JP2013536315A - Method and apparatus for coating a surface - Google Patents

Abstract

In the method of coating the surface (1) of the support (2) with molecules (5, 6), the molecules (5, 6) from the molecular reservoir (3, 4) are converted into a gas phase, ionized, In order to exert a force directed action on the charged molecules (5, 6) perpendicular to the directed movement of the charged molecules (5, 6), the charged molecules (5, 6) are moved to the surface (1 On the way to at least one electric and / or magnetic field with at least one field component perpendicular to the directed movement of the charged molecules (5, 6). An electric and / or magnetic focusing device (8), such as a quadrupole electric field, is used for the directional movement of the charged molecules (5, 6) between the molecular reservoir (3, 4) and the surface (1). Works. Only the molecules (5, 6) having a mass / charge ratio that can be specified between the molecular reservoir (3, 4) and the surface (1) are connected to the diaphragm device (12). Is disposed so as to pass through the surface (1). The charged molecules (5, 6) are prevented from hitting the surface (1) for an identifiable time by an appropriate electric and / or magnetic field or by a diaphragm device (14) which can be changed over time. A systematic coating of the surface is thereby facilitated.
[Selection] Figure 1

Description

  The present invention is a method for coating a surface of a support material with molecules, wherein molecules from a molecular reservoir are converted to a gas phase state and ionized, and the charged molecules are transferred to the surface of the support material in an electric field. It relates to a method in which a directed movement is made and the molecules hit the surface and are absorbed there.

  In many microtechnology products, coating the surface of a support with a coating material represents an important method step in the production of microtechnology products. Various coating methods are known from practice that facilitate the desired coating of the support material, particularly depending on the respective requirements of the coating material and the final product.

  For example, coating a support with an organic material, such as is necessary for the production of OLEDs, OFETs or organic solar cells, is often essential for the quality of the final product and the manufacturing costs. This corresponds to a manufacturing step. Due to the molecular size of the coating material having a molecular weight in the range of 200-1000 g / mol or even significantly higher, the usual appropriate coating methods cannot be used. Moreover, in the production of OLEDs, a finely structured application of the coating to the surface of the support can form individual pixels of the display away from the others and then address them independently of each other You have to take into account what you need to be able to do. This is also true for the manufacture of other organic electronic devices, such as conductor tracks.

  The coating of support surfaces in the manufacture of OLEDs is currently usually carried out by thermally induced evaporation of organic coating materials in the vacuum and subsequent deposition on the surface to be coated. In order to cover the individual pixels, this is left uncovered so that only the pixels are covered, and is covered by a shadow mask in the form of a grid that delimits areas of the surface that should not be covered. However, it has been found that this coating method is actually associated with considerable disadvantages.

  In order to be economically advantageous and facilitate sufficiently high coating rates, the organic coating material must be converted to the gas phase at the highest possible evaporation temperature. However, high evaporation temperatures result in strong thermal stresses in the support and coating equipment. Particularly commonly used shadow masks are exposed to considerable mechanical distortions due to high evaporation temperatures, which is substantially impractical to reliably prevent unwanted deformation and imaging errors, especially in the case of large form shadow masks. It means that it is possible. For this reason, the upper limit for the largest possible shape that can be produced with a sufficiently low defect rate without large imaging errors is the current use of shadow masks for surface coating microstructuring. You can see it.

  The coating materials that can be used for coating are also limited. At present, coating materials with molecular weights up to about 1000 g / mol are available for thermal evaporation. If the molecular weight is much larger than this value, the stability of large molecules is often no longer adequate, i.e. the molecules are thermally decomposed and destroyed. The proportion of decomposition products increases with increasing evaporation temperature, and the purity of the coating material and hence the quality of the coating decreases.

  However, a major problem with currently used coating methods is that, in many cases, the evaporated coating material is not efficiently utilized to coat the surface, which is generally associated with an evaporated coating material. This is because only 1 to 10% is deposited on the surface of the support material to be coated. A much larger proportion of the evaporated coating material is deposited inside the coating equipment used each time, in particular on the shadow mask, leading to rapid contamination of the coating equipment and the shadow mask. The coating equipment and in particular the vacuum chamber in which the coating process takes place must always be cleaned, which means that an extended machine interruption time is inevitable. The shadow mask used must also be constantly replaced and cleaned to keep imaging errors as low as possible.

