JP2017133964A - Radiographic imaging device and radiographic imaging method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a radiographic imaging device capable of imaging a reference object and a measurement object at the same time, while avoiding a contact between the two and capable of suppressing reduction of resolution.SOLUTION: A radiographic imaging device applies an X-ray toward a measurement object 11 while rotating a stage device 14, and captures an X-ray image at each rotational position. The radiographic imaging device includes: a reference object 12; and a support mechanism 52 for supporting the reference object 12 such that the reference object 12 can be positioned within an imaging-available space 40 and capable of adjusting the position of the reference object 12. The support mechanism 52 is configured so as to rotate together with the stage device 14, and makes the reference object 12 and the measurement object 11 integrally rotate at the adjusted position of the reference object 12.SELECTED DRAWING: Figure 2

Description

  The present invention relates to a radiographic image capturing apparatus and a radiographic image capturing method.

  There is a radiographic imaging device that irradiates a measurement object while rotating the measurement object, detects radiation transmitted through the measurement object, and captures a radiation image at each predetermined rotation position. This radiographic image capturing apparatus generates a three-dimensional image and a tomographic plane image of a measurement object from radiographic images at respective rotational positions obtained by imaging. These three-dimensional images and the like are used for measuring the dimension of the measurement object, the internal structure of the measurement object, and defects generated in the measurement object. Since the measurement dimensions are derived in consideration of imaging conditions such as the imaging magnification, it is important to accurately grasp the imaging conditions in order to accurately measure the dimensions.

  For example, in Patent Document 1, a radiation image is taken by irradiating a reference object with a known dimension, and the dimension of the reference object is measured from the radiation image. Based on the measured dimension value and the actual size of the reference object. A radiographic image capturing apparatus that grasps imaging conditions is disclosed.

  However, in the above conventional radiographic imaging device, since the reference object is imaged independently of the measurement object, for example, the temperature of the radiation source rises while the measurement object is being rotated and the radiation is increased. It is not possible to cope with a change in shooting conditions during shooting of the measurement object, such as fluctuations.

JP 2010-185859 A

  In view of the above problem, for example, it is conceivable that a reference object is arranged in a photographic space when rotating the measurement object, and the reference object and the measurement object are imaged simultaneously. Under such a configuration, it is possible to correct the three-dimensional image of the measurement object and the measurement dimension value based on the grasped content by grasping the change of the imaging condition from the radiation image of the reference object.

  However, when the reference object is placed in the photographic space together with the measurement object, the measurement object and the reference object come into contact with each other when the measurement object rotates, the position of the measurement object or the reference object changes, or the measurement object May cause damage.

  In this case, it is conceivable to avoid contact between the reference object and the measurement object by arranging the reference object away from the measurement object so that it does not reach the reference object even if the measurement object rotates.

  However, when the reference object is arranged away from the measurement object, it is necessary to enlarge the imageable space in order to include both the reference object and the measurement object in the imageable space. As a result, the size in the real space per pixel in the radiographic image is increased, the proportion of the measurement object in the radiographic image is reduced, and the resolution of the measurement object in the radiographic image is reduced.

  The present invention has been made in view of the above circumstances, and it is possible to avoid contact between the reference object and the measurement object and to suppress a decrease in resolution while allowing the reference object and the measurement object to be photographed simultaneously. An object of the present invention is to provide a radiographic imaging device and a radiographic imaging method.

  The radiographic imaging device of the present invention is an imaging unit that captures a radiographic image based on the radiation that has passed through the measurement object, an installation unit in which the measurement object is installed, a radiation source that irradiates the measurement object with radiation. A radiation image capturing apparatus that captures the radiation image at each rotational position by the imaging unit while performing the rotation by the rotation mechanism, and a rotation mechanism that relatively rotates the measurement object and the radiation The reference object and the reference object are supported so as to be arranged so that the reference object is included in each radiographic image, and the reference is independent of the rotation of the rotation mechanism during the radiographic image capturing period. A support unit capable of fixing a relative position between an object and the measurement object, and an adjustment unit that adjusts a position of the reference object with respect to the measurement object, wherein the support unit is attached to the adjustment unit. Ri wherein the at the location of adjusted the reference object is fixable relative position between the said reference object the measurement object.

  The radiographic image capturing method of the present invention irradiates radiation from a radiation source toward the measurement object installed in the installation unit, relatively rotates the measurement object and the radiation by a rotation mechanism, and the imaging unit In a radiographic image capturing method for capturing a radiation image at each rotational position based on radiation transmitted through a measurement object, the reference object is included in each radiation image in a state where the reference object is separated from the measurement object and the installation unit. Adjusting the position of the reference object within a range, and rotating the rotation mechanism while fixing the relative position of the reference object and the measurement object at the adjusted reference object position. To do.

  According to the radiographic imaging device of the present invention, since the reference object is supported so as to be included in each radiographic image, the reference object and the measurement object can be imaged simultaneously, and the rotation mechanism can be rotated. Regardless, since the relative position between the reference object and the measurement object can be fixed, the contact between the reference object and the measurement object can be avoided. Since the contact between the reference object and the measurement object can be avoided, the reference object can be arranged close to the measurement object, and a reduction in resolution can be suppressed. Furthermore, since the position of the reference object can be adjusted, the convenience can be improved.

  According to the radiographic image capturing method of the present invention, it is possible to perform simultaneous image capturing while avoiding contact between the reference object and the measurement object. At that time, it is possible to perform imaging by adjusting the position of the reference object with respect to the measurement object. Since the reference object can be arranged near the measurement object, it is possible to suppress a decrease in resolution.

The whole block diagram of a radiographic imaging apparatus. (A) The top view of a stage apparatus, (b) The front view of a stage apparatus, (c) The enlarged view of the A section. (A) The figure for demonstrating the position adjustment of a reference | standard thing, (b) The figure which shows a comparative example. 6 is a flowchart illustrating an X-ray image capturing method. The figure for demonstrating the position adjustment of a reference | standard thing.

  Hereinafter, the radiographic image capturing apparatus 10 according to the present embodiment will be described with reference to the drawings. FIG. 1 is an overall configuration diagram of the radiographic image capturing apparatus 10. In the following description, an XYZ orthogonal coordinate system is set, and the left-right direction in FIG. 1 is the X-axis direction, the front-rear direction in FIG. 1 is the Y-axis direction, and the up-down direction in FIG.

