JP2013536796A - カーボンナノチューブが表面に成長する金属基材及びその製造プロセス - Google Patents
カーボンナノチューブが表面に成長する金属基材及びその製造プロセス Download PDFInfo
- Publication number
- JP2013536796A JP2013536796A JP2013527292A JP2013527292A JP2013536796A JP 2013536796 A JP2013536796 A JP 2013536796A JP 2013527292 A JP2013527292 A JP 2013527292A JP 2013527292 A JP2013527292 A JP 2013527292A JP 2013536796 A JP2013536796 A JP 2013536796A
- Authority
- JP
- Japan
- Prior art keywords
- carbon nanotube
- nanotube growth
- catalyst precursor
- growth process
- metal substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 416
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 382
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 382
- 239000000758 substrate Substances 0.000 title claims abstract description 200
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 197
- 239000002184 metal Substances 0.000 title claims abstract description 197
- 238000004519 manufacturing process Methods 0.000 title description 4
- 230000003197 catalytic effect Effects 0.000 claims abstract description 144
- 239000000463 material Substances 0.000 claims abstract description 136
- 239000003054 catalyst Substances 0.000 claims abstract description 112
- 238000000034 method Methods 0.000 claims abstract description 111
- 239000012018 catalyst precursor Substances 0.000 claims abstract description 107
- 230000008569 process Effects 0.000 claims abstract description 100
- 238000000151 deposition Methods 0.000 claims abstract description 29
- 230000008021 deposition Effects 0.000 claims abstract description 11
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 57
- 229910052723 transition metal Inorganic materials 0.000 claims description 31
- MVFCKEFYUDZOCX-UHFFFAOYSA-N iron(2+);dinitrate Chemical compound [Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MVFCKEFYUDZOCX-UHFFFAOYSA-N 0.000 claims description 27
- 238000002844 melting Methods 0.000 claims description 24
- 230000008018 melting Effects 0.000 claims description 24
- 229910052782 aluminium Inorganic materials 0.000 claims description 23
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 23
- 239000000126 substance Substances 0.000 claims description 20
- 239000002904 solvent Substances 0.000 claims description 19
- 150000003624 transition metals Chemical group 0.000 claims description 18
- -1 transition metal salts Chemical class 0.000 claims description 17
- 239000011521 glass Substances 0.000 claims description 14
- BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 claims description 12
- 238000003618 dip coating Methods 0.000 claims description 12
- 150000004677 hydrates Chemical class 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 9
- PVFSDGKDKFSOTB-UHFFFAOYSA-K iron(3+);triacetate Chemical compound [Fe+3].CC([O-])=O.CC([O-])=O.CC([O-])=O PVFSDGKDKFSOTB-UHFFFAOYSA-K 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 8
- QAHREYKOYSIQPH-UHFFFAOYSA-L cobalt(II) acetate Chemical compound [Co+2].CC([O-])=O.CC([O-])=O QAHREYKOYSIQPH-UHFFFAOYSA-L 0.000 claims description 7
- 229940011182 cobalt acetate Drugs 0.000 claims description 6
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 claims description 6
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 claims description 5
- 150000003839 salts Chemical class 0.000 claims description 5
- UFMZWBIQTDUYBN-UHFFFAOYSA-N cobalt dinitrate Chemical compound [Co+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O UFMZWBIQTDUYBN-UHFFFAOYSA-N 0.000 claims description 4
