JP2013524192A5 - - Google Patents

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Publication number
JP2013524192A5
JP2013524192A5 JP2013501904A JP2013501904A JP2013524192A5 JP 2013524192 A5 JP2013524192 A5 JP 2013524192A5 JP 2013501904 A JP2013501904 A JP 2013501904A JP 2013501904 A JP2013501904 A JP 2013501904A JP 2013524192 A5 JP2013524192 A5 JP 2013524192A5
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JP
Japan
Prior art keywords
reference pattern
substrate
image
camera
pixel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013501904A
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English (en)
Japanese (ja)
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JP2013524192A (ja
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Publication date
Priority claimed from FR1052477A external-priority patent/FR2958404B1/fr
Application filed filed Critical
Publication of JP2013524192A publication Critical patent/JP2013524192A/ja
Publication of JP2013524192A5 publication Critical patent/JP2013524192A5/ja
Pending legal-status Critical Current

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JP2013501904A 2010-04-01 2011-03-28 透明基板の光学的品質を分析するための装置及び方法 Pending JP2013524192A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1052477A FR2958404B1 (fr) 2010-04-01 2010-04-01 Procede et dispositif d'analyse de la qualite optique d'un substrat transparent
FR1052477 2010-04-01
PCT/FR2011/050675 WO2011121219A1 (fr) 2010-04-01 2011-03-28 Procede et dispositif d'analyse de la qualite optique d'un substrat transparent

Publications (2)

Publication Number Publication Date
JP2013524192A JP2013524192A (ja) 2013-06-17
JP2013524192A5 true JP2013524192A5 (https=) 2015-03-12

Family

ID=42666144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013501904A Pending JP2013524192A (ja) 2010-04-01 2011-03-28 透明基板の光学的品質を分析するための装置及び方法

Country Status (13)

Country Link
US (1) US8736688B2 (https=)
EP (1) EP2553439B1 (https=)
JP (1) JP2013524192A (https=)
KR (2) KR20130014528A (https=)
CN (1) CN103097879B (https=)
BR (1) BR112012023274B1 (https=)
EA (1) EA026441B1 (https=)
ES (1) ES2751989T3 (https=)
FR (1) FR2958404B1 (https=)
MX (1) MX2012010900A (https=)
PL (1) PL2553439T3 (https=)
PT (1) PT2553439T (https=)
WO (1) WO2011121219A1 (https=)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011109793B4 (de) * 2011-08-08 2014-12-04 Grenzbach Maschinenbau Gmbh Verfahren und Vorrichtung zur sicheren Detektion von Materialfehlern in transparenten Werkstoffen
FR2983583B1 (fr) 2011-12-02 2013-11-15 Saint Gobain Dispositif d'analyse des defauts d'aspect d'un substrat transparent
US9007454B2 (en) * 2012-10-31 2015-04-14 The Aerospace Corporation Optimized illumination for imaging
CN103454287A (zh) * 2013-09-05 2013-12-18 深圳市维图视技术有限公司 一种玻璃管缺陷视觉检测方法及其装置
CN103472072A (zh) * 2013-09-09 2013-12-25 深圳市维图视技术有限公司 一种新的玻璃管缺陷视觉检测方法及其装置
WO2015077113A1 (en) * 2013-11-25 2015-05-28 Corning Incorporated Methods for determining a shape of a substantially cylindrical specular reflective surface
US10156527B2 (en) * 2014-04-24 2018-12-18 Asml Holding N.V. Compact two-sided reticle inspection system
WO2016022151A1 (en) * 2014-08-08 2016-02-11 Heraeus Tenevo Llc Methods and apparatus for determining geometric properties of optical fiber preforms
US20160178535A1 (en) * 2014-12-17 2016-06-23 Xerox Corporation Inspection Device And Method
US10845746B2 (en) * 2017-01-20 2020-11-24 Hp Indigo B.V. Identifying linear defects
IT201700075428A1 (it) * 2017-07-05 2019-01-05 Antares Vision S R L Dispositivo di ispezione di contenitori particolarmente per il rilevamento di difetti lineari
KR102358582B1 (ko) * 2017-08-23 2022-02-04 삼성전자 주식회사 휴대 단말의 커버 글래스의 광학적 특성을 확인하는 검사 장치 및 커버 글래의 광학적 특성의 확인 방법
FR3085205B1 (fr) * 2018-08-22 2020-07-24 Livbag Sas Dispositif et methode de controle de verre de protection de soudeuse laser
EP3640630B1 (en) * 2018-10-18 2026-03-11 Infineon Technologies AG Embedded wafer inspection
CN113613889B (zh) * 2019-03-19 2024-02-13 中央硝子株式会社 信息采集系统的光学图案
CN111107257A (zh) * 2020-01-20 2020-05-05 成都德图福思科技有限公司 针对透明介质表面刻蚀或浮雕图案进行高对比度成像的方法
EP3875893A1 (en) * 2020-03-02 2021-09-08 Trifid Automation, s.r.o. Method and device for contactless measurement of geometric objects
FR3151094B1 (fr) * 2023-07-10 2025-07-18 Sas Woodoo Procede d’evaluation de la clarte d’un materiau, notamment non-homogene

Family Cites Families (16)

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Publication number Priority date Publication date Assignee Title
JPS61176839A (ja) * 1985-01-31 1986-08-08 Kanebo Ltd 透明または半透明の板状体の欠点検査装置
US5175601A (en) * 1991-10-15 1992-12-29 Electro-Optical Information Systems High-speed 3-D surface measurement surface inspection and reverse-CAD system
JP2795595B2 (ja) * 1992-06-26 1998-09-10 セントラル硝子株式会社 透明板状体の欠点検出方法
JPH10111252A (ja) * 1996-10-02 1998-04-28 Asahi Glass Co Ltd ガラス板の欠点検出装置
US6509967B1 (en) 1996-10-18 2003-01-21 Innomess Gelsellschaft Fur Messtechnik Mbh Method for detecting optical errors in large surface panels
US6208412B1 (en) 1999-06-14 2001-03-27 Visteon Global Technologies, Inc. Method and apparatus for determining optical quality
JP4633245B2 (ja) * 2000-11-06 2011-02-16 住友化学株式会社 表面検査装置及び表面検査方法
DE10301941B4 (de) * 2003-01-20 2005-11-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Kamera und Verfahren zur optischen Aufnahme eines Schirms
KR100615576B1 (ko) 2003-02-06 2006-08-25 주식회사 고영테크놀러지 3차원형상 측정장치
CN101287960A (zh) * 2004-10-13 2008-10-15 阿克罗米特里克斯有限责任公司 测量连续移动样品的样品表面平整度的系统与方法
US20060092276A1 (en) * 2004-10-28 2006-05-04 Ariglio James A Inspection system and method for identifying surface and body defects in a glass sheet
FR2898969B1 (fr) * 2006-03-24 2008-10-24 Peugeot Citroen Automobiles Sa Procede et installation de controle de la qualite de pieces
US8736677B2 (en) * 2008-08-07 2014-05-27 Kde Corporation Inspection system
NL2003263A (en) * 2008-08-20 2010-03-10 Asml Holding Nv Particle detection on an object surface.
FR2936605B1 (fr) 2008-10-01 2014-10-31 Saint Gobain Dispositif d'analyse de la surface d'un substrat
CN101592621A (zh) * 2009-05-18 2009-12-02 济南佳美视觉技术有限公司 一种使用折射栅格光源检验玻璃瓶表面缺陷及内部缺陷的自动光学检验设备

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