  The radiographic imaging apparatus 10 according to the present embodiment acquires X-ray CT (Computed Tomography) that acquires information such as the internal structure of the measurement object 11 and defects generated in the measurement object 11 and measures their dimensions. ) It is configured as a device.

  As shown in FIG. 1, the radiographic imaging apparatus 10 includes a stage device 14, an X-ray irradiator 15, an X-ray detector 16, a drive mechanism 17, and a control device 18.

  The stage device 14 functions as an installation unit on which the measurement object 11 is installed. As the measurement object 11, for example, industrial parts such as mechanical parts and electrical parts are used. The stage device 14 is provided with a support mechanism 52 as a support portion that supports the reference object 12. Details of the stage device 14 and the support mechanism 52 will be described later.

  The reference object 12 is an object having a known size and is a sphere having a diameter of 2 to 3 mm. The reference object 12 preferably has the same X-ray absorption rate as that of the measurement object 11. For example, when the measurement object 11 is made of aluminum, it can be formed of sapphire or the like.

  The X-ray irradiator 15 irradiates the measurement object 11 and the reference object 12 with X-rays. The X-ray irradiator 15 is configured by an X-ray source such as an X-ray tube, for example, and generates X-rays having a wavelength of 1 pm to 30 nm by colliding electrons emitted from the filament with a target. As the X-ray, an ultra soft X-ray of about 50 eV, a soft X-ray of about 0.1 to 2 keV, an X-ray of about 2 to 20 keV, a hard X-ray of about 20 to 100 keV, and the like can be used.

  The X-ray irradiator 15 is configured to irradiate the measurement object 11 and the reference object 12 with cone beam X-rays that spread in a substantially conical shape. In addition, you may irradiate not only a cone beam X-ray but the fan beam X-ray and linear pencil beam X-ray which spread in fan shape.

  The X-ray detector 16 detects X-rays transmitted through the measurement object 11 and the reference object 12, and functions as an imaging unit that captures X-ray images (perspective images) of the measurement object 11 and the reference object 12. The X-ray detector 16 is provided with a scintillator section 16a to which X-rays transmitted through the measurement object 11 and the reference object 12 are incident, and a light receiving section 16b that generates an image signal based on the output of the scintillator section 16a. Yes. The scintillator unit 16a includes a fluorescent material that converts X-rays into visible light, and the light receiving unit 16b receives and photoelectrically converts the visible light converted by the scintillator unit 16a, and generates an image signal of an electrical signal. Is output.

  The drive mechanism 17 rotates the stage device 14 or moves it in the X-axis direction, the Y-axis direction, and the Z-axis direction, and includes a rotation drive unit 21, a first drive unit 22, and a second drive unit. 23 and a third drive unit 24.

  The rotation drive unit 21 functions as a rotation mechanism that rotates the stage device 14. The rotation drive unit 21 includes a turntable 21a (see FIG. 2B), a drive source (for example, a motor) 21b that rotates the turntable 21a, a driver circuit 21c that drives the drive source 21b, and the like, and is in the Z-axis direction. The stage device 14 is rotated about the axis O extending to the center. The rotary drive unit 21 is provided with a rotary encoder 21 d for detecting the rotation position (rotation angle) of the stage device 14, and the detection value of the rotary encoder 21 d is output to the control device 18.

  The first drive unit 22 moves the stage device 14 in the X-axis direction, and includes a drive source (for example, a motor) 22a, a driver circuit 22b, a guide unit (not shown) that guides the stage device 14 in the X-axis direction, and the like. I have. The first drive unit 22 is provided with a linear encoder 22 c for detecting the position of the stage device 14 in the X-axis direction, and the detection value of the linear encoder 22 c is output to the control device 18.

  The second drive unit 23 moves the stage device 14 in the Y-axis direction, and includes a drive source (for example, a motor) 23a, a driver circuit 23b, a guide unit (not shown) that guides the stage device 14 in the Y-axis direction, and the like. I have. The second drive unit 23 is provided with a linear encoder 23 c for detecting the position of the stage device 14 in the Y-axis direction, and the detection value of the linear encoder 23 c is output to the control device 18.

  The third drive unit 24 moves the stage device 14 in the Z-axis direction, and includes a drive source (for example, a motor) 24a, a driver circuit 24b, a guide unit (not shown) that guides the stage device 14 in the Z-axis direction, and the like. I have. The third drive unit 24 is provided with a linear encoder 24 c for detecting the position of the stage device 14 in the Z-axis direction, and the detection value of the linear encoder 24 c is output to the control device 18.

  The control device 18 controls the overall operation of the radiographic image capturing device 10. The control device 18 includes an imaging control unit 31 that controls the X-ray irradiator 15, the X-ray detector 16, and the driving mechanism 17 to acquire X-ray images of the measurement object 11 and the reference object 12, and an imaging control unit 31. An image processing unit 32 that performs signal processing such as edge processing and reconstruction on the acquired X-ray image to generate a three-dimensional image and a tomographic plane image of the measurement object 11 and the reference object 12, and an image processing unit 32 The dimension measuring unit 33 that measures the dimensions of the measurement object 11 and the reference object 12 from the three-dimensional image, and the image that corrects the three-dimensional image of the measurement object 11 based on the dimensions of the reference object 12 measured by the dimension measurement unit 33 A correction unit 34 is provided. The control device 18 includes a ROM 35 and a RAM 36. The ROM 35 stores an imaging processing program, an image processing program, a correction processing program, and the like, and the RAM 36 is used as a work memory for image processing and correction processing.

  Connected to the control device 18 is a display unit 37 on which X-ray images and three-dimensional images of the measurement object 11 and the reference object 12 are displayed, and an input unit 38 for an operator to perform an input operation.

  In the radiographic imaging apparatus 10, an X-ray irradiator 15 and an X-ray detector 16 are arranged to face each other in the X-axis direction, and the stage device 14 is arranged so that the measurement object 11 and the reference object 12 are positioned therebetween. ing. Then, the second drive unit 23 and the third drive unit 24 adjust the position of the stage device 14 in the Y-axis direction and the Z-axis direction, so that the measurement object 11 and the reference object 12 can be photographed in the space 40 (see FIG. 2). ). In this state, the stage device 14 is rotationally driven by the rotational drive unit 21, and X-ray images of the measurement object 11 and the reference object 12 are taken.

  Here, the imageable space 40 is a cylindrical space having an axis O as a central axis, and is a range in which a three-dimensional image can be generated from an X-ray image at each rotational position obtained by rotational imaging. The size (diameter and height) of the imageable space 40 can be adjusted by moving the stage device 14 in the X-axis direction and changing the distance between the X-ray irradiator 15 and the measurement object 11.

<About the configuration of the stage device 14>
Next, the configuration of the stage apparatus 14 will be described with reference to FIG. 2A is a plan view of the stage device 14, FIG. 2B is a front view of the stage device 14, and FIG. 2C is an enlarged view of part A.

  The stage device 14 roughly includes a stage main body 51, a support mechanism 52, and a spacer 53.

  As shown in FIG. 2B, the stage main body 51 is provided with an attachment plate 61 for attaching the stage device 14 to the rotating disk 21 a of the rotation driving unit 21. The attachment plate 61 is screwed to the turntable 21a by a plurality of attachment screws 62, whereby the stage body 51 is fixed to the turntable 21a.

  A columnar column 63 is provided on the upper surface of the mounting plate 61, and a disk-shaped enlarged diameter portion 64 having a larger diameter than the column 63 is provided on the upper surface of the column 63. A cylindrical small-diameter portion 65 formed with a smaller diameter than the enlarged-diameter portion 64 is provided on the upper surface of the enlarged-diameter portion 64. The mounting plate 61, the column 63, the enlarged diameter portion 64, and the small diameter portion 65 are integrally formed of metal, and are arranged so that the respective central axes coincide with the axis O.

  On the upper surface of the enlarged diameter portion 64, an annular metal rotating ring portion 67 is disposed. A support mechanism 52 is connected to the outer peripheral surface of the rotating ring portion 67. Details of the support mechanism 52 will be described later.

  A through hole 68 that penetrates the rotating ring portion 67 in the thickness direction is provided at the center of the rotating ring portion 67. The diameter of the through hole 68 is set slightly larger than the diameter of the small diameter portion 65, and the small diameter portion 65 is inserted into the through hole 68.

  On the upper surface of the small diameter portion 65, a pedestal portion 71 on which the spacer 53 is installed is disposed. The pedestal portion 71 is a metal disk-like member having a larger diameter than the small diameter portion 65, and is arranged so that the central axis thereof coincides with the axis O. The pedestal portion 71 is provided with a positioning hole 72 that penetrates the pedestal portion 71 in the thickness direction. The positioning hole 72 communicates with a positioning recess 66 provided on the upper surface of the small diameter portion 65, and the upper portion of the positioning hole 72 and the positioning recess 66 protrudes higher than the upper surface of the pedestal portion 71. A positioning pin 73 is inserted. Further, a positioning recess 74 is provided on the upper surface of the pedestal 71 at a position spaced radially from the central axis.

  The pedestal portion 71 is screwed to the upper surface of the small diameter portion 65 by a plurality of mounting screws 75, but is not connected to the rotating ring portion 67 by screwing or the like. For this reason, the rotating ring part 67 is rotatable along the peripheral surface of the small diameter part 65 in a state sandwiched between the base part 71 and the enlarged diameter part 64. That is, the rotating ring portion 67 is rotatable around the axis O with respect to the pedestal portion 71.

  A plurality of substantially hemispherical grooves 76 are provided on the lower surface of the pedestal 71. As shown in FIG. 2A, the plurality of grooves 76 are arranged at equal intervals over the entire circumference of a circle centered on the axis O. A notch mechanism 69 is disposed in the rotating ring portion 67 so as to face the groove portion 76. The notch mechanism 69 includes a sphere 69 a disposed at the upper end of the notch mechanism 69, and an elastic body 69 b such as a spring that biases the sphere 69 a upward, and the upper end of the sphere 69 a is the rotational ring portion 67. It arrange | positions so that it may protrude upwards from the upper surface. When the spherical body 69a of the notch mechanism 69 is engaged with one of the plurality of grooves 76 provided on the lower surface of the pedestal portion 71, the rotational position of the rotating ring portion 67 with respect to the pedestal portion 71 is maintained.

  With such a configuration, when a rotation driving force is applied by the rotation drive unit 21 and the pedestal unit 71 rotates, the rotation ring unit 67 rotates along with the pedestal unit 71. On the other hand, when an external force exceeding the holding force of the notch mechanism 69 is applied to the rotating ring portion 67, only the rotating ring portion 67 rotates independently.

  In addition, the structure is arbitrary if only the rotation ring part 67 can be rotated independently, enabling the rotation ring part 67 to rotate integrally with the base part 71. FIG. For example, when the rotation direction of the pedestal portion 71 is fixed in one direction, a ratchet mechanism that allows the rotation of the rotation ring portion 67 relative to the pedestal portion 71 in only one direction may be used. The notch mechanism and the ratchet mechanism are not limited to between the upper surface of the rotating ring portion 67 and the lower surface of the pedestal portion 71, but between the lower surface of the rotating ring portion 67 and the upper surface of the enlarged diameter portion 64, or around the small diameter portion 65. It may be provided between the surface and the wall surface defining the through hole 68.

  The spacer 53 is provided with the measurement object 11 and is provided to adjust the height position of the measurement object 11. When the measurement object 11 is installed, the measurement object 11 is fixed to the upper surface of the spacer 53 with a double-sided tape or the like. Note that the measurement object 11 may be fixed to the spacer 53 by a non-slip structure such as a non-slip sheet or an adsorption structure using air suction or the like.

  On the lower surface of the spacer 53, a positioning recess 82 and a positioning projection 83 for positioning the spacer 53 with respect to the pedestal 71 are provided. The upper portion of the positioning pin 73 is inserted into the positioning recess 82, and the positioning projection 83 is inserted into the positioning recess 74 of the pedestal portion 71. The spacer 53 is not screwed to the pedestal 71 and is detachable. The spacer 53 may be screwed to the pedestal portion 71.

<About the structure of the support mechanism 52>
Next, the configuration of the support mechanism 52 will be described with reference to FIGS.

  The support mechanism 52 functions as a support unit that supports the reference object 12 so as to be disposed in the shootable space 40. As shown in FIG. 2, the support mechanism 52 is supported by a support base 91 connected to the outer peripheral surface of the rotating ring portion 67, a rotation clamp 92 supported by the support base 91, and a rotation clamp 92. And a support arm 93 on which the reference object 12 is installed at the tip.

  The support base 91 is a metal member that functions as a second support body that rotatably supports the rotation clamp 92, and includes a pair of wall portions 95 a and 95 b that are opposed to each other with the space portion 94 interposed therebetween. . These wall portions 95a and 95b have a flat plate shape, and the end portions on the rotating ring portion 67 side of each wall portion are connected through a connecting portion 95c.