- KBJMLQFLOWQJNF-UHFFFAOYSA-N nickel(ii) nitrate Chemical compound [Ni+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O KBJMLQFLOWQJNF-UHFFFAOYSA-N 0.000 claims description 4
- 229910021580 Cobalt(II) chloride Inorganic materials 0.000 claims description 3
- 229910021592 Copper(II) chloride Inorganic materials 0.000 claims description 3
- 229910021577 Iron(II) chloride Inorganic materials 0.000 claims description 3
- 229910021578 Iron(III) chloride Inorganic materials 0.000 claims description 3
- 229910021586 Nickel(II) chloride Inorganic materials 0.000 claims description 3
- 150000001242 acetic acid derivatives Chemical class 0.000 claims description 3
- MQRWBMAEBQOWAF-UHFFFAOYSA-N acetic acid;nickel Chemical compound [Ni].CC(O)=O.CC(O)=O MQRWBMAEBQOWAF-UHFFFAOYSA-N 0.000 claims description 3
- HDYRYUINDGQKMC-UHFFFAOYSA-M acetyloxyaluminum;dihydrate Chemical compound O.O.CC(=O)O[Al] HDYRYUINDGQKMC-UHFFFAOYSA-M 0.000 claims description 3
- 229940009827 aluminum acetate Drugs 0.000 claims description 3
- 150000001805 chlorine compounds Chemical class 0.000 claims description 3
- 150000001860 citric acid derivatives Chemical class 0.000 claims description 3
- GVPFVAHMJGGAJG-UHFFFAOYSA-L cobalt dichloride Chemical compound [Cl-].[Cl-].[Co+2] GVPFVAHMJGGAJG-UHFFFAOYSA-L 0.000 claims description 3
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 claims description 3
- OPQARKPSCNTWTJ-UHFFFAOYSA-L copper(ii) acetate Chemical compound [Cu+2].CC([O-])=O.CC([O-])=O OPQARKPSCNTWTJ-UHFFFAOYSA-L 0.000 claims description 3
- NMCUIPGRVMDVDB-UHFFFAOYSA-L iron dichloride Chemical compound Cl[Fe]Cl NMCUIPGRVMDVDB-UHFFFAOYSA-L 0.000 claims description 3
- NPFOYSMITVOQOS-UHFFFAOYSA-K iron(III) citrate Chemical compound [Fe+3].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NPFOYSMITVOQOS-UHFFFAOYSA-K 0.000 claims description 3
- 229940078494 nickel acetate Drugs 0.000 claims description 3
- QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 claims description 3
- 150000002823 nitrates Chemical class 0.000 claims description 3
- 238000007761 roller coating Methods 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 229910000838 Al alloy Inorganic materials 0.000 claims description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 2
- 229910001245 Sb alloy Inorganic materials 0.000 claims description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
- 239000002140 antimony alloy Substances 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 239000011777 magnesium Substances 0.000 claims description 2
- 229910000077 silane Inorganic materials 0.000 claims description 2
- 150000004756 silanes Chemical class 0.000 claims description 2
- 150000004760 silicates Chemical class 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 239000011701 zinc Substances 0.000 claims description 2
- PFKAKHILNWLJRT-UHFFFAOYSA-H 2-hydroxypropane-1,2,3-tricarboxylate;iron(2+) Chemical compound [Fe+2].[Fe+2].[Fe+2].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O PFKAKHILNWLJRT-UHFFFAOYSA-H 0.000 claims 2
- UPPLJLAHMKABPR-UHFFFAOYSA-H 2-hydroxypropane-1,2,3-tricarboxylate;nickel(2+) Chemical compound [Ni+2].[Ni+2].[Ni+2].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O UPPLJLAHMKABPR-UHFFFAOYSA-H 0.000 claims 2
- FRHBOQMZUOWXQL-UHFFFAOYSA-K azane;2-hydroxypropane-1,2,3-tricarboxylate;iron(3+) Chemical compound N.[Fe+3].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O FRHBOQMZUOWXQL-UHFFFAOYSA-K 0.000 claims 2
