JP2013540891A - Pecvdシステムにおける差圧の制御 - Google Patents
Pecvdシステムにおける差圧の制御 Download PDFInfo
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- JP2013540891A JP2013540891A JP2013526292A JP2013526292A JP2013540891A JP 2013540891 A JP2013540891 A JP 2013540891A JP 2013526292 A JP2013526292 A JP 2013526292A JP 2013526292 A JP2013526292 A JP 2013526292A JP 2013540891 A JP2013540891 A JP 2013540891A
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- pressure
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- hermetic
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- hermetic seal
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45557—Pulsed pressure or control pressure
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Vapour Deposition (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
KAI-Mシステム内での微結晶シリコン層の堆積条件は、13.56MHz、13mmの中間電極ギャップ、450W、9.0mbar、2500sccmのH2である。実験A)では、強い差圧排気が堆積中に用いられた。その結果圧力差は8mbarとなった(つまり図2)。実験B)では、PECVD反応装置周辺での排気は、堆積圧力を9.0mbarに維持しながら圧力差をわずか0.5mbarにするように減少した。
図4は、高い差圧(>8mbar)での堆積を表している。前記高い差圧での堆積では、μc-Si:H 堆積の中心領域(Rc〜50%)を取り囲むa-Si:H堆積領域(Rc<10%)が明確に識別できる。局所的な不均一が生じる結果、参照番号2の近くに位置する側部の窓に顕著に堆積する。他方領域2に位置する窓では、清浄な窓が見いだされた。
− 外側真空チャンバと内側プラズマチャンバとの間での気体の圧力差が減少するとき、反応装置部の内側から外側へ印加される力が、高圧領域において顕著に減少しうる。その結果、漏洩率に影響しうる機械的応力及び/又は変形が減少する。圧力差が10mbarのKAI-1200でのプラズマボックスの端部板に加わる力の粗い推定は約140kgである。寿命と保守期間の改善は、その装置に作用する機械的な力が減少する結果でもあり得る。
− 一のプラズマボックス漏洩率は、一の製造用積層体の反応装置から他の製造用積層体の反応装置までで変化しうる。その結果微結晶シリコンの成長に用いられる堆積領域の不一致が生じ、最終的には一の反応装置から他の反応装置までのデバイスの性能においてばらつきが大きくなってしまう。提案された解決法は、漏洩率のプラズマ条件への影響を制限することによってこの問題を緩和することができる。
− 通常の差圧排気が存在する状態からPout=Pinへ移行することで、a-Si:H成長しようとするため、差圧を調節することで、アモルファスシリコンから微結晶シリコンへの遷移を制御するさらなる自由度が追加される。
− 従来の差圧排気はアモルファス成長を起こしやすいので、差圧を(Pout=Pinに)減少することで、基板面積全体にわたって微結晶シリコン成長からアモルファスシリコン成長への遷移を良好に制御することが可能となる。
− パウダー生成が制限されることで、SF6、NF3、又はF2のいずれかに基づく既存の溶液を用いた反応装置の洗浄が容易になる。
Claims (4)
- 少なくとも1つの基板を含む内側の非気密性封止体、前記封止体を完全に取り囲む外側の気密性チャンバ、並びに、前記内側の非気密性封止体及び前記外側の気密性チャンバと操作可能なように接続する排気口を有する堆積システム内で薄膜を作製する方法であって、
当該方法は、前記内側の非気密性封止体内での圧力よりも低い圧力に前記外側の気密性チャンバを維持する手順を有し、
動作中、前記内側の非気密性封止体と前記外側の気密性チャンバとの間での圧力差が、1mbar未満に設定される、
ことを特徴とする方法。 - 前記内側の非気密性封止体と前記外側の気密性チャンバとの間での差圧ΔP= Pout-Pinは、Pout=0.5Pin、Pout=0.75Pin、又はPout=0.95Pinで有効となる、請求項1に記載の方法。
- 微結晶シリコン層が、9mbarの前記内側の非気密性封止体の圧力で、かつ、0.5mbarの圧力差で堆積される、請求項1に記載の方法。
- 少なくとも1つの基板を含む、支配的な圧力が大気圧未満である内側の非気密封止体;
前記内側の非気密封止体を取り囲み、前記内側の非気密封止体20の圧力よりも低い圧力に維持される外側の気密性チャンバ;
前記内側の非気密性封止体及び前記外側の気密性チャンバと操作可能なように接続する排気口;
前記内側の非気密封止体と前記外側の気密性チャンバとの間での圧力差を制御するため、前記排気口と前記内側の非気密性封止体との間、及び、前記排気口と前記外側の気密性チャンバとの間に配置されて、前記内側の非気密封止体と前記外側の気密性チャンバとの間の圧力差を1mbar未満に設定するように構成される2つのバタフライベント;
を有する、プラズマ堆積プロセスを用いて薄膜を作製する装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US37989710P | 2010-09-03 | 2010-09-03 | |
