becomes possible.

  Examples of the present invention will be described below.

First embodiment A substrate tray 11 for a G6 size substrate for liquid crystal (1850 mm × 1500 mm × 0.7 mmt; the functional layer is formed in the center of the substrate and the size of the functional layer area is 1820 mm × 1470 mm) is manufactured. Transport and storage tests were performed. The substrate holding member 14 is arranged with eight on the long side and seven on the short side.

  The frame body 12 was produced by bending the two long sides into a straight line and bending the short side downward vertically so as to have a curvature radius of 3000 mm. The frame body 12 was fabricated so that the vertical width was 10 mm. In addition, the frame 12 is provided with a fitting portion 123 so that when the substrate trays 11 are stacked in the vertical direction, the stacked substrate trays 11 are in the same position when viewed from above. At the same time, a handle for machine conveyance was provided. The thickness of the substrate support portion 13 was 2 mm and was formed along the frame body 12. In the substrate support portion 13 supported by the frame body 12, openings for fixing the substrate holding member 14 were formed by cutting at 8 locations on the long side and 7 locations on the short side.

  As shown in FIG. 10, the substrate holding member 14 is divided into a substrate holding portion 14a, a movement restricting portion 31 formed with a groove 101, a substrate restricting portion 14b, and a vibration control portion 32 formed with a groove. Then, the substrate was fixed to the substrate tray 11.

The substrate holding portion 14a and the substrate restricting portion 14b were separately molded by injection molding using polypropylene as a material. Further, as shown in FIG. 10 (b), the substrate holding portion 14 a and the substrate restricting portion 14 b are opened on the surfaces opposed to each other when attached to the substrate supporting portion 13 and the openings of the fitting portion 123 and the substrate supporting portion 13. A positioning portion 124 is formed in accordance with the shape.
The movement restricting portion 31 and the vibration controlling portion 32 were made by cutting using UPE (ultra high molecular weight polyethylene) as a material. A U-shaped groove 101 and a screw hole are formed in the movement restricting portion 31 and the vibration control portion 32, respectively. As shown in FIG. 10, the substrate holding portion 14a and the movement restricting portion 31 are fixed with screws, the substrate restricting portion 14b and the vibration control portion 32 are fixed with screws, and the fitting portion 123 and Used for the positioning part 124, the substrate holding part 14a to which the movement restricting part 31 is fixed and the substrate restricting part 14b to which the vibration control part 32 is fixed are fixed to the opening of the substrate support part 13. .

  The substrate holding member 14 was formed so that the flat upper surface of the substrate holding portion was a rectangle having a direction perpendicular to the movement regulating surface 35 of 50 mm and the other of 180 mm. The rectangle was formed so that the corner was R8. When the substrate trays 11 to which the substrate holding member 14 is fixed are stacked in multiple stages, the flat upper surface 36 of the substrate holding portion 14a of the first substrate holding member 14 located on the lower side is located immediately above it. The substrate holding portion 14a and the substrate restricting portion 14b are arranged so that the distance (a in FIG. 4B) between the substrate restricting portion 14b of the second substrate holding member 14 and the flat lower surface 37 is 4.8 mm. The substrate holding member 14 was formed by designing the thickness. The distance (b in FIG. 4B) between the flat upper surface 36 of the substrate holding portion and the upper surface of the movement control portion of the substrate holding member is 4.2 mm, the flat lower surface 37 of the substrate restricting portion, and the vibration control. The distance between the flat bottom surface of the portion 32 (c in FIG. 4B) is 2.6 mm, and the movement restricting surface of the first substrate holding member located on the lower side and the second position located immediately above the movement regulating surface. The substrate holding member 14 was formed such that the distance between the flat lower surface of the vibration control unit of the substrate holding member and the end portion in the X direction was 9 mm. The groove 101 is formed in the movement restricting portion 31 and the vibration control portion 32. The movement restricting portion 31 was formed with a groove having a width of 2 mm, a depth of 3 mm, and an arc radius of 1 mm. Further, the vibration control unit 32 was formed with a groove having a width of 2 mm, a depth of 1 mm, and an arc radius of 1 mm. The vibration control unit 40 was manufactured so that the thickness changing unit 39 of the vibration control unit had an outwardly convex curved surface with a radius of 2.6 mm.

The opposing substrate holding members 14 fixed to a pair of opposing two sides of the substrate tray 11 correspond to G6 size substrates (1850 mm × 1500 mm). The substrate holding member 14 was fixed to the substrate tray 11 so that the distance from the other movement regulating surface 35 was 1855 mm and 1505 mm, respectively.
The groove 101 having the bottom portion formed in an arc shape can be stably attached to the curved portion.

  As a result of performing a storage and conveyance test of the G6 size substrate for liquid crystal using the substrate tray 11 to which the substrate holding member 14 is fixed, the frame body 12, against vibration during the storage and conveyance test, It can be confirmed that the substrate support member 13 can be stably stored and transported without causing troubles such as dropping and breakage of the substrate holding member 14 and contamination or breakage of the substrate against deformation due to stress or the like of the substrate support portion 13. It was.