- 229910001981 cobalt nitrate Inorganic materials 0.000 claims 2
- IEXXNGVQCLMTKU-UHFFFAOYSA-H cobalt(2+);2-hydroxypropane-1,2,3-tricarboxylate Chemical compound [Co+2].[Co+2].[Co+2].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O IEXXNGVQCLMTKU-UHFFFAOYSA-H 0.000 claims 2
- 235000019850 ferrous citrate Nutrition 0.000 claims 2
- 239000011640 ferrous citrate Substances 0.000 claims 2
- 235000000011 iron ammonium citrate Nutrition 0.000 claims 2
- 239000004313 iron ammonium citrate Substances 0.000 claims 2
- STDMRMREKPZQFJ-UHFFFAOYSA-H tricopper;2-hydroxypropane-1,2,3-tricarboxylate Chemical compound [Cu+2].[Cu+2].[Cu+2].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O STDMRMREKPZQFJ-UHFFFAOYSA-H 0.000 claims 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- 230000001376 precipitating effect Effects 0.000 claims 1
- 238000005229 chemical vapour deposition Methods 0.000 description 53
- 230000015572 biosynthetic process Effects 0.000 description 48
- 239000002105 nanoparticle Substances 0.000 description 42
- 230000003068 static effect Effects 0.000 description 35
- 238000003786 synthesis reaction Methods 0.000 description 35
- 229910052799 carbon Inorganic materials 0.000 description 31
- 229910052742 iron Inorganic materials 0.000 description 27
- 239000007789 gas Substances 0.000 description 25
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 24
- 229910052802 copper Inorganic materials 0.000 description 24
- 239000010949 copper Substances 0.000 description 24
- 239000000835 fiber Substances 0.000 description 24
- 238000001878 scanning electron micrograph Methods 0.000 description 21
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 18
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 13
- 239000000203 mixture Substances 0.000 description 13
- 230000008901 benefit Effects 0.000 description 11
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 229910052763 palladium Inorganic materials 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000010410 layer Substances 0.000 description 8
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical class C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 6
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 6
- 150000002739 metals Chemical class 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- 238000010926 purge Methods 0.000 description 6
- 239000004071 soot Substances 0.000 description 6
- 230000003685 thermal hair damage Effects 0.000 description 6
- 230000000670 limiting effect Effects 0.000 description 5
- 229910000314 transition metal oxide Inorganic materials 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 4
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000002244 precipitate Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- XNDZQQSKSQTQQD-UHFFFAOYSA-N 3-methylcyclohex-2-en-1-ol Chemical group CC1=CC(O)CCC1 XNDZQQSKSQTQQD-UHFFFAOYSA-N 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-K Citrate Chemical compound [O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O KRKNYBCHXYNGOX-UHFFFAOYSA-K 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 239000002134 carbon nanofiber Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000002657 fibrous material Substances 0.000 description 3
- 239000003365 glass fiber Substances 0.000 description 3
