JP2013174495A - Detection device, detection method, and method for manufacturing structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a detection device capable of suppressing a deterioration in detection accuracy, a detection method, and a method for manufacturing a structure.SOLUTION: A measuring instrument for irradiating an X-ray to a measuring object from an X-ray source to detect a transmission X-ray transmitting the measuring object, and forming an image based on the transmission X-ray is provided, and control of the measuring instrument is corrected on the basis of position information of the X-ray source.

Description

  The present invention relates to a detection device, a detection method, and a structure manufacturing method.

  An X-ray apparatus that irradiates an object with X-rays and detects X-rays passing through the object is known as an apparatus that acquires information inside an object nondestructively, for example, as disclosed in the following patent document. It has been.

US Patent Application Publication No. 2009/0268869

  In the X-ray apparatus, when the temperature of the X-ray source that emits X-rays rises, the position of the X-ray source changes, and the detection accuracy may decrease.

  It is an object of the present invention to provide a detection device, a detection method, and a structure manufacturing method that can suppress a decrease in detection accuracy.

  In the first aspect, the X-ray source is provided with a measuring device that irradiates the measurement object with X-rays, detects the transmitted X-rays transmitted through the measurement object, and forms an image based on the transmission X-rays. A reference object that is irradiated with X-rays and a detector that detects transmitted X-rays that have passed through the reference object, the detector detects transmitted X-rays that have passed through the reference object, and a measurement device based on the detection A detection device is provided that compensates for the control.

  In the second aspect, the X-ray source irradiates the reference object with X-rays, detects transmitted X-rays transmitted through the reference object, and the X-ray source irradiates the measurement object with X-rays. A detection method is provided that includes detecting transmitted X-rays transmitted through the light source and correcting at least a part of detection of the measurement object based on detection of the reference object.

  According to the present invention, it is possible to suppress a decrease in detection accuracy.

The figure which shows an example of the detection apparatus which concerns on 1st Embodiment. Sectional drawing which shows an example of the X-ray source which concerns on embodiment. The fragmentary sectional view which shows an example of a reflection type X-ray source. The perspective view which shows an example of the reference | standard object which concerns on embodiment. The functional block diagram of the detection apparatus of embodiment. The flowchart which shows the detection method by a detection apparatus. The schematic diagram which shows an example of the calibration which concerns on embodiment. FIG. 4 is a schematic diagram showing an X-ray transmission image detected in a calibration operation. The schematic diagram which shows an example of the detection which concerns on embodiment. The schematic diagram which shows the X-ray transmission image detected in detection operation | movement. Explanatory drawing when the X-ray source moves in the Z-axis direction. Explanatory drawing when the X-ray source moves in the Z-axis direction. Explanatory drawing when the X-ray source moves in the Y-axis direction. Explanatory drawing when the X-ray source moves in the Y-axis direction. The figure which shows an example of the detection apparatus which concerns on 2nd Embodiment. The figure which shows a part of detection apparatus which concerns on 3rd Embodiment. The figure which shows a part of detection apparatus which concerns on 4th Embodiment. The figure which shows a part of detection apparatus which concerns on 5th Embodiment. The figure which shows a part of detection apparatus which concerns on 6th Embodiment. The figure which shows a part of detection apparatus which concerns on 7th Embodiment. The figure which shows a part of detection apparatus which concerns on 8th Embodiment. The figure which shows a part of detection apparatus which concerns on 9th Embodiment. The figure which shows a part of detection apparatus which concerns on 9th Embodiment. The figure which shows a part of detection apparatus which concerns on 10th Embodiment. The figure which shows a part of detection apparatus which concerns on 10th Embodiment. The figure which shows the grid member with which the detection apparatus which concerns on 10th Embodiment is equipped. Explanatory drawing of an effect | action of the detection apparatus which concerns on 10th Embodiment. Explanatory drawing of an effect | action of the detection apparatus which concerns on 10th Embodiment. The block block diagram of a structure manufacturing system. The flowchart which showed the flow of the process by a structure manufacturing system.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited thereto. In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ orthogonal coordinate system. A predetermined direction in the horizontal plane is defined as the Z-axis direction, a direction orthogonal to the Z-axis direction in the horizontal plane is defined as the X-axis direction, and a direction orthogonal to each of the Z-axis direction and the X-axis direction (that is, the vertical direction) is defined as the Y-axis direction. Further, the rotation (inclination) directions around the X axis, Y axis, and Z axis are the θX, θY, and θZ directions, respectively.

<First Embodiment>
A first embodiment will be described. FIG. 1 is a diagram illustrating an example of a detection device 100 according to the first embodiment.

  The detection apparatus 100 irradiates the measurement object S with X-ray XL, and detects transmitted X-rays transmitted through the measurement object S. X-rays are electromagnetic waves having a wavelength of about 1 pm to 30 nm, for example. The X-ray includes at least one of an ultra-soft X-ray of about 50 eV, a soft X-ray of about 0.1 to 2 keV, an X-ray of about 2 to 20 keV, and a hard X-ray of about 20 to 100 keV.

  In the present embodiment, the detection apparatus 100 irradiates the measurement object S with X-rays, detects transmitted X-rays transmitted through the measurement object S, and information inside the measurement object S (for example, internal structure). X-ray CT inspection device that acquires non-destructively. In the present embodiment, the measurement object S includes industrial parts such as mechanical parts and electronic parts. The X-ray CT inspection apparatus includes an industrial X-ray CT inspection apparatus that irradiates industrial parts with X-rays and inspects the industrial parts.

  In FIG. 1, the detection apparatus 100 includes a measurement apparatus 1 that irradiates a measurement object S with X-rays to detect transmitted X-rays, and a control apparatus 5 that controls the overall operation of the detection apparatus 100 including the measurement apparatus 1. I have. The measuring apparatus 1 includes an X-ray source 2 that emits X-ray XL, a stage apparatus 3 that can move while holding the measurement object S, and a measurement object S that is emitted from the X-ray source 2 and held on the stage apparatus 3. And a detector 4 for detecting transmitted X-rays transmitted through the.

  In the present embodiment, the X-ray source 2 and the detector 4 are installed so that the optical axis of the X-ray XL emitted from the X-ray source 2 toward the detector 4 is in the direction along the Z axis. The detection surface of the detector 4 is installed in parallel to a surface (XZ plane) orthogonal to the optical axis of the X-ray XL.

  In the present embodiment, the detection apparatus 100 includes a chamber member 6 that forms an internal space SP in which the X-ray XL emitted from the X-ray source 2 travels. In the present embodiment, the X-ray source 2, the stage device 3, and the detector 4 are disposed in the internal space SP.

  In the present embodiment, the chamber member 6 is disposed on the support surface FR. The support surface FR includes a floor surface of a factory or the like. The chamber member 6 is supported by a plurality of support members 6S. The chamber member 6 is disposed on the support surface FR via the support member 6S. In the present embodiment, the lower surface of the chamber member 6 and the support surface FR are separated by the support member 6S. That is, a space is formed between the lower surface of the chamber member 6 and the support surface FR. Note that at least a part of the lower surface of the chamber member 6 may be in contact with the support surface FR.

  In this embodiment, the chamber member 6 contains lead. The chamber member 6 suppresses the X-ray XL in the internal space SP from leaking into the external space RP of the chamber member 6.

  In the present embodiment, the detection apparatus 100 includes a member 6D that is attached to the chamber member 6 and has a lower thermal conductivity than the chamber member 6. In the present embodiment, the member 6D is disposed on the outer surface of the chamber member 6. The member 6D suppresses the temperature of the internal space SP from being affected by the temperature (temperature change) of the external space RP. That is, the member 6D functions as a heat insulating member that suppresses the heat of the external space RP from being transmitted to the internal space SP. The member 6D includes, for example, plastic. In the present embodiment, the member 6D includes, for example, polystyrene foam.

  The X-ray source 2 irradiates the measurement object S with X-ray XL. The X-ray source 2 includes an emission unit 8 that emits X-ray XL. The X-ray source 2 forms a point X-ray source. In the present embodiment, the emission unit 8 includes a point X-ray source (X-ray generation point). The X-ray source 2 irradiates the measurement object S with conical X-rays (so-called cone beam). The X-ray source 2 may be capable of adjusting the intensity of the emitted X-ray XL. When the intensity of the X-ray XL emitted from the X-ray source 2 is adjusted, it may be based on the X-ray absorption characteristics of the measurement object S or the like. Further, the shape of the X-rays emitted from the X-ray source 2 is not limited to a conical shape, and may be a fan-shaped X-ray (so-called fan beam), for example. Further, for example, a linear X-ray (so-called pencil beam) may be used.

  The injection unit 8 faces the + Z direction. In the present embodiment, at least a part of the X-ray XL emitted from the emission unit 8 travels in the + Z direction in the internal space SP.

  The stage apparatus 3 includes a stage 9 that can move while holding the measurement object S, and a drive system 10 that moves the stage 9.

  In the present embodiment, the stage 9 moves the table 12 having the holding unit 11 that holds the reference object 50 and the measurement object S, the first movable member 13 that supports the table 12 movably, and the first movable member 13. It has the 2nd movable member 14 which supports movably, and the 3rd movable member 15 which supports the 2nd movable member 14 so that a movement is possible.

  The table 12 can be rotated in a state where the measurement object S is held in the holding unit 11. The table 12 can be moved (rotated) in the θY direction. The first movable member 13 is movable in the X axis direction. When the first movable member 13 moves in the X-axis direction, the table 12 moves in the X-axis direction together with the first movable member 13. The second movable member 14 is movable in the Y axis direction. When the second movable member 14 moves in the Y-axis direction, the first movable member 13 and the table 12 move together with the second movable member 14 in the Y-axis direction. The third movable member 15 is movable in the Z-axis direction. When the third movable member 15 moves in the Z-axis direction, the second movable member 14, the first movable member 13, and the table 12 move in the Z-axis direction together with the third movable member 15.

  In the present embodiment, the drive system 10 moves the first movable member 13 in the X-axis direction on the first movable member 13 and the rotary drive device 16 that rotates the table 12 around the Y-axis and the second movable member 14. A first drive device 17 that moves the second movable member 14 in the Y-axis direction, and a third drive device 19 that moves the third movable member 15 in the Z-axis direction.

