JP2013525756A - 空気質量流量計 - Google Patents
空気質量流量計 Download PDFInfo
- Publication number
- JP2013525756A JP2013525756A JP2013504233A JP2013504233A JP2013525756A JP 2013525756 A JP2013525756 A JP 2013525756A JP 2013504233 A JP2013504233 A JP 2013504233A JP 2013504233 A JP2013504233 A JP 2013504233A JP 2013525756 A JP2013525756 A JP 2013525756A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- sensor chip
- air mass
- mass flow
- flow meter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000011156 evaluation Methods 0.000 claims abstract description 15
- 239000000853 adhesive Substances 0.000 claims abstract description 10
- 230000001070 adhesive effect Effects 0.000 claims abstract description 10
- 239000012528 membrane Substances 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 description 6
- 239000011241 protective layer Substances 0.000 description 6
- 238000002485 combustion reaction Methods 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 229920001721 polyimide Polymers 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 230000005678 Seebeck effect Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000011157 data evaluation Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
Description
前記センサチップは、マイクロエレクトロメカニカルシステムとして構成され、
前記センサチップは、センサ素子と電子評価回路と電子発振器とを有しており、
さらに前記センサチップは、接着剤を用いて支持体要素上に固定されている、空気質量流量計に関している。
Claims (4)
- センサチップを備えた空気質量流量計(1)であって、
前記センサチップ(2)は、マイクロエレクトロメカニカルシステムとして構成され、
前記センサチップ(2)は、センサ素子(4)と電子評価回路(5)と電子発振器(3)とを有しており、
さらに前記センサチップ(2)は、接着剤(6)を用いて支持体要素(7)上に固定されている、空気質量流量計(1)において、
前記センサチップ(2)が、第1の領域(10)と第2の領域(9)とに分割されており、
前記支持体要素(7)における前記センサチップ(2)の固定が、接着剤(6)を用いて専ら前記第1の領域(10)内で行われ、
さらに前記センサ素子(4)と発振器(3)とが、前記第2の領域(9)内に配設されていることを特徴とする、空気質量流量計。 - 前記支持体要素(7)は、打抜き板金パーツとして構成されている、請求項1記載の空気質量流量計。
- 前記センサ素子(4)は、膜構造部(メンブレン)として構成されている、請求項1または2記載の空気質量流量計。
- 前記膜構造部(メンブレン)上に第1の温度センサと第2の温度センサと加熱素子とが形成されている、請求項3記載の空気質量流量計。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE201010015522 DE102010015522B4 (de) | 2010-04-16 | 2010-04-16 | Luftmassenmesser |
DE102010015522.5 | 2010-04-16 | ||
PCT/EP2011/055669 WO2011128315A1 (de) | 2010-04-16 | 2011-04-12 | Luftmassenmesser |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013525756A true JP2013525756A (ja) | 2013-06-20 |
JP5579320B2 JP5579320B2 (ja) | 2014-08-27 |
Family
ID=43495560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013504233A Active JP5579320B2 (ja) | 2010-04-16 | 2011-04-12 | 空気質量流量計 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9134159B2 (ja) |
EP (1) | EP2558826A1 (ja) |
JP (1) | JP5579320B2 (ja) |
KR (1) | KR101768736B1 (ja) |
CN (1) | CN102844646A (ja) |
DE (1) | DE102010015522B4 (ja) |
WO (1) | WO2011128315A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019064887A1 (ja) * | 2017-09-29 | 2019-04-04 | 日立オートモティブシステムズ株式会社 | 物理量検出装置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8640552B2 (en) | 2011-09-06 | 2014-02-04 | Honeywell International Inc. | MEMS airflow sensor die incorporating additional circuitry on the die |
DE102011089898A1 (de) * | 2011-12-23 | 2013-06-27 | Continental Automotive Gmbh | Verfahren zum Betreiben eines Luftmassensensors |
DE102017218893A1 (de) * | 2017-10-23 | 2019-04-25 | Robert Bosch Gmbh | Sensoranordnung zur Bestimmung wenigstens eines Parameters eines durch einen Messkanal strömenden fluiden Mediums |
DE102020211142B4 (de) * | 2020-09-03 | 2022-08-18 | Vitesco Technologies GmbH | Gassensor für ein Fahrzeug |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05264314A (ja) * | 1992-03-18 | 1993-10-12 | Hitachi Ltd | 空気流量検出器及びそれを使用したエンジン制御装置 |
JPH0926343A (ja) * | 1995-07-06 | 1997-01-28 | Robert Bosch Gmbh | 流動媒体の質量測定装置 |
JP2000146654A (ja) * | 1998-11-13 | 2000-05-26 | Fuji Electric Co Ltd | 熱式質量流量計 |