- 230000002401 inhibitory effect Effects 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- QZRHHEURPZONJU-UHFFFAOYSA-N iron(2+) dinitrate nonahydrate Chemical group O.O.O.O.O.O.O.O.O.[Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O QZRHHEURPZONJU-UHFFFAOYSA-N 0.000 description 3
- 239000002048 multi walled nanotube Substances 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000006722 reduction reaction Methods 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000002109 single walled nanotube Substances 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- 229910001374 Invar Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 150000001722 carbon compounds Chemical class 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000010531 catalytic reduction reaction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910021389 graphene Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(3+);trinitrate Chemical compound [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 2
- SZQUEWJRBJDHSM-UHFFFAOYSA-N iron(3+);trinitrate;nonahydrate Chemical compound O.O.O.O.O.O.O.O.O.[Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O SZQUEWJRBJDHSM-UHFFFAOYSA-N 0.000 description 2
- 229910052747 lanthanoid Inorganic materials 0.000 description 2
- 150000002602 lanthanoids Chemical class 0.000 description 2
- 238000000608 laser ablation Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000002082 metal nanoparticle Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 239000002071 nanotube Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000000197 pyrolysis Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910021381 transition metal chloride Inorganic materials 0.000 description 2
- 229910021524 transition metal nanoparticle Inorganic materials 0.000 description 2
- 239000002759 woven fabric Substances 0.000 description 2
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 1
- YZCKVEUIGOORGS-IGMARMGPSA-N Protium Chemical compound [1H] YZCKVEUIGOORGS-IGMARMGPSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- SMZOGRDCAXLAAR-UHFFFAOYSA-N aluminium isopropoxide Chemical compound [Al+3].CC(C)[O-].CC(C)[O-].CC(C)[O-] SMZOGRDCAXLAAR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 150000001649 bromium compounds Chemical class 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 229910021387 carbon allotrope Inorganic materials 0.000 description 1
- 239000002717 carbon nanostructure Substances 0.000 description 1
- 239000007833 carbon precursor Substances 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002079 double walled nanotube Substances 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 150000004673 fluoride salts Chemical class 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 238000007306 functionalization reaction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 150000004694 iodide salts Chemical class 0.000 description 1
- LNOZJRCUHSPCDZ-UHFFFAOYSA-L iron(ii) acetate Chemical compound [Fe+2].CC([O-])=O.CC([O-])=O LNOZJRCUHSPCDZ-UHFFFAOYSA-L 0.000 description 1
- XEEYBQQBJWHFJM-RNFDNDRNSA-N iron-60 Chemical compound [60Fe] XEEYBQQBJWHFJM-RNFDNDRNSA-N 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000002574 poison Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910021558 transition metal bromide Inorganic materials 0.000 description 1
- 150000003623 transition metal compounds Chemical class 0.000 description 1
- 229910021561 transition metal fluoride Inorganic materials 0.000 description 1
- 229910021573 transition metal iodide Inorganic materials 0.000 description 1
