JP6461857B2 - 調節可能な繰り返し率を有する高出力のフェムト秒レーザ - Google Patents
調節可能な繰り返し率を有する高出力のフェムト秒レーザ Download PDFInfo
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- 230000003287 optical effect Effects 0.000 claims description 225
- 239000006185 dispersion Substances 0.000 claims description 119
- 230000010287 polarization Effects 0.000 claims description 51
- 230000008859 change Effects 0.000 claims description 45
- 239000013078 crystal Substances 0.000 claims description 44
- 238000000034 method Methods 0.000 claims description 40
- 230000000694 effects Effects 0.000 claims description 37
- 239000000835 fiber Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 7
- 230000001172 regenerating effect Effects 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 5
- 238000013461 design Methods 0.000 description 49
- 238000005086 pumping Methods 0.000 description 26
- 238000001356 surgical procedure Methods 0.000 description 26
- 101100100125 Mus musculus Traip gene Proteins 0.000 description 21
- 230000002829 reductive effect Effects 0.000 description 19
- 230000006870 function Effects 0.000 description 18
- 230000010355 oscillation Effects 0.000 description 16
- 208000019849 gnathodiaphyseal dysplasia Diseases 0.000 description 12
- 230000003321 amplification Effects 0.000 description 11
- 238000005520 cutting process Methods 0.000 description 11
- 238000012423 maintenance Methods 0.000 description 11
- 238000003199 nucleic acid amplification method Methods 0.000 description 11
- 239000010409 thin film Substances 0.000 description 11
- 208000002177 Cataract Diseases 0.000 description 10
- 210000001508 eye Anatomy 0.000 description 10
- 230000007257 malfunction Effects 0.000 description 10
- 230000009471 action Effects 0.000 description 9
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 5
- 230000006835 compression Effects 0.000 description 5
- 238000007906 compression Methods 0.000 description 5
- 229910052779 Neodymium Inorganic materials 0.000 description 4
- 229910052769 Ytterbium Inorganic materials 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 230000003111 delayed effect Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000004904 shortening Methods 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 210000005252 bulbus oculi Anatomy 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000001934 delay Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 230000003449 preventive effect Effects 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000005697 Pockels effect Effects 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000004087 circulation Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000004424 eye movement Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000002207 retinal effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- PBYZMCDFOULPGH-UHFFFAOYSA-N tungstate Chemical compound [O-][W]([O-])(=O)=O PBYZMCDFOULPGH-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
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Description