JP2008020193A (ja) * | 2006-07-10 | 2008-01-31 | Mitsubishi Electric Corp | 熱式流量センサ |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4219454C2 (de) | 1992-06-13 | 1995-09-28 | Bosch Gmbh Robert | Massenflußsensor |
JP3310167B2 (ja) | 1996-06-12 | 2002-07-29 | 株式会社ユニシアジェックス | 気体流量計測装置 |
DE19744997A1 (de) | 1997-10-11 | 1999-04-15 | Bosch Gmbh Robert | Vorrichtung zur Messung der Masse eines strömenden Mediums |
JP3587734B2 (ja) * | 1999-06-30 | 2004-11-10 | 株式会社日立製作所 | 熱式空気流量センサ |
DE10135142A1 (de) | 2001-04-20 | 2002-10-31 | Bosch Gmbh Robert | Vorrichtung zur Bestimmung zumindest eines Parameters eines in einer Leitung strömenden Mediums |
-
2010
- 2010-04-16 DE DE201010015522 patent/DE102010015522B4/de active Active
-
2011
- 2011-04-12 JP JP2013504233A patent/JP5579320B2/ja active Active
- 2011-04-12 KR KR1020127029951A patent/KR101768736B1/ko active IP Right Grant
- 2011-04-12 EP EP11713804A patent/EP2558826A1/de not_active Ceased
- 2011-04-12 WO PCT/EP2011/055669 patent/WO2011128315A1/de active Application Filing
- 2011-04-12 CN CN2011800192152A patent/CN102844646A/zh active Pending
- 2011-04-12 US US13/641,679 patent/US9134159B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05264314A (ja) * | 1992-03-18 | 1993-10-12 | Hitachi Ltd | 空気流量検出器及びそれを使用したエンジン制御装置 |
JPH0926343A (ja) * | 1995-07-06 | 1997-01-28 | Robert Bosch Gmbh | 流動媒体の質量測定装置 |
JP2000146654A (ja) * | 1998-11-13 | 2000-05-26 | Fuji Electric Co Ltd | 熱式質量流量計 |
JP2008020193A (ja) * | 2006-07-10 | 2008-01-31 | Mitsubishi Electric Corp | 熱式流量センサ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019064887A1 (ja) * | 2017-09-29 | 2019-04-04 | 日立オートモティブシステムズ株式会社 | 物理量検出装置 |
JPWO2019064887A1 (ja) * | 2017-09-29 | 2020-07-02 | 日立オートモティブシステムズ株式会社 | 物理量検出装置 |
Also Published As
Publication number | Publication date |
---|---|
DE102010015522B4 (de) | 2011-09-01 |
DE102010015522A1 (de) | 2011-02-24 |
WO2011128315A1 (de) | 2011-10-20 |
US9134159B2 (en) | 2015-09-15 |
KR20130103323A (ko) | 2013-09-23 |
JP5579320B2 (ja) | 2014-08-27 |
EP2558826A1 (de) | 2013-02-20 |
CN102844646A (zh) | 2012-12-26 |
KR101768736B1 (ko) | 2017-08-16 |
US20130031959A1 (en) | 2013-02-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8069718B2 (en) | Thermal flowmeter | |
JP5579320B2 (ja) | 空気質量流量計 | |
KR101775184B1 (ko) | 공기 질량 유량계 | |
JP3553422B2 (ja) | 流量センサ | |
JP4576444B2 (ja) | 熱式流量計 | |
US9772208B2 (en) | Thermal type flowmeter with particle guide member | |
US7661303B2 (en) | Flow measuring device having heating resistor in inclined position with respect to the flow direction | |
JP5546202B2 (ja) | マスフローセンサおよびマスフローセンサを備える自動車 | |
US8448503B2 (en) | Hot-film air-mass meter having a flow separating element | |
JP6073489B2 (ja) | センサ素子を備えた空気質量流量計 | |
US9841305B2 (en) | Sensor device for determining at least one parameter of a fluid medium flowing through a duct | |
JP2009541757A (ja) | 排気管内の層抵抗体 | |
JP2001027558A (ja) | 感熱式流量センサ | |
JP6689387B2 (ja) | エアフローメータ | |
JP3920247B2 (ja) | 感熱式流量検出素子およびその製造方法 | |
JP2012242298A (ja) | 流量検出装置 | |
JP5634698B2 (ja) | 質量流量センサ装置の製造方法および質量流量センサ装置 | |
JP2003294508A (ja) | 感熱式流量検出素子およびその製造方法 | |
WO2014156240A1 (ja) | 熱式流量計 | |
JP2007155533A (ja) | 空気流量測定装置 | |
JP5312603B2 (ja) | マスフローセンサおよびマスフローセンサを備えた自動車 | |
JP2023041549A (ja) | Mems異物検出素子 | |
JP2023041540A (ja) | Mems異物検出素子及び、mems異物検出素子の製造方法 | |
JP2023041552A (ja) | Mems流量測定素子 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20131220 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140114 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20140414 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20140421 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140609 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140708 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5579320 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |