JP2013254782A5 - - Google Patents

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Publication number
JP2013254782A5
JP2013254782A5 JP2012128157A JP2012128157A JP2013254782A5 JP 2013254782 A5 JP2013254782 A5 JP 2013254782A5 JP 2012128157 A JP2012128157 A JP 2012128157A JP 2012128157 A JP2012128157 A JP 2012128157A JP 2013254782 A5 JP2013254782 A5 JP 2013254782A5
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JP
Japan
Prior art keywords
gas
carbon
unsaturated bond
mold
resin
Prior art date
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Application number
JP2012128157A
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English (en)
Japanese (ja)
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JP6304921B2 (ja
JP2013254782A (ja
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Priority to JP2012128157A priority Critical patent/JP6304921B2/ja
Priority claimed from JP2012128157A external-priority patent/JP6304921B2/ja
Publication of JP2013254782A publication Critical patent/JP2013254782A/ja
Publication of JP2013254782A5 publication Critical patent/JP2013254782A5/ja
Application granted granted Critical
Publication of JP6304921B2 publication Critical patent/JP6304921B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012128157A 2012-06-05 2012-06-05 インプリント方法およびインプリント装置、それを用いた物品の製造方法 Expired - Fee Related JP6304921B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012128157A JP6304921B2 (ja) 2012-06-05 2012-06-05 インプリント方法およびインプリント装置、それを用いた物品の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012128157A JP6304921B2 (ja) 2012-06-05 2012-06-05 インプリント方法およびインプリント装置、それを用いた物品の製造方法

Publications (3)

Publication Number Publication Date
JP2013254782A JP2013254782A (ja) 2013-12-19
JP2013254782A5 true JP2013254782A5 (https=) 2015-07-16
JP6304921B2 JP6304921B2 (ja) 2018-04-04

Family

ID=49952077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012128157A Expired - Fee Related JP6304921B2 (ja) 2012-06-05 2012-06-05 インプリント方法およびインプリント装置、それを用いた物品の製造方法

Country Status (1)

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JP (1) JP6304921B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014112495A1 (ja) * 2013-01-17 2014-07-24 キヤノン株式会社 インプリント方法、およびインプリント装置
JP5882922B2 (ja) * 2012-01-19 2016-03-09 キヤノン株式会社 インプリント方法、およびインプリント装置
JP6420571B2 (ja) * 2014-06-13 2018-11-07 キヤノン株式会社 インプリント装置、インプリント方法及び物品の製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8211214B2 (en) * 2003-10-02 2012-07-03 Molecular Imprints, Inc. Single phase fluid imprint lithography method
US7090716B2 (en) * 2003-10-02 2006-08-15 Molecular Imprints, Inc. Single phase fluid imprint lithography method
JP2006210601A (ja) * 2005-01-27 2006-08-10 Asahi Glass Co Ltd 転写層にパターンを形成する方法
JP5175771B2 (ja) * 2009-02-27 2013-04-03 株式会社日立ハイテクノロジーズ 微細構造転写装置及び微細構造転写方法
JP2011016351A (ja) * 2009-06-10 2011-01-27 Asahi Glass Co Ltd 子モールドの製造方法および物品の製造方法
JP5364533B2 (ja) * 2009-10-28 2013-12-11 株式会社東芝 インプリントシステムおよびインプリント方法
JP5546893B2 (ja) * 2010-02-16 2014-07-09 東京エレクトロン株式会社 インプリント方法

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