  The connecting portion 95 c is screwed to the outer peripheral surface of the rotating ring portion 67 by a plurality of mounting screws 70, whereby the support mechanism 52 is fixed to the rotating ring portion 67. For this reason, when the rotating ring part 67 rotates, the support mechanism 52 rotates integrally with the rotating ring part 67.

  Each of the wall portions 95a and 95b is provided with a columnar through hole 96 that penetrates each wall portion in the opposing direction. On the other hand, on both side surfaces of the rotating clamp 92, columnar shaft members 97 extending outward along the opposing direction of the wall portions 95a and 95b are provided. The rotation clamp 92 is accommodated in the space portion 94 between the wall portion 95a and the wall portion 95b so that these shaft members 97 are inserted into the through holes 96 of the wall portions 95a and 95b. The diameters of the through hole 96 and the shaft member 97 are substantially the same, and the width dimension of the rotating clamp 92 is slightly smaller than that of the space portion 94. With this configuration, the rotation clamp 92 can rotate around the axis of the shaft member 97 in the space portion 94 while receiving support from the support base 91.

  As shown in FIG. 2B, the height position of the rotating clamp 92 is set not diagonally next to the rotating ring portion 67 but obliquely above the rotating ring portion 67. This raises the position of the support arm 93 and its rotation shaft (shaft member 97), suppresses the support arm 93 from interfering with the spacer 53 and the pedestal 71, and increases the rotation range of the support arm 93. It is for securing.

  The rotation clamp 92 is a metal member that functions as a first support that supports the support arm 93 so as to be capable of moving back and forth in the length direction. The rotation clamp 92 is provided with a cylindrical through hole 98 that penetrates the rotation clamp 92 in the front-rear direction of the rotation clamp 92 (a direction orthogonal to the opposing direction of the wall portions 95a and 95b). A round bar (columnar) support arm 93 is inserted into the through hole 98, and the support arm 93 is rotated when the rotation clamp 92 is rotated. The diameter of the through hole 98 is formed larger than the diameter of the support arm 93, and the support arm 93 is movable in the length direction of the support arm 93 within the through hole 98.

  The through hole 98 is disposed above the shaft member 97. Thereby, it is suppressed that the support arm 93 interferes with the spacer 53 and the base part 71, and it contributes to the expansion of the rotation range of the support arm 93.

  Above the through hole 98, a slit-like gap 99 is formed extending along the length direction of the through hole 98 (the direction orthogonal to the opposing direction of the wall portions 95a and 95b). The gap 99 communicates with the through hole 98 and is formed over the entire length of the through hole 98. Thereby, the upper part of the rotation clamp 92 is divided into the 1st part 92a by the side of the wall part 95a, and the 2nd part 92b by the side of the wall part 95b above the through-hole 98. The gap 99 functions as a changing portion for enabling the diameter of the through hole 98 to be changed, and is a direction in which the width dimension of the gap 99 is reduced with respect to the rotating clamp 92 (opposite direction of the wall portions 95a and 95b). By applying this external force, the diameter of the through hole 98 can be reduced.

  On the side of the through hole 98, a screw hole 100 is provided in the wall portion 95a of the support base 91 so as to penetrate the wall portion 95a. A clamp screw 101 is screwed into the screw hole 100 from the outside of the wall portion 95a. A rotating clamp 92 is located between the front end portion of the clamp screw 101 in the tightening direction and the inner wall surface of the wall portion 95b. When the clamp screw 101 is rotated in the tightening direction, the clamp screw 101 is tightened. The leading end in the insertion direction contacts the rotation clamp 92.

  Then, by tightening the clamp screw 101, the first portion 92a of the rotation clamp 92 is pressed toward the second portion 92b, and the rotation clamp 92 is deformed so as to narrow the width dimension of the gap 99. As a result, the diameter of the through hole 98 is reduced, and the support arm 93 is clamped (clamped) by the peripheral surface of the through hole 98 (the inner wall surface that defines the through hole 98). Thereby, the advance / retreat position of the support arm 93 is held.

  At the same time, when the clamp screw 101 is tightened, the entire rotation clamp 92 is pressed toward the wall portion 95b by the clamp screw 101, and the rotation clamp 92 is clamped by the clamp screw 101 and the wall portion 95b. (Clamped). As a result, the rotation angle of the rotation clamp 92 is maintained.

  Since the clamp direction when holding the advance / retreat position of the support arm 93 and the clamp direction when holding the rotation angle of the rotation clamp 92 are matched, the advance / retreat of the support arm 93 is performed by one clamp screw 101. The position and the rotation angle of the rotation clamp 92 can be held, and both can be held by a single tightening operation. Thereby, reduction of a number of parts and improvement of workability | operativity are achieved.

  Here, the position of the screw hole 100 (the position of the clamp screw 101) is set so that the center thereof is above the center of the shaft member 97 of the rotation clamp 92 (the rotation center of the rotation clamp 92). Yes. In other words, the screw hole 100 is set to be positioned closer to the gap 99 than the shaft member 97. Thereby, when the clamp screw 101 is tightened, the rotation clamp 92 can be easily deformed, and the advance / retreat position of the support arm 93 can be suitably held.

  In addition, by attaching a knob, a lever, or the like to the head of the clamp screw 101, it may be possible to perform a manual tightening operation without using a tool.

  Incidentally, in this embodiment, the rotation clamp 92 also functions as a changing means that can change the distance between the reference object 12 and the rotation axis of the support arm 93, and the rotation clamp 92 and the support base 91 are supported. It also functions as a rotating means that enables the arm 93 to rotate.

  The support arm 93 is a long member for supporting the reference object 12, and the reference object 12 is installed at the tip of the support arm 93. As described above, since the support mechanism 52 is configured to rotate integrally with the rotating ring portion 67, when the stage device 14 is driven to rotate by the rotation driving unit 21, the support arm 93 is arranged around the measurement object 11. Will be revolved. For this reason, depending on the rotation angle of the stage device 14, the support arm 93 may enter between the measurement object 11 and the X-ray irradiator 15 and overlap the measurement object 11 from the X-ray irradiator 15 side. In this case, the support arm 93 is reflected in front of the measurement object 11 in the X-ray image, which may adversely affect analysis processing of the X-ray image.

  In view of this point, in the present embodiment, the support arm 93 is formed so that the X-ray absorption rate is lower than that of the measurement object 11 and the reference object 12. As a result, X-rays easily pass through the support arm 93, and reflection of the support arm 93 on the X-ray image is suppressed. The material of the support arm 93 needs to be determined in consideration of the material of the measurement object 11 and the reference object 12, etc. For example, when the reference object 12 is made of sapphire and the measurement object 11 is made of aluminum, carbon or An acrylic resin or the like can be used.

  Similarly to the support arm 93, the rotating clamp 92 revolves around the measurement object 11, but the height position of the rotating clamp 92 is restricted so that the rotating clamp 92 does not enter the imageable space 40. Has been. Specifically, as shown in FIG. 3A, the height of the rotation clamp 92 is such that the upper end position of the rotation clamp 92 regardless of the rotation angle of the rotation clamp 92 (support arm 93). Is set to be lower than the upper surface of the spacer 53 (the installation surface of the measurement object 11, in other words, the lower end position of the shootable space 40).

  For this reason, the rotation clamp 92 does not enter the imageable space 40, and reflection in the X-ray image is avoided. The same applies to the support base 91, and the upper end position thereof is set to be lower than the upper surface of the spacer 53. Thereby, it is possible to prevent the rotating clamp 92 and the support base 91 from adversely affecting the analysis processing of the X-ray image, and it is possible to improve the degree of freedom in selecting the material of the rotating clamp 92 and the support base 91. .

  The upper end position of the rotation clamp 92 is the highest in the rotation angle when the support arm 93 is in the standing state. For this reason, if the height position of the rotation clamp 92 is set so that the upper end position of the rotation clamp 92 in the standing state is lower than the upper surface of the spacer 53, the rotation clamp 92 enters the imageable space 40. This can be avoided reliably. However, it is assumed that the reference object 12 often does not enter the shootable space 40 when the support arm 93 is standing. Therefore, when the rotation range of the rotation clamp 92 in which the reference object 12 can be arranged in the imageable space 40 is determined, the upper end position of the rotation clamp 92 is higher than the upper surface of the spacer 53 within at least the range. What is necessary is just to set the height position of the rotation clamp 92 so that it may become downward.

  An inclined surface 102 that obliquely intersects the length direction of the support arm 93 is formed at the tip of the support arm 93. As shown in FIG. 2C, the inclined surface 102 is formed with a curved concave portion 102a. The curvature of the recess 102a is formed so as to coincide with the curvature of the reference object 12, and the reference object 12 is adhered by an adhesive or the like in a state where a part of the reference object 12 is fitted in the recess 102a.

  As will be described later, in the present embodiment, the diameter dimension of the reference object 12 is measured from the X-ray image of the reference object 12. In this case, at least the upper half region 12a of the reference object 12 is imaged in the X-ray image. It is required to be. Under such conditions, the position of the reference object 12 is adjusted by rotating the support arm 93 (the rotation clamp 92). As shown in FIG. At the time when the position is determined, it is assumed that it is not in a horizontal state or a standing state but is rotated in a state of being inclined with respect to the installation surface of the measurement object 11 (the upper surface of the spacer 53).

  In this case, as shown in FIG. 3B, when the reference object 12 is placed on a plane parallel to the length direction (axial direction) of the support arm 93 without providing the inclined surface 102, for example, the measurement object 11 The inclination of the reference object 12 with respect to the installation surface (the upper surface of the spacer 53) increases, and it becomes difficult to photograph the upper half area 12a of the reference object 12.

  In this regard, in this embodiment, as shown in FIG. 2B, when the support arm 93 is inclined to some extent, the inclined surface 102 becomes parallel to the upper surface of the spacer 53, and the reference object 12 is in a horizontal posture. Can do. Therefore, the degree of inclination of the reference object 12 at the time of positioning can be suppressed to a low level, and the above inconvenience can be solved. The inclination angle of the inclined surface 102 is such that the inclined surface 102 and the upper surface of the spacer 53 are parallel at an intermediate position in the rotation range when the support arm 93 is rotated from the standing state toward the upper surface of the spacer 53. It is preferable to set so.

  The reference object 12 is placed on the inclined surface 102 while being fitted in the recess 102a. The depth d of the recess 102a is set so that the upper half area 12a of the reference object 12 can be photographed. Set to less than. However, even if it is less than the radius, if the depth d of the concave portion 102a is increased more than necessary, the rotation range of the support arm 93 capable of photographing the upper half region 12a of the reference object 12 becomes narrow, and an adhesive or the like. Is also reflected in the X-ray image. In view of this point, it is preferable that the depth d of the recess 102a is formed shallow within a range in which the reference object 12 can be supported. Specifically, it is preferable to set it to 1/4 or less of the diameter of the reference | standard thing 12, and it is more preferable to set it as 1/10 or less.

<About X-ray image capturing methods>
Next, an X-ray image capturing method will be described with reference to FIG.

  In step S1, the operator adjusts the position of the reference object 12. This step may be performed in a state where the measurement object 11 is installed on the spacer 53, or may be performed in a state where the measurement object 11 is not installed.

  The position adjustment of the reference object 12 can be performed using at least one of the first method and the second method. Hereinafter, these methods will be described.

<About the first method for adjusting the position of the reference object 12>
A first method for adjusting the position of the reference object 12 will be described with reference to FIG.

  The first method is to adjust the position of the reference object 12 by the advance / retreat operation of the support arm 93 and the rotation operation of the rotation clamp 92.

  In the first method, first, the clamp screw 101 is loosened to release the state in which the advance / retreat position of the support arm 93 and the rotation angle of the rotation clamp 92 are maintained. Accordingly, the support arm 93 can advance and retract in the length direction with respect to the rotation clamp 92, and the rotation clamp 92 can rotate with respect to the support base 91. Then, the position of the reference object 12 is changed by changing the advance / retreat position of the support arm 93 and the rotation angle of the rotation clamp 92 to align the reference object 12.

  In this way, by combining the advancing / retreating operation of the support arm 93 and the rotating operation of the rotating clamp 92, the vertical direction (perpendicular to the installing surface) above the installation surface of the measurement object 11 (the upper surface of the spacer 53). The position of the reference object 12 can be changed in the first direction) and the horizontal direction (second direction orthogonal to the first direction), and the height position and the horizontal position of the reference object 12 can be freely changed. Is possible.

  After the position of the reference object 12 is adjusted, the clamp screw 101 is tightened to hold the advance / retreat position of the support arm 93 and the rotation angle of the rotation clamp 92, and the position of the reference object 12 is fixed.

