JP2013536797A - カーボンナノチューブを成長させる金属基材及びその製造方法 - Google Patents
カーボンナノチューブを成長させる金属基材及びその製造方法 Download PDFInfo
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- JP2013536797A JP2013536797A JP2013527293A JP2013527293A JP2013536797A JP 2013536797 A JP2013536797 A JP 2013536797A JP 2013527293 A JP2013527293 A JP 2013527293A JP 2013527293 A JP2013527293 A JP 2013527293A JP 2013536797 A JP2013536797 A JP 2013536797A
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- Prior art keywords
- catalyst
- carbon nanotube
- metal substrate
- catalytic
- catalytic material
- Prior art date
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 322
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 296
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 296
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 188
- 239000002184 metal Substances 0.000 title claims abstract description 188
- 239000000758 substrate Substances 0.000 title claims abstract description 175
- 238000004519 manufacturing process Methods 0.000 title description 4
- 230000003197 catalytic effect Effects 0.000 claims abstract description 158
- 239000000463 material Substances 0.000 claims abstract description 134
- 239000003054 catalyst Substances 0.000 claims abstract description 106
- 238000000034 method Methods 0.000 claims abstract description 103
- 239000012018 catalyst precursor Substances 0.000 claims abstract description 25
- 238000000151 deposition Methods 0.000 claims abstract description 24
- 238000003618 dip coating Methods 0.000 claims abstract description 9
- 238000005507 spraying Methods 0.000 claims abstract description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 57
- 239000000126 substance Substances 0.000 claims description 50
- 239000002105 nanoparticle Substances 0.000 claims description 42
- 229910052742 iron Inorganic materials 0.000 claims description 27
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 25
- 238000002844 melting Methods 0.000 claims description 25
- 230000008018 melting Effects 0.000 claims description 25
- 229910052802 copper Inorganic materials 0.000 claims description 24
- 239000010949 copper Substances 0.000 claims description 24
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 22
- 229910052723 transition metal Inorganic materials 0.000 claims description 22
- -1 transition metal salts Chemical class 0.000 claims description 20
- 239000011521 glass Substances 0.000 claims description 14
- 229910052763 palladium Inorganic materials 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 9
- MVFCKEFYUDZOCX-UHFFFAOYSA-N iron(2+);dinitrate Chemical compound [Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MVFCKEFYUDZOCX-UHFFFAOYSA-N 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 7
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 claims description 6
- 230000002194 synthesizing effect Effects 0.000 claims description 6
- BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 claims description 4
- QSQUFRGBXGXOHF-UHFFFAOYSA-N cobalt(iii) nitrate Chemical compound [Co].O[N+]([O-])=O.O[N+]([O-])=O.O[N+]([O-])=O QSQUFRGBXGXOHF-UHFFFAOYSA-N 0.000 claims description 4
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 claims description 4
- OPQARKPSCNTWTJ-UHFFFAOYSA-L copper(ii) acetate Chemical compound [Cu+2].CC([O-])=O.CC([O-])=O OPQARKPSCNTWTJ-UHFFFAOYSA-L 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 claims description 4
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 claims description 4
- KBJMLQFLOWQJNF-UHFFFAOYSA-N nickel(ii) nitrate Chemical compound [Ni+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O KBJMLQFLOWQJNF-UHFFFAOYSA-N 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 229910021381 transition metal chloride Inorganic materials 0.000 claims description 4
- 229910002001 transition metal nitrate Inorganic materials 0.000 claims description 4
