JP2013168202A - Disk cleaning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a disk cleaning device capable of eliminating cleaning unevenness of a disk by simple structure.SOLUTION: A disk cleaning device 1 includes: chuck rollers 15, 16 which rotatably hold a plurality of disks 100 at erected states; and an impeller vane wheel 17 which is attached at the end of the chuck roller 16 and rotates the chuck roller 16 by water flow of cleaning fluid, and is constituted so as to clean the disks while rotating the disks. A cleaning fluid supply pipe 23 for rotating the impeller vane wheel supplies the cleaning fluid for rotating the impeller vane wheel 17.

Description

  The present invention relates to a disk cleaning apparatus for cleaning a disk-shaped substrate such as a magnetic disk.

  As a step of cleaning the disk-shaped substrate in the magnetic disk manufacturing process, a method of immersing the disk in a cleaning liquid in a cleaning tank and applying ultrasonic vibration is used. At this time, a holder for holding a plurality of disks is used. However, there is a problem in that the engaging portion between the disk and the holder becomes a blind spot of ultrasonic vibration, causing uneven cleaning.

  Patent Document 1 discloses a configuration in which a disk is rotated by connecting and rotating a support member that supports the disk in order to ultrasonically clean the entire disk. It is stated that by rotating the disk, the part where ultrasonic vibration is not transmitted is eliminated.

JP-A-6-60371

  The configuration disclosed in Patent Document 1 includes a power transmission mechanism such as a motor and a transmission gear provided outside the ultrasonic cleaning tank as a rotational drive unit that rotationally drives a support member that supports the disk. For this reason, the rotational driving means has a complicated structure, and the disk cleaning device becomes large.

  An object of the present invention is to provide a disk cleaning apparatus that can eliminate uneven cleaning of a disk with a simple configuration.

  The present invention relates to a disk cleaning apparatus for cleaning a disk by immersing the disk in a cleaning liquid in a cleaning tank, and a chuck roller that rotatably holds the disk in an upright state, and a cleaning liquid attached to an end of the chuck roller. And an impeller that rotates the chuck roller, and the disk is cleaned while rotating.

  According to the present invention, there is provided a disk cleaning apparatus that eliminates the need for complicated rotational driving means such as a motor and eliminates uneven cleaning of the disk with a simple configuration.

1 is an overall configuration diagram showing an embodiment of a disk cleaning apparatus according to the present invention. The figure which shows the disk washing | cleaning state in the washing tank. FIG. 3 is a cross-sectional view taken along the line XX in FIG. 2 and shows a contact state between a disk 100 and chuck rollers 15 and 16.

FIG. 1 is an overall configuration diagram showing an embodiment of a disk cleaning apparatus according to the present invention.
The disk cleaning apparatus 1 includes a cleaning tank 20 that cleans the disk 100, a carrier 13 that holds the disk 100, and a carrier driving unit 10 that drives the carrier 13 in and out of the cleaning tank 20. Here, the disk 100 to be cleaned may be a substrate before forming a magnetic film or the like, or a substrate after forming a magnetic film or the like. The carrier drive unit 10 includes a carrier drive motor 11 and a ball screw 12 and drives the carrier 13 in the vertical direction. The cleaning tank 20 is filled with a cleaning liquid, and a cleaning liquid supply pipe 22 (hereinafter referred to as “liquid supply pipe”) for supplying the cleaning liquid into the tank and an impeller rotation cleaning liquid supply pipe 23 (hereinafter referred to as “impeller rotation liquid supply pipe”), And an ultrasonic oscillator 21 for applying ultrasonic vibration during cleaning.

  The disc cradle 14 (hereinafter “cradle”) of the carrier 13 stores the discs 100 to be cleaned conveyed from the previous process. For example, 25 discs × 2 rows = 50 discs 100 are stored. The cradle 14 has chuck rollers 15 and 16 that rotatably hold the disk 100 in a state of being erected at a predetermined interval, and an impeller 17 is attached to an end portion of one chuck roller 16.

  At the time of disc cleaning, the carrier drive unit 10 moves the cradle 14 containing the disc 100 into the cleaning tank 20 and immerses the disc 100 in the cleaning liquid. In the cleaning tank 20, ultrasonic vibration is applied by the ultrasonic oscillator 21 to clean the disc. At that time, as will be described later, the impeller 17 is rotated by the water flow of the cleaning liquid supplied from the impeller rotating liquid supply pipe 23, and is held by the chuck roller 16 to which the impeller 17 is attached, and the chuck roller 16. The disk 100 being rotated rotates. After completion of the disk cleaning, the carrier drive unit 10 moves the cradle 14 to the outside of the cleaning tank 20, and the disk 100 is transported to the next process.

FIG. 2 shows a disk cleaning state in the cleaning tank 20, and is a view of the disk cleaning device 1 of FIG. 1 as viewed from the right side.
3 is a cross-sectional view taken along the line XX of FIG. 2 and shows a contact state between the disk 100 and the chuck rollers 15 and 16.