  The second drive device 18 includes a screw shaft 20B disposed on a nut included in the second movable member 14, and an actuator 20 that rotates the screw shaft 20B. The screw shaft 20B is supported by the bearings 21A and 21B so as to be rotatable around the Y axis. In the present embodiment, the screw shaft 20B is supported by the bearings 21A and 21B so that the axis of the screw shaft 20B and the Y axis are substantially parallel. In the present embodiment, a ball is disposed between the nut of the second movable member 14 and the screw shaft 20B. That is, the second drive device 18 includes a so-called ball screw drive mechanism.

  The third drive device 19 includes a screw shaft 23B disposed on a nut included in the third movable member 15, and an actuator 23 that rotates the screw shaft 23B. The screw shaft 23B is rotatably supported by bearings 24A and 24B. In the present embodiment, the screw shaft 23B is supported by the bearings 24A and 24B so that the axis of the screw shaft 23B and the Z-axis are substantially parallel. In the present embodiment, a ball is disposed between the nut included in the third movable member 15 and the screw shaft 23B. That is, the third drive device 19 includes a so-called ball screw drive mechanism.

  The third movable member 15 includes a guide mechanism 25 that guides the second movable member 14 in the Y-axis direction. The guide mechanism 25 includes rail-shaped guide members 25A and 25B extending in the Y-axis direction. At least a part of the second driving device 18 including the actuator 20 and the bearings 21 </ b> A and 21 </ b> B that support the screw shaft 20 </ b> B is supported by the third movable member 15. When the actuator 20 rotates the screw shaft 20 </ b> B, the second movable member 14 moves in the Y-axis direction while being guided by the guide mechanism 25.

  In the present embodiment, the detection device 100 includes a base member 26. The base member 26 is supported by the chamber member 6. In the present embodiment, the base member 26 is supported on the inner wall (inner surface) of the chamber member 6 via a support mechanism. The position of the base member 26 is fixed at a predetermined position.

  The base member 26 has a guide mechanism 27 that guides the third movable member 15 in the Z-axis direction. The guide mechanism 27 includes rail-shaped guide members 27A and 27B extending in the Z-axis direction. At least a part of the third drive device 19 including the actuator 23 and the bearings 24 </ b> A and 24 </ b> B that support the screw shaft 23 </ b> B is supported by the base member 26. When the actuator 23 rotates the screw shaft 23 </ b> B, the third movable member 15 moves in the Z-axis direction while being guided by the guide mechanism 27.

  Although not shown, in the present embodiment, the second movable member 14 has a guide mechanism that guides the first movable member 13 in the X-axis direction. The first driving device 17 includes a ball screw mechanism that can move the first movable member 13 in the X-axis direction. The rotation drive device 16 includes a motor that can move (rotate) the table 12 in the θY direction.

  In the present embodiment, the reference object 50 is installed on the table 12, and the measurement object S is installed on the reference object 50. The reference object 50 and the measurement object S held on the table 12 can be moved by the drive system 10 in four directions including the X axis, the Y axis, the Z axis, and the θY direction.

  In addition, the drive system 10 may move the measuring object S held on the table 12 in six directions including the X axis, the Y axis, the Z axis, the θX, the θY, and the θZ directions. In the present embodiment, the drive system 10 includes the ball screw drive mechanism, but may include a voice coil motor, for example. For example, the drive system 10 may include a linear motor or a planar motor.

  In the present embodiment, the stage 9 is movable in the internal space SP. The stage 9 is disposed on the + Z side of the injection unit 8. The stage 9 is movable in a space on the + Z side of the injection unit 8 in the internal space SP. At least a part of the stage 9 can face the injection unit 8. The stage 9 can arrange the held measurement object S at a position facing the injection unit 8. The stage 9 can arrange the measurement object S on a path through which the X-ray XL emitted from the emission unit 8 passes. The stage 9 can be disposed within the irradiation range of the X-ray XL emitted from the emission unit 8.

  In the present embodiment, the detection apparatus 100 includes a measurement system 28 that measures the position of the stage 9. In the present embodiment, the measurement system 28 includes an encoder system.

  The measurement system 28 includes a rotary encoder 29 that measures the amount of rotation of the table 12 (position in the θY direction), a linear encoder 30 that measures the position of the first movable member 13 in the X-axis direction, and a second movable in the Y-axis direction. The linear encoder 31 that measures the position of the member 14 and the linear encoder 32 that measures the position of the third movable member 15 in the Z-axis direction are provided.

  In the present embodiment, the rotary encoder 29 measures the amount of rotation of the table 12 relative to the first movable member 13. The linear encoder 30 measures the position of the first movable member 13 with respect to the second movable member 14 (position in the X-axis direction). The linear encoder 31 measures the position of the second movable member 14 with respect to the third movable member 15 (position in the Y-axis direction). The linear encoder 32 measures the position of the third movable member 15 with respect to the base member 26 (position in the Z-axis direction).

  The rotary encoder 29 includes, for example, a scale member 29A disposed on the first movable member 13 and an encoder head 29B disposed on the table 12 and detecting the scale of the scale member 29A. The scale member 29 </ b> A is fixed to the first movable member 13. The encoder head 29B is fixed to the table 12. The encoder head 29B can measure the amount of rotation of the table 12 relative to the scale member 29A (first movable member 13).

  The linear encoder 30 includes, for example, a scale member 30A disposed on the second movable member 14, and an encoder head 30B disposed on the first movable member 13 and detecting the scale of the scale member 30A. The scale member 30 </ b> A is fixed to the second movable member 14. The encoder head 30 </ b> B is fixed to the first movable member 13. The encoder head 30B can measure the position of the first movable member 13 with respect to the scale member 30A (second movable member 14).

  The linear encoder 31 includes a scale member 31A disposed on the third movable member 15 and an encoder head 31B disposed on the second movable member 14 and detecting the scale of the scale member 31A. The scale member 31 </ b> A is fixed to the third movable member 15. The encoder head 31 </ b> B is fixed to the second movable member 14. The encoder head 31B can measure the position of the second movable member 14 with respect to the scale member 31A (third movable member 15).

  The linear encoder 32 includes a scale member 32A disposed on the base member 26 and an encoder head 32B disposed on the third movable member 15 and detecting the scale of the scale member 32A. The scale member 32 </ b> A is fixed to the base member 26. The encoder head 32 </ b> B is fixed to the third movable member 15. The encoder head 32B can measure the position of the third movable member 15 with respect to the scale member 32A (base member 26).

  The detector 4 is disposed on the + Z side with respect to the X-ray source 2 and the stage 9 in the internal space SP. The position of the detector 4 is fixed at a predetermined position. The detector 4 may be movable. The stage 9 can move in the space between the X-ray source 2 and the detector 4 in the internal space SP.

  The detector 4 includes a scintillator unit 34 having an incident surface 33 on which an X-ray XL from the X-ray source 2 including transmitted X-rays transmitted through the measurement object S is incident, and a light receiving unit that receives light generated in the scintillator unit 34 35. The incident surface 33 of the detector 4 can face the measurement object S held on the stage 9.

  The scintillator unit 34 includes a scintillation substance that generates light having a wavelength different from that of the X-rays when it hits the X-rays. The light receiving unit 35 includes a photomultiplier tube. The photomultiplier tube includes a phototube that converts light energy into electrical energy by a photoelectric effect. The light receiving unit 35 amplifies the light generated in the scintillator unit 34, converts it into an electrical signal, and outputs it.

  The detector 4 has a plurality of scintillator sections 34. A plurality of scintillator sections 34 are arranged in the XY plane. The scintillator units 34 are arranged in an array. The detector 4 has a plurality of light receiving portions 35 so as to be connected to each of the plurality of scintillator portions 34. The detector 4 may directly convert incident X-rays into electric signals without converting them into light.

  FIG. 2 is a cross-sectional view showing an example of the X-ray source 2 according to the present embodiment. In FIG. 2, the X-ray source 2 includes a filament 39 that generates electrons, a target 40 that generates X-rays by collision of electrons or transmission of electrons, and a conductor member 41 that guides electrons to the target 40. . FIG. 2 shows a passage 43 through which electrons pass. In the present embodiment, the X-ray source 2 includes a housing 42 that houses at least a part of the conductor member 41. In the present embodiment, each of the filament 39, the conductor member 41, and the target 40 is accommodated in the housing 42.

  The filament 39 includes, for example, tungsten. When a current flows through the filament 39 and the filament 39 is heated by the current, electrons (thermoelectrons) are emitted from the filament 39. The filament 39 has a shape with a sharp tip, and electrons are emitted from the sharp tip portion. The shape of the filament 39 is wound in a coil shape.

  The target 40 includes, for example, tungsten, and generates X-rays by electron collision or electron transmission. In the present embodiment, the X-ray source 2 is a so-called transmission type. In the present embodiment, the target 40 generates X-rays by transmission of electrons.

  For example, when a voltage is applied between the target 40 and the filament 39 using the target 40 as an anode and the filament 39 as a cathode, the thermoelectrons jumping out of the filament 39 are accelerated toward the target (anode) 40, and the target 40 is irradiated. Thereby, X-rays are generated from the target 40.

  The conductor member 41 is disposed between at least a part of the periphery of the electron passage 43 from the filament 39 between the filament 39 and the target 40. The conductor member 41 includes, for example, an electron lens such as a focusing lens and an objective lens, or a polarizer, and guides electrons from the filament 39 to the target 40. The conductor member 41 causes electrons to collide with a partial region (X-ray focal point) of the target 40. The size (spot size) of the region where the electrons collide in the target 40 is sufficiently small. Thereby, a point X-ray source is substantially formed.

In this embodiment, a reflective X-ray source may be used. FIG. 3 is a partial sectional view showing an example of a reflective X-ray source.
The X-ray source 2R shown in FIG. 3 differs from the X-ray source 2 shown in FIG. 2 in the configuration of the tip portion, and the configuration of the filament 39, the conductor member 41, and the housing 42 is the same. In the X-ray source 2R, the target 40 is disposed at the tip of the housing 42 in a posture inclined with respect to the Y axis. In the present embodiment, the housing 42 is disposed in the internal space SP in a posture inclined by 45 ° with respect to a horizontal plane (XZ plane).