- 229910002001 transition metal nitrate Inorganic materials 0.000 description 1
- YFNKIDBQEZZDLK-UHFFFAOYSA-N triglyme Chemical compound COCCOCCOCCOC YFNKIDBQEZZDLK-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 238000013316 zoning Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
- D01F9/127—Carbon filaments; Apparatus specially adapted for the manufacture thereof by thermal decomposition of hydrocarbon gases or vapours or other carbon-containing compounds in the form of gas or vapour, e.g. carbon monoxide, alcohols
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/12—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a coating with specific electrical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/20—Nanotubes characterized by their properties
- C01B2202/34—Length
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/20—Nanotubes characterized by their properties
- C01B2202/36—Diameter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/23907—Pile or nap type surface or component
- Y10T428/23979—Particular backing structure or composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Composite Materials (AREA)
- Thermal Sciences (AREA)
- Textile Engineering (AREA)
- Carbon And Carbon Compounds (AREA)
- Catalysts (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US37971310P | 2010-09-02 | 2010-09-02 | |
| US61/379,713 | 2010-09-02 | ||
| PCT/US2011/050084 WO2012031037A1 (en) | 2010-09-02 | 2011-08-31 | Metal substrates having carbon nanotubes grown thereon and processes for production thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013536796A true JP2013536796A (ja) | 2013-09-26 |
| JP2013536796A5 JP2013536796A5 (enExample) | 2014-09-18 |
Family
ID=45770929
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013527293A Withdrawn JP2013536797A (ja) | 2010-09-02 | 2011-08-31 | カーボンナノチューブを成長させる金属基材及びその製造方法 |
| JP2013527292A Pending JP2013536796A (ja) | 2010-09-02 | 2011-08-31 | カーボンナノチューブが表面に成長する金属基材及びその製造プロセス |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013527293A Withdrawn JP2013536797A (ja) | 2010-09-02 | 2011-08-31 | カーボンナノチューブを成長させる金属基材及びその製造方法 |
Country Status (10)
| Country | Link |
|---|---|
| US (2) | US20120058352A1 (enExample) |
| EP (2) | EP2611550A4 (enExample) |
| JP (2) | JP2013536797A (enExample) |
| KR (2) | KR20130105639A (enExample) |
| CN (2) | CN103079714A (enExample) |
| AU (1) | AU2011295929A1 (enExample) |
| BR (2) | BR112013002120A2 (enExample) |
| CA (2) | CA2806908A1 (enExample) |
| WO (2) | WO2012031037A1 (enExample) |
| ZA (1) | ZA201300397B (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013201373A (ja) * | 2012-03-26 | 2013-10-03 | Toshiba Corp | 配線及び半導体装置 |
| JP2016028012A (ja) * | 2015-03-05 | 2016-02-25 | 中国科学院上海微系統与信息技術研究所 | ｈ−ＢＮ上におけるグラフェンナノリボンの製造方法 |
| WO2018151278A1 (ja) * | 2017-02-17 | 2018-08-23 | 学校法人早稲田大学 | 担持触媒および炭素ナノ構造体の製造方法 |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201315276A (zh) * | 2011-09-28 | 2013-04-01 | Univ Nat Taiwan | 奈米碳管加熱器及其製法 |
| DK2836460T3 (da) * | 2012-04-09 | 2022-10-10 | Univ Ohio | Fremgangsmåde til fremstilling af graphen |
| CN104718170A (zh) | 2012-09-04 | 2015-06-17 | Ocv智识资本有限责任公司 | 碳强化的增强纤维在含水或非水介质内的分散 |
| JP2015533187A (ja) * | 2012-09-28 | 2015-11-19 | アプライド ナノストラクチャード ソリューションズ リミテッド ライアビリティー カンパニーＡｐｐｌｉｅｄ Ｎａｎｏｓｔｒｕｃｔｕｒｅｄｓｏｌｕｔｉｏｎｓ， Ｌｌｃ | カーボンナノ構造体の剪断混合により形成される複合体材料及び関連方法 |
| US20140093728A1 (en) * | 2012-09-28 | 2014-04-03 | Applied Nanostructured Solutions, Llc | Carbon nanostructures and methods of making the same |