  As is essential for the manufacture of OLEDs or other organic electronic devices, when different coating materials are used in succession, cross-contamination of the different coating materials may cause the manufacturing process to coat the surface. Often occurs when they are used continuously. Frequent cleaning of the coating equipment and especially the shadow mask is necessary to avoid unwanted contamination with the same or different adhesive coating material from previous coating operations.

  In order to improve the yield of molecules deposited on the surface, an electric field is generated between the molecular reservoir in which the molecules are converted into a gas phase state by evaporation and the surface to be coated, and during or shortly after the evaporation Can be promoted to be ionized and thus charged in the direction of the surface. In this way, a preferential direction for charged molecules that move by evaporation occurs, so that a larger proportion of molecules are deposited on the surface.

  However, excessive electric field strength and the resulting excessive acceleration of charged molecules can be inconvenient and the degradation products that the molecules collide and the surface is coated too quickly and are destroyed or decomposed into contact It has thus been found that this can lead to a reduction in the purity of the coating.

  Therefore, the general type of coating method described at the beginning is a method that promotes higher yields of coating material molecules absorbed on the surface to be coated, higher purity coatings and lower production costs. It is considered an object of the present invention to improve on It is a further object of the present invention to improve the above type of coating process so that molecules can be systematically applied to the surface to be coated.

  This object is achieved by the present invention, in which a charged molecule is en route to the surface in order to exert a force directed action on the charged molecule that is perpendicular to the directed movement of the charged molecule. Exposure to at least one electric and / or magnetic field having at least one field component perpendicular to the directed movement of The electric or magnetic field component that runs perpendicular to the movement of the charged molecule also exerts a force directing action that is perpendicular to the direction of movement of the molecule. Molecules can be deflected to affect the direction of their path to the surface. In this way, it is possible to prevent an important or dominant proportion of evaporated molecules from hitting the coating device outside the surface to be coated and being lost to the desired coating of the surface.

  In accordance with an embodiment of the inventive idea, it is proposed that an electrical or magnetic focusing device acts on the directed movement of charged molecules between the molecular reservoir and the surface. The focusing device used can be, for example, a Wehnelt cylinder or system of magnetic lenses. Suitable electrical or magnetic or electromagnetic focusing devices are well known from the customs and can be adapted to the respective requirements of the coating process in a simple manner. The use of a suitable focusing device allows molecules that have been ionized and converted to a gas phase state to be combined to form a molecular ion beam that can be directed in a substantially lossless manner to the surface to be coated. To do.

  According to a particularly advantageous embodiment of the inventive idea, the diaphragm device is such that only molecules having an identifiable mass / charge ratio between the molecular reservoir and the surface pass through the diaphragm device to the surface. It is proposed that they are arranged in such a way. By means of a suitable diaphragm device conveniently located after the focusing device, for example molecules broken down in the evaporating action or their degradation products or impurities are separated and covered by the diaphragm device due to different mass / charge ratios While reaching the surface to be prevented is prevented, it is possible to ensure that molecules intended exclusively for coating reach the surface to be coated. This diaphragm device and the combination of the diaphragm device and the focusing device placed in front of it suitable for the coating method are known, for example, from the practices associated with mass spectrometers.

  It is preferably proposed that at least one quadrupole field acts on the directed movement of charged molecules between the molecular reservoir and the surface.

  A quadrupole electric field can be generated and controlled at low cost. The force acting on the movement of a charged molecule allows the flight direction of that molecule to be reliably affected. A quadrupole field to which the appropriate alternating voltage is applied ensures a highly accurate mass separation of charged molecules in a simple manner so that the high purity coating material molecules used for coating can be ensured. Make it possible. This high purity is known, for example, in the case of OLEDs, so that even small amounts of impurities can have a significant adverse effect on the properties of the OLED, so that not only the corresponding good coating quality but also the surface of the coated surface. It also provides increased durability and functionality.