Claims (13)
- フェムト秒の種パルスから成る光線を生成して出力する発振器と、
前記種パルスの存続時間を伸張する伸張器/圧縮器と、
前記伸張器/圧縮器からの伸張済み種パルスを受信し、選択された伸張済み種パルスの振幅を増幅して、増幅済みの伸張済みパルスを生成し、増幅された伸張済みパルスから成るレーザ光線を出力する増幅器と、を備える繰り返し率可変のレーザ・エンジンであって、
前記増幅器は、群遅延分散(GDD)を5,000フェムト秒から20,000フェムト秒の範囲に補償するように構成された分散補償器と、50kHzから1MHzの範囲内の繰り返し率で作用するように偏光極性を切換え可能な電気光学的偏光子と、を備え、前記分散補償器は、往復の間において前記増幅器の光学的構成要素により導入される分散と逆向きであり且つ本質的に等しい分散を導入することで、光学的構成要素により引き起こされた前記増幅済みの伸張済みパルスの分散を減少させる1又は複数のチャープ・ミラーであり、
前記伸張器/圧縮器は、前記増幅済みの伸張済みパルスから成るレーザ光線を受信し、前記増幅済みの伸張済みパルスの存続時間を圧縮し、且つ、1,000フェムト秒未満のパルス存続時間を備えるフェムト秒パルスから成るレーザ光線を出力し、
前記レーザ・エンジンが、0.1Wよりも大きな出力パワーを以ってレーザ光線を出力し、屈折補償器の機械的な調整なしで熱レンズ効果に対して補償するように構成された、レーザ結晶と端部ミラーを備え、
前記増幅器は、繰り返し率が変更されたときに、該増幅器の光学的設定を変更せずに維持しながら、該増幅器における前記増幅済みの伸張済みパルスの往復の回数を変更すべく構成され、
前記切換え可能な電気光学的偏光子が、
端部ミラー間の光路中に配置され、
前記増幅器の空洞の線質係数Qを制御するために、
該切換え可能な電気光学的偏光子が前記増幅済みの伸張済みパルスの偏光極性を調節する、という偏光極性調節状態と、
該切換え可能な電気光学的偏光子が本質的に、前記増幅済みの伸張済みパルスの偏光極性を調節しない、という偏光極性非調節状態と、
の間で切換わることにより伸張済みパルスを選択するように構成された、
レーザ・エンジン。 - 前記発振器は、ダイオードによりポンピングされたファイバ発振器である、請求項1に記載のレーザ・エンジン。
- 前記発振器は、トランスフォームリミット種パルスを出力する、請求項1に記載のレーザ・エンジン。
- 前記発振器は、1,000フェムト秒未満の種パルス存続時間を以て前記光線を生成する、請求項1に記載のレーザ・エンジン。
- 前記伸張器/圧縮器はチャーピングされた体積ブラッグ格子を備える、請求項1に記載のレーザ・エンジン。
- 前記伸張器/圧縮器は、光熱屈折ガラスを備える、請求項1に記載のレーザ・エンジン。
- 前記伸張器/圧縮器は、前記フェムト秒の種パルスの存続時間を、1,000〜200,000フェムト秒の伸張済み存続時間へと伸張する、請求項1に記載のレーザ・エンジン。
- ファラデー・アイソレータであって、
前記伸張器/圧縮器からの前記伸張済み種パルスから成る光線を受信し、
前記伸張済み種パルスから成る光線を前記増幅器に向けて出力し、
前記増幅器から増幅済みの伸張済みパルスから成るレーザ光線を受信し、
前記増幅済みの伸張済みパルスから成るレーザ光線を、前記伸張器/圧縮器の圧縮器ポートに向けて出力し、
前記増幅済みの伸張済みパルスから成るレーザ光線から前記発振器を隔離する、というファラデー・アイソレータを備える、請求項1に記載のレーザ・エンジン。 - 前記分散補償器により導入される前記分散は、該分散補償器以外の前記増幅器の各光学素子により1回の往復内に導入される分散と大きさが本質的に等しく且つ符号が逆である、請求項1に記載のレーザ・エンジン。
- 前記増幅器は、
前記選択された伸張済み種パルスの振幅を増幅する利得材料と、
共振空洞を画成する2つの端部ミラーと、
該増幅器の内部にて共振光路を折返す2つの折返しミラーと、を備え、
前記2つの端部ミラーおよび前記2つの折返しミラーの内の少なくともひとつはチャープ・ミラーである、請求項1に記載のレーザ・エンジン。 - 前記増幅器は、空洞ダンピング型再生増幅器、チャーピングされたパルス増幅器、または、Qスィッチ式増幅器の内のひとつである、請求項1に記載のレーザ・エンジン。
- 前記切換え可能な電気光学的偏光子を制御して前記偏光極性非調節状態から前記偏光極性調節状態へと、5ナノ秒より短い立ち上がり時間を以て切換える高電圧パワースィッチを備える、請求項1に記載のレーザ・エンジン。
- 繰り返し率可変のレーザ・エンジンによりレーザ光線を生成する方法であって、
1,000フェムト秒未満の存続時間を以て種パルスから成る光線を発振器により生成する段階と、
前記種パルスの存続時間をパルス伸張器により伸張する段階と、
選択された伸張済み種パルスの振幅を増幅器により増幅し、増幅済みの伸張済みパルスを生成する、増幅する段階と、
前記増幅済みの伸張済みパルスの存続時間を、パルス圧縮器により1,000フェムト秒未満に圧縮する段階と、
50kHz〜1MHzの範囲内の第1繰り返し率および1,000フェムト秒未満のパルス存続時間を備えたフェムト秒パルスから成るレーザ光線を切換え可能な電気光学的偏光子で出力する段階と、
前記レーザ・エンジンの光学的設定を本質的に変更せずに、繰り返し率を、前記第1繰り返し率から、50kHz〜1MHzの範囲内の第2繰り返し率へと変更する段階と、
屈折補償器の機械的な調整なしで熱レンズ効果に対して補償する段階と、
前記第2繰り返し率を以て、且つ、1,000フェムト秒未満のパルス存続時間を以て、前記フェムト秒パルスから成るレーザ光線を出力する段階とを有し、
前記増幅する段階が、前記増幅器内の分散補償器を用いて、前記増幅器の光学的構成要素により引き起こされた前記増幅済みの伸張済みパルスの分散を減少させ、往復の間において前記増幅器の光学的構成要素により導入される分散と逆向きであり且つ本質的に等しい分散を導入することを含み、
前記レーザ・エンジンが0.1Wよりも大きな出力パワーを以ってレーザ光線を出力し、
前記増幅器は、繰り返し率が変更されたときに、該増幅器の光学的設定を変更せずに維持しながら、該増幅器における前記増幅済みの伸張済みパルスの往復の回数を変更すべく構成され、
前記切換え可能な電気光学的偏光子が、
端部ミラー間の光路中に配置され、
前記増幅器の空洞の線質係数Qを制御するために、
該切換え可能な電気光学的偏光子が前記増幅済みの伸張済みパルスの偏光極性を調節する、という偏光極性調節状態と、
該切換え可能な電気光学的偏光子が本質的に、前記増幅済みの伸張済みパルスの偏光極性を調節しない、という偏光極性非調節状態と、
の間で切換わることにより伸張済みパルスを選択するように構成された、
方法。
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