JP2013514173A - プラズマチャンバで使用される上方電極から表面金属汚染を洗浄するための方法 - Google Patents
プラズマチャンバで使用される上方電極から表面金属汚染を洗浄するための方法 Download PDFInfo
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- JP2013514173A JP2013514173A JP2012544473A JP2012544473A JP2013514173A JP 2013514173 A JP2013514173 A JP 2013514173A JP 2012544473 A JP2012544473 A JP 2012544473A JP 2012544473 A JP2012544473 A JP 2012544473A JP 2013514173 A JP2013514173 A JP 2013514173A
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- 238000000034 method Methods 0.000 title claims abstract description 59
- 238000004140 cleaning Methods 0.000 title claims abstract description 40
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 14
- 239000002184 metal Substances 0.000 title claims abstract description 14
- 238000011109 contamination Methods 0.000 title claims description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 18
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 16
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000000356 contaminant Substances 0.000 claims abstract description 9
- 239000000908 ammonium hydroxide Substances 0.000 claims abstract description 8
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 6
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910017604 nitric acid Inorganic materials 0.000 claims abstract description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 claims description 12
- 239000008367 deionised water Substances 0.000 claims description 9
- 229910021641 deionized water Inorganic materials 0.000 claims description 9
- 239000011230 binding agent Substances 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 2
- 238000005498 polishing Methods 0.000 claims description 2
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 2
- 239000012498 ultrapure water Substances 0.000 claims description 2
- 238000005406 washing Methods 0.000 claims 9
- 238000002791 soaking Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 description 14
- 239000007789 gas Substances 0.000 description 6
- 239000010949 copper Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- -1 polytetrafluoroethylene Polymers 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000013522 chelant Substances 0.000 description 1
- 239000003251 chemically resistant material Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- QOSATHPSBFQAML-UHFFFAOYSA-N hydrogen peroxide;hydrate Chemical compound O.OO QOSATHPSBFQAML-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/43—Solvents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
Abstract
【選択図】図1
Description
Claims (21)
- プラズマチャンバで使用される上方電極から金属汚染物質を洗浄するための方法であって、
水酸化アンモニウムと、過酸化水素と、水とで構成される洗浄溶液に前記上方電極全体を浸すことを備える方法。 - 請求項1に記載の方法であって、
前記上方電極は、10分から60分にわたって前記洗浄溶液に浸される、方法。 - 請求項1に記載の方法であって、更に、
前記洗浄溶液に浸す前に、
前記上方電極を約30分にわたってイソプロピルアルコールに浸すことと、
前記上方電極をクリーンルームワイプで拭き掃除し、前記上方電極を約2分にわたって脱イオン水ですすぐことと、
前記洗浄溶液に浸した後に、
前記上方電極を約5分にわたって脱イオン水ですすぐことと、
前記上方電極を約2分にわたって脱イオン水を使用してクリーンルームワイプで拭き掃除することと、
随意として、前記上方電極を2分から5分にわたって2%の硝酸溶液に浸し、前記上方電極を約1分から10分にわたって脱イオン水ですすぐことと、
を備える方法。 - 請求項3に記載の方法であって、更に、
前記工程を少なくとも1回繰り返し、その後に続いて前記上方電極を約1分から30分にわたって超純水ですすぐことを備える方法。 - 請求項1に記載の方法であって、
前記洗浄溶液は、濃縮水酸化アンモニウム水溶液をNH3基準で28〜30重量%と、過酸化水素水溶液を29〜31重量%と、水とを、1〜2:1〜2:2から1〜2:1〜2:20の水酸化アンモニウム:過酸化水素:水の体積比で混ぜ合わせることによって用意される、方法。 - 請求項5に記載の方法であって、
前記体積比は、1:1:2から1:1:10である、方法。 - 請求項1に記載の方法であって、
前記上方電極は、単結晶シリコンのシャワーヘッド型電極を含む、方法。 - 請求項1に記載の方法であって、
前記洗浄溶液は、フッ酸及び塩酸を含まない、方法。 - 請求項1に記載の方法であって、
前記洗浄は、前記上方電極のプラズマ暴露表面を研磨することなく行われる、方法。 - 請求項1に記載の方法であって、
前記洗浄は、クラス10000又はそれよりも高水準のクリーンルームで行われる、方法。 - 請求項1に記載の方法であって、
前記上方電極は、エラストマ系結合剤によってシリコンのシャワーヘッド型電極に接合されたアルミニウム又は黒鉛の裏当て部材を含む、方法。 - 請求項1に記載の方法であって、更に、
洗浄に先立って前記上方電極をプラズマチャンバから取り出すことと、
洗浄後の前記上方電極を同じ又は異なるチャンバに再び取り付けることと、
を備える方法。 - 請求項1に記載の方法であって、
前記洗浄溶液は、Cu汚染を3000×1010原子数/cm2超えから50×1010原子数/cm2未満に減少させる、方法。 - 請求項1に記載の方法であって、
前記洗浄溶液は、Ni汚染を200×1010原子数/cm2超えから50×1010原子数/cm2未満に減少させる、方法。 - 請求項1に記載の方法であって、
前記洗浄溶液は、Zn汚染を250×1010原子数/cm2超えから75×1010原子数/cm2未満に減少させる、方法。 - 請求項1に記載の方法であって、