  Although the support arm 93 is configured to be rotatable in a plane orthogonal to the upper surface of the spacer 53 (the installation surface of the measurement object 11), the rotation direction of the support arm 93 is not necessarily orthogonal to the installation surface. It is not necessary to make it cross, and it is sufficient if it intersects the installation surface. Instead of the configuration in which the support arm 93 is advanced or retracted, the support arm 93 may be expanded or contracted, and the reference object 12 may be moved on the support arm 93.

<About the second method of adjusting the position of the reference object 12>
A second method for adjusting the position of the reference object 12 will be described with reference to FIG.

  The second method is to adjust the position of the reference object 12 by rotating the rotary ring portion 67.

  As shown in FIG. 5, for example, when there is a recess 103 large enough to arrange the reference object 12 at the corner of the measurement object 11, the measurement object 11 placed on the spacer 53 is rotated in the circumferential direction. In some cases, it is desired to perform alignment with the reference object 12. However, when the measurement object 11 is fixed with a double-sided tape or the like, it is necessary to remove the measurement object 11 from the spacer 53, which may cause damage to the measurement object 11 or be forced to fix it again.

  In such a case, a rotational force in the direction of arrow A is applied to the rotating ring portion 67, and the rotating ring portion 67 is rotated with respect to the spacer 53 (pedestal portion 71). Accordingly, the position of the reference object 12 can be changed in the circumferential direction of the measurement object 11 without requiring removal of the measurement object 11. The rotational position of the rotating ring portion 67 is held by the groove portion 76 and the notch mechanism 69 (see FIG. 2). It is preferable that the support arm 93 is previously rotated in a direction away from the spacer 53 so that the reference object 12 and the support arm 93 do not come into contact with the measurement object 11.

  Returning to FIG. 4, in step S <b> 2, X-ray irradiation is performed in a state where the measurement object 11 is installed and the stage device 14 is not rotated. Specifically, X-rays are irradiated from the X-ray irradiator 15 in a state where the measurement object 11 and the reference object 12 are positioned within the X-ray irradiation range.

  In step S3, an X-ray image obtained by X-ray irradiation is displayed on the display unit 37. In step S4, the operator adjusts the size of the imaging range (imagingable space 40) while viewing the X-ray image displayed on the display unit 37, and also measures the measurement object 11 and the reference object 12 within the imaging range. Adjust the position. These operations are performed by operating the first to third drive units 22 to 24 via the input unit 38. Note that the processing in steps S3 and S4 is performed in a state where X-rays are continuously irradiated.

  In step S5, calibration processing for adjusting the sensitivity of the X-ray detector 16 is performed in a state where the measurement object 11 is installed and the stage device 14 is not rotated. In this process, the stage device 14 is moved so that the measurement object 11, the reference object 12, and the stage device 14 are located outside the X-ray irradiation range. In this state, X-rays are emitted from the X-ray irradiator 15, and X-rays that have passed through the air are detected by the X-ray detector 16 and imaged. Further, X-ray irradiation from the X-ray irradiator 15 is stopped, and imaging is performed under a situation where the X-ray does not reach the X-ray detector 16. The sensitivity adjustment of the X-ray detector 16 is performed based on the imaging results in these totally transmissive and non-transmissive states.

  In step S <b> 6, the photographing process is performed in a state where the measurement object 11 is installed and the stage device 14 is rotated. Specifically, the stage device 14 is moved to the position when the imaging range is adjusted in step S4, and in this state, the stage device 14 is rotated 360 ° while the stage device 14 is rotated based on the detection value of the rotary encoder. The rotation position is detected, and X-ray images of the measurement object 11 and the reference object 12 are taken at each predetermined rotation position (for example, 0.5 °).

  In subsequent step S7, the X-ray image at each rotational position is subjected to image processing such as edge processing and reconstruction by the image processing unit 32, and a three-dimensional image of the measurement object 11 and the reference object 12 is generated. As a reconstruction method, a back projection method, a filter-corrected back projection method, a successive approximation method, or the like can be used. Further, in this step, the generated three-dimensional images of the measurement object 11 and the reference object 12 are displayed on the display unit 37.

  Thereafter, in step S8, the dimension of the reference object 12 is measured from the three-dimensional image of the reference object 12. In the present embodiment, the average diameter is measured as the dimension of the reference object 12. In the subsequent step S <b> 9, the measured average diameter of the reference object 12 is displayed on the display screen of the display unit 37. At this time, the actual size of the reference object 12 is also displayed.

  Here, in the X-ray irradiator 15, some of the electrons colliding with the target become X-rays, but the other part is converted into heat. For this reason, if X-rays are continuously irradiated for a long period of time, the temperature of the target rises and the target may be thermally deformed. When the target is thermally deformed, the X-ray irradiation direction is changed, the X-rays fluctuate, and the position and size of the X-ray image of the measurement object 11 projected on the X-ray detector 16 changes.

  In the present embodiment, since the measurement object 11 and the reference object 12 are photographed simultaneously, the influence of the X-ray fluctuation is also reflected in the X-ray image of the reference object 12. For this reason, when X-ray fluctuations occur during imaging, the effect appears in the measurement dimension value of the reference object 12, and a measurement value different from the actual dimension of the reference object 12 can be obtained. The influence of X-ray fluctuations is also reflected in the three-dimensional image of the reference object 12 such as distortion on the surface of the sphere. Therefore, by comparing the measured dimension value and the actual dimension value of the reference object 12 or referring to the surface shape of the three-dimensional image of the reference object 12, it can be understood that the imaging condition has changed during the imaging.

  When the operator inputs a correction process via the input unit 38 as a result of comparing the measured size value with the actual size value of the reference object 12 or referring to the surface shape of the three-dimensional image of the reference object 12. (YES in step S10), the image correcting unit 34 corrects the three-dimensional image of the measuring object 11 based on the difference between the measured dimension value of the reference object 12 and the actual dimension (step S11). On the other hand, when it is determined that the correction process is not performed (NO in step S10), the photographing process is terminated without performing the correction process on the measurement object 11.

  When measuring the dimensions of the measurement object 11, the corrected three-dimensional image or tomographic image of the measurement object 11 (uncorrected three-dimensional image or tomographic image) is displayed on the display unit 37. In the state displayed on the display screen, the operator designates two points on the display screen, and the dimension measuring unit 33 obtains the distance between the two points.

  As mentioned above, according to the structure of this embodiment explained in full detail, the following outstanding effects are acquired.

