JP6201394B2 - X-ray source, X-ray device - Google Patents

Description

The present invention, X-ray source, those about the X SenSo location.

  An X-ray apparatus that has an X-ray source that irradiates an object with X-rays and includes a detection device that detects transmitted X-rays transmitted through the object is known as a non-destructive apparatus for acquiring information inside the object. Yes. As an X-ray source used in such an X-ray apparatus, for example, one disclosed in Patent Document 1 below is known.

JP 2005-174715 A

  In the X-ray source, a region restricting body having an opening is provided at an electron focusing position. The spot diameter of the electrons is minimized by blocking a part of the electrons by the region limiter. However, the region limiter generates heat because it blocks some of the blocking electrons.

  An aspect of the present invention is directed to an X-ray source, an X-ray apparatus, and a method for manufacturing a structure that can efficiently dissipate heat generated in a region limiter.

  According to the first aspect of the present invention, the electron optical system that is arranged between the electron source and the target and focuses the electrons at a predetermined position, and the part of the electrons focused by the electron optical system is limited. An aperture unit in which an opening is formed, and the aperture unit includes an extending portion that extends outward along a second direction in which the electrons cross the first direction toward the target. Is provided.

  According to the second aspect of the present invention, an X-ray comprising the X-ray source of the first aspect and detecting transmitted X-rays passing through the object by irradiating the object with the X-ray generated by the X-ray source. An apparatus is provided.

  According to the third aspect of the present invention, a design process for creating design information related to the shape of the structure, a molding process for creating the structure based on the design information, and the shape of the created structure There is provided a manufacturing method of a structure including a measurement process for measurement using the X-ray apparatus of the second aspect, and an inspection process for comparing the shape information acquired in the measurement process with the design information.

  According to the present invention, the heat generated in the region limiting body can be efficiently dissipated.

1 is a schematic configuration diagram showing an example of an X-ray apparatus according to a first embodiment. Sectional drawing which shows schematic structure of the X-ray source which concerns on 1st Embodiment. The figure which shows the structure of the vicinity of the emission part in the X-ray source which concerns on 1st Embodiment. The expanded sectional view showing the important section composition of the X-ray source concerning a 1st embodiment. The block block diagram which shows an example of the structure manufacturing system which concerns on 2nd Embodiment. The flowchart which showed the flow of the process in the structure manufacturing system which concerns on 2nd Embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited thereto. Note that the requirements of the embodiments described below can be combined as appropriate.
Some components may not be used. In addition, as long as it is permitted by law, the disclosure of all published publications and US patents related to the X-ray source and detection apparatus cited in each embodiment and modification are incorporated herein by reference.

  In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ orthogonal coordinate system. The X axis, the Y axis, and the Z axis intersect perpendicularly. A direction parallel to the X axis is defined as an X axis direction, a direction parallel to the Y axis is defined as a Y axis direction, and a direction parallel to the Z axis is defined as a Z axis direction. The rotation (tilt) directions around the X axis, Y axis, and Z axis are the θX, θY, and θZ directions, respectively.

<First Embodiment>
A first embodiment will be described. FIG. 1 is a schematic configuration diagram illustrating an example of an X-ray apparatus 1 according to the present embodiment.

  The X-ray apparatus 1 irradiates the measurement object S with X-rays and detects transmitted X-rays transmitted through the measurement object S. X-rays are electromagnetic waves having a wavelength of about 1 pm to 30 nm, for example. The X-ray includes at least one of an ultra-soft X-ray of about 50 keV, a soft X-ray of about 0.1 to 2 keV, an X-ray of about 2 to 20 keV, and a hard X-ray of about 20 to 100 keV.

  In the present embodiment, the X-ray apparatus 1 irradiates the measurement object S with X-rays, detects transmitted X-rays transmitted through the measurement object S, and detects information inside the measurement object S (for example, an internal structure). X-ray CT inspection apparatus which acquires non-destructively. In the present embodiment, the measurement object S includes, for example, mechanical parts, electronic parts, and other industrial parts. The X-ray CT inspection apparatus includes an industrial X-ray CT inspection apparatus that irradiates industrial parts with X-rays and inspects the industrial parts.

  As shown in FIG. 1, an X-ray apparatus 1 includes an X-ray source 2 that emits X-rays, and a stage apparatus 3 that holds and can move a measurement object S irradiated with X-rays from the X-ray source 2. The detection device 4 that detects at least a part of the X-rays (transmission X-rays) emitted from the X-ray source 2 and passed through the measurement object S held by the stage device 3 and the overall operation of the X-ray device 1 are controlled. And a control device 5 for performing the above operation.

  The X-ray apparatus 1 also includes a chamber member 6 that forms an internal space SP in which X-rays emitted from the X-ray source 2 travel. In the present embodiment, the X-ray source 2, the stage device 3, and the detection device 4 are disposed in the internal space SP.

The chamber member 6 is disposed on the support surface FR. The support surface FR includes a floor surface of a factory or the like.
The chamber member 6 is supported by a plurality of legs 6S. The chamber member 6 is arrange | positioned on the support surface FR via the leg part 6S. The leg portion 6S separates the lower surface of the chamber member 6 from the support surface FR. That is, a space is formed between the lower surface of the chamber member 6 and the support surface FR. Note that at least a part of the lower surface of the chamber member 6 may be in contact with the support surface FR.

  In this embodiment, the chamber member 6 contains lead. The chamber member 6 suppresses the X-rays in the internal space SP from leaking into the external space RP of the chamber member 6.

  The X-ray source 2 irradiates the measurement object S with X-rays. The X-ray source 2 has an emission unit 7 that emits X-rays. The X-ray source 2 forms a point X-ray source. In the present embodiment, the emission unit 7 includes a point X-ray source. The X-ray source 2 irradiates the measurement object S with conical X-rays (so-called cone beam). The X-ray source 2 can adjust the intensity of the emitted X-ray. Based on the X-ray absorption characteristics of the measurement object S, the intensity of the X-rays emitted from the X-ray source 2 may be adjusted. The shape in which the X-rays emitted from the X-ray source 2 spread is not limited to a conical shape, and may be a fan-shaped X-ray (so-called fan beam), for example. The X-rays emitted from the X-ray source 2 may be linear X-rays (so-called pencil beams) that are constant in the emission direction (Z-axis direction).

  In the present embodiment, at least part of the X-rays from the X-ray source 2 travels in the Z-axis direction in the internal space SP. The injection unit 7 faces the + Z direction. At least a part of the X-rays emitted from the emission part 7 travels in the + Z direction in the internal space SP. That is, in the present embodiment, the X-ray irradiation direction is the Z-axis direction.

  In the present embodiment, the X-ray source 2, the stage device 3, and the detection device 4 are arranged in the Z-axis direction. The stage device 3 is disposed on the + Z side of the X-ray source 2. The detection device 4 is disposed on the + Z side of the stage device 3.

  In the present embodiment, the X-ray apparatus 1 includes a support member 8 that supports the X-ray source 2, the stage apparatus 3, and the detection apparatus 4. The support member 8 is disposed in the internal space SP of the chamber member 6. The support member 8 is disposed on the bottom surface 6T of the internal space SP. The position of the support member 8 is substantially fixed in the internal space SP. The support member 8 supports the X-ray source 2, the stage device 3, and the detection device 4 together.

  The thermal expansion coefficient of the support member 8 is smaller than the thermal expansion coefficient of the chamber member 6. The support member 8 is less susceptible to thermal deformation than at least the chamber member 6.

  In the present embodiment, the support member 8 is formed of a low thermal expansion material. In the present embodiment, the support member 8 includes, for example, invar. Invar is an alloy of about 36% nickel and about 64% iron.

  In the present embodiment, the support member 8 is composed of one member. The support member 8 may be a combination of a plurality of members.

  The stage device 3 is movable in the internal space SP. The stage device 3 is movable in a space on the + Z side of the injection unit 7 in the internal space SP. The stage device 3 is movable on the support member 8. In the present embodiment, the stage device 3 is movable in six directions, that is, an X axis, a Y axis, a Z axis, a θX, a θY, and a θZ direction. The stage device 3 is movable by the operation of the drive system 9. By the operation of the drive system 9, the measurement object S held by the stage device 3 can move in six directions including the X-axis, Y-axis, Z-axis, θX, θY, and θZ directions. The drive system 9 includes a motor that operates by Lorentz force, such as a linear motor or a voice coil motor. The drive system 9 may include a piezo element. For example, the drive system 9 may move the stage device 3 (measurement object S) in at least one direction of the X axis, the Y axis, the Z axis, θX, θY, and θZ using a piezo element.

  At least a part of the stage device 3 can face the injection unit 7. The stage apparatus 3 can arrange the held measurement object S at a position facing the injection unit 7. The stage apparatus 3 can arrange the measurement object S on a path through which the X-rays emitted from the emission unit 7 pass. The stage apparatus 3 can arrange the measurement object S within the irradiation range of the X-rays emitted from the emission unit 7.

  The detection device 4 is arranged on the + Z side with respect to the X-ray source 2 and the stage device 3 in the internal space SP. The position of the detection device 4 is substantially fixed in the internal space SP. Note that the detection device 4 may be movable. The stage device 3 can move in the space between the X-ray source 2 and the detection device 4 in the internal space SP.

  The detection device 4 includes a scintillator unit 11 having an incident surface 10 on which X-rays from the X-ray source 2 including transmitted X-rays transmitted through the measurement object S are incident, and a light receiving unit 12 that receives light generated in the scintillator unit 11. And have. The incident surface 10 of the detection device 4 can face the measurement object S held by the stage device 3.

  The scintillator unit 11 includes a scintillation substance that generates light having a wavelength different from that of the X-rays when it hits the X-rays. The light receiving unit 12 includes a photomultiplier tube. The photomultiplier tube includes a phototube that converts light energy into electrical energy by a photoelectric effect. The light receiving unit 12 amplifies the light generated in the scintillator unit 11, converts it into an electrical signal, and outputs it.

  The detection device 4 includes a plurality of scintillator units 11. A plurality of scintillator units 11 are arranged in the XY plane. The scintillator units 11 are arranged in an array. A plurality of light receiving units 12 are arranged so as to be connected to each of the plurality of scintillator units 11. Note that the detection device 4 may directly convert incident X-rays into electric signals without converting them into light.

FIG. 2 is a cross-sectional view showing a schematic configuration of the X-ray source 2 according to the present embodiment, and FIG. FIG. 4 is an enlarged cross-sectional view showing the main configuration of the X-ray source 2.
As shown in FIG. 2, the X-ray source 2 includes a filament 13 that is an electron source that emits electrons, a target 14 that generates X-rays by collision of electrons or transmission of electrons, and a conductor that guides electrons to the target 14. A member 15 and an aperture unit 16 that restricts a part of electrons directed to the target 14 are provided.

  The conductor member 15 is disposed between the filament 13 and the target 14 and focuses the electrons from the filament 13 at a predetermined position. The aperture unit 16 is disposed at or near the position where the electrons are focused by the conductive member 15, and restricts a part of the electrons gathered at the focused position.

  The X-ray source 2 includes an exterior body 17 that houses the filament 13, the conductor member 15, and the aperture unit 16. The filament 13 and the conductor member 15 are accommodated in the internal space of the exterior body 17. An apparatus different from the X-ray source 2 may have the filament 13.

  In the present embodiment, the exterior body 17 is composed of a plurality of members. The exterior body 17 includes a housing 27 provided on the front end side in the + Z-axis direction. The housing 27 serves as a holding member that holds the target 14 and the aperture unit 16 and constitutes a part of the exterior body 17.

  The internal space of the exterior body 17 is substantially kept in a vacuum. In the present embodiment, the internal space of the exterior body 17 is connected to the vacuum device 2A. The vacuum apparatus 2A includes a pump for discharging the air in the internal space to the outside.

  In the present embodiment, the X-ray source 2 includes a cooling device 2B for keeping the temperature of the exterior body 17 constant. In particular, the cooling device 2 </ b> B efficiently absorbs the heat generated from the target 14, the conductor member 15, and the aperture unit 16, so that the temperature rise of the exterior body 17 can be suppressed. Note that a cooling device for keeping the temperature of the exterior body 17 constant and a cooling device for keeping the temperature of the target 14 constant may be used. Further, the cooling device includes a device for introducing a temperature-adjusted fluid (liquid or air) into a flow path provided inside the target 14 (see FIG. 3). That is, the temperature of the target 14 may be kept constant by introducing a temperature-adjusted liquid or air into a flow path provided inside the target 14.

  The filament 13 includes, for example, tungsten. The filament 13 is wound in a coil shape. When a current flows through the filament 13 and the filament 13 is heated by the current, electrons (thermoelectrons) are emitted from the filament 13. The tip of the filament 13 is sharp. Electrons are emitted from the pointed portion of the filament 13.

  The target 14 includes, for example, tungsten, and generates X-rays by electron collision or electron transmission. In the present embodiment, the X-ray source 2 is a so-called transmission type. In the present embodiment, the target 14 generates X-rays by the passage of electrons.

  There is a predetermined potential difference between the target 14 and the filament 13. For example, a potential difference corresponding to 160 KeV or 225 KeV is applied. When a voltage is applied between the target 14 and the filament 13 with the target 14 as the anode and the filament 13 as the cathode, the thermoelectrons that have jumped out of the filament 13 are accelerated toward the target (anode) 13. Irradiated. Thereby, X-rays are generated from the target 14. In the present embodiment, 99.9% of the thermoelectrons irradiated to the target 14 are converted into heat, and 0.1% are converted into X-rays.

  The conductor member 15 is arranged between the filament 13 and the target 14 in at least a part of the periphery of the passage of electrons from the filament 13. In the present embodiment, a plurality of conductor members 15 are arranged between the filament 13 and the target 14. The conductor member 15 includes, for example, an electronic lens such as a focusing lens and an objective lens, or a polarizer. Further, the conductor member 15 may be a member that reduces aberrations at the target 14. For example, the conductor member 15 may be a stigmator that corrects astigmatism on the optical axis. The conductor member 15 focuses the electrons from the filament 13 and guides them to the target 14. The conductor member 15 causes electrons to collide with a partial region (X-ray focal point) of the target 14.

  In the present embodiment, the aperture unit 16 shields electrons in the outer peripheral portion of the electron bundle focused by the conductor member 15. The size (spot size) of a region (portion) where electrons collide with the target 14 via the aperture unit 16 is sufficiently small. Thereby, the electron beam bundle having a spot size of about 0.3 μm can be formed by shielding electrons that are not completely focused by the conductor member 15. In the present embodiment, the emission unit 7 that is a region where electrons collide with the target 14 substantially constitutes a point X-ray source.

As shown in FIG. 3, in this embodiment, the conductor member 15 closest to the target 14 (hereinafter also referred to as a conductor member 15 </ b> A) is composed of, for example, an electron lens.
The conductor member 15 </ b> A includes a coil portion 18 and a yoke portion 19. The coil part 18 is comprised by winding a copper wire, for example. The yoke part 19 is comprised from material with high magnetic permeability, such as soft iron, for example.

  The yoke portion 19 has a substantially circular cross section in the XY plane that intersects the Z-axis direction, which is the X-ray irradiation direction, and has a cylindrical shape in which a through hole 20 is formed. In addition, the shape of the target may have a conical shape having a tapered shape in which the diameter of the circle decreases toward the target 14. A through hole 20 is formed in the yoke portion 19 along the Z-axis direction. The through hole 20 is for guiding electrons from the filament 13 to the target 14.

  In the present embodiment, the cooling device 2 </ b> B introduces a temperature-adjusted fluid (for example, water) into the flow path 40 provided on the −Z direction side of the yoke portion 19.

