JPH0660371A - Ultrasonic washer - Google Patents

Ultrasonic washer

Info

Publication number
JPH0660371A
JPH0660371A JP22778992A JP22778992A JPH0660371A JP H0660371 A JPH0660371 A JP H0660371A JP 22778992 A JP22778992 A JP 22778992A JP 22778992 A JP22778992 A JP 22778992A JP H0660371 A JPH0660371 A JP H0660371A
Authority
JP
Japan
Prior art keywords
magazine
disks
supporting rods
ultrasonic cleaning
gear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22778992A
Other languages
Japanese (ja)
Other versions
JP2817532B2 (en
Inventor
Shotaro Hiwatari
正太郎 樋渡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP4227789A priority Critical patent/JP2817532B2/en
Publication of JPH0660371A publication Critical patent/JPH0660371A/en
Application granted granted Critical
Publication of JP2817532B2 publication Critical patent/JP2817532B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To uniformly wash a disk as the whole by eliminating parts to which ultrasonic oscillation does not pass round at the time of ultrasonic washing of the disk. CONSTITUTION:Supporting rods 4a to 4c where many circular grooves 6 with which outer peripheral edge parts of disks D are engaged are formed are laid between front and rear end plates 2 and 3 of a magazine 1, and disks D are stood and stored in the magazine 1. Supporting rods 4a to 4c are extended up to the outside face on the side of one end plate 2, and gears 8a, 8b, and 8c engaged with a transmission gear 9 are connected to these supporting rods. When the magazine 1 is immersed in a tank main body 11 of an ultrasonic washing tank 10, the transmission gear 9 is engaged with a driving gear 15 to rotate the driving gear 15, and then, the transmission gear 9 rotates while following up the gear 15 to rotate the supporting rods 4a to 4c, and this torque is transmitted to disks D to rotate the disks D, and positions of contact parts to supporting rods 4a to 4c in outer peripheral edge parts of disks D are always changed.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、磁気ディスク等の円環
状記録媒体の製造工程において、この円環状記録媒体を
構成するディスクを超音波洗浄するための超音波洗浄装
置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning device for ultrasonically cleaning a disk constituting a circular recording medium in the process of manufacturing a circular recording medium such as a magnetic disk.

【0002】[0002]

【従来の技術】磁気ディスク等、円環状記録媒体を構成
するディスクは、その製造工程において、繰り返し洗浄
されるが、このディスクの洗浄方式の代表的なものとし
て、ブラシ等によって行うスクラブ洗浄と洗浄槽内に超
音波振動装置を設けて、液を超音波振動させることによ
り行う超音波洗浄とがある。超音波洗浄の効率化を図る
ために、通常は洗浄槽内には複数のディスクが浸漬され
るようになっており、槽内でディスクを整列した状態に
保持するために、マガジンが用いられる。そして、マガ
ジンに所定のピッチ間隔をもって多数のディスクを立設
して、マガジンを洗浄槽内に浸漬させるようにする。
2. Description of the Related Art Disks constituting an annular recording medium, such as magnetic disks, are repeatedly washed in the manufacturing process. A typical cleaning method for this disk is scrubbing and cleaning with a brush or the like. There is ultrasonic cleaning performed by providing an ultrasonic vibration device in the tank and ultrasonically vibrating the liquid. In order to improve the efficiency of ultrasonic cleaning, a plurality of disks are usually immersed in the cleaning tank, and a magazine is used to keep the disks aligned in the tank. Then, a large number of discs are erected at a predetermined pitch in the magazine so that the magazine is immersed in the cleaning tank.

【0003】超音波洗浄槽に設けられる超音波振動装置
は、通常、槽の下部に設けられることから、マガジンは
その底部を開放しておかなければならない。このため
に、マガジンは、前後の端板を有し、この両端板間に3
本の支承杆を架設して、これら各支承杆に所定のピッチ
間隔をもって多数の溝を円周状に形成し、これら各溝に
ディスクの外周縁部を係合させることによって、安定し
た状態に位置決め・固定するようにしている。
Since the ultrasonic vibration device provided in the ultrasonic cleaning tank is usually provided in the lower part of the tank, the bottom of the magazine must be opened. For this purpose, the magazine has front and rear end plates with a 3
The supporting rods of the book are erected, a large number of grooves are circumferentially formed on each of the supporting rods with a predetermined pitch interval, and the outer peripheral edge portion of the disk is engaged with each of these supporting rods, so that a stable state is obtained. Positioned and fixed.