前記洗浄溶液は、Fe汚染を50×1010原子数/cm2超えから5×1010原子数/cm2未満に減少させる、方法。 - 請求項1に記載の方法であって、
前記洗浄溶液は、Ca汚染を700×1010原子数/cm2超えから400×1010原子数/cm2未満に減少させる、方法。 - 請求項1に記載の方法であって、
前記洗浄溶液は、Mg汚染を50×1010原子数/cm2超えから20×1010原子数/cm2未満に減少させる、方法。 - 請求項1に記載の方法であって、
前記洗浄溶液は、K汚染を450×1010原子数/cm2超えから5×1010原子数/cm2未満に減少させる、方法。 - 請求項1に記載の方法であって、
前記洗浄溶液は、Na汚染を1500×1010原子数/cm2超えから50×1010原子数/cm2未満に減少させる、方法。 - 請求項1に記載の方法であって、
前記洗浄溶液は、Ti汚染を250×1010原子数/cm2超えから75×1010原子数/cm2未満に減少させる、方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US28808709P | 2009-12-18 | 2009-12-18 | |
US61/288,087 | 2009-12-18 | ||
PCT/US2010/003092 WO2011084127A2 (en) | 2009-12-18 | 2010-12-06 | Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamber |
Publications (2)
Publication Number | Publication Date |
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JP2013514173A true JP2013514173A (ja) | 2013-04-25 |
JP5896915B2 JP5896915B2 (ja) | 2016-03-30 |
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Family Applications (1)
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JP2012544473A Active JP5896915B2 (ja) | 2009-12-18 | 2010-12-06 | プラズマチャンバで使用される上方電極から表面金属汚染を洗浄するための方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9079228B2 (ja) |
JP (1) | JP5896915B2 (ja) |
KR (1) | KR101820976B1 (ja) |
CN (1) | CN102652350B (ja) |
SG (2) | SG181424A1 (ja) |
TW (1) | TWI523703B (ja) |
WO (1) | WO2011084127A2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2016152142A1 (ja) * | 2015-03-24 | 2016-09-29 | パナソニックIpマネジメント株式会社 | 洗浄方法 |
JP7499678B2 (ja) | 2020-11-02 | 2024-06-14 | 東京応化工業株式会社 | 半導体製造用プロセスチャンバのコンポーネントの洗浄用組成物及び洗浄方法 |
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US9337002B2 (en) | 2013-03-12 | 2016-05-10 | Lam Research Corporation | Corrosion resistant aluminum coating on plasma chamber components |
US20190341276A1 (en) * | 2018-05-03 | 2019-11-07 | Applied Materials, Inc. | Integrated semiconductor part cleaning system |
CN110528010B (zh) * | 2019-09-20 | 2020-11-03 | 北京航空航天大学 | 一种镍基高温合金断口清洗方法 |
KR102654366B1 (ko) * | 2024-03-06 | 2024-04-03 | 주식회사 디에프텍 | 반도체 제조공정에 사용되는 샤워헤드 세정 방법 |
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- 2010-12-06 KR KR1020127015493A patent/KR101820976B1/ko active IP Right Grant
- 2010-12-06 WO PCT/US2010/003092 patent/WO2011084127A2/en active Application Filing
- 2010-12-06 SG SG2012035655A patent/SG181424A1/en unknown
- 2010-12-06 CN CN201080056019.8A patent/CN102652350B/zh active Active
- 2010-12-06 SG SG10201408436TA patent/SG10201408436TA/en unknown
- 2010-12-06 JP JP2012544473A patent/JP5896915B2/ja active Active
- 2010-12-07 US US12/962,166 patent/US9079228B2/en active Active
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JP2008506530A (ja) * | 2004-06-09 | 2008-03-06 | ラム リサーチ コーポレーション | プラズマ処理チャンバ用の構成要素の石英表面をウェット洗浄する方法 |
JP2008526023A (ja) * | 2004-12-23 | 2008-07-17 | ラム リサーチ コーポレーション | シリコン電極アセンブリ表面から汚染を除去するための洗浄方法 |
WO2008121287A1 (en) * | 2007-03-30 | 2008-10-09 | Lam Research Corporation | Methodology for cleaning of surface metal contamination from electrode assemblies |
WO2009142078A1 (ja) * | 2008-05-22 | 2009-11-26 | 富士電機デバイステクノロジー株式会社 | 半導体装置の製造方法及びそのための装置 |
Cited By (2)
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WO2016152142A1 (ja) * | 2015-03-24 | 2016-09-29 | パナソニックIpマネジメント株式会社 | 洗浄方法 |
JP7499678B2 (ja) | 2020-11-02 | 2024-06-14 | 東京応化工業株式会社 | 半導体製造用プロセスチャンバのコンポーネントの洗浄用組成物及び洗浄方法 |
Also Published As
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KR20120102707A (ko) | 2012-09-18 |
WO2011084127A2 (en) | 2011-07-14 |
US20110146704A1 (en) | 2011-06-23 |
SG10201408436TA (en) | 2015-02-27 |
WO2011084127A3 (en) | 2011-10-13 |
SG181424A1 (en) | 2012-07-30 |
JP5896915B2 (ja) | 2016-03-30 |
CN102652350A (zh) | 2012-08-29 |
TW201141627A (en) | 2011-12-01 |
TWI523703B (zh) | 2016-03-01 |
US9079228B2 (en) | 2015-07-14 |
CN102652350B (zh) | 2015-11-25 |
KR101820976B1 (ko) | 2018-01-22 |
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