  The same can be considered for preparing a quadrupole magnetic field for focusing and deflecting charged molecules. Multiple quadrupole magnetic fields are usually arranged one after the other in order to facilitate focusing and advantageous effects on all sides of the charged molecules in the direction of flight.

  Coating charged molecules instead of or in addition to other devices for influencing the direction of charged particles known from the prior art on their way from the molecular reservoir to the surface to be coated Is even more possible. A fast ion trap or any electrostatic or magnetic deflection system suitable for this application could also be used here. The method advantageously used to influence the direction of the molecular ion beam containing charged molecules is, for each individual application, for example the intensity of the ion beam of charged molecules associated with coating the surface, It can be selected according to a specific deflection angle and molecular weight.

  Deflecting charged molecules while moving from the molecular reservoir to the surface by a time-varying electric and / or magnetic field so that the use of a shadow mask or the like during the surface microstructured coating can be avoided Is proposed. This charged molecule is deflected, for example, by two pairs of deflection capacitors while moving to the surface, so that the molecular ion beam previously generated by the focusing device is precisely directed to the region of the surface to be covered by the molecule. Can be attached.

  In this way, a systematic coating of the surface and therefore a coating of individual pixels is also possible. The size and shape of an individual pixel and the placement of that pixel depends on the desired resolution, the desired application and the desired addressing (active matrix or passive matrix). Skilled engineers in the field of organic electroluminescent devices know how a person can arrange pixels for his application.

  As with a cathode ray tube or an oscilloscope, it can be envisaged that the electric fields generated by the two pairs of deflection capacitors are aligned essentially perpendicular to each other and to the directed movement of the charged molecules. For such OLED surface coatings, it is possible to adopt and use control schemes known, for example, from beam deflectors and tube screens.

  In order to prevent the charged molecules from colliding with each other, which can be coated along each other region of the surface that is partitioned from each other, the charged molecules have a suitable electric field and It is proposed to prevent the surface from being hit for an identifiable time by means of a diaphragm device that can be driven by a magnetic field or that can change over time. The application of a further deflecting electric field or the use of a rotating mechanical diaphragm allows the molecular ion beam of charged molecules to be blocked at identifiable intervals so that individual areas of the surface are covered and other areas are not covered. Enable.

  A diaphragm in a deflecting electric field that can rotate or connect a time-varying electric and / or magnetic field that can direct a pre-generated molecular ion beam to an identifiable location on the surface. By using in combination with the system, the microstructured coating of the support surface to be coated can be performed in a substantially lossless manner from the existing molecular reservoir. Precise microstructured surface coatings can be generated inexpensively and quickly because there is no need to use shadow masks and undesired deposition of gas phase molecules outside the coating apparatus or surface to be coated can also be avoided . No extended preparation, modification or cleaning time is required, which is reliable and accurate, and allows large surface-structured coatings to be coupled with substantially error-free or appropriately modified imaging shapes Means that. In contrast to the use of shadow masks, even large mold surfaces can be manufactured or coated with essentially no imaging errors and without the risk of increasing dirt or cross-contamination.

  In order to assist in the microstructuring of the surface to be coated, the surface region to be coated is given a charge opposite to that of the charged molecule and the surface to be left uncoated before coating with charged molecules is initiated. It is proposed that the region is qualitatively matched with the charged molecule and is therefore usually also given a positive charge. Due to the spatially varying charge conditions, charged molecules approaching the surface are attracted by and preferably absorbed into the region where the opposite surface charge is generated. On the other hand, charged molecules must be kept free of coating material and are therefore repelled and isolated from them by the same surface charge of the surface area being given the same charge.

  In order to prevent excessive collision speed of charged molecules when hitting the surface and reduce the risk of molecular degradation or rupture when hitting the surface to be coated, an electric field against the movement of the charged molecules is It is proposed that the charged molecules are generated in the previous region and are decelerated before they hit the surface. In this way, even very large charged molecules that are normally destroyed in the case of an undecelerated impact on the surface to be coated and are broken up into relatively small pieces should be used to coat the surface. Can do. This can be achieved, for example, by the surface to be coated having the same surface charge so that the approaching charged molecules are decelerated.

  If the deceleration of the charged molecules is delayed, a gentle collision of the molecules with the surface to be coated can be ensured. Molecules can therefore be accelerated in the desired direction as desired without impact of their destruction as they impact the surface by the generation of a suitable acceleration field after their ionization.