  In the X-ray source 2R, when electrons emitted from the filament 39 are irradiated onto the target 40, the target 40 generates X-rays XL due to electron collision. In the present embodiment, the irradiated surface of the target 40 is arranged at an angle smaller than 90 ° with respect to the electron path 43 from the filament 39. In the present embodiment, electrons from the filament 39 are incident on the target 40 obliquely. The generated X-ray XL is emitted to the + Z side. In the present embodiment, the optical axis of the X-ray XL emitted from the X-ray source 2R is parallel to the Z-axis direction.

FIG. 4 is a perspective view showing an example of the reference object 50 according to the present embodiment.
In the present embodiment, the reference object 50 is a cylindrical structure (top surface diameter R, height h). As a material of the reference object 50, for example, a metal having a high X-ray absorption rate such as tungsten or lead can be used. By increasing the X-ray absorption rate of the reference object 50, the detector 4 can acquire an image of the reference object 50 with a clear outline. The reference object 50 may be made of a material other than metal (resin, ceramics, etc.) as long as it can project at least the outline of the reference object 50 onto the detector 4. That is, it is only necessary that the X-ray absorption rate of the reference object 50 is different from the X-ray absorption rate around the reference object 50. Due to the different X-ray absorption rates, the contour of the reference object 50 can be projected.

  In the present embodiment, the reference object 50 is disposed on the table 12. Thereby, the reference object 50 is rotated with the rotation of the table 12. In the present embodiment, the center axis O of the reference object 50 is arranged in parallel with the rotation axis of the table 12. In the present embodiment, the shape is symmetrical with respect to the central axis O of the reference object 50. Thereby, when the table 12 is rotated, the transmission length of the X-ray XL in the reference object 50 does not change. Thereby, a projection image having a uniform contour can be obtained regardless of the rotation angle of the table 12.

  The shape of the reference object 50 is not limited to a cylindrical shape, and an arbitrary shape can be used. The shape is preferably a shape having an axis of symmetry. For example, the symmetry axis is a rotational symmetry axis. In this case, a reference object 50 having a spherical shape, a cone shape, or a truncated cone shape is used, and the rotational symmetry axis of the reference object 50 and the rotation axis of the table 12 are arranged in parallel. In this case, since the reference object 50 has a rotational symmetry axis, the distance through which the X-ray passes inside the reference object 50 does not change regardless of the rotation angle of the table 12. Further, for example, when the shape has an n-fold rotational symmetry axis, when it is rotated by (360 / n) ° and overlapped with itself, the distance through which the X-ray XL passes inside the reference object 50 is does not change.

  In the present embodiment, the center axis O of the reference object 50 is installed on the rotation axis of the table 12 in the stage 9. The reference object 50 is arranged on the table 12 so that the central axis O and the rotation axis of the table 12 coincide. Thereby, when the table 12 is rotated in the θY direction, the position of the reference object 50 projected on the detector 4 does not change regardless of the rotation angle in the θY direction. Thereby, the position shift analyzing means of the X-ray source 2 can be simplified.

  In the present embodiment, the reference object 50 is provided on the table 12, and the measurement object S is installed on the reference object 50. The reference object 50 may be moved to another position within a range that can be projected onto the detector 4. For example, the reference object 50 may be supported on the measurement object S installed on the table 12. For example, the reference object 50 may be detachably supported on the table 12. For example, when measuring a plurality of measurement objects S, the reference object 50 and the first measurement object S1 (one or a plurality of measurement objects selected from the plurality of measurement objects S) are detected simultaneously. After detection of the first measurement object S1, the reference object 50 on the table 12 is removed, and the second measurement object S2 (one or more measurement objects including the measurement object S other than the first measurement object S1) is obtained. The measurement may be performed using only the second measurement object S2. The result of the reference object 50 detected together with the first measurement object S1 may be used for detection of the second measurement object S2. Of course, the result detected only by the reference object 50 may be used.

  When the target 40 is irradiated with electrons in the X-ray source 2 (or X-ray source 2R) of the detection apparatus 100 of the present embodiment having the above-described configuration, a part of the energy of the electrons is X It becomes a line and some energy becomes heat. Due to the electron irradiation to the target 40, the temperature of the target 40, the space around the target 40, and the members disposed in the vicinity of the target 40 rise.

  When the temperature of the target 40 rises, for example, the target 40 may be thermally deformed, the housing 42 may be thermally deformed, or the relative position between the filament 39 and the target 40 may be changed. When the X-ray source 2 is thermally deformed, the relative position between the X-ray source 2 and the stage 9 may fluctuate, or the relative position between the X-ray source 2 and the detector 4 may fluctuate. As a result, the detection accuracy (inspection accuracy, measurement accuracy) of the detection apparatus 100 may be reduced.

  In the detection apparatus 100 of the present embodiment, the reference object 50 is arranged together with the measurement object S on the stage 9, and the X-ray source 2 is relative to the stage 9 and the detector 4 based on the transmitted X-ray image of the reference object 50. Detect position fluctuations. Then, by controlling the operation of the measuring apparatus 1 based on the information related to the position variation of the X-ray source 2, a decrease in detection accuracy due to the position variation of the X-ray source 2 is suppressed.

Next, an example of the operation of the detection apparatus according to this embodiment will be described.
FIG. 5 is a functional block diagram of the detection apparatus of the present embodiment. FIG. 6 is a flowchart showing a detection method by the detection apparatus 100.

  As shown in FIG. 5, the control device 5 provided in the detection device 100 of the present embodiment includes a measurement control device 51, a work memory 52, an image analysis device 53, a storage device 54, and an image correction device 55. A reconstructed image calculation device 56. The above devices are connected to each other via a system bus 59.

  The measurement control device 51 is connected to the measurement device 1. The measurement control device 51 controls the X-ray source 2, the stage device 3, and the detector 4 that constitute the measurement device 1, and acquires a transmitted X-ray image (X-ray image data) that has passed through the measurement object S.

  The work memory 52 is used as a work area when the control device 5 controls the measuring device 1. In the work memory 52, in addition to the X-ray transmission image acquired by the measurement control device 51, analysis data created by the image analysis device 53, a correction image created by the image correction device 55, and a reconstructed image calculation device 56 The reconstructed image created by is temporarily stored. The working memory 52 includes a readable / writable storage medium such as a RAM (Random Access Memory).

  The image analysis device 53 analyzes the X-ray transmission image acquired by the measurement control device 51 and creates analysis data. The analysis data is, for example, information related to the positions and dimensions of the measurement object S and the reference object 50.

  The storage device 54 includes, for example, a ROM (Read Only Memory), and predetermined measurement control conditions, image analysis conditions, image correction conditions, and reconstructed image calculation conditions for controlling the measurement apparatus 1. , Etc. are stored. The storage device 54 may record an X-ray transmission image obtained by measurement, a correction image obtained by image correction processing, analysis data created by the image analysis device 53, and the like. In this case, the storage device 54 includes a readable / writable storage medium such as a flash memory.

The image correction device 55 corrects the X-ray transmission image based on the analysis data created by the image analysis device 53 and creates a corrected image.
The reconstructed image calculation device 56 reconstructs the X-ray transmission image obtained by the measurement control device 51 by superimposing the X-ray transmission image acquired by the measurement control device 51 while using the corrected image created by the image correction device 55 as necessary. Calculate 3D data of internal structure.

A specific operation will be described below.
In the present embodiment, as shown in the flowchart of FIG. 6, the calibration of the detection apparatus 100 (step SA1), the irradiation of the measurement object S and the reference object 50 with the X-ray XL, and the measurement object S and the reference object 50 are performed. Detection of transmitted X-rays that have passed (step SA2) and calculation of the internal structure of the measuring object S (step SA3) are performed.

Calibration (step SA1) will be described.
FIG. 7 is a schematic diagram illustrating an example of calibration according to the present embodiment. FIG. 8 is a schematic diagram showing an X-ray transmission image PV detected by the detector 4 in the calibration operation.

  As shown in FIG. 7, only the reference object 50 is held in the table 12 in the calibration. In the present embodiment, the reference object 50 is a cylindrical structure made of tungsten, for example. In this embodiment, the columnar structure is made of tungsten and does not have a cavity inside. The external shape (size) of the reference object 50 is known. The shape of the reference object 50 is not limited to a cylindrical shape.

  The measurement control device 51 controls the drive system 10 while measuring the position of the stage 9 by the measurement system 28, and adjusts the position of the stage 9 holding the reference object 50. The measurement control device 51 adjusts the position of the stage 9 so that the reference object 50 is arranged at the same position as when the measurement object S is detected (step SA2).

  The measurement control device 51 supplies a current to the filament 39 in order to emit X-rays from the X-ray source 2. Thereby, the filament 39 is heated and electrons are emitted from the filament 39. The electrons emitted from the filament 39 are applied to the target 40. X-rays are generated from the target 40 irradiated with electrons.

  X-ray XL generated from the X-ray source 2 is applied to the reference object 50. The X-ray XL irradiated on the reference object 50 passes through the reference object 50. The transmitted X-ray that has passed through the reference object 50 is incident on the incident surface 33 of the detector 4. The detector 4 detects transmitted X-rays that have passed through the reference object 50. The detector 4 detects an X-ray transmission image PV (see FIG. 8) including the reference object 50 obtained based on the transmission X-rays transmitted through the reference object 50.

  The X-ray transmission image PV shown in FIG. 8 includes a projection image 12 a that is a part of the table 12 and a projection image 50 a of the reference object 50. An X-ray transmission image PV that is a detection result of the detector 4 is output to the measurement control device 51. The measurement control device 51 stores the acquired X-ray transmission image PV including the reference object 50 in the work memory 52.

  The measurement control device 51 performs the above X-ray transmission image acquisition and recording operation over the entire circumference of the reference object 50 while rotating the table 12. As a result, the work memory 52 stores an X-ray transmission image PV over the entire circumference of the reference object 50. In the present embodiment, the above X-ray transmission image acquisition and recording operations are performed over 360 ° in the θY direction. Note that it is not necessary to execute 360 ° in the θY direction. For example, only the range of 180 ° may be executed.

  In the present embodiment, the image analysis device 53 analyzes the X-ray transmission image PV including the projection image of the reference object 50 stored in the work memory 52. The image analysis device 53 acquires the position and dimensions of the projection image 50a of the reference object 50 included in the X-ray transmission image PV, and stores these positions and dimensions in the work memory 52 as analysis data.

  Note that the calibration operation described above may not be performed when analysis data relating to the position and dimensions of the reference object 50 is known. In the present embodiment, a cylindrical structure is used as the reference object 50 and the center axis O is arranged so as to coincide with the rotation axis of the table 12. Therefore, the projection image 50 a obtained when the table 12 is rotated has a constant position and size regardless of the rotation angle of the table 12. As described above, when the projected image 50a does not change, the number of X-ray transmission images PV acquired in the calibration may be reduced to about 1 to several.

After the calibration is completed, the measurement object S is detected (step SA2).
FIG. 9 is a schematic diagram illustrating an example of detection according to the present embodiment. FIG. 10 is a schematic diagram showing an X-ray transmission image PV detected by the detector 4 in the detection operation.

  As shown in FIG. 9, the measurement object S is placed on the reference object 50 on the table 12 in the detection. The measurement control device 51 controls the stage device 3 to place the measurement object S at the measurement position between the X-ray source 2 and the detector 4. That is, the measurement control device 51 controls the drive system 10 while measuring the position of the stage 9 with the measurement system 28, and adjusts the position of the stage 9 holding the reference object 50 and the measurement object S.

  The measurement control device 51 supplies a current to the filament 39 in order to emit X-rays from the X-ray source 2. Thereby, the filament 39 is heated and electrons are emitted from the filament 39. The electrons emitted from the filament 39 are applied to the target 40. Thereby, X-rays are generated from the target 40.

  At least part of the X-ray XL generated from the X-ray source 2 is irradiated to the measurement object S and the reference object 50. At least a part of the X-ray XL irradiated to the measurement object S and the reference object 50 passes through the measurement object S and the reference object 50. The transmitted X-rays that have passed through the measuring object S and the reference object 50 enter the incident surface 33 of the detector 4. The detector 4 detects transmitted X-rays that have passed through the measurement object S and the reference object 50. The detector 4 detects an X-ray transmission image PV (see FIG. 10) including the measurement object S and the reference object 50 obtained based on the transmission X-rays transmitted through the measurement object S and the reference object 50.

  An X-ray transmission image PV shown in FIG. 10 includes a partial projection image 12b of the table 12, a projection image 50b of the reference object 50, and a projection image Sb of the measurement object S. An X-ray transmission image PV that is a detection result of the detector 4 is output to the measurement control device 51. The measurement control device 51 stores the acquired X-ray transmission image PV including the measured object S and the reference object 50 in the work memory 52.

  In the present embodiment, the measurement control device 51 performs measurement while changing the positions of the measurement object S and the reference object 50 in order to change the irradiation region of the X-ray XL from the X-ray source 2 on the measurement object S and the reference object 50. The object S and the reference object 50 are irradiated with the X-ray XL from the X-ray source 2. The measurement control device 51 irradiates the measurement object S with the X-ray XL from the X-ray source 2 every time the position of the measurement object S is changed, and transmits the transmitted X-rays transmitted through the measurement object S with the detector 4. To detect.

  In the present embodiment, the measurement control device 51 rotates the table 12 holding the measurement object S and the reference object 50 to change the positions of the measurement object S and the reference object 50 with respect to the X-ray source 2, thereby measuring the measurement object S. And the irradiation area of the X-ray XL from the X-ray source 2 in the reference object 50 is changed.

  That is, in the present embodiment, the control device 5 irradiates the measurement object S with the X-ray XL while rotating the table 12 holding the measurement object S. Transmitted X-rays (X-ray transmission data) that have passed through the measurement object S at each position (each rotation angle) of the table 12 are detected by the detector 4. The detector 4 acquires an X-ray transmission image PV including a projection image of the measurement object S and the reference object 50 at each position.

  In the present embodiment, the image analysis device 53 analyzes the X-ray transmission image PV including the projection image of the measurement object S and the reference object 50 stored in the work memory 52. The image analysis device 53 acquires the position and size of the projection image 50b of the reference object 50 included in the X-ray transmission image PV. The image analysis device 53 stores the acquired position and size of the projection image 50b in the work memory 52 as analysis data.

  The image correction device 55 is based on the analysis data (position, dimensions) of the projection image 50b acquired at the time of measuring the measurement object S and the analysis data (position, dimensions) of the projection image 50a acquired at the time of calibration. The position information of the X-ray source 2 is acquired. The position information may be information related to the relative positions of the X-ray source 2, the reference object 50, and the detector 4, or may be information related to the relative positions of the X-ray source 2 at the time of calibration. Information on the current position of the X-ray source 2 at the SP may be used.

  In the present embodiment, the image correction device 55 corrects the detection result (X-ray transmission image PV) of transmitted X-rays transmitted through the measurement object S based on the position information. Hereinafter, this image correction operation will be described with reference to FIGS.

11 and 12 are explanatory diagrams when the X-ray source 2 moves in the Z-axis direction.
In FIG. 11, the projected image 50a of the reference object 50 at the time of calibration, the projected image 12a of the table 12, the projected image Sb of the measured object S when the measured object S is measured, the projected image 50b of the reference object 50, and A projected image 12b of the table 12 is shown.

  In FIG. 11, comparing the projected image 50a and the projected image 50b, the projected image 50b has a larger dimension in the X-axis direction and a dimension in the Y-axis direction than the projected image 50a. In this case, as shown in FIG. 12, the target 40 (injection part 8) is moving in the + Z direction (direction approaching the measurement object S) as compared with the time of calibration.

  The movement of the target 40 shown in FIG. 12 is performed in the Z-axis direction at the portion of the housing 42 where the target 40 is installed when the temperature of the target 40 rises due to electron irradiation in the X-ray source 2 shown in FIG. Thermal expansion EC occurs, thereby causing the position of the target 40 to move in the + Z direction. The movement distance ΔZ of the target 40 can be calculated based on the projection image 50b and the projection image 50a.

  When the relatively enlarged projection image 50b shown in FIG. 11 is detected, the image correction device 55 corrects the X-ray transmission image PV so as to coincide with the projection image 50a obtained at the time of calibration. .

  For example, the image correction device 55 has a projection image 50b obtained in the measurement of the measuring object S having a dimension (diameter) in the X-axis direction of R1 and a dimension (height) in the Y-axis direction of h1. The X-ray transmission image PV is reduced and corrected so that the diameter R1 coincides with the diameter R and the height h in the projection image 50a. As a result, a corrected image including the projection image Sa of the measuring object S shown in FIG. 11 is obtained. The image correction device 55 stores the created corrected image in the work memory 52.

On the other hand, FIG.13 and FIG.14 is explanatory drawing when the X-ray source 2 moves to the Y-axis direction.
FIG. 13 shows a projected image 50a of the reference object 50 at the time of calibration, a projected image 12a of the table 12, a projected image Sb of the measured object S when the measured object S is measured, a projected image 50b of the reference object 50, and A projected image 12b of the table 12 is shown.

  In FIG. 13, comparing the projected image 50a and the projected image 50b, the projected image 50b moves in the + Y direction (upward in the vertical direction) with respect to the projected image 50a, and the dimensions in the X-axis direction and the Y-axis direction are the same. It is. In this case, as shown in FIG. 14, the target 40 (injection unit 8) moves in the −Y direction (downward in the vertical direction) as compared with the calibration. The movement distance ΔY of the target 40 can be calculated based on the projection image 50b and the projection image 50a.

For example, in the X-ray source 2R shown in FIG. 3, when the temperature of the target 40 rises due to electron irradiation, the target 40 shown in FIG. The thermal expansion EC occurs in the oblique direction, and the position of the target 40 is moved in the Y-axis direction.
When the thermal expansion EC in the oblique direction shown in FIG. 3 occurs, the target 40 actually moves in the + Z direction, so the movement of the target 40 shown in FIG. 12 and the movement of the target 40 shown in FIG. Occur in a complex manner.

  When the projection image 50b whose position is relatively moved as shown in FIG. 13 is detected, the image correction device 55 displays the X-ray transmission image PV so as to coincide with the projection image 50a obtained at the time of calibration. to correct.

  For example, the image correction device 55 translates the X-ray transmission image PV in the −Y direction so that the position (coordinates) of the projection image 50b obtained in the measurement of the measurement object S matches the position of the projection image 50a. To correct. As a result, a corrected image including the projection image Sa of the measuring object S shown in FIG. 13 is obtained. The image correction device 55 stores the created corrected image in the work memory 52.

  Note that when the position and size of the projection image 50b included in the X-ray transmission image PV and the position and size of the projection image 50a match, image correction processing by the image correction device 55 is not necessary.

  The reconstructed image computation device 56 performs computation based on a plurality of X-ray transmission images and correction images obtained by irradiating the measurement object S with X-ray XL while rotating the measurement object S, and the measurement object S The three-dimensional data (three-dimensional image) of the internal structure of the measurement object S is acquired by reconstructing the tomographic image (step SA3). Thereby, the internal structure of the measuring object S is calculated. Examples of the reconstruction method of the tomographic image of the measurement object include a back projection method, a filter-corrected back projection method, and a successive approximation method. The back projection method and the filtered back projection method are described in, for example, US Patent Application Publication No. 2002/0154728. The successive approximation method is described, for example, in US Patent Application Publication No. 2010/0220908.

  In the present embodiment, a corrected image is created by the image correction device 55 and stored in the work memory 52. Therefore, the reconstructed image calculation device 56 calculates the internal structure of the measurement object using the correction image created by the image correction device 55 together with the X-ray transmission image detected by the detector 4. When a plurality of X-ray transmission images with different positions and dimensions of the projection image are used at each position (each rotation angle) of the measurement object S, the internal structure of the measurement object S is obtained in the reconstructed image calculation device 56. There is a possibility that a false image is generated in the data. The false image is, for example, an image that does not originate from the internal structure and is generated at the stage of creating data of the internal structure of the measurement object S from a plurality of X-ray transmission images by a reconstructed image calculation device. Therefore, in the present embodiment, the reconstructed image calculation device 56 uses the X-ray transmission image of the measurement object S acquired at each position (each rotation angle) of the measurement object S and the position variation of the X-ray source 2. A three-dimensional image of the measuring object S is created based on the corrected image obtained by correcting the positional and dimensional deviation of the projected image.

As described above, according to the present embodiment, the position information of the X-ray sources 2 and 2R is acquired based on the projection image of the reference object 50, and the X-ray transmission image is corrected based on the position information. did. Thereby, even when the positions of the X-ray sources 2 and 2R move due to thermal deformation or the like, the X-ray transmission image can be corrected appropriately. Then, by forming a reconstructed image using the corrected image (corrected image), it is possible to suppress a false image due to the positional deviation of the X-ray source 2.
Therefore, according to the present embodiment, a decrease in detection accuracy of the detection apparatus 100 can be suppressed. For example, the detection apparatus 100 can accurately acquire information related to the internal structure of the measurement object S.

  In the present embodiment, the image analysis device 53 analyzes all X-ray transmission images acquired in the measurement of the measurement object S. However, the image analysis device 53 may analyze only a part of the X-ray transmission images. Good. For example, when the X-ray transmission image is analyzed every 100 sheets (first sheet, 101st sheet, 201st sheet,...) From the start of measurement, and the position variation of the X-ray source 2 is detected, the subsequent X-rays are detected. You may make it analyze all the line transmission images.

  In the present embodiment, the irradiation region of the X-ray XL with respect to the measurement object S is changed to obtain a plurality of images of the measurement object S, and the internal structure of the measurement object S is obtained based on the plurality of images (images). However, it is also possible to acquire information related to the internal structure of the measurement object S based on one image (image). That is, two-dimensional data of the internal structure of the measurement object S may be acquired without irradiating the measurement object S with X-ray XL from different angles.

In the present embodiment, the control device 5 includes a measurement control device 51 that controls the measurement device 1 and devices (image analysis device 53, image correction device 55, reconstructed image calculation device 56) that execute various arithmetic processes. Although it was set as the structure provided with both, these are good also as a separate apparatus. That is, calculation of image analysis, image correction, and image reconstruction may be executed using an arithmetic device (computer) with high processing capability.
In the present embodiment, the case where the X-ray source 2 moves in the Y-axis direction is taken as an example. However, the X-ray source may move in at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction. Absent. Further, the moving direction may change with the passage of time.

Second Embodiment
Next, a second embodiment will be described. In the following description, the same or equivalent components as those in the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

FIG. 15 is a diagram illustrating an example of the detection apparatus 100 according to the second embodiment.
In FIG. 15, the detection apparatus 100 includes a moving mechanism 45 connected to the X-ray source 2 and a moving mechanism 46 connected to the detector 4.

  The moving mechanism 45 supports the X-ray source 2 so as to be movable. The moving mechanism 45 includes a driving device that moves the X-ray source 2 at least in the Z-axis direction (a direction that moves forward and backward with respect to the stage 9 and the detector 4). When the X-ray source 2 moves in the vertical direction (Y-axis direction), the moving mechanism 45 includes a drive device that moves the X-ray source 2 in the Y-axis direction. The moving mechanism 45 may be a mechanism that moves the X-ray source 2 in the X-axis direction, the Y-axis direction, the Z-axis direction, and the θY direction, similarly to the stage 9.

  The moving mechanism 46 supports the detector 4 so as to be movable. The moving mechanism 46 includes a drive device that moves the detector 4 at least in the Z-axis direction (a direction in which the detector 4 advances and retreats with respect to the X-ray source 2 and the stage 9). When the X-ray source 2 moves in the vertical direction (Y-axis direction), the moving mechanism 46 includes a drive device that moves the detector 4 in the Y-axis direction. The moving mechanism 46 may be a mechanism that moves the detector 4 in the X-axis direction, the Y-axis direction, the Z-axis direction, and the θY direction, similarly to the stage 9.

  In the detection apparatus 100 of the present embodiment, when the position variation of the X-ray source 2 occurs, the movement mechanism 45, the stage apparatus 3, or the movement mechanism 46 is operated to correct the operation of the measurement apparatus 1.

  For example, as shown in FIG. 12, when the target 40 moves in the Z-axis direction due to the thermal expansion of the X-ray source 2, the reference object 50 is enlarged in the X-ray transmission image PV as shown in FIG. Observed. The moving distance ΔZ of the target 40 can be calculated from the magnification of the projection image 50b with respect to the projection image 50a. Then, the control device 5 controls the moving mechanism 45 to move the X-ray source 2 by the distance ΔZ in the −Z direction. Thereby, the position variation of the X-ray source 2 can be corrected, and an accurate X-ray transmission image can be acquired.

Alternatively, the control device 5 may control the moving mechanism 46 to move the detector 4 in the −Z direction (direction approaching the X-ray source 2). As a result, the projected image of the measuring object S projected on the detector 4 is reduced, so that the change in the projected image due to the position variation of the X-ray source 2 can be corrected.
Alternatively, the measuring device S may be moved in the + Z direction (a direction away from the X-ray source 2) by the control device 5 controlling the stage device 3. As a result, the projected image of the measuring object S projected on the detector 4 is reduced, so that the change in the projected image due to the position variation of the X-ray source 2 can be corrected.

  Further, even when the X-ray source 2 shown in FIG. 14 moves in the Y-axis direction, the X-ray source 2 and the measurement are controlled by controlling the moving mechanism 45, the stage device 3, and the moving mechanism 46 in the same manner as described above. By moving at least one of the object S and the detector 4 in the Y-axis direction, it is possible to correct the change in the projected image due to the position variation of the X-ray source 2.

  Moreover, you may use combining the above-mentioned position correction operation | movement of the X-ray source 2, the measured object S, and the detector 4. FIG. For example, an operation of controlling the stage device 3 to move the measurement object S away from the X-ray source 2 and an operation of controlling the moving mechanism 46 to bring the detector 4 closer to the X-ray source 2 may be performed.

  As described above, also in the present embodiment, it is possible to correct a change in the projected image caused by the position variation of the X-ray source 2 and to suppress generation of a false image.

In the present embodiment, the projection image of the reference object 50 may be analyzed only for a part of the plurality of X-ray transmission images obtained in the measurement of the measurement object S. Then, the position correction operation of the X-ray source 2, the measurement object S, or the detector 4 may be executed only when the position variation of the X-ray source 2 is detected.
In the present embodiment, the moving mechanism 45 supports the X-ray source 2 so as to be movable. However, the detector 4 or the measuring object S may be moved.

<Third Embodiment>
Next, a third embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

FIG. 16 is a diagram illustrating a part of the detection apparatus according to the third embodiment.
FIG. 16 shows a table 12 of the detection apparatus according to the third embodiment. A measuring object S is installed at the center of the holding unit 11 on the table 12. Three reference objects 50 </ b> A are arranged on the holding unit 11 around the measurement object S. In the present embodiment, unlike the above-described embodiment, a plurality of reference objects 50A are arranged. In the present embodiment, the number of reference objects 50A is three. In the present embodiment, the positions of the plurality of reference objects 50 </ b> A move as the table 12 rotates. Therefore, the control device 5 acquires projection images of a plurality of reference objects 50A in calibration. The image analysis device 53 analyzes the position and size of the projected image of the reference object 50A, and stores the created analysis data in the work memory 52.

  In the measurement of the measurement object S, the measurement control device 51 acquires an X-ray transmission image including a projection image of the measurement object S and a projection image of the reference object 50A. Also for this X-ray transmission image, the image analysis device 53 analyzes the position and size of the projection image of the reference object 50 </ b> A and stores the created analysis data in the work memory 52.

  The image correction device 55 corrects the X-ray transmission image acquired in the measurement based on the analysis data created in the measurement and calibration, and stores the created corrected image in the work memory 52. The reconstructed image calculation device 56 calculates the internal structure of the measurement object using the correction image created by the image correction device 55 together with the X-ray transmission image detected by the detector 4.

  In the present embodiment, the positions of the three reference objects 50A are specified. Thereby, the normal direction of the surface including the three reference objects 50A can be clarified. Thereby, the position fluctuation | variation of the X-ray source 2 can be clarified. The three reference objects 50A are arranged apart from each other by a predetermined distance, and form a surface including them. On the other hand, the volume of the reference object can be reduced by using a plurality of reference objects 50A as compared with the case where the normal direction of the surface is clarified with one reference object 50A having a predetermined interval length. Can do. For example, when the density of the reference object is high, the volume of the reference object can be reduced, so that the table 12 can be reduced in weight.

In the present embodiment, three reference objects 50A are arranged on the table 12, but the number of reference objects 50A may be two or less, or four or more. The arrangement of the reference object 50A is also arbitrary.
In the present embodiment, as in the second embodiment, the position variation of the X-ray source 2 can be achieved by moving any one or more of the X-ray source 2, the measurement object S, and the detector 4. It is also possible to correct the change in the projected image due to the above.

<Fourth embodiment>
Next, a fourth embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

FIG. 17 is a diagram illustrating a part of the detection apparatus according to the fourth embodiment.
FIG. 17 shows a table 12 of the detection apparatus according to the fourth embodiment. A measuring object S is installed at the center of the holding unit 11 on the table 12. Three reference objects 50 </ b> B are embedded in the table 12.

  In the present embodiment, the table 12 is configured to transmit X-rays to such an extent that the detector 4 can detect at least the projected image of the reference object 50B. For example, the table 12 is formed using a resin material that transmits X-rays. Alternatively, if the table 12 is hollow, it may be formed of a metal that easily absorbs X-rays.

  The measuring operation of the measuring object S in the detection device of the present embodiment is the same as that of the third embodiment. That is, the analysis data of the projection image of the reference object 50B is acquired at the time of calibration, and is used together with the analysis data of the projection image of the reference object 50B acquired together with the projection image of the measurement object S. Correct the image. Then, the internal structure of the measurement object S is calculated using the X-ray transmission image and the correction image.

  As described above, also in the present embodiment, it is possible to correct a change in the projected image caused by the position variation of the X-ray source 2 and to suppress generation of a false image.