- 229910000851 Alloy steel Inorganic materials 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 150000004756 silanes Chemical class 0.000 claims description 3
- 150000004760 silicates Chemical class 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 229910001369 Brass Inorganic materials 0.000 claims description 2
- 229910021581 Cobalt(III) chloride Inorganic materials 0.000 claims description 2
- 229910021592 Copper(II) chloride Inorganic materials 0.000 claims description 2
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 2
- 229910021577 Iron(II) chloride Inorganic materials 0.000 claims description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- HDYRYUINDGQKMC-UHFFFAOYSA-M acetyloxyaluminum;dihydrate Chemical compound O.O.CC(=O)O[Al] HDYRYUINDGQKMC-UHFFFAOYSA-M 0.000 claims description 2
- 229940009827 aluminum acetate Drugs 0.000 claims description 2
- 239000010951 brass Substances 0.000 claims description 2
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 claims description 2
- NMCUIPGRVMDVDB-UHFFFAOYSA-L iron dichloride Chemical compound Cl[Fe]Cl NMCUIPGRVMDVDB-UHFFFAOYSA-L 0.000 claims description 2
- PVFSDGKDKFSOTB-UHFFFAOYSA-K iron(3+);triacetate Chemical compound [Fe+3].CC([O-])=O.CC([O-])=O.CC([O-])=O PVFSDGKDKFSOTB-UHFFFAOYSA-K 0.000 claims description 2
- LNOZJRCUHSPCDZ-UHFFFAOYSA-L iron(ii) acetate Chemical compound [Fe+2].CC([O-])=O.CC([O-])=O LNOZJRCUHSPCDZ-UHFFFAOYSA-L 0.000 claims description 2
- AIYYMMQIMJOTBM-UHFFFAOYSA-L nickel(ii) acetate Chemical compound [Ni+2].CC([O-])=O.CC([O-])=O AIYYMMQIMJOTBM-UHFFFAOYSA-L 0.000 claims description 2
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 claims description 2
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- 239000010936 titanium Substances 0.000 claims description 2
- IEKWPPTXWFKANS-UHFFFAOYSA-K trichlorocobalt Chemical compound Cl[Co](Cl)Cl IEKWPPTXWFKANS-UHFFFAOYSA-K 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
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- 239000000788 chromium alloy Substances 0.000 claims 1
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- QAHREYKOYSIQPH-UHFFFAOYSA-L cobalt(II) acetate Chemical compound [Co+2].CC([O-])=O.CC([O-])=O QAHREYKOYSIQPH-UHFFFAOYSA-L 0.000 claims 1
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 claims 1
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
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- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
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- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
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- 239000001307 helium Substances 0.000 description 2
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- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical group C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
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- 150000001649 bromium compounds Chemical class 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
- D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/12—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a coating with specific electrical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/20—Nanotubes characterized by their properties
- C01B2202/34—Length
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/20—Nanotubes characterized by their properties
- C01B2202/36—Diameter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/23907—Pile or nap type surface or component
- Y10T428/23979—Particular backing structure or composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Composite Materials (AREA)
- Textile Engineering (AREA)
- Thermal Sciences (AREA)
- Carbon And Carbon Compounds (AREA)
- Catalysts (AREA)
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| US13/042,397 | 2011-03-07 | ||
| PCT/US2011/050094 WO2012031042A1 (en) | 2010-09-02 | 2011-08-31 | Metal substrates having carbon nanotubes grown thereon and methods for production thereof |