  The kinetic energy of the individual molecules required for the molecular ion beam can be generated by an accelerating field, so that additional kinetic excitations are transferred to the molecules when they are converted into the gas phase and during their ionization. Is not already needed. The method of ionization can therefore be selected for high ion yield and substantially very destructive ionization.

  A particularly suitable ionization method that is gentle and non-breaking is, for example, photoionization, in which light of a specific wavelength is used for the excitation of molecular electrons. Due to the specific wavelength of the incident photons, the preferentially excited electrons can be selected precisely, and their excitation is almost equal to the ionization energy of a particular type of molecule, or slightly Can be specified to be larger. In this case, mild and particularly efficient ionization of selected types of molecules in the molecular reservoir can occur, while at the same time preventing other molecules with different excitation energies of the outer electrons from being ionized. It is possible. This allows selection to be made even during the ionization of molecules from the molecular reservoir, facilitating a significant reduction in impurities.

  The use of laser-induced two-photon absorption for molecular ionization of molecular reservoirs is considered particularly advantageous. In particular, in combination with the use of an organic coating material to coat the OLED, a good absorption coefficient occurs in the case of two-photon absorption, allowing an efficient and gentle ionization of the OLED material to be performed.

  Photoionization or laser-induced two-photon absorption and the resulting ionization of the coating material can be performed intermittently or pulsed. In this way, the molecular ion beam used for the coating can be generated or blocked exactly as desired. In combination with the lateral deflection of the molecular ion beam, which can be similarly determined in a simple manner, coating charged molecules in a very precise position-determined way is a significant amount already dissolved from the molecular reservoir. This can be done without the need to deflect the amount of molecules halfway to the surface to be coated and the need to deposit. The loss of molecules from the molecular reservoir is therefore very low. For this reason, there is no risk of significant contamination of the coating apparatus which requires cleaning of the complex apparatus at short intervals.

  However, other methods and method steps for molecular ionization are also contemplated and may be advantageous depending on the respective coating material.

  Other suitable ionization methods include electron impact ionization (EI), chemical ionization (CI), soft ionization (SI), field ionization (FI), field desorption (FD), liquid injection field desorption ionization (LIFDI), Fast atom bombardment (FAB), electrospray ionization (ESI), atmospheric pressure chemical ionization (APCI), atmospheric pressure photoionization (APPI), atmospheric pressure laser ionization (APLI), matrix-assisted laser desorption / ionization (MALDI), single One photon ionization (SPI), resonance amplified multiphoton ionization (REMPI), thermal ionization (TI), inductively coupled plasma (IPC) and glow discharge ionization (GI).

  It is proposed to use molecules from at least two different molecular reservoirs to convert the gas phase state sequentially or alternately and coat the surface. In this way, for example, OLEDs can be produced very quickly, each of which consists of individual areas of a coating material in which the pixels can emit in different colors.

  It is further proposed to use molecules from at least two different molecular reservoirs to simultaneously convert to the gas phase and coat the surface. In this way, for example, an OLED comprising a layer comprising a mixture of at least two materials can be produced. This is important, for example, for the production of doped emissive layers usually used according to the prior art, or doped hole or electron transport layers. It is also possible to apply more than two materials, for example three, four or five different materials to the surface in this way. Thus, for example, it is possible to produce a so-called “mixed host” having two or more host materials and one or more dopants.

  The advantage of this doping method compared to conventional coating methods is that the degree of doping can be set more precisely in this way. This is particularly important when only low levels of doping are used and even small deviations from the degree of doping can have a significant impact on the properties of the electronic device.

  The coating method according to the invention allows organic, organometallic and inorganic materials to be applied to the surface. This method is not only applied to low molecular weight compounds, but also to relatively high molecular weight compounds such as oligomers, dendrimers, fullerene derivatives, graphene derivatives, etc., these compounds are ionized without decomposition by the soft ionization method. So you can use it. This is an additional advantage when compared to conventional gas phase coating methods where relatively high molecular weight compounds often undergo thermal decomposition.