In the present embodiment, three reference objects 50B are embedded in the table 12, but the number of reference objects 50B may be two or less, or four or more. The arrangement of the reference object 50B in the table 12 is also arbitrary.
In the present embodiment, as in the second embodiment, the position variation of the X-ray source 2 can be achieved by moving any one or more of the X-ray source 2, the measurement object S, and the detector 4. It is also possible to correct the change in the projected image due to the above.

<Fifth Embodiment>
Next, a fifth embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

FIG. 18 is a diagram illustrating a part of the detection apparatus according to the fifth embodiment.
FIG. 18 shows a table 12 of the detection apparatus according to the fifth embodiment. A measuring object S is installed at the center of the holding unit 11 on the table 12. A ring-shaped reference object 50 </ b> C is provided on the side surface of the table 12. The reference object 50C has a circular upper end surface and a lower end surface arranged in parallel to the XZ plane, and the positions of the upper end surface and the lower end surface in the Y-axis direction do not change even when the table 12 rotates.

  In the present embodiment, the table 12 is configured to transmit X-rays to such an extent that the detector 4 can detect at least the projected image of the reference object 50C. For example, the table 12 is formed using a resin material that transmits X-rays. Alternatively, if the table 12 is hollow, it may be formed of a metal that easily absorbs X-rays.

  The measuring operation of the measuring object S in the detection device of the present embodiment is the same as that of the third embodiment. That is, the analysis data of the projection image of the reference object 50C is acquired at the time of calibration, and is used together with the analysis data of the projection image of the reference object 50C acquired together with the projection image of the measurement object S. Correct the image. Then, the internal structure of the measurement object S is calculated using the X-ray transmission image and the correction image.

  As described above, also in the present embodiment, it is possible to correct a change in the projected image caused by the position variation of the X-ray source 2 and to suppress generation of a false image.

  In the present embodiment, as in the second embodiment, the position variation of the X-ray source 2 can be achieved by moving any one or more of the X-ray source 2, the measurement object S, and the detector 4. It is also possible to correct the change in the projected image due to the above.

<Sixth Embodiment>
Next, a sixth embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

FIG. 19 is a diagram illustrating a part of the detection apparatus according to the sixth embodiment.
FIG. 19 shows a table 12 of the detection apparatus according to the sixth embodiment. A measuring object S is installed at the center of the holding unit 11 on the table 12. The table 12 is formed with three conduits (reference objects) 50D having a circular cross section that penetrate the table 12 in the vertical direction (Y-axis direction).

  The conduit 50 </ b> D may not penetrate the table 12. That is, only the upper end side or the lower end side of the conduit 50 </ b> D may be opened, or may be formed only inside the table 12. A substance different from the material of the table 12 may be disposed inside the conduit 50D.

  In the present embodiment, the table 12 is configured to transmit X-rays to such an extent that the detector 4 can detect at least the projection image of the conduit 50D. For example, the table 12 is formed using a metal material having a transmittance that does not block irradiated X-rays.

  The measuring operation of the measuring object S in the detection device of the present embodiment is the same as that of the third embodiment. That is, the analysis data of the projection image of the conduit 50D is acquired at the time of calibration, and the X-ray transmission image of the measurement object S is used together with the analysis data of the projection image of the conduit 50D acquired together with the projection image of the measurement object S. to correct. Then, the internal structure of the measurement object S is calculated using the X-ray transmission image and the correction image.

As described above, also in the present embodiment, it is possible to correct a change in the projected image caused by the position variation of the X-ray source 2 and to suppress generation of a false image.
In the present embodiment, as in the second embodiment, the position variation of the X-ray source 2 can be achieved by moving any one or more of the X-ray source 2, the measurement object S, and the detector 4. It is also possible to correct the change in the projected image due to the above.

<Seventh embodiment>
Next, a seventh embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

FIG. 20 is a diagram illustrating a part of the detection apparatus according to the seventh embodiment.
FIG. 20 shows the X-ray source 2, the table 12, and the detector 4 of the detection apparatus according to the seventh embodiment. A measurement object S is installed in the center of the table 12.
In the present embodiment, the reference objects 50E, 50F, or 50G can be arranged in the X-ray XL irradiation range outside the table 12. The reference objects 50E, 50F, and 50G are all cylindrical structures. The shapes of the reference objects 50E, 50F, and 50G are not limited to a cylindrical shape, and any shape can be used. Any one of the reference objects 50E, 50F, and 50G may be selectively used, or a plurality of kinds may be used in combination. Further, the shape of the reference object may be determined based on the range of the X-ray XL radiated from the X-ray source 2 that extends in the X-axis direction and the Y-axis direction. For example, in the present embodiment, at a predetermined position in the Z-axis direction of the emitted X-ray XL, it expands in a circular shape. Therefore, the reference object may correspond to the circular shape. A semicircular reference object may be inserted from a different direction (for example, the Y-axis direction) at a predetermined position in the Z-axis direction of the X-ray XL to form a circular shape.

Two reference objects 50 </ b> E are provided between the X-ray source 2 and the table 12. In FIG. 20, the X-ray XL radiated from the X-ray source 2 is irradiated to a range extending in the X-axis direction and the Y-axis direction. In the present embodiment, the reference object 50E is arranged side by side in the X-axis direction so as to be symmetric with respect to the irradiation range of the X-ray XL. The two reference objects 50E are arranged near the ends in the X-axis direction of the irradiation range of the X-ray XL. Each reference object 50E is connected to an insertion / removal mechanism 60 that inserts / removes the reference object 50E into / from the X-ray XL irradiation range.
The insertion / removal mechanism 60 inserts / removes the reference object 50E with respect to the irradiation range of the X-ray XL by moving the reference object 50E in the X-axis direction or the Y-axis direction, for example. Alternatively, the insertion / removal mechanism 60 may rotate the reference object 50E.

  Two reference objects 50 </ b> F are provided in the vicinity of the table 12. In the present embodiment, the reference object 50F is arranged side by side in the X-axis direction so as to be symmetric with respect to the optical axis of the X-ray XL. The two reference objects 50F are arranged near the ends in the X-axis direction of the irradiation range of the X-ray XL. An insertion / removal mechanism 60 for inserting / removing the reference object 50F with respect to the X-ray XL irradiation range may be connected.

  Two reference objects 50 </ b> G are provided between the table 12 and the detector 4. In the present embodiment, the reference object 50G is arranged side by side in the X-axis direction so as to be symmetric with respect to the optical axis of the X-ray XL. The two reference objects 50G are arranged in the vicinity of the end in the X-axis direction of the irradiation range of the X-ray XL. An insertion / removal mechanism 60 for inserting / removing the reference object 50G with respect to the irradiation range of the X-ray XL may be connected. Further, the reference object 50G may be arranged side by side in the Y-axis direction. Of course, the reference object 50G may be arranged side by side in the Y-axis direction and the X-axis direction.

  In the present embodiment, the positions of the reference objects 50E, 50F, and 50G do not move even when the table 12 rotates. Therefore, the control device 5 acquires only one projection image of the reference objects 50E, 50F, and 50G in the calibration. The image analysis device 53 analyzes the positions and dimensions of the projected images of the reference objects 50E, 50F, and 50G, and stores the created analysis data in the work memory 52.

  In the measurement of the measurement object S, the measurement control device 51 acquires an X-ray transmission image including the projection image of the measurement object S and the projection images of the reference objects 50E, 50F, and 50G. Also for this X-ray transmission image, the image analysis device 53 analyzes the positions and dimensions of the projected images of the reference objects 50E, 50F, and 50G, and stores the created analysis data in the work memory 52.

  The image correction device 55 corrects the X-ray transmission image acquired in the measurement based on the analysis data created in the measurement and calibration, and stores the created corrected image in the work memory 52. The reconstructed image calculation device 56 calculates the internal structure of the measurement object using the correction image created by the image correction device 55 together with the X-ray transmission image detected by the detector 4.

  As described above, also in the present embodiment, it is possible to correct a change in the projected image caused by the position variation of the X-ray source 2 and to suppress generation of a false image.

In the present embodiment, since the two reference objects 50E are arranged side by side in the X-axis direction, the distance between the two reference objects 50E is used as analysis data, not the size of the reference object 50E itself. Alternatively, it may be used in combination with the dimension of the reference object 50E itself. The same applies to the case where the reference objects 50F and 50G are used.
In the present embodiment, as in the second embodiment, the position variation of the X-ray source 2 can be achieved by moving any one or more of the X-ray source 2, the measurement object S, and the detector 4. It is also possible to correct the change in the projected image due to the above.

<Eighth Embodiment>
Next, an eighth embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

FIG. 21 is a diagram illustrating a part of the detection apparatus according to the eighth embodiment.
FIG. 21 shows the X-ray source 2, the table 12, and the detector 4 of the detection apparatus according to the eighth embodiment. A measurement object S is installed in the center of the table 12. Between the X-ray source 2 and the table 12, a diaphragm plate 62 that defines the irradiation range of the X-ray XL is disposed.

  The diaphragm plate 62 is a plate member made of, for example, tungsten or lead. The aperture plate 62 is formed with a first opening 62a that defines the irradiation range of the X-ray XL irradiated to the measurement object S and a second opening 62b that allows X-rays to pass in a direction not irradiated to the measurement object S. Has been. The first opening 62a and the second opening 62b are, for example, circular through holes.

  A detector 4A is installed on the opposite side of the diaphragm plate 62 from the X-ray source 2. The detector 4A is disposed at a position facing the emission part 8 of the X-ray source 2 through the second opening 62b. The reference object 50H is arranged between the detector 4A and the second opening 62b and within the irradiation range of the X-rays that have passed through the second opening 62b. The reference object 50H is a cylindrical structure, for example. The shape of the reference object 50H is not limited to a cylindrical shape, and can be an arbitrary shape.

  The detector 4A having the same configuration as that of the detector 4 can be used. In the present embodiment, the detector 4A only needs to be able to detect the projected image of the reference object 50H, and therefore may have a detection surface that is smaller in size than the detector 4. In the present embodiment, the detector 4 </ b> A is connected to the measurement control device 51. The measurement control device 51 controls the detector 4A to acquire an X-ray transmission image including a projection image of the reference object 50H.

  In the present embodiment, the reference object 50H and the detector 4A are independent of the table 12 and the detector 4 used for measuring the measurement object S. The control device 5 acquires a projection image of the reference object 50H in the calibration. The image analysis device 53 analyzes the position and size of the projected image of the reference object 50H, and stores the created analysis data in the work memory 52.

