JP2013546122A5 - - Google Patents

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JP2013546122A5
JP2013546122A5 JP2013532983A JP2013532983A JP2013546122A5 JP 2013546122 A5 JP2013546122 A5 JP 2013546122A5 JP 2013532983 A JP2013532983 A JP 2013532983A JP 2013532983 A JP2013532983 A JP 2013532983A JP 2013546122 A5 JP2013546122 A5 JP 2013546122A5
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Japan
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plasma
magnets
pair
flood gun
plasma chamber
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JP2013532983A
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Japanese (ja)
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JP2013546122A (ja
JP5847184B2 (ja
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Priority claimed from US12/901,198 external-priority patent/US8471476B2/en
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JP2013532983A 2010-10-08 2011-10-07 浸漬低インダクタンスｒｆコイル及びマルチカスプ磁気配列を用いた誘導結合型プラズマフラッドガン Active JP5847184B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/901,198 US8471476B2 (en) 2010-10-08 2010-10-08 Inductively coupled plasma flood gun using an immersed low inductance FR coil and multicusp magnetic arrangement
US12/901,198 2010-10-08
PCT/US2011/055425 WO2012048256A1 (en) 2010-10-08 2011-10-07 Inductively coupled plasma flood gun using an immersed low inductance rf coil and multicusp magnetic arrangement

Publications (3)

Publication Number Publication Date
JP2013546122A JP2013546122A (ja) 2013-12-26
JP2013546122A5 true JP2013546122A5 (https=) 2014-07-31
JP5847184B2 JP5847184B2 (ja) 2016-01-20

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JP2013532983A Active JP5847184B2 (ja) 2010-10-08 2011-10-07 浸漬低インダクタンスｒｆコイル及びマルチカスプ磁気配列を用いた誘導結合型プラズマフラッドガン

Country Status (6)

Country Link
US (2) US8471476B2 (https=)
JP (1) JP5847184B2 (https=)
KR (1) KR101631159B1 (https=)
CN (1) CN103250228B (https=)
TW (1) TWI503859B (https=)
WO (1) WO2012048256A1 (https=)

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