JP2013143364A5 - - Google Patents

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Publication number
JP2013143364A5
JP2013143364A5 JP2012004580A JP2012004580A JP2013143364A5 JP 2013143364 A5 JP2013143364 A5 JP 2013143364A5 JP 2012004580 A JP2012004580 A JP 2012004580A JP 2012004580 A JP2012004580 A JP 2012004580A JP 2013143364 A5 JP2013143364 A5 JP 2013143364A5
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JP
Japan
Prior art keywords
sample
charged particle
particle beam
internal structure
observation method
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JP2012004580A
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English (en)
Japanese (ja)
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JP5904799B2 (ja
JP2013143364A (ja
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Priority claimed from JP2012004580A external-priority patent/JP5904799B2/ja
Publication of JP2013143364A publication Critical patent/JP2013143364A/ja
Publication of JP2013143364A5 publication Critical patent/JP2013143364A5/ja
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Publication of JP5904799B2 publication Critical patent/JP5904799B2/ja
Expired - Fee Related legal-status Critical Current
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JP2012004580A 2012-01-13 2012-01-13 試料の内部構造を観察する荷電粒子線装置および試料観察方法 Expired - Fee Related JP5904799B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012004580A JP5904799B2 (ja) 2012-01-13 2012-01-13 試料の内部構造を観察する荷電粒子線装置および試料観察方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012004580A JP5904799B2 (ja) 2012-01-13 2012-01-13 試料の内部構造を観察する荷電粒子線装置および試料観察方法

Publications (3)

Publication Number Publication Date
JP2013143364A JP2013143364A (ja) 2013-07-22
JP2013143364A5 true JP2013143364A5 (https=) 2014-12-18
JP5904799B2 JP5904799B2 (ja) 2016-04-20

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JP2012004580A Expired - Fee Related JP5904799B2 (ja) 2012-01-13 2012-01-13 試料の内部構造を観察する荷電粒子線装置および試料観察方法

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JP (1) JP5904799B2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6811324B2 (ja) * 2017-07-05 2021-01-13 株式会社日立ハイテク 荷電粒子線装置
JP7083629B2 (ja) * 2017-11-27 2022-06-13 日本電子株式会社 定量分析方法および電子顕微鏡
JP7127088B2 (ja) 2020-07-21 2022-08-29 日本電子株式会社 荷電粒子線装置及び設定支援方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05290786A (ja) * 1992-04-10 1993-11-05 Hitachi Ltd 走査試料像表示方法および装置ならびにそれに供される試料
JPH10283965A (ja) * 1997-04-10 1998-10-23 Jeol Ltd 走査電子顕微鏡における試料の帯電除去方法および走査電子顕微鏡
JP4372339B2 (ja) * 2000-12-28 2009-11-25 株式会社島津製作所 凹凸像形成装置及び電子線分析装置
JP2005259396A (ja) * 2004-03-10 2005-09-22 Hitachi High-Technologies Corp 欠陥画像収集方法およびその装置
JP5517559B2 (ja) * 2009-10-26 2014-06-11 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び荷電粒子線装置における三次元情報の表示方法

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