JP2013133110A - Dust-free packaging bag excellent in automatic packaging aptitude - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve an automatic packaging aptitude for an automatic packaging machine relating to a dust-free packaging bag for packaging an electronic material component or the like requiring high cleanliness.SOLUTION: In a dust-free packaging bag for packaging an electronic component or the like, the bag having a sealant layer 2 on at least an innermost layer, a polyester film having a haze of not less than 5% and not more than 40 is used for an outermost layer 4 film, an antistatic agent-containing primer layer or adhesion layer is formed within a base material layer or in the innermost layer, and a peak value of an initial charging voltage in a frictional charging voltage experiment of a surface of the outermost layer film is not more than 2.0 kV in absolute value.

Description

  The present invention relates to a dust-free packaging bag suitably used for packaging electronic material parts or electronic material products such as a wafer case loaded with, for example, a silicon wafer, a compound semiconductor wafer, a hard disk, etc. Related to excellent packaging bags.

  Electronic materials such as silicon wafers, compound semiconductor wafers (eg, gallium / phosphorus wafers), and hard disks have extremely high requirements for cleanliness. Therefore, for example, the disk-shaped products such as silicon wafers, compound semiconductor wafers, and hard disks are stored in a cleanly washed box-shaped resin case and then a clean packaging bag made of a laminate having polyethylene as a sealant layer. Generally packaged. In this way, if the inner plastic case lacks confidentiality in the packaging bag that packages the electronic material product, the so-called breathing phenomenon, in which air enters and exits the resin case due to the pressure change of the surrounding environment during the transportation process Will occur. For example, when air cargo is temporarily stored in a warehouse in a high-temperature environment in an airport, or when it is stored as air cargo in the cargo compartment of an aircraft and decompressed above, a breathing phenomenon occurs due to pressure change. When such a breathing phenomenon occurs, ionic impurities and floating particles present in the innermost layer of the packaging bag adhere to the surface of the clean electronic material stored in the resin case, and the electronic material is contaminated. Therefore, the innermost sealant layer of the packaging bag is strongly required to have a small content of ionic impurities and a small amount of floating particles.

  Therefore, the applicant of the present invention has previously proposed a laminate for a dust-free packaging bag as shown in Patent Documents 1 and 2 below, as a solution to meet such a requirement.

That is, in Patent Document 1, the melt flow rate produced by a high-pressure radical polymerization method using a peroxide radical initiator alone having a half-life in the range of 150 to 200 ° C. or a combination of two or more of these is 0. The present invention proposes a laminate for a packaging bag using a low-density polyethylene film having a density of 0.92 g / cm ³ or less, which is ^{3 to 5} g / 10 minutes, as a sealant layer (see claim 4 of Patent Document 1). ).

Patent Document 2 does not contain an additive having a density of 0.925 to 0.935 g / cm ³ containing a linear ethylene-α-olefin copolymer produced using a metallocene catalyst as a polymerization catalyst. A laminate for packaging bags using a film as a sealant layer (see claim 1 of Patent Document 2), or a linear ethylene-α-olefin copolymer produced using a Ziegler catalyst as a polymerization catalyst is an operation for removing ionic impurities. A film containing no linear additives having a density of 0.925 to 0.935 g / cm ³ and containing a linear ethylene-α-olefin copolymer with reduced or eliminated ionic impurities contained in the sealant layer was used. A laminate for packaging (see claim 2 of Patent Document 2) is proposed.

  On the other hand, as mentioned above, box-shaped resin cases containing disc-shaped products such as silicon wafers, compound semiconductor wafers, and hard disks are generally automatically packaged in clean, dust-free packaging bags by automatic packing machines. is there. At this time, the empty bags stacked on the supply stage of the automatic packing machine are taken out one by one with a sucker or the like of an automatic bag feeder, automatically opened, and sealed after the resin case is loaded.

  In addition, the dust-free packaging bag used above is a laminated body in which a laminated body of polyester, polyamide, and polyolefin plastic films is used for the inner bag and a barrier layer such as aluminum foil or silica-deposited polyester is used for the outer bag. It is usual to use the inside and outside double packaging.

