KR20130105634A - 그 위에 성장된 카본 나노튜브를 갖는 금속 기재 및 이의 제조 방법 - Google Patents
그 위에 성장된 카본 나노튜브를 갖는 금속 기재 및 이의 제조 방법 Download PDFInfo
- Publication number
- KR20130105634A KR20130105634A KR20137007230A KR20137007230A KR20130105634A KR 20130105634 A KR20130105634 A KR 20130105634A KR 20137007230 A KR20137007230 A KR 20137007230A KR 20137007230 A KR20137007230 A KR 20137007230A KR 20130105634 A KR20130105634 A KR 20130105634A
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- KR
- South Korea
- Prior art keywords
- catalyst
- metal substrate
- catalyst material
- carbon nanotube
- carbon nanotubes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
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- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
- D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/12—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a coating with specific electrical properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/20—Nanotubes characterized by their properties
- C01B2202/34—Length
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/20—Nanotubes characterized by their properties
- C01B2202/36—Diameter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/23907—Pile or nap type surface or component
- Y10T428/23979—Particular backing structure or composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Textile Engineering (AREA)
- Thermal Sciences (AREA)
- Composite Materials (AREA)
- Carbon And Carbon Compounds (AREA)
- Catalysts (AREA)
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| US13/042,397 | 2011-03-07 | ||
| US13/042,397 US20120058352A1 (en) | 2010-09-02 | 2011-03-07 | Metal substrates having carbon nanotubes grown thereon and methods for production thereof |
| PCT/US2011/050094 WO2012031042A1 (en) | 2010-09-02 | 2011-08-31 | Metal substrates having carbon nanotubes grown thereon and methods for production thereof |
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| TW201315276A (zh) * | 2011-09-28 | 2013-04-01 | Univ Nat Taiwan | 奈米碳管加熱器及其製法 |
| JP5668009B2 (ja) * | 2012-03-26 | 2015-02-12 | 株式会社東芝 | 配線及び半導体装置 |
| WO2013154997A1 (en) * | 2012-04-09 | 2013-10-17 | Ohio University | Method of producing graphene |
| US9506194B2 (en) | 2012-09-04 | 2016-11-29 | Ocv Intellectual Capital, Llc | Dispersion of carbon enhanced reinforcement fibers in aqueous or non-aqueous media |
| CA2885330C (en) * | 2012-09-28 | 2020-12-22 | Applied Nanostructured Solutions, Llc | Composite materials formed by shear mixing of carbon nanostructures and related methods |
| US20140093728A1 (en) * | 2012-09-28 | 2014-04-03 | Applied Nanostructured Solutions, Llc | Carbon nanostructures and methods of making the same |
| US9133031B2 (en) * | 2012-10-04 | 2015-09-15 | Applied Nanostructured Solutions, Llc | Carbon nanostructure layers and methods for making the same |
| US9327969B2 (en) * | 2012-10-04 | 2016-05-03 | Applied Nanostructured Solutions, Llc | Microwave transmission assemblies fabricated from carbon nanostructure polymer composites |
| US20140097146A1 (en) * | 2012-10-04 | 2014-04-10 | Applied Nanostructured Solutions, Llc | Carbon nanostructure separation membranes and separation processes using same |