  Typical types of molecules used in organic electroluminescent devices are, for example, arylamines as hole transport materials or singlet emitters, aromatic hydrocarbons as host materials, especially anthracene, pyrene, chrysene, benz Anthracene, phenanthrene, benzophenanthrene, fluorene or spirobifluorene, in particular benzimidazole, triazine or pyrimidine, or an electron-deficient heteroaromatic compound containing an aluminum complex as an electron transport material, a carbazole derivative as a triplet matrix material, Aromatic ketones, aromatic phosphine oxides, triazine or pyrimidine derivatives or triphenylene derivatives, and iridium or platinum complexes as triplet emitters.

  The invention also comprises a storage device for a molecular reservoir, a device for the evaporation and ionization of molecules from said molecular reservoir, for the generation of the movement of charged molecules directed towards said surface The invention relates to an apparatus for coating a surface of a support material with molecules, comprising an apparatus for generating an electrostatic acceleration field for, and having a holder for a support material having a surface to be coated. This type of coating apparatus is already known from practice.

  According to the invention, it is proposed that the coating device has a device for generating an electric and / or magnetic field having a field component and acting on a movement perpendicular to the movement of charged molecules. In this way, an electric and / or magnetic field generated in a suitable manner ensures that a dominant proportion of molecules evaporated and ionized from the molecular reservoir is deposited on the surface of the coating apparatus that is not the object of coating. Can be prevented.

  It is preferably proposed that the coating device has at least one device for the generation of a quadrupole electric field. This type of device can be manufactured easily and at low cost, or is commercially available to influence the direction and focusing of a beam of charged molecules, eg by a quadrupole magnetic field, or of charged molecules The selection can be adapted or configured to effect cleaning of the coating material by a quadrupole alternating electric field.

  Advantageously, it is proposed that the coating device comprises a focusing device and / or a diaphragm device. With this focusing device, a molecular ion beam containing charged molecules can be generated. In particular, in combination with a diaphragm device, only molecules with a identifiable mass / charge ratio reach the surface to be coated through the diaphragm device to form a very uniform and remarkably pure coating Can be secured.

  In order to promote a microstructured pattern of the surface coating, the coating apparatus is an apparatus for generating electrical and / or magnetic deflection fields that can be varied over time due to the targeted deflection of the molecular ion beam Is also proposed to have. In combination with a diaphragm device that can be controlled over time and is similarly provided in the coating equipment, certain areas of the surface are covered with coating material, while other areas are kept free of coating material. It can be achieved that it is not coated.

  It is of course possible to apply several layers of different materials one above the other. It is likewise possible to apply individual layers over a large area and thus in an unstructured manner and to apply other layers in an organized manner. Thus, for example, a charge transport layer (hole and electron transport layer) is applied in an unstructured manner on a large area and a light-emitting layer is applied in an organized manner, thus the individual pixel Addressing can be facilitated.

  The coating device preferably has a photoionization device. The photoionization device conveniently includes at least one laser directed at the molecular reservoir and can dissolve charged molecules from the molecular reservoir. Alternatively, the device can have another suitable ionization device.

  Specific embodiments of the invention depicted in the drawings are described in more detail below.

FIG. 1 shows a graphical depiction of a coating apparatus having a Wehnelt cylinder and a substantially uniform magnetic field aligned perpendicular to the direction of flight of charged molecules. FIG. 2 shows a graphical depiction of a different type of coating apparatus in which charged molecules are selected by a quadrupole field and then deflected laterally by two pairs of deflection capacitors. FIG. 3 shows a graphical depiction of yet another type of coating apparatus in which molecules are ionized by laser-induced two-photon absorption and then laterally deflected by a quadrupole magnetic field.

Detailed Description of the Invention

  The coating apparatus depicted in FIG. 1 for the surface 1 to be coated of the OLED support 2 in the depicted example comprises a first molecular reservoir 3 and a second molecular reservoir 4. Each of which contains a solution covering the surface 1 or a concentrated content of organic molecules 5,6. The organic molecules 5 and 6 are evaporated and ionized by a suitable evaporation device 7. The ionization of the molecules 5, 6 can be carried out simultaneously with evaporation based on the use of a corresponding suitable evaporation device 7 or in subsequent method steps using a suitable ionization device. The evaporated and charged molecules 5, 6 are then combined by the focusing device 8, for example, by a Wehnelt cylinder, to form a molecular ion beam 9 (solid line) or 10 (dotted line). Accelerated in the direction of the device 11 for the generation of an electric and / or magnetic field with at least one field component acting on the movement and the vertical movement.