The through hole 20 is circular when viewed from the Z-axis direction.
The conductor member 15 </ b> A guides electrons to the target 14 through the through hole 20 along the Z-axis direction coinciding with the central axis direction of the through hole 20. In the present embodiment, the conductor member 15 (15A) has a Z-axis in a direction substantially parallel to a virtual line connecting the filament 13 and the target 14 (direction substantially parallel to the electron path from the filament 13). Match the direction. In the following description, a direction substantially parallel to a virtual line connecting the filament 13 and the target 14 is appropriately referred to as a central axis (central optical axis) direction of the conductor member 15 (15A).

  In this embodiment, the aperture unit 16 is attached to the end of the through hole 20 on the target 14 side. The aperture unit 16 has an aperture 16a in which an opening is formed and an electron beam passes.

  The aperture unit 16 is made of a material having relatively high thermal conductivity, for example, brass, tungsten alloy, copper, or the like. In this embodiment, it is comprised from one member, However, The diaphragm for forming the opening of the aperture part 16a and the other site | part may be comprised from another member.

  The aperture 16a and the through hole 25 are formed with openings so as to extend in the common Z-axis direction. The aperture portion 16a and the through hole 25 are circular when viewed from the Z-axis direction.

  Some of the electrons that have passed through the through-hole 20 restrict the passage of some of the electrons incident on the aperture portion 16a from the target 14 side.

  In the present embodiment, the aperture portion 16a has a function as a diaphragm (a diaphragm) that restricts a part of electrons collected at the focusing position by the conductor member 15A. The aperture portion 16a shields electrons that could not be focused by the conductor member 15, that is, electrons focused at a position away from the central axis.

  The aperture unit 16 includes a main body portion 23 having a cylindrical shape and an extending portion 24 extending outward along the radial direction of the main body portion 23. The aperture unit 16 is supported by the yoke portion 19 by inserting a part of the main body portion 23 into the through hole 20. The extending portion 24 only needs to have a larger diameter than the diameter of the through hole 20 formed in the yoke portion 19. Preferably, it should have a shape extending radially in a plane perpendicular to the propagation direction of the electron beam with the center of the opening as the center. However, in the present invention, a shape extending only in the Y direction shown in FIG. 3 or a shape extending only in the Y direction may be used.

  The outer diameter of the main body portion 23 is equal to or smaller than the inner diameter of the through hole 20. A seal member 26 made of, for example, a rubber ring or a resin material is provided on the outer surface of the main body 23 over the entire circumferential direction. The sealing member 26 substantially holds the internal space of the through hole 20 in a vacuum by sealing the gap between the main body portion 23 and the through hole 20.

  The extending part 24 extends from the main body part 23 along the X direction and the Y direction (second direction) that intersect with the Z-axis direction (first direction), which is the direction in which electrons are directed toward the target 14. In the present embodiment, the extending portion 24 is provided in a bowl shape over the entire circumference of the main body portion 23 as viewed from the Z-axis direction.

  The extending portion 24 is provided at the position where the aperture portion 16a is formed in the aperture unit 16 (main body portion 23) in the Z-axis direction. The extending portion 24 includes a first surface 24a facing the inner surface of the housing 27, a second surface 24b opposite to the first surface 24a in the Z direction, and the first surface 24a and the second surface. And a third surface 24c connecting 24b. The third surface 24 c of the extending portion 24 constitutes a contact portion that contacts the inner surface of the housing 27 (hereinafter also referred to as the contact portion 24 c).

  The housing 27 is connected to a conical main body 27a whose inner diameter narrows in the + Z direction, to the −Z direction side of the main body 27a, to a fixed portion 27b fixed to the yoke portion 19, and to the + Z direction side of the main body 27a. And a support portion 27c that faces the + Z direction side surface (first surface 24a) of the extension portion 24 and indirectly supports the aperture unit 16.

  The main body 27 a has an inner surface shape corresponding to the outer shape of the coil portion 18. The inner surface of the main body 27a has a tapered shape that approaches the central axis of the main body 23 as it goes in the + Z-axis direction.

  The first surface 24a of the extending portion 24 includes, for example, a seal member arrangement region (sealing member arrangement region) 28a where a seal member (first sealing member) 28 such as an O-ring is provided. The seal member 28 holds the electron passage region in the aperture unit 16 in a vacuum state.

  In the embodiment, the extension part 24 has a function of increasing the area in contact with the housing 27, but the extension part 24 does not necessarily need to be in direct contact with the housing 27. As described later, a heat conductive layer 30 may be interposed. Moreover, the extension part 24 should just have the length extended from the main-body part 23 to the outer side at least rather than the sealing member arrangement | positioning area | region 28a.

  As shown in FIG. 3, the contact portion 24 c has a tapered shape in which the thickness in the Z direction becomes thinner as the distance from the central axis of the main body portion 23, which is an electron passage region, increases. On the other hand, the contact portion 27 ′ of the housing 27 with the extending portion 24 has a reverse taper shape in which the thickness in the Z direction increases as the distance from the central axis of the main body portion 23 increases.

  In the extending portion 24, the contact portion 24 c comes into contact with the housing 27 via the paste-like heat conductive layer 30. In the present embodiment, the heat conductive layer 30 is disposed between the contact portion 24 c of the extending portion 24 and the contact portion 27 ′ of the housing 27.