【0004】[0004]

【発明が解決使用とする課題】ところで、前述したよう
に、ディスクを支承杆の溝に係合させると、ディスクに
おけるその支承杆への係合部が超音波振動の死角となっ
て、洗浄むらを発生させるという問題点がある。
By the way, as described above, when the disc is engaged with the groove of the supporting rod, the engaging portion of the disc with the supporting rod becomes a blind spot of ultrasonic vibration and uneven cleaning occurs. There is a problem in that

【0005】本発明は以上の点に鑑みてなされたもので
あって、その目的とするところは、ディスク全体にむら
なく超音波洗浄を行えるようにすることにある。
The present invention has been made in view of the above points, and it is an object of the present invention to make it possible to perform ultrasonic cleaning uniformly on the entire disk.

【0006】[0006]

【課題を解決するための手段】前述した目的を達成する
ために、本発明は、複数枚のディスクを立設状態にして
並べたマガジンを、超音波洗浄槽内に浸漬させることに
よって、このマガジン内のディスクを超音波洗浄するも
のであって、前記各ディスクを支承させるために、所定
のピッチ間隔を持って位置決め用の溝を設けた支承杆を
両側の端板に回転自在に連結し、前記超音波洗浄槽内で
これら各支承杆を回転駆動する回転駆動手段に連結する
構成としたことをその特徴とするものである。
In order to achieve the above-mentioned object, according to the present invention, a magazine in which a plurality of discs are arranged in an upright state is immersed in an ultrasonic cleaning tank, so that the magazine is Ultrasonic cleaning of the inner disk, in order to support each of the disks, a supporting rod provided with positioning grooves with a predetermined pitch interval is rotatably connected to the end plates on both sides, The structure is characterized in that it is connected to a rotation driving means for rotating and driving each of the support rods in the ultrasonic cleaning tank.

【0007】[0007]

【作用】ディスクは超音波洗浄槽内において、何らかの
支承部材により支承させなければならないことから、超
音波洗浄を行う際において、洗浄液の超音波振動が回り
込まない部位をなくすのは不可能である。そこで、本発
明においては、超音波洗浄槽内において、ディスクを回
転させることによって、このディスクの一部が支承杆に
よって超音波振動が回り込まない部位、または円滑には
回り込まない部位が常に一定位置で留まるという状態を
生じないようにしている。これによって、超音波振動が
伝わらない部位がなくなる。
In the ultrasonic cleaning tank, the disk must be supported by some kind of supporting member. Therefore, it is impossible to eliminate the portion where the ultrasonic vibration of the cleaning liquid does not circulate during ultrasonic cleaning. Therefore, in the present invention, in the ultrasonic cleaning tank, by rotating the disk, a part of the disk where ultrasonic vibration does not wrap around by the supporting rod, or a part that does not wrap around smoothly is always at a fixed position. We try not to create a situation of staying. As a result, there is no part where ultrasonic vibration is not transmitted.

【0008】ここで、ディスクの回転は必ずしも高速で
行う必要はない。洗浄むらの防止という観点からは、例
えばマガジンが槽内に浸漬させている間にディスクが1
回転すれば、十分である。従って、このディスクの回転
によって、槽内の液が乱れる等といった不都合を起こす
ことはない。
Here, it is not always necessary to rotate the disk at a high speed. From the viewpoint of preventing uneven cleaning, for example, when the magazine is immersed in the tank,
Rotating is enough. Therefore, the rotation of the disk does not cause any inconvenience such as disturbance of the liquid in the tank.