  The device 11 generates, for example, a magnetic field oriented perpendicular to the moving direction of the charged molecules 5 and 6, and causes a circular motion of the charged molecules 5 and 6 due to Lorentz force applied to the moving molecules 5 and 6. The radius of the circular motion induced depends not only on the magnetic field, but also on the mass / charge ratio and the velocity of the charged molecules 5,6. In the illustrative embodiment depicted by way of example, the magnetic field lines are oriented perpendicularly to the viewer in the drawing plane, and the charged molecules 5, 6 arc positively in the drawing plane. Deflection to the right by approximately 90 ° towards the part. When the molecular ion beam 9, 10 of each molecule 5, 6 leaves the device 11 with a magnetic field, the molecular ion beam 9, 10 is already directed to the surface 1 to be coated.

  The diaphragm device 12 after the device 11 is prepared such that only molecules 5 and 6 having a corresponding mass / charge ratio can pass through the diaphragm device 12. In this way, a homogeneous molecular ion beam 9, 10 is generated, and all impurities or contaminating molecules are separated from the molecular ion beam 9, 10.

  The molecular ion beams 9, 10 are then directed specifically to the area to be covered in each case of the surface 1 according to a deflection that can be changed over time by the deflection device 13. This deflection device 13 can be composed of, for example, two pairs of vertically arranged plate capacitors, as is known, for example, in oscilloscopes or cathode ray tubes. This deflecting device 13 allows the molecular ion beams 9, 10 to be guided over the surface 1 in a moving pattern that can be specified to cover the surface.

  In the specific embodiment depicted by way of example in FIG. 1, a further diaphragm device that can allow the molecular ion beams 9, 10 to be interrupted or passed through to the surface 1 at a identifiable time interval thereby. 14 is arranged between the deflection device 13 and the surface 1 to be coated. In this way, individual points 15 due to the respective desired coating material or respective molecules 5, 6 can be generated by the molecular ion beams 9, 10 intermittently reaching the surface 1, in which case this point 15 Can be arranged at a distance from each other, and the adjacent points 15 can be successively produced from different molecules 5, 6 to form individually addressable OLED pixels.

  In a specific embodiment, which is also illustrated schematically by way of example in FIG. 2, the molecules 5 in the molecular reservoir 3 are evaporated into a gas phase state. The laser beam of the laser 16 is directed into the molecular reservoir 3. The molecules 5 evaporated and ionized by the laser 16 are then collected by a focusing device 8 to form a molecular ion beam 9 and guided into a quadrupole electric field device 17 to which an alternating voltage is applied. This quadrupole field device 17 operated in a suitable manner allows molecules 5 with identifiable charge / mass ratios to be selected very accurately and allowed to pass while having different charge / mass ratios. The other molecules are separated laterally, making it possible not to reach the surface 1 to be coated. The molecular ion beam 9 is then subjected to a deflection which can be changed over time by the deflection device 13 and specifically directed to the area to be coated in the surface 1 in each case.

  A further different coating device is depicted by way of example in FIG. 3 for the sake of mere illustration of the changes that may occur for the individual components. Individual molecules 5 escape from the molecular reservoir 3 and are dissolved and ionized by the laser 16 by two-photon absorption. With proper selection and specification of the laser beam wavelength, the coating oriented molecules 5 can be selectively excited and ionized, while impurities or other molecules cannot be excited or ionized.

  The ionized molecules 5 are removed from the molecular reservoir 3 by a suitable accelerator 18 and are assembled to form a molecular ion beam 9. The molecular ion beam 9 is directed into the device 19 thereby creating a quadrupole magnetic field. The focusing of the molecular ion beam 9 and its direction towards exciting the device 19 can be determined in its quadrupole magnetic field.