  As shown in FIG. 4, the heat conductive layer 30 includes a sheet-like resin layer 30a and heat conductive particles 30b mixed in the resin layer 30a. The resin layer 30a is, for example, an acrylic resin or a silicon resin. Further, the heat conductive particles 30 b are made of a metal having higher heat conductivity than the extending portion 24.

  The target 14 is disposed at a position facing the support portion 27 c of the housing 27. The target 14 is attached to the housing 27 via the target holding part 31. The target holding portion 31 is supported by a holding portion 29 provided on the outer surface of the main body 27 a of the housing 27. Between the holding part 29 and the target holding part 31, for example, a seal member 32a such as an O-ring is provided. The seal member 32 a substantially holds the internal space of the X-ray source 2 in a vacuum by sealing a gap at a connection portion between the holding unit 29 and the target holding unit 31.

  Between the target holding part 31 and the support part 27c of the housing 27, for example, a sealing member (second sealing member) 32b such as an O-ring is provided. The sealing member 32b substantially holds the internal space of the X-ray source 2 in a vacuum by sealing the gap between the housing 27 and the target holding unit 31. The seal member 32b holds the space SP1 surrounded by the target 14, the target holding portion 31, the housing 27, and the aperture unit 16 in a hermetically sealed state, and holds the vacuum substantially. The space SP1 is a region through which electrons traveling toward the target 14 pass.

  When the target 14 is irradiated with electrons in the X-ray source 2, a part of the energy of the electrons becomes X-rays and a part of the energy becomes heat. Due to the electron irradiation to the target 14, the temperature of the target 14, the space around the target 14, and the members disposed in the vicinity of the target 14 rise.

  In the present embodiment, the X-ray source 2 substantially constitutes a point X-ray source in the emission unit 7 by blocking a part of electrons directed to the target 14 by the aperture unit 16 a of the aperture unit 16. Therefore, there is a possibility that the temperature of the aperture part 16a and the aperture unit 16 that shields a part of the electrons traveling toward the target 14 will increase greatly.

  When the temperature of the aperture portion 16a and the aperture unit 16 rises, the surrounding seal members 26, 32a, and 32b may be deteriorated by heat.

  In the present embodiment, since the internal space of the X-ray source 2 is substantially kept in a vacuum by the seal members 26, 32 a, and 32 b, when the seal members 26, 32 a, and 32 b deteriorate, the outside air ( Oxygen and nitrogen) may enter. As described above, the electrons generated in the filament 13 collide with oxygen atoms or nitrogen atoms, thereby losing energy, and the X-ray generation efficiency may be reduced. As a result, the detection accuracy (detection accuracy, measurement accuracy) of the detection device 4 may be reduced.

  In the present embodiment, the aperture unit 16 has an extending portion 24 that extends outward along the radial direction of the main body portion 23. The aperture 16a increases in temperature by shielding electrons. The temperature of the body portion 23 in which the aperture portion 16a is formed rises together with the aperture portion 16a. The extending portion 24 is provided at the position where the aperture portion 16a is formed in the aperture unit 16 (main body portion 23) in the Z-axis direction. Therefore, the heat of the main body portion 23 is efficiently diffused to the extending portion 24. Due to the presence of the extending portion 24, the thermal resistance of the aperture unit 16 is reduced. Therefore, the heat generated in the diaphragm forming the aperture portion 16a can be efficiently discharged to the extending portion 24. That is, the heat generated by the diaphragm is diffused to the extending portion 24 side through the main body portion 23. Therefore, in this embodiment, for example, even if heat is generated by shielding electrons in the diaphragm, the temperature increase of the aperture unit 16 is suppressed by diffusing the heat to the extending portion 24. Therefore, the deterioration of the seal members 26, 32a, 32b is suppressed, and the internal space of the X-ray source 2 can be maintained in a substantially vacuum for a long period. Therefore, the X-ray source 2 can efficiently generate X-rays. Further, heat can be efficiently released to the housing 27 and transmitted to the exterior body 17 via the housing 27. Since the fluid flow path 40 circulating between the exterior body 17 and the cooling device 2B is formed, the heat generated in the diaphragm is efficiently transmitted to the cooling device 2B. Therefore, since the exterior body 17 including the yoke portion 19 and the housing 27 that hold the electron optical system is not extremely heated, the displacement due to the thermal expansion of the exterior body 17 can be reduced. For this reason, since the target 14 supported by the housing 27 has little displacement caused by the heat generated by the diaphragm, the detection accuracy of the detection device 4 that detects the shape of the object to be measured by X-ray exposure over a long period of time ( Reduction in detection accuracy and measurement accuracy) is suppressed.

  Moreover, in this embodiment, since the extension part 24 is provided over the perimeter of the main-body part 23 seeing from a Z-axis direction, an aperture part is made to spread | diffuse heat over the perimeter direction of the main-body part 23. The temperature rise of 16a is suppressed. Further, since the extending portion 24 is provided, the area that is in thermal communication with the housing 27 is increased. Therefore, the heat of the diaphragm can be efficiently discharged to the housing 27.

  In the present embodiment, the extending portion 24 has a contact portion 24 c that contacts the housing 27. The contact portion 24 c has a shape that follows the inner surface of the housing 27. Therefore, the heat diffused from the aperture portion 16a to the extending portion 24 is diffused to the housing 27 through the contact portion 24c. Therefore, it is possible to suppress deterioration of the peripheral seal members 26, 32a, and 32b due to the temperature rise of the aperture portion 16a and the aperture unit 16.