A support mechanism 52 that supports the reference object 12 so as to be disposed in the imageable space 40 is provided. Thereby, the reference object 12 and the measurement object 11 can be simultaneously photographed when photographing the X-ray image of each rotational position.

The measurement object 11 and the reference object 12 are configured to rotate integrally, and the relative position between the measurement object 11 and the reference object 12 is fixed regardless of the rotation by the rotation drive unit 21. As a result, the positional relationship between the measurement object 11 and the reference object 12 can be maintained throughout the imaging period, and if the position of the reference object 12 is determined avoiding the measurement object 11, the measurement object 11 and the measurement object 11 can be rotated. The reference object 12 does not come into contact.

  Since the reference object 12 does not contact even if the measurement object 11 rotates, the reference object 12 can be placed close to the measurement object 11 in determining the position of the reference object 12. In this case, even if the reference object 12 is imaged together with the measurement object 11, it is not necessary to enlarge the imageable space 40 or the amount of enlargement can be reduced, so that a reduction in resolution can be suppressed. become.

An adjustment unit (support base 91 and rotation clamp 92) that adjusts the position of the reference object 12 with respect to the measurement object 11 is provided, and the measurement object 11 and the reference object 12 are relative to each other at the position of the reference object 12 adjusted by the adjustment unit. The position can be fixed.

  For example, when the reference object 12 is arranged immediately below the spacer 53 or the pedestal 71, when the reference object 12 is embedded in the spacer 53, or when the reference object 12 is installed on the upper surface of the spacer 53, the measurement object 11 Even if an attempt is made to partially shoot an area relatively far from the installation surface (for example, the upper part of the measurement object 11), there may be a disadvantage that the reference object 12 does not reach the imaging area. In addition, when the reference object 12 is installed on the upper surface of the spacer 53 or the like, the area for installing the measurement object 11 is narrowed by the reference object 12, and the size of the measurement object 11 that can be installed is limited. Problems can also arise.

  In this regard, in the above configuration including the adjustment unit, the height position of the reference object 12 is changed above the installation surface of the measurement object 11 (the upper surface of the spacer 53), so that it is relatively far from the installation surface. The reference object 12 can be delivered even in the area, and it is possible to flexibly respond to a request for partial shooting. In addition, even when there is a space in which the reference object 12 can be arranged in the middle of the measurement object 11 in the height direction, such as a dent in the peripheral surface of the measurement object 11, the reference object is matched to the position of the space. The height position of 12 can be adjusted, and the convenience is greatly improved.

  In the above configuration, the problem that the size of the measurement object 11 that can be installed is limited by the reference object 12 can be solved by changing the lateral position of the reference object 12. That is, prior to the installation of the measurement object 11, when the measurement object 11 is installed from above the installation surface by moving the reference object 12 so as to be retracted from the upper space of the installation surface to the side, It is possible to suppress the installation area from being narrowed by the reference object 12.

  By moving the reference object 12 so as to be close to the measurement object 11, it is possible to arrange the reference object 12 in a state of being close to the measurement object 11 even in the case of the small-size measurement object 11. In addition, if the imageable space 40 is reduced and adjusted to a size suitable for the measurement object 11, the proportion of the measurement object 11 in the X-ray image can be increased, and the resolution can be improved. .

A clamp portion (inner wall surface defining the through hole 98) that can hold the advance / retreat position of the support arm 93 is provided in the rotary clamp 92, and a pair of presser portions (clamps) that can hold the rotation angle of the rotary clamp 92. A screw 101 and a wall portion 95b) are provided on the support base 91, and a rotating clamp 92 is arranged between the pair of presser portions so that the clamp direction of the clamp portion is coincident with the clamp direction of the pair of presser portions. As a result, the forward / backward position of the support arm 93 and the rotation angle of the rotation clamp 92 can be held by one fastener (clamp screw 101), and the holding (or release of the holding state) can be tightened once. (Or loosening operation). Therefore, it is possible to reduce the number of parts and improve workability.

  Note that the clamping direction of the support base 91 and the clamping direction of the rotation clamp 92 do not necessarily coincide with each other, and the clamping force by the pair of pressing portions in the support base 91 acts in the clamping direction of the rotation clamp 92. For example, the configuration is arbitrary.

The inclined surface 102 is provided at the tip of the support arm 93, and the reference object 12 is installed on the inclined surface 102. Thereby, when the support arm 93 is inclined, the reference object 12 can be in a horizontal posture, and the degree of inclination of the reference object 12 can be suppressed to a small level.

  The inclined surface 102 of the support arm 93 may be reversely inclined. In this case, the support arm 93 can be suspended and supported obliquely from above the measurement object 11, and the support arm 93 can be rotated so as to move upward from a state in which the support arm 93 hangs down.

The radiation absorption rate of the support arm 93 was made lower than the radiation absorption rates of the reference object 12 and the measurement object 11. Thereby, the reflection of the support arm 93 on the X-ray image is suppressed, and adverse effects on the imaging result are suppressed.

  The present invention is not limited to the above embodiment, and may be implemented as follows, for example.

(1) In the above embodiment, the stage device 14 is rotated, but the X-ray irradiator 15 and the X-ray detector 16 may be rotated after the stage device 14 is configured not to rotate. At the same time as rotating 14, the X-ray irradiator 15 and the X-ray detector 16 may be rotated in the opposite direction. The configuration is arbitrary as long as the measurement object 11 and the X-ray can be rotated relatively.

(2) In the above embodiment, the reference object 12 is formed in a spherical shape, but may have a shape other than a spherical shape such as a columnar shape, a conical shape, or a prism shape.

(3) In the above embodiment, the support arm 93 is formed in a columnar shape, but may have other shapes such as a prismatic shape. In this case, the through hole 98 of the rotating clamp 92 may be shaped to match the shape of the support arm 93.

(4) In the above embodiment, the position of the reference object 12 can be adjusted in both the vertical direction and the horizontal direction, but it may be adjustable only in either the vertical direction or the horizontal direction.

(5) In the above-described embodiment, the support arm 93 is configured to advance and retreat and rotate. Instead of this, a mechanism for moving the reference object 12 linearly in the vertical direction and a straight line for moving the reference object 12 in the horizontal direction. And a mechanism for moving it in a shape.

(6) In the above embodiment, the rotating ring portion 67 is provided, but instead of or in addition, a mechanism (for example, a slide mechanism) that moves the reference object 12 linearly in the front-rear direction with respect to the measurement object 11 is provided. May be.

(7) In the above embodiment, X-rays are used as radiation. However, other radiations such as γ-rays and microwaves can be used as long as the radiation has transparency to the measurement object 11.