【0009】ディスクの回転駆動は、具体的には、この
ディスクを支承している支承杆を回転させることにより
行うことができる。3本設けられている支持杆を同時に
同一角速度で同方向に回転させれば、これら各支承杆に
よって支承されているディスクが回転する。また、この
回転駆動手段は、槽外に設けるのが好ましい。このため
には、各支承杆に歯車の連結し、これら各歯車をマガジ
ンの端板に取り付けた伝達歯車に噛合させるようにな
し、超音波洗浄槽内にマガジンが浸漬された後に、槽外
にモータ等の回転駆動手段に連結されている駆動歯車を
噛合させるようにすれば、回転駆動手段は槽外に位置さ
せることができる。
Specifically, the rotation of the disk can be carried out by rotating the support rod supporting the disk. If the three supporting rods are simultaneously rotated in the same direction at the same angular velocity, the disks supported by these supporting rods rotate. Further, it is preferable that the rotation driving means is provided outside the tank. For this purpose, gears are connected to each support rod, and these gears are made to mesh with the transmission gears attached to the end plates of the magazine.After the magazine is immersed in the ultrasonic cleaning tank, it is placed outside the tank. If the drive gear connected to the rotation driving means such as a motor is engaged, the rotation driving means can be located outside the tank.

【0010】[0010]

【実施例】以下、本発明の実施例を図面に基づいて詳細
に説明する。まず、図1にマガジン1の全体構成を示
す。このマガジン1は、前後の端板2,3間に3本の支
承杆4a〜4cを架設してなるものであり、端板2,3
間には、さらに後述する超音波洗浄槽10における液面
上に位置する部位には、補強用のバー5が左右一対掛け
渡して設けられている。そして、支承杆4a〜4cに
は、それぞれ等しいピッチ間隔をもって円周状の溝6が
多数形成されている。この溝6は、図2からも明らかな
ように、側壁部は中心部に向かうに従って狭くなる傾斜
状となっている。これによって、ディスクDの外周縁部
をこの溝6に係合させた時に、重力の作用によって、こ
のディスクDのチャンファの部分が挾持されるようにな
る。
Embodiments of the present invention will now be described in detail with reference to the drawings. First, FIG. 1 shows the overall configuration of the magazine 1. This magazine 1 has three support rods 4a to 4c installed between the front and rear end plates 2 and 3, and the end plates 2 and 3 are
In between, a pair of reinforcing bars 5 is provided so as to extend over the left and right parts of the ultrasonic cleaning tank 10 which will be described later and which are located on the liquid surface. A large number of circumferential grooves 6 are formed on the support rods 4a to 4c at equal pitch intervals. As is apparent from FIG. 2, the groove 6 has an inclined shape in which the side wall portion becomes narrower toward the central portion. As a result, when the outer peripheral edge portion of the disc D is engaged with the groove 6, the chamfer portion of the disc D is held by the action of gravity.

【0011】支承杆は、ディスクDを立てた状態におい
て、その最下部に係合する支承杆4aと、この位置から
90°以下の角度で、等しい角度隔てた位置で係合する
一対の支承杆4b,4cとから構成される。そして、こ
れら各支承杆4a〜4cは、端板2,3にそれぞれ軸受
7を介して回転自在に連結されている。端板2,3のう
ちの一方の端板2側において、支承杆4a〜4cはこの
端板2の外側面にまで延在されて、図3に示したよう
に、その先端にそれぞれ歯車8a,8b,8cが連結さ
れている。これら各歯車8a〜8cは、端板2に回転自
在に装着した伝達歯車9と常時噛合している。従って、
この伝達歯車9を回転させると、各歯車8a〜cは同時
に同方向に、しかも同一の角速度で回転する。
The support rods are a support rod 4a engaged with the lowermost part of the support rod 4a when the disc D is in an upright position, and a pair of support rods engaged with the support rod 4a at an angle of 90 ° or less from this position and at equal intervals. 4b and 4c. The bearing rods 4a to 4c are rotatably connected to the end plates 2 and 3 via bearings 7, respectively. On one end plate 2 side of the end plates 2 and 3, the supporting rods 4a to 4c are extended to the outer side surface of the end plate 2 and, as shown in FIG. , 8b, 8c are connected. These gears 8a to 8c are constantly meshed with a transmission gear 9 rotatably mounted on the end plate 2. Therefore,
When the transmission gear 9 is rotated, the gears 8a to 8c simultaneously rotate in the same direction and at the same angular velocity.