  Further, in the present embodiment, since the heat conductive layer 30 is provided in the contact portion 24c, the heat of the extending portion 24 can be efficiently diffused to the housing 27 side via the heat conductive layer 30. Since the heat conductive layer 30 includes the heat conductive particles 30b made of a metal having higher heat conductivity than the extending portion 24, the heat of the extending portion 24 is efficiently transferred to the housing 27 side by the heat conductive particles 30b. Can be diffused.

  Since the heat conductive layer 30 is composed of a paste including the resin layer 30 a, the heat conductive layer 30 enters the gap between the extension portion 24 and the housing 27 satisfactorily. Therefore, the heat conductive layer 30 can be made into the state which filled the clearance gap between the extension part 24 and the housing 27 which arise, for example by dimensional tolerance. Moreover, since the resin layer 30a is made of, for example, acrylic resin or silicon resin having a predetermined resistance against X-rays generated at the target 14, good resistance is obtained in the vicinity of the target 14 where X-rays are generated. be able to.

  In the present embodiment, the cooling device 2B introduces a fluid (for example, water) whose temperature has been adjusted to the flow path 40 provided on the −Z direction side of the yoke portion 19. Therefore, the temperature increase of the yoke unit 19 and the aperture unit 16 provided in the yoke unit 19 is suppressed by the flow path 40.

  In addition, in this embodiment, although the heat conductive layer 30 was comprised from the paste-form thing, you may be comprised from the film-form material.

  Note that the cooling device may adjust the temperature of the target 14 so that the temperature of the target 14 does not exceed a predetermined temperature. In the present embodiment, the X-ray source 2 includes the cooling device 2B, but the X-ray source 2 may not include the cooling device 2B. For example, the chamber member 6 may include a cooling device. For example, the X-ray apparatus 1 may not include a cooling device. An apparatus different from the X-ray apparatus 1 may include a cooling device.

  Next, an example of the operation of the X-ray apparatus 1 according to this embodiment will be described. In the detection, the measurement object S is held on the stage device 3. The control device 5 controls the stage device 3 to place the measurement object S between the X-ray source 2 and the detection device 4.

The control device 5 passes a current through the filament 13 in order to emit X-rays from the X-ray source 2.
Thereby, the filament 13 is heated and electrons are emitted from the filament 13. Electrons emitted from the filament 13 are irradiated to the target 14 through the aperture unit 16. Thereby, X-rays are generated from the target 14.

  At least a part of the X-rays generated from the X-ray source 2 is irradiated on the measurement object S. When the measurement object S is irradiated with X-rays from the X-ray source 2, at least a part of the X-rays irradiated on the measurement object S passes through the measurement object S. The transmitted X-rays that have passed through the measurement object S enter the incident surface 10 of the detection device 4. The detection device 4 detects transmitted X-rays that have passed through the measurement object S. The detection device 4 detects an image of the measurement object S obtained based on the transmitted X-rays transmitted through the measurement object S. The detection result of the detection device 4 is output to the control device 5.

  In this embodiment, the control device 5 changes the position of the measurement object S from the X-ray source 2 while changing the position of the measurement object S in order to change the irradiation region of the measurement object S from the X-ray source 2. X-rays are irradiated. That is, the control device 5 irradiates the measurement object S with X-rays from the X-ray source 2 at each position of the plurality of measurement objects S, and detects the transmitted X-rays transmitted through the measurement object S by the detection device 4. To do.

  In this embodiment, the control device 5 rotates the stage device 3 that holds the measurement object S (the holding unit that holds the measurement object S among the stage devices 3), and the position of the measurement object S with respect to the X-ray source 2. Is changed, the irradiation region of the X-ray from the X-ray source 2 in the measurement object S is changed.

  That is, in the present embodiment, the stage device 3 moves (rotates) the measurement object S in the θY direction during at least a part of the period in which the measurement object S is irradiated with X-rays. The control device 5 irradiates the measurement object S with X-rays while rotating the stage device 3 that holds the measurement object S (the holding unit that holds the measurement object S among the stage devices 3). Transmission X-rays (X-ray transmission data) that have passed through the measurement object S at each position (each rotation angle) of the stage device 3 are detected by the detection device 4. The detection device 4 acquires an image of the measurement object S at each position.

  The control device 5 calculates the internal structure of the measurement object S from the detection result of the detection device 4. In the present embodiment, the control device 5 acquires an image of the measurement object S based on transmitted X-rays (X-ray transmission data) that have passed through the measurement object S at each position (each rotation angle) of the measurement object S. That is, the control device 5 acquires a plurality of images of the measurement object S.

  The control device 5 performs a calculation based on a plurality of X-ray transmission data (images) obtained by rotating the measurement object S and irradiating the measurement object S with X-rays, and obtains a tomographic image of the measurement object S. Is reconstructed to obtain three-dimensional data (three-dimensional structure) of the internal structure of the measuring object S. Thereby, the internal structure of the measuring object S is calculated. Examples of the reconstruction method of the tomographic image of the measurement object include a back projection method, a filter-corrected back projection method, and a successive approximation method. The back projection method and the filtered back projection method are described in, for example, US Patent Application Publication No. 2002/0154728. The successive approximation method is described in, for example, US Patent Application Publication No. 2010/0220908.