| US9133031B2 (en) | 2012-10-04 | 2015-09-15 | Applied Nanostructured Solutions, Llc | Carbon nanostructure layers and methods for making the same |
| US9327969B2 (en) * | 2012-10-04 | 2016-05-03 | Applied Nanostructured Solutions, Llc | Microwave transmission assemblies fabricated from carbon nanostructure polymer composites |
| US20140097146A1 (en) * | 2012-10-04 | 2014-04-10 | Applied Nanostructured Solutions, Llc | Carbon nanostructure separation membranes and separation processes using same |
| US9107292B2 (en) | 2012-12-04 | 2015-08-11 | Applied Nanostructured Solutions, Llc | Carbon nanostructure-coated fibers of low areal weight and methods for producing the same |
| US10546698B2 (en) | 2013-03-15 | 2020-01-28 | Zapgo Ltd | Structure for electric energy storage using carbon nanotubes |
| US10734166B2 (en) | 2013-03-15 | 2020-08-04 | Zapgo Ltd | Structure for electric energy storage using carbon nanotubes |
| JP6080658B2 (ja) * | 2013-04-05 | 2017-02-15 | 日立造船株式会社 | カーボンナノチューブ生成用基板の製造方法、カーボンナノチューブ生成用基板及びカーボンナノチューブ生成用基板の再利用方法 |
| US10399322B2 (en) | 2014-06-11 | 2019-09-03 | Applied Nanostructured Solutions, Llc | Three-dimensional printing using carbon nanostructures |
| US9802373B2 (en) | 2014-06-11 | 2017-10-31 | Applied Nanostructured Solutions, Llc | Methods for processing three-dimensional printed objects using microwave radiation |
| CN106456310A (zh) * | 2014-06-24 | 2017-02-22 | 加利福尼亚大学董事会 | 镍钛氧化物涂覆的制品 |
| US20170144133A1 (en) | 2014-07-02 | 2017-05-25 | General Nano Llc | Method for making a catalyst metal substrate for growth of carbon nanotubes |
| CN105070619B (zh) * | 2015-07-17 | 2017-05-03 | 兰州空间技术物理研究所 | 一种铁基金属合金衬底上碳纳米管阵列阴极的制备方法 |
| CN105047423B (zh) * | 2015-08-07 | 2018-05-01 | 华中师范大学 | 一种柔性对称型赝电容超级电容器及其制备方法 |
| CN107236876B (zh) * | 2017-06-01 | 2018-12-11 | 西安科技大学 | 一种高致密性高导热钨铜材料的制备方法 |
| US20190389727A1 (en) * | 2018-06-22 | 2019-12-26 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Apparatus and method for growing discrete ultralong cylindrical sp2 carbon structures |
| AU2020213637B2 (en) * | 2019-01-28 | 2025-12-11 | Carbonova Corp. | Apparatus and method for producing carbon nanofibers from light hydrocarbons |
| NO346078B1 (en) * | 2020-10-15 | 2022-02-07 | Univ Of South Eastern Norway | Direct growth cross-linked carbon nanotubes on microstructured metal substrate for supercapacitor application |
| US11930565B1 (en) * | 2021-02-05 | 2024-03-12 | Mainstream Engineering Corporation | Carbon nanotube heater composite tooling apparatus and method of use |
| CN112974799B (zh) * | 2021-02-05 | 2022-09-23 | 中国人民解放军陆军装甲兵学院 | 一种用于制备自修复涂层的复合粉末及其制备方法、钛基耐磨自修复涂层及其制备方法 |
| CN114604855A (zh) * | 2022-03-14 | 2022-06-10 | 无锡东恒新能源科技有限公司 | 一种基于原子层沉积催化合成单壁碳纳米管的方法 |
| CN115385327A (zh) * | 2022-08-30 | 2022-11-25 | 青岛科技大学 | 碳材料的原位制备方法及连续生长装置 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004284921A (ja) * | 2003-03-25 | 2004-10-14 | Kenjiro Oura | カーボンナノチューブの製造方法、カーボンナノチューブデバイスおよび電気二重層キャパシタ |
| JP2006007213A (ja) * | 2004-06-22 | 2006-01-12 | Samsung Sdi Co Ltd | 炭素ナノチューブ製造用触媒の製造方法 |
| JP2007230832A (ja) * | 2006-03-02 | 2007-09-13 | Sanyo Electric Co Ltd | カーボンナノチューブ電極及びその製造方法 |
| JP2008520429A (ja) * | 2004-11-17 | 2008-06-19 | 本田技研工業株式会社 | 単層カーボンナノチューブ合成用触媒 |
| JP2008544939A (ja) * | 2005-06-28 | 2008-12-11 | ザ ボード オブ リージェンツ オブ ザ ユニバーシティ オブ オクラホマ | カーボンナノチューブを成長および収集するための方法 |