  The measurement control device 51 controls the detector 4 to acquire an X-ray transmission image of the measurement object S, and controls the detector 4A to acquire an X-ray transmission image including a projection image of the reference object 50H. The image analysis device 53 analyzes the X-ray transmission image including the projection image of the reference object 50H, and analyzes the position and size of the projection image of the reference object 50H. The image analysis device 53 stores the created analysis data in the work memory 52.

  The image correction device 55 corrects the X-ray transmission image including the projection image of the measurement object S based on the analysis data of the reference object 50H created in the measurement and calibration. The image correction device 55 stores the created corrected image in the work memory 52. The reconstructed image calculation device 56 calculates the internal structure of the measurement object using the correction image created by the image correction device 55 together with the X-ray transmission image detected by the detector 4.

  As described above, also in the present embodiment, it is possible to correct a change in the projected image caused by the position variation of the X-ray source 2 and to suppress generation of a false image.

In the present embodiment, the reference object 50H may not be disposed, and the projected image of the second opening 62b may be detected by the detector 4A. When the emission part 8 of the X-ray source 2 moves, the incident angle and the incident range of the X-rays narrowed by the second opening 62b with respect to the detector 4A change. Therefore, the position information of the X-ray source 2 can be acquired by detecting the projection image of the second opening 62b and analyzing the position and size of the projection image, and based on the position information, the measurement object S can be obtained. An X-ray transmission image including a projection image can be corrected.
In the present embodiment, as in the second embodiment, the position variation of the X-ray source 2 can be achieved by moving any one or more of the X-ray source 2, the measurement object S, and the detector 4. It is also possible to correct the change in the projected image due to the above.

<Ninth Embodiment>
Next, a ninth embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

FIG. 22 is a diagram illustrating a part of the detection apparatus according to the ninth embodiment.
FIG. 22 shows the X-ray source 2, the table 12, and the detector 4 of the detection apparatus according to the ninth embodiment. A measurement object S is installed in the center of the table 12. An imaging device 65 that images an X-ray generation point (emitter 8) in the X-ray source 2 is installed outside the irradiation range of the X-ray XL irradiated from the X-ray source 2 to the measurement object S.

  The imaging device 65 detects light having a long wavelength different from that of X-rays. In the emission part 8 of the X-ray source 2, the temperature of the incident position of the electrons on the target 40 rises locally, so that the X-ray generation position is accurately detected by using the imaging device 65 that detects infrared rays. be able to. In addition to the X-rays, ultraviolet rays and visible rays are radiated from the generation point of the X-rays of the target 40. Therefore, the light having a long wavelength may be detected by the imaging device 65. When the intensity of ultraviolet rays or visible light is low, a condenser 66 is provided between the imaging device 65 and the X-ray source 2 and the collected light is detected by the imaging device 65 as shown in FIG. You may make it do. The position of the emission unit 8 of the X-ray source 2 may be detected from the intensity distribution of light detected within a predetermined plane on the imaging device 65.

  In the present embodiment, the imaging device 65 is connected to the measurement control device 51. The measurement control device 51 controls the imaging device 65 to detect the position of the emission unit 8 (X-ray generation point) of the X-ray source 2.

  In the present embodiment, the measurement control device 51 acquires position information of the emission unit 8 in the X-ray source 2 in calibration. The measurement control device 51 stores the acquired position information of the injection unit 8 in the work memory 52.

  The measurement control device 51 controls the detector 4 to obtain an X-ray transmission image of the measurement object S, and controls the imaging device 65 to obtain position information of the emission unit 8. The measurement control device 51 stores the acquired position information of the injection unit 8 in the work memory 52.

  The image correction device 55 corrects the X-ray transmission image including the projection image of the measurement object S based on the position information of the emission unit 8 acquired in the measurement and calibration. For example, when the emission unit 8 is approaching the measurement object S and the detector 4 due to the temperature rise of the X-ray source 2, the projection image of the measurement object S is detected in an enlarged manner. The projected image of the measuring object S is reduced according to the distance, and a corrected image is created. The image correction device 55 stores the created corrected image in the work memory 52. The reconstructed image calculation device 56 calculates the internal structure of the measurement object using the correction image created by the image correction device 55 together with the X-ray transmission image detected by the detector 4.

  In the present embodiment, as in the second embodiment, the position variation of the X-ray source 2 can be achieved by moving any one or more of the X-ray source 2, the measurement object S, and the detector 4. It is also possible to correct the change in the projected image due to the above. For example, in this embodiment, since the moving direction and moving distance of the emission unit 8 of the X-ray source 2 can be detected via the imaging device 65, the position of the X-ray source 2 is corrected by the moving mechanism 45 shown in FIG. Can do.

  As described above, also in the present embodiment, it is possible to correct a change in the projected image caused by the position variation of the X-ray source 2 and to suppress generation of a false image.

<Tenth Embodiment>
Next, a tenth embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

24 and 25 are diagrams illustrating a part of the detection apparatus according to the tenth embodiment. FIG. 26 is a diagram illustrating a grid member provided in the detection device according to the tenth embodiment.
24 and 25 show the X-ray source 2, the table 12, and the detector 4 of the detection apparatus according to the tenth embodiment. A measurement object S is installed in the center of the table 12. A grid member 70 is installed between the table 12 and the detector 4.

  The grid member 70 is a member in which a plurality of plate-like members 71 extending in the Y-axis direction (vertical direction) and a plurality of plate-like members 72 extending in the X-axis direction (horizontal direction) are combined in a cross-beam shape. In the grid member 70, the installation angles of the plate-like members 71 and 72 are set so that the shielding rate of the X-ray XL is the lowest when the X-ray source 2 is arranged at the reference position.

  As shown in FIG. 24, the plurality of plate-like members 71 (vertical plates) extending in the Y-axis direction spread in the X-axis direction of X-rays XL that are emitted from the X-ray source 2 and whose irradiation range is defined by the diaphragm plate 62. It arrange | positions so that it may spread in fan shape centering | focusing on the optical axis of X-ray XL according to an angle. Further, as shown in FIG. 25, the plurality of plate-like members 72 (horizontal plates) extending in the X-axis direction are also fan-shaped around the optical axis of the X-ray XL in accordance with the spread angle of the X-ray XL in the Y-axis direction. It is arranged to spread over.

27 and 28 are explanatory views of the operation of the detection apparatus according to the tenth embodiment.
FIG. 27 shows the operation of the grid member 70 when the emission unit 8 of the X-ray source 2 moves in the X-axis direction or the Y-axis direction. In FIG. 27, Fo is the position of the injection unit 8 in calibration, and F is the position when the injection unit 8 moves in the X-axis direction or the Y-axis direction.

  When the emission part 8 of the X-ray source 2 is arranged at the position Fo, the X-ray XL spreading in a cone shape (cross-sectional fan shape) from the position Fo is parallel to the plate surfaces of the plate-like members 71 and 72 of the grid member 70. Incident. For this reason, the shadows of the plate-like members 71 and 72 are hardly projected on the detector 4 located behind the grid member 70.

  On the other hand, when the emitting portion 8 moves to the position F, the radiation direction of the X-ray XL radiated from the position F and the direction of the plate surface of the plate member 71 or the plate member 72 do not coincide with each other. For example, when the emission unit 8 moves in the X-axis direction, the radiation direction of the X-ray XL and the direction of the plate surface of the plate-like member 71 do not match. As a result, as shown in FIG. 27, the projection image of the plate-like member 71 is detected by the detector 4. As the moving distance (F-Fo) of the emitting unit 8 increases, the width of the projection image of the plate-like member 71 increases. Therefore, the moving distance of the emitting unit 8 (that is, the X-ray source 2) is analyzed by analyzing the dimensions of the projected image. Position information) can be calculated.

  When the emission unit 8 moves in the Y axis direction, the radiation direction of the X-ray XL and the direction of the plate surface of the plate member 72 do not coincide with each other, and the projection image of the plate member 72 is detected by the detector 4. . Then, by analyzing the size of the projected image of the plate-like member 72, the movement distance in the Y-axis direction of the emitting portion 8 can be calculated.

  Next, FIG. 28 shows the operation of the grid member 70 when the emission unit 8 of the X-ray source 2 moves in the Z-axis direction. In FIG. 28, Fo is the position of the injection unit 8 in calibration, and F is the position when the injection unit 8 moves in the Z-axis direction.

  When the emission part 8 of the X-ray source 2 is arranged at the position Fo, the X-ray XL spreading in a cone shape (cross-sectional fan shape) from the position Fo is parallel to the plate surfaces of the plate-like members 71 and 72 of the grid member 70. Incident. For this reason, the shadows of the plate-like members 71 and 72 are hardly projected on the detector 4 located behind the grid member 70.

  On the other hand, when the emitting portion 8 moves to the position F, the radiation direction of the X-ray XL radiated from the position F and the direction of the plate surfaces of the plate-like members 71 and 72 do not coincide with each other. The difference between the radiation direction of the X-ray XL and the plate surface direction of the plate members 71 and 72 increases as the plate members 71 and 72 arranged on the outer peripheral side of the grid member 70. Therefore, as shown in FIG. 28, the width of the plate-like members 71 and 72 detected by the detector 4 is large in the plate-like members 71 and 72 located on the outer peripheral side of the grid member 70, and the center portion of the grid member 70 It becomes small in the plate-shaped members 71 and 27 located in this.

  In addition, the width of the projected image of the same plate-like members 71 and 72 increases as the emitting portion 8 approaches the grid member 70. Therefore, the movement direction of the emission unit 8 can be detected by analyzing the distribution of the width of the projection image, and the movement distance of the emission unit 8 (that is, position information of the X-ray source 2) by analyzing the dimensions of the projection image. ) Can be calculated.

  As described above, also in the present embodiment, since the moving direction and moving distance of the emitting unit 8 of the X-ray source 2 can be detected, the position information of the emitting unit 8 and the previous ninth embodiment are used. Similarly, an X-ray transmission image including a projection image of the measuring object S can be corrected.

  As described above, also in the present embodiment, it is possible to correct a change in the projected image caused by the position variation of the X-ray source 2 and to suppress generation of a false image.