  As described above, according to the present embodiment, since the aperture unit 16 includes the extending portion 24, the heat of the aperture portion 16a is diffused to the outside, so that the seal caused by the temperature rise of the aperture portion 16a is achieved. Deterioration of the members 26, 32a, 32b is suppressed. Accordingly, since the internal space of the X-ray source 2 is maintained in a substantially vacuum for a long period of time, the X-ray source 2 efficiently generates X-rays, thereby detecting the detection accuracy (inspection accuracy and measurement) of the X-ray apparatus 1. (Accuracy) can be suppressed. For example, the X-ray apparatus 1 can accurately acquire information related to the internal structure of the measurement object S.

Second Embodiment
Next, a second embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  In the present embodiment, a structure manufacturing system including the above-described X-ray apparatus (such as 1) will be described.

  FIG. 5 is a block configuration diagram showing an example of the structure manufacturing system 200 according to the present embodiment. The structure manufacturing system 200 includes the X-ray apparatus (inspection apparatus) 1, the design apparatus 110, the molding apparatus 120, the control system 130, and the repair apparatus 140 described in the above embodiments. In the present embodiment, the X-ray apparatus 1 functions as a shape measuring device that measures coordinates related to the shape of a structure. The control system 130 includes a coordinate storage unit 131 and an inspection unit 132.

  In the present embodiment, the structure manufacturing system 200 creates a molded product such as an electronic component including an automobile door portion, an engine component, a gear component, and a circuit board.

  In the present embodiment, in the structure manufacturing system 200, a design process in which design information related to the shape of the structure is created, a molding process in which the structure is created based on the design information, and the shape of the created structure Are measured by the X-ray apparatus, and an inspection process in which the shape information acquired in the measurement process is compared with the design information is performed.

  Moreover, in this embodiment, in the structure manufacturing system 200, the repair process in which the rework of a structure is implemented is performed based on the comparison result of an inspection process.

  In the design process, the design apparatus 110 creates design information related to the shape of the structure. The design device 110 transmits the created design information to the molding device 120. The design information is input to the molding apparatus 120. In addition, the design apparatus 110 transmits the created design information to the control system 130. The design information is stored in the coordinate storage unit 131 of the control system 130.

  The design information is information indicating the coordinates of each position of the structure.

  In the molding process, the molding apparatus 120 creates a structure. The molding device 120 creates a structure based on the design information from the design device 110. In the forming process, at least one of casting, forging, and cutting may be performed.

  In the measurement process, the X-ray apparatus 1 measures the shape of the created structure. The X-ray apparatus 1 transmits information indicating the measured coordinates to the control system 130.

  In the inspection process, the inspection unit 132 compares the shape information acquired in the measurement process with the design information created in the design process. The coordinate storage unit 131 of the control system 130 stores design information transmitted from the design apparatus 110. The inspection unit 132 reads design information from the coordinate storage unit 131.

The inspection unit 132 creates information (shape information) indicating the created structure from the information indicating the coordinates transmitted from the X-ray apparatus 1. The inspection unit 132 compares information (shape information) indicating coordinates transmitted from the X-ray apparatus 1 with design information read from the coordinate storage unit 131. Based on the comparison result, the inspection unit 132 determines whether or not the structure is molded according to the design information.
In other words, the inspection unit 132 determines whether or not the created structure is a non-defective product.

  If the structure is not molded according to the design information, the inspection unit 132 determines whether or not the structure can be repaired. When the repair is possible, the inspection unit 132 calculates the defective portion and the repair amount based on the comparison result. The inspection unit 132 transmits information indicating the defective part and information indicating the repair amount to the repair device 140.

  In the repair process, the repair device 140 processes the defective portion of the structure based on the information indicating the defective portion received from the control system 130 and the information indicating the repair amount. In the repair process, the structure is reworked. In the repair process, the molding process is re-executed.

  FIG. 6 is a flowchart showing the flow of processing in the structure manufacturing system 200.

  The design apparatus 110 creates design information related to the shape of the structure (step S101).

  Next, the molding apparatus 120 creates a structure based on the design information (step S102).

  Next, the X-ray apparatus 1 measures coordinates related to the shape of the structure (step S103).

  Next, the inspection unit 132 of the control system 130 inspects whether the structure is created according to the design information by comparing the shape information of the structure created by the X-ray apparatus 1 with the design information. (Step S104).

  Next, the inspection unit 132 of the control system 130 determines whether or not the created structure is a non-defective product (step S105).

  If the created structure is a non-defective product (if YES is determined in step S105), structure manufacturing system 200 ends the process.

  If the created structure is not a non-defective product (if NO is determined in step S105), the inspection unit 132 of the control system 130 determines whether the created structure can be repaired (step S106).

    When the created structure can be repaired (when YES is determined in Step S106), the repair device 140 performs reworking of the structure (Step S107) and returns to the process of Step S103.

  When the created structure cannot be repaired (when NO is determined in step S106), the structure manufacturing system 200 ends the process.

  Above, the process of this flowchart is complete | finished.

    As described above, since the X-ray apparatus 1 can accurately measure the coordinates of the structure, the structure manufacturing system 200 can determine whether the created structure is a non-defective product. In addition, the structure manufacturing system 200 can reconstruct and repair the structure when the structure is not a good product.

