JP2013186108A5 - - Google Patents

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Publication number
JP2013186108A5
JP2013186108A5 JP2012054188A JP2012054188A JP2013186108A5 JP 2013186108 A5 JP2013186108 A5 JP 2013186108A5 JP 2012054188 A JP2012054188 A JP 2012054188A JP 2012054188 A JP2012054188 A JP 2012054188A JP 2013186108 A5 JP2013186108 A5 JP 2013186108A5
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JP
Japan
Prior art keywords
physical quantity
quantity sensor
sensor module
substrate
module according
Prior art date
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Granted
Application number
JP2012054188A
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English (en)
Japanese (ja)
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JP5982889B2 (ja
JP2013186108A (ja
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Priority to JP2012054188A priority Critical patent/JP5982889B2/ja
Priority claimed from JP2012054188A external-priority patent/JP5982889B2/ja
Publication of JP2013186108A publication Critical patent/JP2013186108A/ja
Publication of JP2013186108A5 publication Critical patent/JP2013186108A5/ja
Application granted granted Critical
Publication of JP5982889B2 publication Critical patent/JP5982889B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012054188A 2012-03-12 2012-03-12 物理量センサーモジュール及び電子機器 Expired - Fee Related JP5982889B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012054188A JP5982889B2 (ja) 2012-03-12 2012-03-12 物理量センサーモジュール及び電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012054188A JP5982889B2 (ja) 2012-03-12 2012-03-12 物理量センサーモジュール及び電子機器

Publications (3)

Publication Number Publication Date
JP2013186108A JP2013186108A (ja) 2013-09-19
JP2013186108A5 true JP2013186108A5 (enrdf_load_stackoverflow) 2015-04-23
JP5982889B2 JP5982889B2 (ja) 2016-08-31

Family

ID=49387632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012054188A Expired - Fee Related JP5982889B2 (ja) 2012-03-12 2012-03-12 物理量センサーモジュール及び電子機器

Country Status (1)

Country Link
JP (1) JP5982889B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6378269B2 (ja) * 2016-05-17 2018-08-22 エーエーシー テクノロジーズ ピーティーイー リミテッドＡａｃ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｐｔｅ．Ｌｔｄ． 加速度センサー
JP6373318B2 (ja) * 2016-05-17 2018-08-15 エーエーシー テクノロジーズ ピーティーイー リミテッドＡａｃ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｐｔｅ．Ｌｔｄ． 圧力センサー
CN110243343B (zh) 2018-03-09 2022-07-29 精工爱普生株式会社 传感器模块、倾斜仪以及结构物监视装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0639335Y2 (ja) * 1988-03-14 1994-10-12 三菱油化株式会社 加速度センサ
JPH0943270A (ja) * 1995-07-26 1997-02-14 Ngk Spark Plug Co Ltd 圧電型力学量センサ
JP2003028892A (ja) * 2001-07-16 2003-01-29 Matsushita Electric Works Ltd 加速度センサ
JP2007040766A (ja) * 2005-08-01 2007-02-15 Toyota Motor Corp センサユニット
JP2007127607A (ja) * 2005-11-07 2007-05-24 Mitsutoyo Corp センサブロック

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