US61/379,897 | 2010-09-03 | ||
PCT/CH2011/000203 WO2012027858A1 (en) | 2010-09-03 | 2011-09-02 | Control of differential pressure in pecvd systems |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2013540891A true JP2013540891A (ja) | 2013-11-07 |
Family
ID=44645407
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013526292A Pending JP2013540891A (ja) | 2010-09-03 | 2011-09-02 | Pecvdシステムにおける差圧の制御 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20130216731A1 (ja) |
EP (1) | EP2625309A1 (ja) |
JP (1) | JP2013540891A (ja) |
KR (1) | KR20130103738A (ja) |
CN (1) | CN103119199A (ja) |
WO (1) | WO2012027858A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150010718A1 (en) * | 2012-01-04 | 2015-01-08 | Tel Solar Ag | Heat transfer control in pecvd systems |
WO2018142179A1 (en) * | 2017-02-02 | 2018-08-09 | C4E Technology Gmbh | Apparatus for applying a deposition onto a substrate by a deposition process and method for carrying out a deposition process by use of such an apparatus |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2589168B1 (fr) * | 1985-10-25 | 1992-07-17 | Solems Sa | Appareil et son procede d'utilisation pour la formation de films minces assistee par plasma |
FR2621930B1 (fr) | 1987-10-15 | 1990-02-02 | Solems Sa | Procede et appareil pour la production par plasma de couches minces a usage electronique et/ou optoelectronique |
US4793283A (en) * | 1987-12-10 | 1988-12-27 | Sarkozy Robert F | Apparatus for chemical vapor deposition with clean effluent and improved product yield |
CH687986A5 (de) * | 1993-05-03 | 1997-04-15 | Balzers Hochvakuum | Plasmabehandlungsanlage und Verfahren zu deren Betrieb. |
ATE391339T1 (de) * | 2004-11-24 | 2008-04-15 | Oc Oerlikon Balzers Ag | Vakuumbehandlungskammer für sehr grossflächige substrate |
US8067061B2 (en) * | 2007-10-25 | 2011-11-29 | Asm America, Inc. | Reaction apparatus having multiple adjustable exhaust ports |
-
2011
- 2011-09-02 JP JP2013526292A patent/JP2013540891A/ja active Pending
- 2011-09-02 CN CN2011800426009A patent/CN103119199A/zh active Pending
- 2011-09-02 EP EP11755238.0A patent/EP2625309A1/en not_active Withdrawn
- 2011-09-02 WO PCT/CH2011/000203 patent/WO2012027858A1/en active Application Filing
- 2011-09-02 KR KR1020137008482A patent/KR20130103738A/ko not_active Application Discontinuation
- 2011-09-02 US US13/820,180 patent/US20130216731A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US20130216731A1 (en) | 2013-08-22 |
CN103119199A (zh) | 2013-05-22 |
EP2625309A1 (en) | 2013-08-14 |
KR20130103738A (ko) | 2013-09-24 |
WO2012027858A1 (en) | 2012-03-08 |
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