【0012】次に、超音波洗浄槽10は、図4及び図5
に示したように、槽本体11の底面に超音波振動装置1
2を装着してなるものであって、この槽本体11には所
定の液面高さまで洗浄液が貯留されるようになってい
る。また、槽本体11の外面にはブラケット13が設け
られており、このブラケット13にはモータ14が設置
されている。そして、このモータ14の出力軸14aに
は駆動歯車15が取り付けられており、この駆動歯車1
5を伝達歯車9と噛合させて、モータ14を作動させて
駆動歯車15を回転駆動すると、伝達歯車9がこれに追
従回転せしめられるようになっている。
Next, the ultrasonic cleaning tank 10 is shown in FIGS.
As shown in FIG.
The cleaning liquid is stored in the tank body 11 up to a predetermined liquid level. A bracket 13 is provided on the outer surface of the tank body 11, and a motor 14 is installed on the bracket 13. A drive gear 15 is attached to the output shaft 14a of the motor 14, and the drive gear 1
When 5 is meshed with the transmission gear 9 and the motor 14 is operated to drive the drive gear 15 to rotate, the transmission gear 9 is made to follow the rotation.

【0013】本実施例は以上のように構成されるもので
あって、次にその作用について説明する。まず、マガジ
ン1に所定数のディスクDを、支承杆4a〜4cの溝6
に係合させた状態に装着する。そして、このマガジン1
を超音波洗浄槽10の槽本体11内に浸漬させ、かつマ
ガジン1に設けた伝達歯車9をモータ14の駆動歯車1
5と噛合させる。ここで、両歯車15,9間の噛合を行
わせるためには、例えば槽本体11内にマガジン1を浸
漬させる際に、伝達歯車9が駆動歯車15と離れた位置
に一度配置し、次いでこのマガジン1をスライドさせれ
ば良い。また、モータ14を上下動させることができる
構成としておけば、モータ14を上昇させた状態で、マ
ガジン1を槽本体11内に浸漬させ、然る後にモータ1
4を下降させるようにすれば、このモータ14に連結し
た駆動歯車15を伝達歯車9に噛合させることができ
る。
The present embodiment is constructed as described above, and its operation will be described below. First, a predetermined number of discs D are placed in the magazine 1 and the grooves 6 of the support rods 4a to 4c.
It is attached in the state of being engaged with. And this magazine 1
Is immersed in the tank body 11 of the ultrasonic cleaning tank 10, and the transmission gear 9 provided in the magazine 1 is connected to the drive gear 1 of the motor 14.
Mesh with 5. Here, in order to make the gears 15 and 9 mesh with each other, for example, when the magazine 1 is immersed in the tank body 11, the transmission gear 9 is once arranged at a position separated from the drive gear 15, and then Just slide the magazine 1. If the motor 14 can be moved up and down, the magazine 1 is immersed in the tank body 11 with the motor 14 being raised, and then the motor 1 is moved.
4 is lowered, the drive gear 15 connected to the motor 14 can be meshed with the transmission gear 9.

【0014】このように、駆動歯車15と伝達歯車9と
を噛合させた状態で、超音波振動装置12を作動状態に
することによって、槽本体11内の洗浄液に超音波振動
を発生させて、ディスクDを超音波洗浄する。そして、
この間にモータ14を作動させて、駆動歯車15を回転
させる。この駆動歯車15の回転は、伝達歯車9を介し
て、各支承杆4a〜4cに連結されている歯車8a〜8
cを回転駆動する。これによって、図5に矢印で示した
ように、支承杆4a〜4cが回転して、この回転力がデ
ィスクDに伝達されて、ディスクDが回転することにな
る。この結果、ディスクDの外周縁部における支承杆4
a〜4cへの接触部の位置が常に変化することになり、
超音波振動の及ばない部位がなくなり、ディスクDの表
面全体が均一に洗浄される。ここで、ディスクDを回転
させる目的は、その外周縁部における支承杆4a〜4c
への接触位置を常に変化させるためのものであるから、
このディスクDの回転を高速で行う必要はなく、洗浄液
が乱れるのを防止するには、むしろ低速回転させる方が
好ましい。具体的には、超音波洗浄槽10の槽本体11
内に浸漬させている間に少なくとも1回転させれば良
い。
As described above, by operating the ultrasonic vibration device 12 in a state where the drive gear 15 and the transmission gear 9 are meshed with each other, ultrasonic vibration is generated in the cleaning liquid in the tank main body 11, The disk D is ultrasonically cleaned. And
During this time, the motor 14 is operated to rotate the drive gear 15. The rotation of the drive gear 15 is transmitted through the transmission gear 9 to the gears 8a to 8c connected to the support rods 4a to 4c.
Rotate c. As a result, as shown by the arrow in FIG. 5, the support rods 4a to 4c rotate, this rotational force is transmitted to the disk D, and the disk D rotates. As a result, the support rod 4 at the outer peripheral edge of the disk D is
The positions of the contact parts to a to 4c will always change,
There is no part that is not affected by ultrasonic vibration, and the entire surface of the disk D is uniformly washed. Here, the purpose of rotating the disk D is to support the support rods 4a to 4c at the outer peripheral edge thereof.
Since it is for constantly changing the contact position to
It is not necessary to rotate the disk D at a high speed, and it is preferable to rotate the disk D at a low speed to prevent the cleaning liquid from being disturbed. Specifically, the tank body 11 of the ultrasonic cleaning tank 10
It is sufficient to rotate at least once while being immersed.