  In the present embodiment, as in the second embodiment, the position variation of the X-ray source 2 can be achieved by moving any one or more of the X-ray source 2, the measurement object S, and the detector 4. It is also possible to correct the change in the projected image due to the above. For example, in this embodiment, since the movement direction and movement distance of the emission part 8 of the X-ray source 2 can be detected by analyzing the projection image of the grid member 70, the movement mechanism 45 shown in FIG. The position can be corrected.

<Eleventh embodiment>
Next, an eleventh embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  In the eleventh embodiment, a structure manufacturing system including the detection device 100 described above will be described.

  FIG. 29 is a block configuration diagram of the structure manufacturing system 200. The structure manufacturing system 200 includes the above-described detection device 100, a molding device 120, a control device (inspection device) 130, and a repair device 140. In the present embodiment, the structure manufacturing system 200 creates a molded product such as an aircraft engine component, a gear component, and an electronic component including a circuit board.

  The design device 110 creates design information related to the shape of the structure, and transmits the created design information to the molding device 120. In addition, the design device 110 stores the created design information in a coordinate storage unit 131 (to be described later) of the control device 130. Here, the design information is information indicating the coordinates of each position of the structure. The molding apparatus 120 produces the structure based on the design information input from the design apparatus 110. The forming process of the forming apparatus 120 includes at least one of casting, forging, and cutting.

  The detection device 100 transmits information indicating the measured coordinates to the control device 130. The control device 130 includes a coordinate storage unit 131 and an inspection unit 132. Design information is stored in the coordinate storage unit 131 by the design device 110. The inspection unit 132 reads design information from the coordinate storage unit 131. The inspection unit 132 creates information (shape information) indicating the created structure from the information indicating the coordinates received from the detection device 100. The inspection unit 132 compares information (shape information) indicating coordinates received from the shape measuring device 170 with design information read from the coordinate storage unit 131. Based on the comparison result, the inspection unit 132 determines whether or not the structure is molded according to the design information. In other words, the inspection unit 132 determines whether or not the created structure is a non-defective product. If the structure is not molded according to the design information, the inspection unit 132 determines whether or not the structure can be repaired. If repair is possible, the inspection unit 132 calculates a defective part and a repair amount based on the comparison result, and transmits information indicating the defective part and information indicating the repair amount to the repair device 140.

  The repair device 140 processes the defective portion of the structure based on the information indicating the defective portion received from the control device 130 and the information indicating the repair amount.

  FIG. 30 is a flowchart showing the flow of processing by the structure manufacturing system 200. First, the design apparatus 110 creates design information related to the shape of the structure (step S101). Next, the molding apparatus 120 produces the structure based on the design information (step S102). Next, the detection apparatus 100 measures coordinates related to the shape of the structure (step S103). Next, the inspection unit 132 of the control device 130 inspects whether or not the structure is created according to the design information by comparing the shape information of the structure created from the detection device 100 with the design information. (Step S104).

  Next, the inspection unit 132 of the control device 130 determines whether or not the created structure is a non-defective product (step S105). If the created structure is a non-defective product (YES in step S106), the structure manufacturing system 200 ends the process. On the other hand, when the created structure is not a non-defective product (NO in step S106), the inspection unit 132 of the control device 130 determines whether the created structure can be repaired (step S107).

  When the created structure can be repaired (YES in step S107), the repair device 140 performs reworking of the structure (step S108) and returns to the process of step S103. On the other hand, when the created structure cannot be repaired (step S107 YES), the structure manufacturing system 200 ends the process. Above, the process of this flowchart is complete | finished.

  As described above, since the detection apparatus 100 in the above embodiment can accurately measure the coordinates of the structure, the structure manufacturing system 200 can determine whether or not the created structure is a non-defective product. . In addition, the structure manufacturing system 200 can repair the structure by reworking the structure when the structure is not a good product.

  In each of the above-described embodiments, the measurement object S is not limited to an industrial part, and may be a human body, for example. In each of the above-described embodiments, the detection device 100 may be used for medical purposes.

  In each of the above-described embodiments, the X-ray source and the detection device are fixed at predetermined positions, the stage is rotated, and the image of the measurement object S is acquired. However, the scanning method is not limited to this. One of the X-ray source and the detection device may be fixed at a predetermined position, and the other may be movable. Further, both the X-ray source and the detection device may be movable.

  Note that the requirements of the above-described embodiments can be combined as appropriate. Some components may not be used. In addition, as long as it is permitted by law, the disclosure of all published publications and US patents related to the detection devices and the like cited in the above embodiments and modifications are incorporated herein by reference.

  DESCRIPTION OF SYMBOLS 1 ... Measuring apparatus, 2, 2R ... X-ray source, 4, 4A ... Detector, 6 ... Chamber member, 9 ... Stage, S ... Measurement object, X ... Point, X ... Transmission, 1pm ... Wavelength, 20B, 23B ... Axis, 50, 50A, 50B, 50C, 50E, 50F, 50G, 50H ... reference object, 50D ... conduit (reference object), 60 ... insertion / removal mechanism, 65 ... imaging device, 66 ... condenser, XL ... X-ray , 100 ... Detection device

Claims (32)

A measuring device that irradiates a measurement object from an X-ray source to detect transmission X-rays transmitted through the measurement object and forms an image based on the transmission X-ray;
A reference object that is irradiated with X-rays from the X-ray source, and a detector that detects transmitted X-rays transmitted through the reference object;
The detector detects a transmitted X-ray transmitted through the reference object, and corrects the control of the measuring device based on the detection.   The detection apparatus according to claim 1, wherein control of the measurement apparatus is corrected based on position information of the X-ray source.   The detection apparatus according to claim 2, wherein position information of the X-ray source when detecting X-rays transmitted through the reference object and transmitted X-rays transmitted through the measurement object is acquired.   The detection apparatus according to claim 3, wherein the measurement object and the reference object are relatively movable.   The detection apparatus according to claim 2, further comprising an insertion / removal mechanism that inserts / removes the reference object with respect to the X-ray irradiation range.   The detection apparatus according to claim 2, wherein the reference object has an axisymmetric shape with respect to an axis parallel to a rotation axis of a stage that rotatably supports the measurement object.   The detection apparatus according to claim 2, wherein the reference object is provided on a stage that supports the measurement object.   The detection apparatus according to claim 7, wherein the reference object is provided on a support surface of the stage that holds the measurement object or inside the stage.   The detection apparatus according to claim 2, wherein the reference object is supported by the measurement object.   The detection apparatus according to claim 7, wherein the reference object is disposed on a rotation axis of a stage that rotatably supports the measurement object.   The detection device according to claim 7, wherein the reference object is a ring-shaped member provided along an outer peripheral surface of the stage.   The detection device according to claim 7, wherein the reference object is a conduit formed on the stage. A stage that supports the object to be measured; and a chamber member that houses at least the object to be measured and the stage;
The detection apparatus according to claim 2, wherein the reference object is provided in the chamber member.   The detection device according to claim 1, wherein a detector that detects the reference object is different from a detector that detects the measurement object.   The detection device according to claim 1, further comprising an imaging device that images an X-ray generation point of the X-ray source.   The detection device according to claim 15, wherein the imaging device detects light having a long wavelength different from that of the X-ray emitted from the generation point of the X-ray.   The detection device according to claim 15 or 16, further comprising a condenser for collecting light emitted from the generation point of the X-rays.   The detection apparatus according to claim 1, wherein the position of the X-ray source is corrected based on the position information. A stage for supporting the measurement object;
The detection device according to claim 1, wherein the position of the stage is corrected based on the position information. A detector for detecting transmitted X-rays transmitted through the measurement object;
The detection device according to claim 1, wherein the position of the detector is corrected based on the position information.   In order to calculate a reconstructed image of the measurement object from a plurality of images formed on the basis of transmitted X-rays that are irradiated so that X-rays are incident on the measurement object from different directions and transmitted from the different directions. The detection apparatus according to claim 1, wherein at least a part of the plurality of images used in the correction is corrected based on the position information. Irradiating a reference object with an X-ray from an X-ray source to detect transmitted X-rays transmitted through the reference object;
Irradiating a measurement object from the X-ray source with X-rays to detect transmitted X-rays transmitted through the measurement object;
Correcting at least a part of the detection of the measurement object based on the detection of the reference object.   The detection method according to claim 22, wherein position information of the X-ray source is obtained from detection of the reference object, and at least a part of detection of the measurement object is corrected based on the position information of the X-ray source.   The detection method according to claim 22 or 23, wherein detecting the measurement object includes forming an image based on the transmitted X-ray, and correcting the formed image.   For the detection of the measurement object, the measurement object is irradiated with X-rays from different directions, and a reconstructed image of the measurement object is calculated from a plurality of images formed based on transmitted X-rays transmitted from the different directions. The detection method according to claim 24, further comprising: correcting at least a part of the plurality of images.   The position information of the X-ray source is acquired in at least a part of an irradiation period in which the measurement object is irradiated with the X-ray or a period different from the irradiation period. The detection method according to any one of claims 22 to 25, further comprising: Imaging an X-ray generation point of the X-ray source;
Obtaining positional information of the X-ray source based on the imaged image;
The detection method according to claim 23.   The detection method according to any one of claims 23 to 25, wherein a relative position of the X-ray source, the measurement object, and the detector that detects the transmitted X-ray is corrected based on the position information. Irradiating the measurement object so that X-rays are incident from different directions, and forming a plurality of images based on transmitted X-rays transmitted from the different directions,
29. The correction method according to claim 22, wherein at least a part of the plurality of images used for calculating a reconstructed image of the measurement object is corrected from the plurality of images based on the position information. The detection method according to any one of the above. A design process for creating design information on the shape of the structure;
A molding process for producing the structure based on the design information;
Measuring the produced structure using the detection method according to any one of claims 22 to 29, and obtaining shape information of the structure;
An inspection process for comparing the shape information and the design information;
A method for manufacturing a structure, comprising:   The method for manufacturing a structure according to claim 30, further comprising a repair process that is executed based on a comparison result of the inspection process and performs reworking of the structure.   32. The structure manufacturing method according to claim 31, wherein the forming step is re-executed in the repair step.

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