Second Embodiment A G6 size substrate for liquid crystal (1850 mm × 1500 mm × 0.7 mmt; the functional layer is formed in the center of the substrate, the size of the functional layer area is 1820 mm × 1470 mm), and a new liquid crystal substrate (1800 mm × 1500 mm) × 0.7 mmt; the functional layer is formed in the center of the substrate, and the size of the functional layer region is changed to 1770 mm × 1470 mm). Therefore, the substrate holding member 14 disposed on the short side of the substrate tray 11 is It was exchanged as shown in Fig. 2, and a conveyance / storage test was conducted.

In order to accommodate the substrate tray of the first embodiment for the new liquid crystal substrate (1800 mm × 1500 mm × 0.7 mmt), seven trays respectively arranged on a pair of opposing short sides of the substrate tray 11 Regarding the substrate holding member 14,
(1) The movement restricting portion 31 and the vibration control portion 32 of the substrate holding member 14 on all sides are exchanged to cope with the substrate size change. (2) The movement restricting portion 31 and the vibration control portion on the substrate holding member 14 on all sides. Corresponding to changing the size of the board by changing the position of the 32 screw holes and changing the mounting position (3) Of the board holding members 14 fixed to each side, holding one board located between the two at both ends and the middle Corresponding to changing the substrate size by exchanging the movement restricting portion 31 and the vibration control portion 32 of the member 14 (4) Of the substrate holding members 14 fixed to each side, holding one substrate located between the two at both ends and the middle Change the mounting position by changing the positions of the screw holes of the movement restricting portion 31 and the vibration control portion 32 of the member 14 to cope with the change in substrate size. (5) Of the seven substrate holding members 14, two substrates at both ends Movement restricting portion 31 and vibration control portion 32 of holding member 14. (6) Among the seven substrate holding members 14, the positions of the screw holes of the movement restricting portion 31 and the vibration control portion 32 of the two substrate holding members 14 at both ends are changed, and the attachment position is changed. The substrate tray 11 was prepared corresponding to the substrate size change, and a conveyance / storage test was performed. In order to correspond to the new liquid crystal substrate, the distance between the two opposing movement restriction surfaces 35 was changed so that the long side was 1805 mm and the short side was 1505 mm.

  As a result of the storage and transport test of the new liquid crystal substrate (1800 mm × 1500 mm × 0.7 mmt) using the substrate tray 11 of (1) to (8) described above, the vibration during the storage and transport test was detected. In addition to the deformation of the frame body 12 and the substrate support portion 13 due to stress or the like, the substrate holding member 14 can be stably stored and transported without causing troubles such as dropping and breakage of the substrate holding member 14 and substrate contamination and breakage. I was able to confirm that it was possible.

  The present invention is a tray for horizontally supporting the substrate by placing the substrate on the upper side with the surface direction of the substrate made of a rectangular and rigid plate as a horizontal direction, and is a plate-like plate for a flat display panel. Can be used for transportation and storage of various materials (for example, glass and plastics) or members, or substrates made of plates such as metals, rare metals, and silicon, and plate-shaped processing members that have been processed on them. is there.

DESCRIPTION OF SYMBOLS 11 Substrate tray 12 Frame 13 Substrate support part 14 Substrate holding member 14a Substrate holding part 14b Substrate restriction part 31 Movement restriction part 32 Vibration control part 35 Movement restriction surface 36 Flat upper surface of substrate holding part 37 Flat of substrate restriction part Lower surface 38 Flat bottom surface of vibration control unit 39 Thickness changing portion of vibration control unit 81 Non-functional portion width 101 Groove 103 Transport platform 111 Substrate 112 Functional portion 123 Fitting portion 124 Positioning portion

Claims (24)