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| TW201315276A (zh) * | 2011-09-28 | 2013-04-01 | Univ Nat Taiwan | 奈米碳管加熱器及其製法 |
| JP5668009B2 (ja) * | 2012-03-26 | 2015-02-12 | 株式会社東芝 | 配線及び半導体装置 |
| PL2836460T3 (pl) * | 2012-04-09 | 2022-12-27 | Ohio University | Sposób wytwarzania grafenu |
| WO2014039509A2 (en) | 2012-09-04 | 2014-03-13 | Ocv Intellectual Capital, Llc | Dispersion of carbon enhanced reinforcement fibers in aqueous or non-aqueous media |
| US20140093728A1 (en) * | 2012-09-28 | 2014-04-03 | Applied Nanostructured Solutions, Llc | Carbon nanostructures and methods of making the same |
| EP2900473B1 (en) | 2012-09-28 | 2020-07-01 | Applied NanoStructured Solutions, LLC | Composite materials formed by shear mixing of carbon nanostructures and related methods |
| US20140097146A1 (en) * | 2012-10-04 | 2014-04-10 | Applied Nanostructured Solutions, Llc | Carbon nanostructure separation membranes and separation processes using same |
| US9133031B2 (en) * | 2012-10-04 | 2015-09-15 | Applied Nanostructured Solutions, Llc | Carbon nanostructure layers and methods for making the same |
| US9327969B2 (en) * | 2012-10-04 | 2016-05-03 | Applied Nanostructured Solutions, Llc | Microwave transmission assemblies fabricated from carbon nanostructure polymer composites |
| US9107292B2 (en) | 2012-12-04 | 2015-08-11 | Applied Nanostructured Solutions, Llc | Carbon nanostructure-coated fibers of low areal weight and methods for producing the same |
| US10734166B2 (en) * | 2013-03-15 | 2020-08-04 | Zapgo Ltd | Structure for electric energy storage using carbon nanotubes |
| US10546698B2 (en) | 2013-03-15 | 2020-01-28 | Zapgo Ltd | Structure for electric energy storage using carbon nanotubes |
| JP6080658B2 (ja) * | 2013-04-05 | 2017-02-15 | 日立造船株式会社 | カーボンナノチューブ生成用基板の製造方法、カーボンナノチューブ生成用基板及びカーボンナノチューブ生成用基板の再利用方法 |
| US9802373B2 (en) | 2014-06-11 | 2017-10-31 | Applied Nanostructured Solutions, Llc | Methods for processing three-dimensional printed objects using microwave radiation |
| US10399322B2 (en) | 2014-06-11 | 2019-09-03 | Applied Nanostructured Solutions, Llc | Three-dimensional printing using carbon nanostructures |
| WO2015200099A1 (en) * | 2014-06-24 | 2015-12-30 | The Regents Of The University Of California | Nickel titanium oxide coated articles |
| US20170144133A1 (en) | 2014-07-02 | 2017-05-25 | General Nano Llc | Method for making a catalyst metal substrate for growth of carbon nanotubes |
| CN104726845B (zh) * | 2015-03-05 | 2018-05-01 | 中国科学院上海微系统与信息技术研究所 | h-BN上石墨烯纳米带的制备方法 |
| CN105070619B (zh) * | 2015-07-17 | 2017-05-03 | 兰州空间技术物理研究所 | 一种铁基金属合金衬底上碳纳米管阵列阴极的制备方法 |
| CN105047423B (zh) * | 2015-08-07 | 2018-05-01 | 华中师范大学 | 一种柔性对称型赝电容超级电容器及其制备方法 |
| WO2018151278A1 (ja) * | 2017-02-17 | 2018-08-23 | 学校法人早稲田大学 | 担持触媒および炭素ナノ構造体の製造方法 |
| CN107236876B (zh) * | 2017-06-01 | 2018-12-11 | 西安科技大学 | 一种高致密性高导热钨铜材料的制备方法 |
| EP3810547A4 (en) * | 2018-06-22 | 2022-04-06 | The Government of the United States of America, as represented by the Secretary of the Navy | DEVICE AND METHOD FOR GROWING DISCRETE ULTRA-LONG CYLINDRICAL SP2 CARBON STRUCTURES |
| CA3235749A1 (en) * | 2019-01-28 | 2020-08-06 | Carbonova Corp. | Apparatus and method for producing carbon nanofibers from light hydrocarbons |
| NO346078B1 (en) * | 2020-10-15 | 2022-02-07 | Univ Of South Eastern Norway | Direct growth cross-linked carbon nanotubes on microstructured metal substrate for supercapacitor application |
| US11930565B1 (en) * | 2021-02-05 | 2024-03-12 | Mainstream Engineering Corporation | Carbon nanotube heater composite tooling apparatus and method of use |
| CN112974799B (zh) * | 2021-02-05 | 2022-09-23 | 中国人民解放军陆军装甲兵学院 | 一种用于制备自修复涂层的复合粉末及其制备方法、钛基耐磨自修复涂层及其制备方法 |
| CN114604855A (zh) * | 2022-03-14 | 2022-06-10 | 无锡东恒新能源科技有限公司 | 一种基于原子层沉积催化合成单壁碳纳米管的方法 |
| CN115385327A (zh) * | 2022-08-30 | 2022-11-25 | 青岛科技大学 | 碳材料的原位制备方法及连续生长装置 |