【0015】[0015]

【発明の効果】以上説明したように、本発明は、マガジ
ンにおけるディスクを支承させるための支承杆を両側の
端板に回転自在に連結し、超音波洗浄槽内でこれら各支
承杆を回転駆動する構成としたので、ディスクと支承杆
との係合部分が洗浄中に常に移動して、ディスクの超音
波振動の及ばない部位が常に変化することになって、デ
ィスクに洗浄むらが発生するおそれはない。
As described above, according to the present invention, the supporting rods for supporting the discs in the magazine are rotatably connected to the end plates on both sides, and these supporting rods are rotationally driven in the ultrasonic cleaning tank. With this configuration, the engaging portion between the disc and the support rod always moves during cleaning, and the portion of the disc that is not subjected to ultrasonic vibrations constantly changes, causing uneven cleaning of the disc. That's not it.

【図面の簡単な説明】[Brief description of drawings]

【図1】マガジンの外観図である。FIG. 1 is an external view of a magazine.

【図2】支承杆の要部断面図である。FIG. 2 is a sectional view of a main part of the support rod.

【図3】マガジンの側面図である。FIG. 3 is a side view of the magazine.

【図4】超音波洗浄装置にディスクを装着したマガジン
を浸漬した状態を示す構成説明図である。
FIG. 4 is a structural explanatory view showing a state in which a disc-mounted magazine is immersed in an ultrasonic cleaning device.

【図5】図4のX−X断面図である。5 is a sectional view taken along line XX of FIG.

【符号の説明】[Explanation of symbols]

1 マガジン 2,3 端板 4a,4b,4c 支承杆 6 溝 8a,8b,8c 歯車 9 伝達歯車 10 超音波洗浄装置 11 槽本体 12 超音波振動装置 14 モータ 15 駆動歯車 1 Magazine 2,3 End Plates 4a, 4b, 4c Support Rod 6 Grooves 8a, 8b, 8c Gear 9 Transmission Gear 10 Ultrasonic Cleaning Device 11 Tank Body 12 Ultrasonic Vibration Device 14 Motor 15 Drive Gear

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 複数枚のディスクを立設状態にして並べ
たマガジンを超音波洗浄槽内に浸漬させることによっ
て、このマガジン内のディスクを超音波洗浄するものに
おいて、前記各ディスクを支承させるために、所定のピ
ッチ間隔を持って位置決め用の溝を設けた支承杆を両側
の端板に回転自在に連結し、前記超音波洗浄槽内でこれ
ら各支承杆を回転駆動する回転駆動手段に連結する構成
としたことを特徴とする超音波洗浄装置。
1. A method for ultrasonically cleaning the disks in a magazine by immersing a magazine in which a plurality of disks are arranged in an upright state in an ultrasonic cleaning tank to support each of the disks. In addition, a supporting rod provided with positioning grooves with a predetermined pitch interval is rotatably connected to the end plates on both sides, and is connected to a rotation driving means for rotationally driving each of the supporting rods in the ultrasonic cleaning tank. An ultrasonic cleaning device having the above structure.
【請求項2】 前記各支承杆には、少なくとも一方の端
板を貫通させて、その延在部に歯車を設け、これら3個
の歯車を端板に取り付けた伝達歯車に噛合させ、この伝
達歯車に超音波洗浄槽の外部に設けたモータにより回転
駆動される駆動歯車に噛合させて、このモータを駆動す
ることによって、前記各支承杆を同時に回転させる構成
としたことを特徴とする請求項1記載の超音波洗浄装
置。
2. Each of the supporting rods has at least one end plate penetrating therethrough, and a gear is provided in an extending portion thereof, and these three gears are meshed with a transmission gear attached to the end plate, and the transmission gear is formed. The gear is engaged with a drive gear that is rotationally driven by a motor provided outside the ultrasonic cleaning tank, and the motor is driven to simultaneously rotate the support rods. 1. The ultrasonic cleaning device according to 1.
JP4227789A 1992-08-05 1992-08-05 Ultrasonic cleaning equipment Expired - Lifetime JP2817532B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4227789A JP2817532B2 (en) 1992-08-05 1992-08-05 Ultrasonic cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4227789A JP2817532B2 (en) 1992-08-05 1992-08-05 Ultrasonic cleaning equipment