  Moreover, the structure manufacturing system 200 can perform not only the detection of the defect of the structure but also the nondestructive inspection for acquiring the information inside the structure nondestructively by using the X-ray apparatus 1. Further, the structure manufacturing system 200 can measure the dimensions of the outer shape of the structure using the X-ray apparatus 1. Moreover, the structure manufacturing system 200 can perform reverse engineering using the X-ray apparatus 1.

  In each of the above embodiments, the X-ray apparatus has an X-ray source. However, the X-ray source may be an external apparatus for the X-ray apparatus. In other words, the X-ray source may not constitute at least a part of the X-ray apparatus.

  The above-described embodiments can also be applied to an X-ray apparatus having a plurality of X-ray sources as disclosed in, for example, US Patent Application Publication No. 2005/0254621, US Pat. No. 7,233,644 and the like.

  Further, each of the above-described embodiments is arranged along a rotation axis for rotating a test object as disclosed in, for example, U.S. Patent Application Publication No. 2007/685985, U.S. Patent Application Publication No. 2001/802468, and the like. The present invention can also be applied to a helical X-ray apparatus that sequentially moves the test object.

  In addition, each of the above-described embodiments is a phase contrast X-ray that evaluates a slight deflection that occurs in an X-ray as it travels through a test object, as disclosed in US Patent Application Publication No. 2010/0220834. It can also be applied to devices.

  In the above-described embodiments, the baggage is moved by a belt conveyor as disclosed in, for example, US Patent Application Publication No. 2009/0003514, US Patent Application Publication No. 2007/0230657, and the baggage is transmitted by X-rays. The present invention can also be applied to an X-ray apparatus that reveals the contents of

DESCRIPTION OF SYMBOLS 1 ... X-ray apparatus, 2 ... X-ray source, 3 ... Stage apparatus, 4 ... Detection apparatus, 13 ... Filament, 14 ... Target, 15, 15A ... Conductor member, 16 ... Aperture unit, 16a ... Aperture part, 17 ... Exterior body, 27 ... housing, 28 ... sealing member (first sealing member), 30 ... thermally conductive layer, 30a ... resin layer, 30b ... thermally conductive particles, 31 ... target holding part, 32a, 32b ... sealing member, 200: Structure manufacturing system, S: Measurement object

Claims (12)

Provided is an electronic optical system Ru focuses the electrons between the emitting portion and the target for emitting electrons,
An aperture unit in which an opening for limiting a part of the electrons focused by the electron optical system is formed;
A housing that forms at least a part of an exterior body that houses the electron optical system and the aperture unit ;
The aperture unit has an extending portion that extends outward along a second direction in which the electrons cross the first direction toward the target ;
The extension portion has a contact portion that contacts the housing;
The contact portion has a tapered shape in which the thickness in the first direction becomes thin according to the distance from the electron passage region,
The X-ray source having a reverse tapered shape in which a thickness of the contact portion with the extension portion of the housing increases in thickness in the first direction according to a distance from the electron passage region .   An electron optical system that is provided between an emission unit that emits electrons and a target, and focuses the electrons;
  An aperture unit in which an opening for limiting a part of the electrons focused by the electron optical system is formed;
  A housing that forms at least a part of an exterior body that houses the electron optical system and the aperture unit;
  The aperture unit has an extending portion that extends outward along a second direction in which the electrons cross the first direction toward the target;
  The extension portion includes a contact portion that contacts the housing, and the contact portion contacts the housing via a heat conductive layer. The X-ray source according to claim 1,
The extending portion is, X-rays source you contact with the housing the contact portion through the heat conductive layer. The X-ray source according to claim 2,
The contact portion has a tapered shape in which the thickness in the first direction becomes thin according to the distance from the electron passage region,
Contact portion between the extending portion of said housing, X-rays source that having a reverse taper shape becomes thicker with distance from the passage region of the thickness in the first direction the electron. The X-ray source according to claim 2 or 4,
The thermally conductive layer includes a resin layer, is blended into the resin layer, including X-ray source and the thermally conductive particles are high thermal conductivity, the than the extending portion. The X-ray source according to claim 5,
The resin layer, X-rays source Ru acrylic resin or silicone resin der. The X-ray source according to any one of claims 1 to 6,
The extending portion is viewed from the first direction, the entire circumference X-ray source that is provided over the outer surface of the aperture unit. The X-ray source according to any one of claims 1 to 7,
The extending portion is in the first direction, X-rays source that is provided at a position where the openings in the aperture unit is formed. The X-ray source according to any one of claims 1 to 8,
The electron optical system has a central optical axis parallel to the first direction;
The opening, X-rays source you shields the electrons converge to a position away from the central optical axis. An X-ray source according to any one of claims 1 to 9,
The aperture unit has a sealing member arrangement region in which a first sealing member is provided between the extension part and the housing to hold the region where the electrons propagate in a sealed state,
The extending portion is, X-rays source that issues extends to a region outside the at least the sealing member arrangement area. The X-ray source according to any one of claims 1 to 10,
On the extension line in the first direction of the housing, a target holding part for installing the target is provided,
The target, the target holding portion, the housing, and the X-ray source and a second sealing member that provided for holding the enclosed space in a sealed state by the aperture unit. An X-ray source according to any one of claims 1 to 11,
X-ray apparatus that detect the transmitted X-rays that have passed through the object to X-rays generated by the X-ray source is irradiated to the object.

Images