JP2013229514A5 - - Google Patents

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Publication number
JP2013229514A5
JP2013229514A5 JP2012101754A JP2012101754A JP2013229514A5 JP 2013229514 A5 JP2013229514 A5 JP 2013229514A5 JP 2012101754 A JP2012101754 A JP 2012101754A JP 2012101754 A JP2012101754 A JP 2012101754A JP 2013229514 A5 JP2013229514 A5 JP 2013229514A5
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Japan
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color
fine
concentration
fine bubbles
processing liquid
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JP2012101754A
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Japanese (ja)
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JP2013229514A (ja
JP6037649B2 (ja
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Publication of JP2013229514A5 publication Critical patent/JP2013229514A5/ja
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JP2012101754A 2012-04-26 2012-04-26 微細気泡発生装置、微細気泡発生方法、基板処理装置、および基板処理方法 Active JP6037649B2 (ja)

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Application Number Priority Date Filing Date Title
JP2012101754A JP6037649B2 (ja) 2012-04-26 2012-04-26 微細気泡発生装置、微細気泡発生方法、基板処理装置、および基板処理方法

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Application Number Priority Date Filing Date Title
JP2012101754A JP6037649B2 (ja) 2012-04-26 2012-04-26 微細気泡発生装置、微細気泡発生方法、基板処理装置、および基板処理方法

Publications (3)

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JP2013229514A JP2013229514A (ja) 2013-11-07
JP2013229514A5 true JP2013229514A5 (https=) 2015-06-18
JP6037649B2 JP6037649B2 (ja) 2016-12-07

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JP2012101754A Active JP6037649B2 (ja) 2012-04-26 2012-04-26 微細気泡発生装置、微細気泡発生方法、基板処理装置、および基板処理方法

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JP (1) JP6037649B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102382789B1 (ko) * 2020-02-26 2022-04-06 주식회사 이앤에이치 기판 세정 장치 및 기판 세정 방법
JP7514687B2 (ja) * 2020-07-31 2024-07-11 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置及び基板処理方法
JP7476024B2 (ja) * 2020-08-03 2024-04-30 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法及び基板処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4869957B2 (ja) * 2006-03-22 2012-02-08 大日本スクリーン製造株式会社 基板処理装置
JP2009285571A (ja) * 2008-05-29 2009-12-10 Mitsubishi Electric Corp 洗浄装置

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JP6037649B2 (ja) 微細気泡発生装置、微細気泡発生方法、基板処理装置、および基板処理方法