| JP2009215146A (ja) * | 2008-03-13 | 2009-09-24 | Panasonic Corp | 金属含有ナノ粒子、これを用いて成長したカーボンナノチューブ構造体、及びこのカーボンナノチューブ構造体を用いた電子デバイス及びその製造方法 |
| WO2011108492A1 (ja) * | 2010-03-01 | 2011-09-09 | 日本ゼオン株式会社 | カーボンナノチューブ配向集合体の製造方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6346189B1 (en) * | 1998-08-14 | 2002-02-12 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube structures made using catalyst islands |
| JP3912583B2 (ja) * | 2001-03-14 | 2007-05-09 | 三菱瓦斯化学株式会社 | 配向性カーボンナノチューブ膜の製造方法 |
| US7070472B2 (en) * | 2001-08-29 | 2006-07-04 | Motorola, Inc. | Field emission display and methods of forming a field emission display |
| US6656339B2 (en) * | 2001-08-29 | 2003-12-02 | Motorola, Inc. | Method of forming a nano-supported catalyst on a substrate for nanotube growth |
| JP2004002182A (ja) * | 2002-03-25 | 2004-01-08 | Mitsubishi Gas Chem Co Inc | 配向性カーボンナノチューブ膜およびその製造方法 |
| FR2844510B1 (fr) * | 2002-09-12 | 2006-06-16 | Snecma Propulsion Solide | Structure fibreuse tridimensionnelle en fibres refractaires, procede pour sa realisation et application aux materiaux composites thermostructuraux |
| JP4584142B2 (ja) * | 2003-02-14 | 2010-11-17 | 茂夫 丸山 | 単層カーボンナノチューブ製造用触媒金属微粒子形成方法 |
| CN1286716C (zh) * | 2003-03-19 | 2006-11-29 | 清华大学 | 一种生长碳纳米管的方法 |
| US7235159B2 (en) * | 2003-09-17 | 2007-06-26 | Molecular Nanosystems, Inc. | Methods for producing and using catalytic substrates for carbon nanotube growth |
| WO2008054349A2 (en) * | 2005-07-07 | 2008-05-08 | The University Of Maryland | Carbon nanotube structures formed on large free floating substrates |
| JP4862303B2 (ja) * | 2005-07-11 | 2012-01-25 | ソニー株式会社 | 像ぶれ補正装置の製造方法 |
| TW200730436A (en) * | 2005-12-19 | 2007-08-16 | Advanced Tech Materials | Production of carbon nanotubes |
| US7687981B2 (en) * | 2006-05-05 | 2010-03-30 | Brother International Corporation | Method for controlled density growth of carbon nanotubes |
| US8337979B2 (en) * | 2006-05-19 | 2012-12-25 | Massachusetts Institute Of Technology | Nanostructure-reinforced composite articles and methods |
| US8951631B2 (en) * | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused metal fiber materials and process therefor |
| KR101281168B1 (ko) * | 2007-01-05 | 2013-07-02 | 삼성전자주식회사 | 전계 방출 전극, 이의 제조 방법 및 이를 구비한 전계 방출소자 |
| EP2011572B1 (en) * | 2007-07-06 | 2012-12-05 | Imec | Method for forming catalyst nanoparticles for growing elongated nanostructures |
| GB0805837D0 (en) * | 2008-03-31 | 2008-06-04 | Qinetiq Ltd | Chemical Vapour Deposition Process |
-
2011
- 2011-03-07 US US13/042,397 patent/US20120058352A1/en not_active Abandoned
- 2011-08-31 WO PCT/US2011/050084 patent/WO2012031037A1/en not_active Ceased
- 2011-08-31 KR KR20137007538A patent/KR20130105639A/ko not_active Withdrawn
- 2011-08-31 CN CN2011800426155A patent/CN103079714A/zh active Pending
- 2011-08-31 EP EP11822620.8A patent/EP2611550A4/en not_active Withdrawn
- 2011-08-31 KR KR20137007230A patent/KR20130105634A/ko not_active Withdrawn
- 2011-08-31 CA CA2806908A patent/CA2806908A1/en not_active Abandoned
- 2011-08-31 WO PCT/US2011/050094 patent/WO2012031042A1/en not_active Ceased
- 2011-08-31 CA CA 2806912 patent/CA2806912A1/en not_active Abandoned
- 2011-08-31 JP JP2013527293A patent/JP2013536797A/ja not_active Withdrawn
- 2011-08-31 AU AU2011295929A patent/AU2011295929A1/en not_active Abandoned
- 2011-08-31 US US13/223,183 patent/US20120058296A1/en not_active Abandoned
- 2011-08-31 EP EP11822616.6A patent/EP2611549A4/en not_active Withdrawn
