JP2013539946A5 - - Google Patents

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Publication number
JP2013539946A5
JP2013539946A5 JP2013533251A JP2013533251A JP2013539946A5 JP 2013539946 A5 JP2013539946 A5 JP 2013539946A5 JP 2013533251 A JP2013533251 A JP 2013533251A JP 2013533251 A JP2013533251 A JP 2013533251A JP 2013539946 A5 JP2013539946 A5 JP 2013539946A5
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JP
Japan
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JP2013533251A
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English (en)
Japanese (ja)
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JP2013539946A (ja
JP5926735B2 (ja
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Priority claimed from FI20106063A external-priority patent/FI20106063A7/fi
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Publication of JP2013539946A5 publication Critical patent/JP2013539946A5/ja
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JP2013533251A 2010-10-14 2011-10-14 広帯域音響結合薄膜bawフィルタ Active JP5926735B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US39295510P 2010-10-14 2010-10-14
FI20106063A FI20106063A7 (fi) 2010-10-14 2010-10-14 Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin
FI20106063 2010-10-14
US61/392,955 2010-10-14
PCT/FI2011/050891 WO2012049372A1 (en) 2010-10-14 2011-10-14 Wide-band acoustically coupled thin-film baw filter

Publications (3)

Publication Number Publication Date
JP2013539946A JP2013539946A (ja) 2013-10-28
JP2013539946A5 true JP2013539946A5 (OSRAM) 2014-11-06
JP5926735B2 JP5926735B2 (ja) 2016-05-25

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JP2013533251A Active JP5926735B2 (ja) 2010-10-14 2011-10-14 広帯域音響結合薄膜bawフィルタ

Country Status (6)

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US (4) US9893712B2 (OSRAM)
EP (1) EP2628246B1 (OSRAM)
JP (1) JP5926735B2 (OSRAM)
CN (2) CN103222191A (OSRAM)
FI (1) FI20106063A7 (OSRAM)
WO (1) WO2012049372A1 (OSRAM)

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US10992284B2 (en) 2018-06-15 2021-04-27 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with multiple frequency setting layers
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US10998882B2 (en) 2018-06-15 2021-05-04 Resonant Inc. XBAR resonators with non-rectangular diaphragms
US12040781B2 (en) 2018-06-15 2024-07-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
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US12119805B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Substrate processing and membrane release of transversely-excited film bulk acoustic resonator using a sacrificial tub
US12149227B2 (en) 2018-06-15 2024-11-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US12184261B2 (en) 2018-06-15 2024-12-31 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with a cavity having round end zones
US11967945B2 (en) 2018-06-15 2024-04-23 Murata Manufacturing Co., Ltd. Transversly-excited film bulk acoustic resonators and filters
US10826462B2 (en) 2018-06-15 2020-11-03 Resonant Inc. Transversely-excited film bulk acoustic resonators with molybdenum conductors
US12224732B2 (en) 2018-06-15 2025-02-11 Murata Manufacturing Co., Ltd. Solidly-mounted transversely-excited film bulk acoustic resonators and filters for 27 GHz communications bands
US12119808B2 (en) 2018-06-15 2024-10-15 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US12132464B2 (en) 2018-06-15 2024-10-29 Murata Manufacturing Co., Ltd. Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
US11349450B2 (en) 2018-06-15 2022-05-31 Resonant Inc. Symmetric transversely-excited film bulk acoustic resonators with reduced spurious modes
US11901878B2 (en) 2018-06-15 2024-02-13 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes with a wider top layer
US11146238B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Film bulk acoustic resonator fabrication method
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US11876498B2 (en) 2018-06-15 2024-01-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
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US12009798B2 (en) 2018-06-15 2024-06-11 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with electrodes having irregular hexagon cross-sectional shapes
US10797675B2 (en) 2018-06-15 2020-10-06 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated z-cut lithium niobate
US10985728B2 (en) 2018-06-15 2021-04-20 Resonant Inc. Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
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CN118523747A (zh) * 2018-10-31 2024-08-20 株式会社村田制作所 固态装配型横向激励的薄膜体声波谐振器
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JP7556358B2 (ja) 2019-03-14 2024-09-26 株式会社村田製作所 音響共振装置、フィルター装置及び音響共振装置の製造方法
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