  In order to store two rows of discs 100a and 100b (25 discs per row) in the disc pedestal 14, two chuck rollers 15 and one chuck roller 16 are provided per row to hold the discs. . These three chuck rollers 15 and 16 are provided at positions that support the lower outer peripheral portion of the disk 100, and grooves 19 are formed at predetermined intervals around the disk 100 in order to hold the disk 100 in an upright state. Each chuck roller 15, 16 is rotatably attached to the cradle 14 via a bearing 18. An impeller 17 for rotating the chuck roller 16 is attached to the end of the chuck roller 16.

  In the cleaning tank 20, the cleaning liquid 200 is supplied from the liquid supply pipe 22 and the impeller rotation liquid supply pipe 23 provided in the lower part, and is always full. The cleaning liquid 200 passes through between the disks 100 stored on the cradle 14 and is then discharged out of the tank from the overflow portion 25 of the cleaning tank 20. Since the dirt due to the disk cleaning is discharged to the outside of the cleaning tank 20 together with the cleaning liquid 200, the cleaning tank 20 is always filled with a clean cleaning liquid to enhance the cleaning effect of the disk 100.

  Here, the impeller rotation liquid supply pipe 23 is divided from the liquid supply pipe 22 and disposed in the vicinity of the impeller 17. The impeller 17 supplies the cleaning liquid 200 a toward the impeller 17. The chuck roller 16 connected to is rotated. At this time, since the outer periphery of the disk 100 is in contact with the groove 19 of the chuck roller 16 as shown in FIG. 3, this rotational force is transmitted to the disk 100, and the disk 100 rotates as indicated by an arrow. Since the chuck roller 15 is attached by the bearing 18, it rotates following the rotation of the disk 100. As a result, the disk 100a on the left side of the drawing rotates clockwise, and the disk 100b on the right side of the drawing rotates counterclockwise.

  By rotating the disk 100 in this way, the position on the disk 100 (the end surface contact portion 110) that contacts the chuck rollers 15 and 16 is not fixed, but moves around the outer peripheral portion, and the cleaning liquid 200 reaches the end surface of the disk 100 sufficiently. This can improve the cleaning effect. Further, even if there is a portion in the disk 100 being cleaned that does not receive ultrasonic vibration from the ultrasonic oscillator 21, the portion always moves, so that uneven cleaning of the disk 100 can be eliminated.

  Further, in this embodiment, a flow rate adjusting valve 24 is attached to the impeller rotating liquid supply pipe 23, and the flow rate supplied to the impeller 17 can be adjusted. By adjusting the flow rate supplied to the impeller 17, the rotational speed of the impeller 17, that is, the rotational speed of the disk 100 can also be adjusted.

  If a rotation detection sensor (not shown) for detecting the rotation of the disk 100 is provided and the flow rate of the flow rate adjusting valve 24 is controlled according to the detected rotation speed, the rotation speed of the disk 100 can be accurately controlled. In addition, a warning can be issued when the disk rotation stops due to a trouble in the apparatus. If the rotation detection sensor is configured to detect the rotation of the chuck roller 15 that rotates following the disk 100, the sensor can be easily attached.

  As a modification of the present embodiment, when adjustment of the disk rotation speed is not required, a dedicated impeller rotation liquid supply pipe 23 for rotating the impeller 17 is not necessary. In that case, what is necessary is just to set it as the structure which rotates the impeller 17 with the water flow in the washing tank 20 of the washing | cleaning liquid 200 supplied from the liquid supply piping 22. FIG.

  As described above, according to this embodiment, the impeller that rotates by the water flow of the cleaning liquid is attached to the disk holding chuck roller, and the disk being cleaned is rotated. No device is required, and the configuration of the disk cleaning device can be simplified. By using the disk cleaning apparatus of this embodiment, it is possible to improve the disk cleaning effect and eliminate unevenness in disk cleaning.

1 ... disk cleaning device,
10 ... carrier drive part,
11 ... Carrier drive motor,
12 ... Ball screw,
13 ... Career,
14 ... disk cradle,
15 ... Chuck roller,
16 ... Chuck roller (with impeller),
17 ... impeller,
18 ... bearings,
19 ... Groove,
20 ... washing tank,
21 ... an ultrasonic oscillator,
22: Cleaning liquid supply pipe,
23 ... Cleaning liquid supply pipe for rotating the impeller,
24 ... Flow control valve,
25. Overflow part,
100 ... disc,
110 ... end face contact portion,
200: Cleaning solution.

Claims (4)

In the disk cleaning device that cleans the disk by immersing it in the cleaning liquid in the cleaning tank,
A chuck roller for rotatably holding the disk in an upright state;
An impeller attached to an end of the chuck roller and rotating the chuck roller by the water flow of the cleaning liquid;
A disc cleaning apparatus for cleaning the disc while rotating the disc. The disc cleaning apparatus according to claim 1, wherein
A disk cleaning apparatus comprising: an impeller rotating cleaning liquid supply pipe disposed near the impeller for supplying a cleaning liquid for rotating the impeller. The disk cleaning apparatus according to claim 2,
A disk cleaning apparatus comprising a flow rate adjusting valve for adjusting a flow rate of cleaning liquid supplied from the cleaning liquid supply pipe for rotating the impeller. In the disk cleaning apparatus according to claim 3,
A rotation detection sensor for detecting the rotation of the disk;
A disk cleaning apparatus, wherein the flow rate of the flow rate adjusting valve is controlled in accordance with the number of rotations of the disk detected by the rotation detection sensor.

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