  The present application mainly describes surface coatings for the production of organic electroluminescent devices. However, the described method can likewise be used for surface coating for the manufacture of other electronic devices, for example organic thin film transistors, organic field effect transistors or organic solar cells, without inventive step. .

Claims (19)

  A method of coating a surface of a support material with molecules, wherein molecules from a molecular reservoir are converted to a gas phase state and ionized, and the charged molecules perform a directional movement toward the surface in an electric field, In order to exert a force directed action on the charged molecule (5, 6), which is perpendicular to the directed movement of the charged molecule (5, 6) in a way that hits the surface and is absorbed there At least one electric and / or magnetic field having at least one field component perpendicular to the directed movement of the charged molecules (5, 6) on the way to the charged molecules (5, 6) towards the surface (1) A method characterized by exposure to water.   An electrical and / or magnetic focusing device (8) acts on the directional movement of the charged molecules (5, 6) between the molecular reservoir (3,4) and the surface (1) The method of claim 1.   Only the molecules (5, 6) having a mass / charge ratio that can be specified between the molecular reservoir (3, 4) and the surface (1) are connected to the diaphragm device (12). 3. A method according to claim 1 or 2, characterized in that it is arranged to pass through to the surface (1).   That at least one quadrupole field (17, 19) acts on the directional movement of the charged molecules (5, 6) between the molecular reservoir (3,4) and the surface (1). 4. A method according to any one of claims 1 to 3, characterized in that:   During the movement from the molecular reservoir (3, 4) to the surface (1), the charged molecules (5, 6) are deflected by an electric and / or magnetic field that can change over time. The method according to any one of claims 1 to 4.   Method according to claim 5, characterized in that the charged molecules (5, 6) are deflected by two pairs of deflection capacitors during the movement to the surface (1).   The method according to claim 6, characterized in that the electric fields generated by the two pairs of deflection capacitors are aligned essentially perpendicular to each other and to the directed movement of the charged molecules (5, 6).   The charged molecules (5, 6) are prevented from hitting the surface (1) for an identifiable time by means of a suitable electric and / or magnetic field or by means of a diaphragm device that can be changed over time. The method according to any one of claims 1 to 7.   Before the coating is started, the surface area to be coated is given the opposite charge to the charged molecules (5, 6) and the surface area to be left uncoated is given the same charge. 9. A method according to any one of the preceding claims, characterized in that it is characterized in that   An electric field that opposes the movement of the charged molecules (5, 6) is generated in a region in front of the surface, and the charged molecules (5, 6) are decelerated before hitting the surface (1). 10. A method according to any one of the preceding claims, characterized in that it is characterized in that   2. The molecule (5) of the molecular reservoir (3) converted to the gas phase is ionized by photoionization or by two-photon absorption induced by laser. The method according to any one of 10 above.   12. Method according to claim 11, wherein the photoionization of the molecules (5) of the molecular reservoir (3) is carried out intermittently or in pulses.   That molecules (5, 6) from at least two different molecular reservoirs (3, 4) are continuously or alternately converted to the gas phase and used to coat said surface (1) 13. A method according to any one of the preceding claims, characterized in that it is characterized in that   A device for coating a surface of a support material with molecules, comprising a storage device for a molecular reservoir, comprising a device for vaporizing and ionizing molecules from said molecular reservoir, An apparatus for generating an electrostatic acceleration field for the generation of directed charged molecule movement, the apparatus having a holder for a support having a surface to be coated, acting on said movement; A device (11) for generating an electric and / or magnetic field having a field component perpendicular to the movement of the charged molecules (5, 6) is arranged in the coating device. .   15. The coating device according to claim 14, wherein the coating device comprises an electrical and / or magnetic focusing device (8).   16. A coating device according to claim 14 or 15, characterized in that the coating device comprises at least one device for the generation of a quadrupole electric field (17, 19).   The coating apparatus according to any one of claims 14 to 16, characterized in that the coating apparatus comprises a diaphragm device (12).   An apparatus for generating a time-varying electrical and / or magnetic deflection field for the targeted deflection of a molecular ion beam (9, 10) comprising charged molecules (5, 6). The coating apparatus according to any one of claims 14 to 17, further comprising (13).   The coating apparatus according to claim 14, further comprising a photoionization apparatus.

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