- 2011-08-31 CN CN2011800426225A patent/CN103079715A/zh active Pending
- 2011-08-31 BR BR112013002120A patent/BR112013002120A2/pt not_active IP Right Cessation
- 2011-08-31 BR BR112013002422A patent/BR112013002422A2/pt not_active IP Right Cessation
- 2011-08-31 JP JP2013527292A patent/JP2013536796A/ja active Pending
-
2013
- 2013-01-15 ZA ZA2013/00397A patent/ZA201300397B/en unknown
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004284921A (ja) * | 2003-03-25 | 2004-10-14 | Kenjiro Oura | カーボンナノチューブの製造方法、カーボンナノチューブデバイスおよび電気二重層キャパシタ |
| JP2006007213A (ja) * | 2004-06-22 | 2006-01-12 | Samsung Sdi Co Ltd | 炭素ナノチューブ製造用触媒の製造方法 |
| JP2008520429A (ja) * | 2004-11-17 | 2008-06-19 | 本田技研工業株式会社 | 単層カーボンナノチューブ合成用触媒 |
| JP2008544939A (ja) * | 2005-06-28 | 2008-12-11 | ザ ボード オブ リージェンツ オブ ザ ユニバーシティ オブ オクラホマ | カーボンナノチューブを成長および収集するための方法 |
| JP2007230832A (ja) * | 2006-03-02 | 2007-09-13 | Sanyo Electric Co Ltd | カーボンナノチューブ電極及びその製造方法 |
| JP2009215146A (ja) * | 2008-03-13 | 2009-09-24 | Panasonic Corp | 金属含有ナノ粒子、これを用いて成長したカーボンナノチューブ構造体、及びこのカーボンナノチューブ構造体を用いた電子デバイス及びその製造方法 |
| WO2011108492A1 (ja) * | 2010-03-01 | 2011-09-09 | 日本ゼオン株式会社 | カーボンナノチューブ配向集合体の製造方法 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013201373A (ja) * | 2012-03-26 | 2013-10-03 | Toshiba Corp | 配線及び半導体装置 |
| JP2016028012A (ja) * | 2015-03-05 | 2016-02-25 | 中国科学院上海微系統与信息技術研究所 | ｈ−ＢＮ上におけるグラフェンナノリボンの製造方法 |
| WO2018151278A1 (ja) * | 2017-02-17 | 2018-08-23 | 学校法人早稲田大学 | 担持触媒および炭素ナノ構造体の製造方法 |
| JPWO2018151278A1 (ja) * | 2017-02-17 | 2019-12-12 | 学校法人早稲田大学 | 担持触媒および炭素ナノ構造体の製造方法 |
| JP7093971B2 (ja) | 2017-02-17 | 2022-07-01 | 学校法人早稲田大学 | 担持触媒および炭素ナノ構造体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2611549A4 (en) | 2014-07-02 |
| ZA201300397B (en) | 2013-09-25 |
| US20120058352A1 (en) | 2012-03-08 |
| US20120058296A1 (en) | 2012-03-08 |
| CA2806912A1 (en) | 2012-03-08 |
| KR20130105639A (ko) | 2013-09-25 |
| EP2611549A1 (en) | 2013-07-10 |
| JP2013536797A (ja) | 2013-09-26 |
| EP2611550A1 (en) | 2013-07-10 |
| CN103079714A (zh) | 2013-05-01 |
| WO2012031037A1 (en) | 2012-03-08 |
| BR112013002120A2 (pt) | 2016-09-20 |
| BR112013002422A2 (pt) | 2016-05-24 |
| KR20130105634A (ko) | 2013-09-25 |
| WO2012031042A1 (en) | 2012-03-08 |
| EP2611550A4 (en) | 2014-07-02 |
| CN103079715A (zh) | 2013-05-01 |
| CA2806908A1 (en) | 2012-03-08 |
| AU2011295929A1 (en) | 2013-01-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2013536796A (ja) | カーボンナノチューブが表面に成長する金属基材及びその製造プロセス | |
| US8815341B2 (en) | Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof | |
| JP2013538780A5 (enExample) | ||
| US8784937B2 (en) | Glass substrates having carbon nanotubes grown thereon and methods for production thereof | |
| CN102648088B (zh) | Cnt并入的金属纤维材料及其方法 | |
| JP5937009B2 (ja) | Ｃｎｔ導入アラミド繊維材料及びそのための方法 | |
| JP2013509504A5 (enExample) | ||
| US20130101495A1 (en) | Systems and methods for continuously producing carbon nanostructures on reusable substrates | |
| JP2014534144A (ja) | カーボンナノ構造体及び関連する材料を含有するハイブリッド繊維の大量生産のための装置及び方法 | |
| AU2011295934A1 (en) | Metal substrates having carbon nanotubes grown thereon and methods for production thereof | |
| JP2016088814A (ja) | グラフェンナノテープ、炭素ナノ構造体集合物およびその製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140801 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140801 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150218 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150303 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20151027 |