In a substrate tray for holding or transporting a plurality of substrates, holding a substrate made of a rectangular and rigid plate in a horizontal direction from the lower side, and stacking in multiple stages in the vertical direction,
A substrate holding member that is fixed to a substrate support provided inside the frame of the substrate tray and holds the substrate from the lower surface,
The substrate holding member includes at least a substrate holding unit, a movement regulating unit, a substrate regulating unit, and a vibration control unit,
The substrate holding part has a flat upper surface, is fixed to protrude from the upper surface of the substrate support part,
The substrate holding part has the movement restricting part on the upper surface of the substrate holding part,
The movement restricting portion has a movement restricting surface that is a plane perpendicular to the flat upper surface of the substrate holding portion,
The substrate restricting portion has a flat lower surface, is fixed to protrude from the lower surface of the substrate support portion,
The substrate restricting portion has the vibration control portion on the lower surface of the substrate restricting portion,
When the substrate trays are stacked in multiple stages in the vertical direction, the direction perpendicular to the movement restricting surface of the movement restricting portion is taken as the X direction, and the X direction from the movement restricting surface of the first substrate holding member located on the lower side A substrate holding member, wherein a vibration control unit of a second substrate holding member located immediately above is fixed to the side. The substrate holding member according to claim 1,
At least one side of the vibration control unit on the X direction side has a thickness changing portion in which the thickness decreases,
A substrate holding member. The substrate holding member according to any one of claims 1 to 2,
In a state where the substrate tray is used by being stacked in multiple stages in the vertical direction,
The movement restricting surface of the first substrate holding member located on the lower side;
The distance from the X-direction end of the flat bottom surface of the vibration control unit of the second substrate holding member located immediately above is as follows:
A substrate holding member having a width smaller than that of a non-functional portion located on an outer periphery of a substrate to be held. The substrate holding member according to any one of claims 1 to 3,
In a state where the substrate tray is used by being stacked in multiple stages in the vertical direction,
The distance between the flat upper surface of the substrate holding portion of the first substrate holding member and the flat lower surface of the substrate restricting portion of the second substrate holding member located immediately above is a,
The distance between the flat upper surface of the substrate holding portion of the substrate holding member and the upper surface of the movement control portion of the substrate holding member is b,
The distance between the flat lower surface of the substrate regulating portion of the substrate holding member and the lower surface of the vibration control portion of the substrate holding member is c,
The thickness of the substrate to be held is d,
When
b <a, b + c> ad, ac> d
The substrate holding portion, the movement restricting portion, the substrate restricting portion, and the vibration control portion are formed so as to satisfy all the relationships
A substrate holding member. The substrate holding member according to any one of claims 1 to 4,
A substrate holding member, wherein at least one groove is formed in the vibration control unit. The substrate holding member according to any one of claims 1 to 4,
At least one groove extending between the vibration control unit and the substrate regulating unit is formed. The substrate holding member according to any one of claims 1 to 4,
A substrate holding member, wherein at least one groove is formed in the movement restricting portion. The substrate holding member according to any one of claims 1 to 4,
At least one groove extending between the movement restricting portion and the substrate holding portion is formed. The substrate holding member according to any one of claims 1 to 4,
At least one groove is formed in the vibration control unit,
A substrate holding member, wherein at least one groove is formed in the movement restricting portion. The substrate holding member according to any one of claims 1 to 4,
At least one groove is formed in the vibration control unit,
At least one groove extending between the movement restricting portion and the substrate holding portion is formed. The substrate holding member according to any one of claims 1 to 4,
At least one groove extending between the vibration control unit and the substrate regulating unit is formed,
A substrate holding member, wherein at least one groove is formed in the movement restricting portion. The substrate holding member according to any one of claims 1 to 4,
At least one groove extending between the vibration control unit and the substrate regulating unit is formed,
At least one groove extending between the movement restricting portion and the substrate holding portion is formed. The substrate holding member according to any one of claims 5 to 12,
A substrate holding member, wherein the bottom of the groove is formed in an arc shape. The substrate holding member according to any one of claims 1 to 13,
A substrate holding member, wherein the vibration control unit is detachable. The substrate holding member according to any one of claims 1 to 13,
The substrate holding member, wherein the movement restricting portion is detachable. The substrate holding member according to any one of claims 1 to 13,
The vibration control unit is made detachable,
The substrate holding member, wherein the movement restricting portion is detachable. The substrate holding member according to any one of claims 1 to 16,
The substrate holding member, wherein the substrate holding member has flexibility. The substrate holding member according to any one of claims 1 to 17,
A substrate holding member, wherein the substrate holding member is formed of a thermoplastic resin.   A tray for a substrate, wherein the substrate holding member is arranged so that the movement restricting surface of the substrate holding member according to any one of claims 1 to 18 is parallel to an end surface of the substrate to be held. A substrate tray, which is fixed.   20. The substrate tray according to claim 19, wherein the distance between the movement restricting surfaces of the substrate holding members fixed to the substrate support portions on the two opposite sides of the substrate tray is greater than the width of the substrate to be held. The substrate tray, wherein the substrate holding member is fixed so as to be large.   The substrate tray according to any one of claims 19 to 20, wherein the substrate holding member according to any one of claims 1 to 18 is configured to support the substrate of the substrate tray. A substrate tray characterized by being fixed along the shape of the portion.   The substrate tray according to any one of claims 19 to 21, wherein at least a pair of opposing two sides of the substrate to be held are curved vertically downward from both sides of the side toward the center. And holding a substrate tray. The substrate tray according to any one of claims 19 to 22,
19. A substrate tray, wherein a plurality of substrate holding members according to any one of claims 1 to 18 are attached to each side of the frame of the substrate tray at intervals. . The substrate tray according to claim 23, wherein
At least two substrate holding members among a plurality of substrate holding members fixed to one side of at least one pair of opposite sides of the four sides of the frame body of the substrate tray include the movement restricting portion. A substrate tray, wherein the vibration control unit is detachable.

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