JP2013251258A5 - - Google Patents

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Publication number
JP2013251258A5
JP2013251258A5 JP2013108815A JP2013108815A JP2013251258A5 JP 2013251258 A5 JP2013251258 A5 JP 2013251258A5 JP 2013108815 A JP2013108815 A JP 2013108815A JP 2013108815 A JP2013108815 A JP 2013108815A JP 2013251258 A5 JP2013251258 A5 JP 2013251258A5
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JP
Japan
Prior art keywords
intermediate vacuum
ion beam
chamber
focused ion
pressure
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JP2013108815A
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English (en)
Japanese (ja)
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JP2013251258A (ja
JP6238570B2 (ja
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Publication of JP2013251258A5 publication Critical patent/JP2013251258A5/ja
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Publication of JP6238570B2 publication Critical patent/JP6238570B2/ja
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JP2013108815A 2012-05-31 2013-05-23 プラズマ・イオン源に対する改良された画像化および処理 Active JP6238570B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261653930P 2012-05-31 2012-05-31
US61/653,930 2012-05-31

Publications (3)

Publication Number Publication Date
JP2013251258A JP2013251258A (ja) 2013-12-12
JP2013251258A5 true JP2013251258A5 (enExample) 2016-11-10
JP6238570B2 JP6238570B2 (ja) 2017-11-29

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ID=48520813

Family Applications (1)

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JP2013108815A Active JP6238570B2 (ja) 2012-05-31 2013-05-23 プラズマ・イオン源に対する改良された画像化および処理

Country Status (4)

Country Link
US (2) US9105438B2 (enExample)
EP (1) EP2669925B1 (enExample)
JP (1) JP6238570B2 (enExample)
CN (1) CN103456588B (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5481401B2 (ja) * 2011-01-14 2014-04-23 株式会社日立ハイテクノロジーズ 走査電子顕微鏡
JP6584786B2 (ja) * 2015-02-13 2019-10-02 株式会社日立ハイテクノロジーズ プラズマイオン源および荷電粒子ビーム装置
DE102018203096B9 (de) * 2018-03-01 2020-02-27 Carl Zeiss Microscopy Gmbh Verfahren zum Betrieb eines Drucksystems für eine Vorrichtung zum Abbilden, Analysieren und/oder Bearbeiten eines Objekts und Vorrichtung zum Ausführen des Verfahrens
CN109243952B (zh) * 2018-10-26 2024-02-27 长沙埃福思科技有限公司 双真空室离子束修形加工系统及修形加工方法
US11469072B2 (en) * 2021-02-17 2022-10-11 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam apparatus, scanning electron microscope, and method of operating a charged particle beam apparatus

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