| US9107292B2 (en) | 2012-12-04 | 2015-08-11 | Applied Nanostructured Solutions, Llc | Carbon nanostructure-coated fibers of low areal weight and methods for producing the same |
| US10734166B2 (en) * | 2013-03-15 | 2020-08-04 | Zapgo Ltd | Structure for electric energy storage using carbon nanotubes |
| US10546698B2 (en) | 2013-03-15 | 2020-01-28 | Zapgo Ltd | Structure for electric energy storage using carbon nanotubes |
| JP6080658B2 (ja) * | 2013-04-05 | 2017-02-15 | 日立造船株式会社 | カーボンナノチューブ生成用基板の製造方法、カーボンナノチューブ生成用基板及びカーボンナノチューブ生成用基板の再利用方法 |
| US9802373B2 (en) | 2014-06-11 | 2017-10-31 | Applied Nanostructured Solutions, Llc | Methods for processing three-dimensional printed objects using microwave radiation |
| US10399322B2 (en) | 2014-06-11 | 2019-09-03 | Applied Nanostructured Solutions, Llc | Three-dimensional printing using carbon nanostructures |
| CN106456310A (zh) * | 2014-06-24 | 2017-02-22 | 加利福尼亚大学董事会 | 镍钛氧化物涂覆的制品 |
| US20170144133A1 (en) | 2014-07-02 | 2017-05-25 | General Nano Llc | Method for making a catalyst metal substrate for growth of carbon nanotubes |
| CN104726845B (zh) * | 2015-03-05 | 2018-05-01 | 中国科学院上海微系统与信息技术研究所 | h-BN上石墨烯纳米带的制备方法 |
| CN105070619B (zh) * | 2015-07-17 | 2017-05-03 | 兰州空间技术物理研究所 | 一种铁基金属合金衬底上碳纳米管阵列阴极的制备方法 |
| CN105047423B (zh) * | 2015-08-07 | 2018-05-01 | 华中师范大学 | 一种柔性对称型赝电容超级电容器及其制备方法 |
| US20200009536A1 (en) * | 2017-02-17 | 2020-01-09 | Waseda University | Manufacturing methods for supported catalysts and carbon nanostructures |
| CN107236876B (zh) * | 2017-06-01 | 2018-12-11 | 西安科技大学 | 一种高致密性高导热钨铜材料的制备方法 |
| EP3810547A4 (en) * | 2018-06-22 | 2022-04-06 | The Government of the United States of America, as represented by the Secretary of the Navy | APPARATUS AND METHOD FOR GROWING DISTINCT ULTRA-LONG CYLINDRICAL SP2 CARBON STRUCTURES |
| JP7539623B2 (ja) * | 2019-01-28 | 2024-08-26 | カーボノバ コーポレイション | 軽質炭化水素からカーボンナノファイバーを生産するための装置及び方法 |
| NO346078B1 (en) * | 2020-10-15 | 2022-02-07 | Univ Of South Eastern Norway | Direct growth cross-linked carbon nanotubes on microstructured metal substrate for supercapacitor application |
| US11930565B1 (en) * | 2021-02-05 | 2024-03-12 | Mainstream Engineering Corporation | Carbon nanotube heater composite tooling apparatus and method of use |
| CN112974799B (zh) * | 2021-02-05 | 2022-09-23 | 中国人民解放军陆军装甲兵学院 | 一种用于制备自修复涂层的复合粉末及其制备方法、钛基耐磨自修复涂层及其制备方法 |
| CN114604855A (zh) * | 2022-03-14 | 2022-06-10 | 无锡东恒新能源科技有限公司 | 一种基于原子层沉积催化合成单壁碳纳米管的方法 |
| CN115385327A (zh) * | 2022-08-30 | 2022-11-25 | 青岛科技大学 | 碳材料的原位制备方法及连续生长装置 |
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| US6346189B1 (en) * | 1998-08-14 | 2002-02-12 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube structures made using catalyst islands |
| JP3912583B2 (ja) * | 2001-03-14 | 2007-05-09 | 三菱瓦斯化学株式会社 | 配向性カーボンナノチューブ膜の製造方法 |
| US7070472B2 (en) * | 2001-08-29 | 2006-07-04 | Motorola, Inc. | Field emission display and methods of forming a field emission display |
| US6656339B2 (en) * | 2001-08-29 | 2003-12-02 | Motorola, Inc. | Method of forming a nano-supported catalyst on a substrate for nanotube growth |