(8) In the above-described embodiment, the measurement object 11 is rotated 360 °. However, the rotation amount of the measurement object 11 may be less than 360 ° or more than 360 °.

(9) In the above embodiment, the entire support arm 93 is formed so that the X-ray absorption rate is lower than that of the measurement object 11 and the reference object 12, but X-ray absorption is at least in a portion included in the imageable space 40. What is necessary is just to form so that a rate may become low.

(10) In the above embodiment, the measurement object 11 is installed on the spacer 53, but the measurement object 11 may be directly installed on the upper surface of the pedestal portion 71 without the spacer 53. As in the case of the spacer 53, the measurement object 11 can be fixed using a double-sided tape sticking structure, a non-slip structure, an adsorption structure, or the like. In this case, it is preferable to set the height positions of the support base 91 and the rotation clamp 92 so that their upper end positions are below the upper surface of the pedestal portion 71.

(11) In the above embodiment, the upper end positions of the support base 91 and the rotation clamp 92 are positioned below the upper surface of the spacer 53 (the installation surface of the measurement object 11), but are positioned above the upper surface of the spacer 53. May be. Thereby, it can avoid more suitably that the support arm 93 interferes with the spacer 53 and the base part 71, and the position adjustment range of the reference | standard thing 12 in the imaging | photography possible space 40 can be expanded. However, since the support base 91 and the rotating clamp 92 may enter the imageable space 40, their X-ray absorption rates are made lower than the X-ray absorption rates of the measurement object 11 and the reference object 12. It is preferable to perform material selection and structural design.

(12) In the above embodiment, the support arm 93 is formed in a straight line. However, a part of the support arm 93 is bent to the spacer 53 side, or the entire support arm 93 is convex to the opposite side to the spacer 53 side. It may be formed in a circular arc shape. This makes it easy to bring the reference object 12 closer to the lower part of the measurement object 11.

(13) In the above embodiment, the position of the reference object 12 is manually adjusted. However, a configuration may be adopted in which a drive source is provided and mechanically moved. At this time, a camera that photographs the measurement object 11 from above may be provided, and the operator may move the reference object 12 by operating the rotating clamp 92 and the support arm 93 while viewing the photographed image of the camera. An appropriate space may be detected by analyzing the captured image of the camera, and the reference object 12 may be automatically moved to the detected space.

(14) In the above embodiment, the diameter of the reference object 12 is measured from the three-dimensional image of the reference object 12, but the diameter of the reference object 12 may be measured from a two-dimensional X-ray image. For example, it is possible to use a two-dimensional X-ray image taken at the end of rotational imaging including the final shot. A period from the start of X-ray irradiation to the occurrence of X-ray fluctuations is sampled in advance for each X-ray intensity, and a reference is made using a two-dimensional X-ray image taken after the passage of the period in actual rotational imaging. The diameter of the object 12 may be measured.

  DESCRIPTION OF SYMBOLS 10 ... Radiation imaging device, 11 ... Measurement object, 12 ... Reference object, 14 ... Stage device, 15 ... X-ray irradiator, 16 ... X-ray detector, 21 ... Rotation drive part, 52 ... Support mechanism, 67 ... Rotation Ring part, 69 ... Notch mechanism, 76 ... Groove part, 91 ... Support base, 92 ... Rotating clamp, 93 ... Support arm, 95b ... Wall part, 96 ... Through hole, 101 ... Clamp screw, 102 ... Inclined surface.

Claims (8)

An installation unit in which a measurement object is installed, a radiation source that irradiates radiation toward the measurement object, an imaging unit that captures a radiation image based on the radiation that has passed through the measurement object, the measurement object, and the radiation A radiological imaging apparatus that captures the radiographic image at each rotational position by the imaging unit while performing the rotation by the rotation mechanism,
A reference and
The reference object is supported so that the reference object is included in each radiographic image, and the reference object, the measurement object, and the measurement object regardless of the rotation of the rotation mechanism during the radiographic image capturing period. A support part capable of fixing the relative position of
An adjustment unit for adjusting the position of the reference object with respect to the measurement object;
With
The radiographic imaging apparatus according to claim 1, wherein the support unit is capable of fixing a relative position between the reference object and the measurement object at the position of the reference object adjusted by the adjustment unit. The support part is configured to be able to arrange the reference object above the installation surface of the installation part,
The radiographic image capturing apparatus according to claim 1, wherein the adjustment unit is configured to be capable of adjusting a position of the reference object above the installation surface. The support portion includes a support arm that supports the reference object,
The adjustment unit is
A rotating means for allowing the support arm to rotate in a plane intersecting an installation surface of the installation unit;
Changing means for changing a distance between the reference object and the rotation axis of the support arm;
The radiographic imaging apparatus according to claim 1, wherein the radiographic image capturing apparatus is provided. The support portion includes a support arm that supports the reference object,
The adjustment unit is
A first support that supports the support arm so as to advance and retreat in the length direction;
A second support that rotatably supports the first support;
With
The first support includes a clamp portion that can clamp the support arm and hold the advance / retreat position of the support arm,
The second support includes a pair of pressers that can clamp the first support and hold the rotation angle of the first support.
Between the pair of presser portions in the second support body, the first support body is disposed such that a clamping force by the pair of presser portions acts in a clamping direction of the clamp portion. The radiographic imaging device according to claim 1 or 2. The support arm is provided with an inclined surface that obliquely intersects the length direction of the support arm,
The radiographic image capturing apparatus according to claim 3, wherein the reference object is installed on the inclined surface of the support arm.   6. The radiation absorption rate of at least a portion included in each radiation image of the support portion is lower than the radiation absorption rate of the reference object and the measurement object. 6. Radiation imaging device. Moving means capable of moving the support portion in a circumferential direction of the installation portion;
Holding means for holding the position of the support portion moved by the moving means;
The radiographic imaging device according to claim 1, comprising: While irradiating radiation from a radiation source toward the measurement object installed in the installation unit, the measurement object and the radiation are relatively rotated by a rotation mechanism, and based on the radiation transmitted through the measurement object by the imaging unit In a radiographic image capturing method for capturing a radiographic image at each rotational position,
The position of the reference object is adjusted within a range in which the reference object is included in each radiation image in a state where the reference object is separated from the measurement object and the installation unit, and the reference object is adjusted at the adjusted position of the reference object. A radiographic imaging method comprising: rotating the rotation mechanism while fixing a relative position between a reference object and the measurement object.

Images