JP2013520848A - 走査速度に従い調節可能な繰り返し率を有する高出力のフェムト秒レーザ - Google Patents
走査速度に従い調節可能な繰り返し率を有する高出力のフェムト秒レーザ Download PDFInfo
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Abstract
【選択図】図6C
Description
Claims (26)
- レーザ・システムにより走査を行う方法であって、
レーザ・エンジンにより、可変の繰り返し率を有するレーザ・パルスを生成する段階と、
走査レーザ供与システムにより、目標領域における焦点へと前記レーザ・パルスを焦点合わせする段階と、
前記走査レーザ供与システムにより、前記目標領域において所定の走査速度を以て前記焦点を走査させる段階と、
前記走査速度を変更する段階と、
前記変更された走査速度に従い前記繰り返し率を、繰り返し率制御器により調節する段階とを有する、方法。 - 前記生成する段階は、
発振器によりフェムト秒の種パルスを生成する段階と、
前記種パルスを伸張器/圧縮器により伸張する段階と、
選択された伸張済み種パルスを増幅器により増幅済みの伸張済みパルスへと増幅する段階と、
前記増幅済みの伸張済みパルスを前記伸張器/圧縮器によりフェムト秒レーザ・パルスへと圧縮する段階とを有する、請求項1に記載の方法。 - 前記繰り返し率を調節し、前記目標領域においてレーザにより生成される気泡の密度を選択値の付近に略々維持する段階を有する、請求項1に記載の方法。
- 前記気泡の密度は、線密度、面積密度、および、体積密度の内のひとつである、請求項3に記載の方法。
- 前記繰り返し率を調節する段階は、
前記走査速度に比例させて前記繰り返し率を調節する段階を有する、請求項3に記載の方法。 - 前記繰り返し率を調節する段階は、
前記繰り返し率を、1μ秒〜1秒の範囲内の時間で第1の値から第2の値へと調節する段階を有する、請求項1に記載の方法。 - 前記焦点を走査させる段階は、
前記焦点を、最小加速経路に沿い走査させる段階を有する、請求項1に記載の方法。 - 前記焦点をスィッチバック経路に沿いXY走査させる段階と、
前記スィッチバック経路のスィッチバック部分に接近するときに前記繰り返し率を減速する段階とを有する、請求項1に記載の方法。 - レーザ光線を渦巻き線に沿い走査させる段階と、
前記走査段階が前記渦巻き線の中心に接近するときに前記繰り返し率を減速する段階とを有する、請求項1記載の方法。 - 前記繰り返し率を調節する段階は、
前記繰り返し率制御器により変更された走査速度に関する情報を、
変化する走査速度を検知する段階、および、
前記変化する走査速度に関する電子的情報をプロセッサまたはメモリから獲得する段階、
の内のひとつの段階により受信する段階と、
前記変更された走査速度に関する前記受信の情報に従い前記繰り返し率を調節する段階とを有する、請求項1記載の方法。 - 複数のフェムト秒の種パルスから成る光線を生成して出力する発振器と、
前記種パルスの存続時間を伸張し、増幅器からの増幅済みの伸張済みパルスを受信し、前記増幅済みの伸張済みパルスの存続時間を圧縮し、且つ、所定の繰り返し率を以て複数のフェムト秒パルスから成るレーザ光線を出力するという伸張器/圧縮器であって、
前記増幅器は、
前記伸張器/圧縮器から前記伸張済み種パルスを受信し、
選択された伸張済み種パルスの振幅を増幅して、増幅済みの伸張済みパルスを生成し、且つ、
前記増幅済みの伸張済みパルスを出力する、
という伸張器/圧縮器と、
目標領域において可変走査速度を以て前記レーザ光線の焦点を走査させることで、光切断による複数のスポットを生成する走査用光学機器と、
を備える繰り返し率可変のレーザ走査システムであって、
該レーザ走査システムは、前記繰り返し率を変更することで、所定の密度変化特性を以て前記光切断による複数のスポットを生成する、繰り返し率可変レーザ走査システム。 - 前記増幅器は、前記増幅済みの伸張済みパルスの分散を減少する分散補償器を備える、請求項11に記載のレーザ走査システム。
- 前記増幅器は、該増幅器において前記伸張済みパルスの偏光面を回転する切換え可能な偏光子を備え、
前記切換え可能な偏光子の立ち上がり時間は、5ns、4nsおよび3nsの内のひとつより短い、請求項11に記載のレーザ走査システム。 - 当該レーザ走査システムは、前記切換え可能な偏光子に対して制御信号を印加することにより該切換え可能な偏光子を5ns、4nsまたは3nsの内のひとつより短い立ち上がり時間を以て切換える制御電子機器を備える、請求項13に記載のレーザ走査システム。
- レーザ・エンジンにより走査を行う方法であって、
所定の繰り返し率を以てフェムト秒レーザ・パルスを生成する段階と、
前記レーザ・パルスを目標領域における焦点に焦点合わせし、光切断による複数のスポットを生成する段階と、
前記目標領域において所定の走査速度を以て前記焦点を走査させる段階と、
前記走査の間に前記繰り返し率を調節し、所定の密度変化特性を以て前記光切断による複数のスポットを生成する段階とを有する、方法。 - 前記調節段階は、目標領域において本質的に均一に維持される線スポット密度、面積スポット密度および体積スポット密度の内のひとつにより前記光切断による複数のスポットを生成する段階を有する、請求項15に記載の方法。
- 前記調節段階は、前記走査速度の変更に従い前記繰り返し率を調節する段階を有する、請求項15に記載の方法。
- 前記調節段階は、前記走査速度に略々比例させて前記繰り返し率を調節する段階を有する、請求項15に記載の方法。
- 前記繰り返し率を調節する段階は、
前記繰り返し率を、1μ秒〜1秒の範囲内の時間で第1の値から第2の値へと調節する段階を有する、請求項15に記載の方法。 - 前記生成段階は、
発振器によりフェムト秒の種パルスを生成する段階と、
前記種パルスを伸張器/圧縮器により伸張する段階と、
選択された伸張済み種パルスを増幅器により増幅済みの伸張済みパルスへと増幅する段階と、
前記増幅済みの伸張済みパルスを前記伸張器/圧縮器によりフェムト秒レーザ・パルスへと圧縮する段階とを有する、請求項15に記載の方法。 - 前記焦点を走査させる段階は、
前記焦点を、最小加速経路に沿い走査させる段階を有する、請求項15に記載の方法。 - 前記焦点をスィッチバック経路に沿い走査させる段階と、
前記スィッチバック経路のスィッチバック部分に接近するときに前記繰り返し率を減速する段階とを有する、請求項15に記載の方法。 - レーザ光線を渦巻き線に沿い走査させる段階と、
前記走査段階が前記渦巻き線の中心に接近するときに前記繰り返し率を減速する段階とを有する、請求項15に記載の方法。 - レーザ光線をラインの端部およびラインの角隅部の内の一方に沿い走査させる段階と、
前記走査段階が前記ラインの端部および前記ラインの角隅部の内の一方に接近するに従い前記繰り返し率を減速する段階とを有する、請求項15に記載の方法。 - 前記走査速度に関して記憶されたもしくは検知された情報を受信する段階と、
前記走査速度に関する前記受信の情報に従い前記繰り返し率を調節する段階とを有する、請求項15に記載の方法。 - 前記目標領域に関して検知されたもしくは画像化された情報を受信する段階と、
前記目標領域に関する前記受信の情報に従い前記繰り返し率を調節する段階とを有する、請求項15に記載の方法。
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