| JP2004002182A (ja) * | 2002-03-25 | 2004-01-08 | Mitsubishi Gas Chem Co Inc | 配向性カーボンナノチューブ膜およびその製造方法 |
| FR2844510B1 (fr) * | 2002-09-12 | 2006-06-16 | Snecma Propulsion Solide | Structure fibreuse tridimensionnelle en fibres refractaires, procede pour sa realisation et application aux materiaux composites thermostructuraux |
| JP4584142B2 (ja) * | 2003-02-14 | 2010-11-17 | 茂夫 丸山 | 単層カーボンナノチューブ製造用触媒金属微粒子形成方法 |
| CN1286716C (zh) * | 2003-03-19 | 2006-11-29 | 清华大学 | 一种生长碳纳米管的方法 |
| JP3837392B2 (ja) * | 2003-03-25 | 2006-10-25 | 憲治郎 尾浦 | カーボンナノチューブの製造方法、カーボンナノチューブデバイスおよび電気二重層キャパシタ |
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| US7485600B2 (en) * | 2004-11-17 | 2009-02-03 | Honda Motor Co., Ltd. | Catalyst for synthesis of carbon single-walled nanotubes |
| KR101289256B1 (ko) * | 2005-06-28 | 2013-07-24 | 더 보드 오브 리젠츠 오브 더 유니버시티 오브 오클라호마 | 탄소 나노튜브의 성장 및 수득 방법 |
| WO2008054349A2 (en) * | 2005-07-07 | 2008-05-08 | The University Of Maryland | Carbon nanotube structures formed on large free floating substrates |
| JP4862303B2 (ja) * | 2005-07-11 | 2012-01-25 | ソニー株式会社 | 像ぶれ補正装置の製造方法 |
| WO2008048313A2 (en) * | 2005-12-19 | 2008-04-24 | Advanced Technology Materials, Inc. | Production of carbon nanotubes |
| JP4743520B2 (ja) * | 2006-03-02 | 2011-08-10 | 三洋電機株式会社 | カーボンナノチューブ電極及びその製造方法 |
| US7687981B2 (en) * | 2006-05-05 | 2010-03-30 | Brother International Corporation | Method for controlled density growth of carbon nanotubes |
| US8337979B2 (en) * | 2006-05-19 | 2012-12-25 | Massachusetts Institute Of Technology | Nanostructure-reinforced composite articles and methods |
| US8951631B2 (en) * | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused metal fiber materials and process therefor |
| KR101281168B1 (ko) * | 2007-01-05 | 2013-07-02 | 삼성전자주식회사 | 전계 방출 전극, 이의 제조 방법 및 이를 구비한 전계 방출소자 |
| EP2011572B1 (en) * | 2007-07-06 | 2012-12-05 | Imec | Method for forming catalyst nanoparticles for growing elongated nanostructures |
| JP2009215146A (ja) * | 2008-03-13 | 2009-09-24 | Panasonic Corp | 金属含有ナノ粒子、これを用いて成長したカーボンナノチューブ構造体、及びこのカーボンナノチューブ構造体を用いた電子デバイス及びその製造方法 |
| GB0805837D0 (en) * | 2008-03-31 | 2008-06-04 | Qinetiq Ltd | Chemical Vapour Deposition Process |
| JP5747333B2 (ja) * | 2010-03-01 | 2015-07-15 | 日本ゼオン株式会社 | カーボンナノチューブ配向集合体の製造方法 |
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| ZA201300397B (en) | 2013-09-25 |
| EP2611550A1 (en) | 2013-07-10 |
| EP2611550A4 (en) | 2014-07-02 |
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| US20120058352A1 (en) | 2012-03-08 |
| BR112013002422A2 (pt) | 2016-05-24 |
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| EP2611549A1 (en) | 2013-07-10 |
| WO2012031037A1 (en) | 2012-03-08 |
| BR112013002120A2 (pt) | 2016-09-20 |
| CA2806908A1 (en) | 2012-03-08 |
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| US20120058296A1 (en) | 2012-03-08 |
| CA2806912A1 (en) | 2012-03-08 |
| EP2611549A4 (en) | 2014-07-02 |
| CN103079715A (zh) | 2013-05-01 |
| WO2012031042A1 (en) | 2012-03-08 |
| CN103079714A (zh) | 2013-05-01 |
| KR20130105639A (ko) | 2013-09-25 |
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