Publications (2)

Publication Number Publication Date
JPH0660371A true JPH0660371A (en) 1994-03-04
JP2817532B2 JP2817532B2 (en) 1998-10-30

Family

ID=16866413

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
JP (1) JP2817532B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5537706A (en) * 1994-10-26 1996-07-23 Baker; Glenn T. Compact disk cleaning system for cleaning multiple compact disks
WO2008078492A1 (en) * 2006-12-26 2008-07-03 Konica Minolta Opto, Inc. Holding jig, method for manufacturing glass substrate for recording medium, glass substrate for recording medium, and recording medium
US8211241B2 (en) 2006-11-28 2012-07-03 Showa Denko K.K. Washing device and washing method for substrate for magnetic recording medium
JP2013168202A (en) * 2012-02-16 2013-08-29 Hitachi High-Technologies Corp Disk cleaning device
CN106734018A (en) * 2015-11-20 2017-05-31 无锡南方声学工程有限公司 A kind of rotary support device
CN106734017A (en) * 2015-11-20 2017-05-31 无锡南方声学工程有限公司 A kind of rotary bracket structure
CN108672397A (en) * 2018-07-02 2018-10-19 盐城哈力动力传动及智能装备产业研究院有限公司 A kind of gear cleaning dedicated unit
JP2021102190A (en) * 2019-12-25 2021-07-15 スピードファムクリーンシステム株式会社 Carrier washing equipment

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176515U (en) * 1984-10-26 1986-05-23
JPS63311000A (en) * 1987-05-12 1988-12-19 メタル ボックス ピー.エル・シー Method and apparatus for removing cobalt layer from nickel surface of matter
JPH0426485U (en) * 1990-06-25 1992-03-03

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176515U (en) * 1984-10-26 1986-05-23
JPS63311000A (en) * 1987-05-12 1988-12-19 メタル ボックス ピー.エル・シー Method and apparatus for removing cobalt layer from nickel surface of matter
JPH0426485U (en) * 1990-06-25 1992-03-03

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5537706A (en) * 1994-10-26 1996-07-23 Baker; Glenn T. Compact disk cleaning system for cleaning multiple compact disks
US8211241B2 (en) 2006-11-28 2012-07-03 Showa Denko K.K. Washing device and washing method for substrate for magnetic recording medium
WO2008078492A1 (en) * 2006-12-26 2008-07-03 Konica Minolta Opto, Inc. Holding jig, method for manufacturing glass substrate for recording medium, glass substrate for recording medium, and recording medium
JP2013168202A (en) * 2012-02-16 2013-08-29 Hitachi High-Technologies Corp Disk cleaning device
CN106734018A (en) * 2015-11-20 2017-05-31 无锡南方声学工程有限公司 A kind of rotary support device
CN106734017A (en) * 2015-11-20 2017-05-31 无锡南方声学工程有限公司 A kind of rotary bracket structure
CN108672397A (en) * 2018-07-02 2018-10-19 盐城哈力动力传动及智能装备产业研究院有限公司 A kind of gear cleaning dedicated unit
JP2021102190A (en) * 2019-12-25 2021-07-15 スピードファムクリーンシステム株式会社 Carrier washing equipment

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