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| US6346189B1 (en) * | 1998-08-14 | 2002-02-12 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube structures made using catalyst islands |
| JP3912583B2 (ja) * | 2001-03-14 | 2007-05-09 | 三菱瓦斯化学株式会社 | 配向性カーボンナノチューブ膜の製造方法 |
| US6656339B2 (en) * | 2001-08-29 | 2003-12-02 | Motorola, Inc. | Method of forming a nano-supported catalyst on a substrate for nanotube growth |
| US7070472B2 (en) * | 2001-08-29 | 2006-07-04 | Motorola, Inc. | Field emission display and methods of forming a field emission display |
| JP2004002182A (ja) * | 2002-03-25 | 2004-01-08 | Mitsubishi Gas Chem Co Inc | 配向性カーボンナノチューブ膜およびその製造方法 |
| FR2844510B1 (fr) * | 2002-09-12 | 2006-06-16 | Snecma Propulsion Solide | Structure fibreuse tridimensionnelle en fibres refractaires, procede pour sa realisation et application aux materiaux composites thermostructuraux |
| WO2004071654A1 (ja) * | 2003-02-14 | 2004-08-26 | Bussan Nanotech Research Institute Inc. | 単層カーボンナノチューブ製造用触媒金属微粒子形成方法 |
| CN1286716C (zh) * | 2003-03-19 | 2006-11-29 | 清华大学 | 一种生长碳纳米管的方法 |
| JP3837392B2 (ja) * | 2003-03-25 | 2006-10-25 | 憲治郎 尾浦 | カーボンナノチューブの製造方法、カーボンナノチューブデバイスおよび電気二重層キャパシタ |
| WO2005025734A2 (en) * | 2003-09-17 | 2005-03-24 | Molecular Nanosystems, Inc. | Methods for producing and using catalytic substrates for carbon nanotube growth |
| KR20050121426A (ko) * | 2004-06-22 | 2005-12-27 | 삼성에스디아이 주식회사 | 탄소나노튜브 제조용 촉매의 제조 방법 |
| US7485600B2 (en) * | 2004-11-17 | 2009-02-03 | Honda Motor Co., Ltd. | Catalyst for synthesis of carbon single-walled nanotubes |
| CA2613203C (en) * | 2005-06-28 | 2013-08-13 | The Board Of Regents Of The University Of Oklahoma | Methods for growing and harvesting carbon nanotubes |
| WO2008054349A2 (en) * | 2005-07-07 | 2008-05-08 | The University Of Maryland | Carbon nanotube structures formed on large free floating substrates |
| JP4862303B2 (ja) * | 2005-07-11 | 2012-01-25 | ソニー株式会社 | 像ぶれ補正装置の製造方法 |
| KR20080078879A (ko) * | 2005-12-19 | 2008-08-28 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 탄소 나노튜브의 생성 |
| JP4743520B2 (ja) * | 2006-03-02 | 2011-08-10 | 三洋電機株式会社 | カーボンナノチューブ電極及びその製造方法 |
| US7687981B2 (en) * | 2006-05-05 | 2010-03-30 | Brother International Corporation | Method for controlled density growth of carbon nanotubes |
| US8337979B2 (en) * | 2006-05-19 | 2012-12-25 | Massachusetts Institute Of Technology | Nanostructure-reinforced composite articles and methods |
| US8951631B2 (en) * | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused metal fiber materials and process therefor |
| KR101281168B1 (ko) * | 2007-01-05 | 2013-07-02 | 삼성전자주식회사 | 전계 방출 전극, 이의 제조 방법 및 이를 구비한 전계 방출소자 |
| EP2011572B1 (en) * | 2007-07-06 | 2012-12-05 | Imec | Method for forming catalyst nanoparticles for growing elongated nanostructures |
| JP2009215146A (ja) * | 2008-03-13 | 2009-09-24 | Panasonic Corp | 金属含有ナノ粒子、これを用いて成長したカーボンナノチューブ構造体、及びこのカーボンナノチューブ構造体を用いた電子デバイス及びその製造方法 |
| GB0805837D0 (en) * | 2008-03-31 | 2008-06-04 | Qinetiq Ltd | Chemical Vapour Deposition Process |
| JP5747333B2 (ja) * | 2010-03-01 | 2015-07-15 | 日本ゼオン株式会社 | カーボンナノチューブ配向集合体の製造方法 |
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| Publication number | Publication date |
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| JP2013536796A (ja) | 2013-09-26 |
| AU2011295929A1 (en) | 2013-01-31 |
| EP2611549A4 (en) | 2014-07-02 |
| US20120058296A1 (en) | 2012-03-08 |
| US20120058352A1 (en) | 2012-03-08 |
| CA2806908A1 (en) | 2012-03-08 |
| CA2806912A1 (en) | 2012-03-08 |
| WO2012031042A1 (en) | 2012-03-08 |
| EP2611550A1 (en) | 2013-07-10 |
| BR112013002422A2 (pt) | 2016-05-24 |
| KR20130105639A (ko) | 2013-09-25 |
| ZA201300397B (en) | 2013-09-25 |
| CN103079714A (zh) | 2013-05-01 |
| CN103079715A (zh) | 2013-05-01 |
| EP2611550A4 (en) | 2014-07-02 |
| KR20130105634A (ko) | 2013-09-25 |
| BR112013002120A2 (pt) | 2016-09-20 |
| EP2611549A1 (en) | 2013-07-10 |
| WO2012031037A1 (en) | 2012-03-08 |
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