  However, these packaging bags are basically made of a laminate made of a synthetic resin film, so that static electricity easily occurs and is easily charged. In particular, it is more easily charged in factories such as silicon wafers, compound semiconductor wafers, and hard disks where the inside of the factory is controlled at a low humidity. For this reason, when taking out the dust-free packaging bags pooled in the stacking state one by one with the sucker of the automatic bag feeder, the bags are adsorbed by static electricity and lifted with the sucker. An empty bag adhesion phenomenon in which the lower bags also stick to each other, and process troubles such as the fact that the packaging bags cannot be taken out one by one or the positions of the lower bags are shifted even if they do not adhere easily occurred.

  In order to prevent or avoid such an electrostatic failure, it is a matter of course to take antistatic measures on the laminated body constituting the packaging bag.

  However, the conventional antistatic technology proposed for this type of dust-free packaging bag, as described in the following Patent Documents 3, 4, and 5, mainly contains the contents, i.e. For example, a conductive ink layer in which antimony-containing tin oxide fine particles are dispersed is formed on the outer surface of a packaging bag for the purpose of preventing adverse effects on electronic material parts and the like that require high cleanliness (see Patent Document 3). Or an antistatic agent such as an inorganic substance such as metal powder, carbon, a silicone compound, or a surfactant is added to the constituent material of the laminate (see Patent Document 4), or as described above An antistatic agent is formed on the outer surface or the like of the laminate by a coating containing an antistatic agent (see Patent Document 5), and an automatic bag feeder for an automatic packaging machine In addition to the intended purpose of improving the transportability, the above-mentioned conventionally known antistatic techniques may cause ionic impurities such as metal ions and floating particles. Since the function as a dust-free packaging bag may be greatly impaired, it has not been able to be suitably employed.

  In addition, as seen in Patent Documents 6 and 7, it is also known that an antistatic layer made of a conductive polymer is formed on the surface of a film as an antistatic measure such as a polyester film for packaging. In addition to the fact that the effects of ionic impurities and suspended particulates when packaging bags are the target, and the effects of these, are not known at all. Since it has to be given in a large amount, its adoption has hardly been recalled or tried because of the unforeseeable cost unpredictability. In addition, since the conductive polymer layer does not have a function as an adhesive, a coating process on the base film is required, and there is a difficulty in making the cost unprofitability more remarkable.

  Furthermore, Patent Document 8 proposes a method for suppressing the generation of static electricity on the surface of a plastic film by using a specific adhesive primer made of a crosslinkable polymer having antistatic properties. This method is effective as a countermeasure against static electricity, but when a dust-free packaging bag is used as an object, generation of ionic impurities is a concern, and it has not always been suitably employed.

  It is common knowledge that dust-free packaging bags are degassed and packed at the time of factory shipment. However, degassing packaging causes the bags to adhere tightly and cause the above process trouble.

  In order to prevent such bags from sticking to each other, it is effective to use a mat film or embossing, but there is concern that the visibility of the contents, the mechanical strength of the bag, and the efficiency during bag making may be reduced. It could not be suitably employed.

JP 2003-191363 A JP 2006-137010 A JP 7-329142 A JP-A-8-276528 JP-A-8-276527 JP 2003-292655 A JP 2006-282941 A Japanese Patent No. 2608383

  The present invention is required to be dust-free packaging bags as described above, that is, not to generate ionic impurities and suspended particles, and therefore, it is difficult to use a general antistatic agent, and in particular, the inner bag is transparent. As a specific object, a dust-free packaging bag for packaging such as electronic material parts that is also repelled from the use of carbon black is satisfied, while satisfying the above various requirements for the dust-free packaging bag, When packing with an automatic packing machine, in the process of taking out empty bags one by one with a sucker of an automatic bag feeding (conveying) device, etc. It is an object of the present invention to provide a dust-free packaging bag that can effectively prevent the occurrence of a process trouble and is excellent in automatic packaging suitability that can be implemented at a relatively low cost.

  The present inventors have conducted various experiments and researches on the technical problems as described above. In order to prevent the occurrence of the above process trouble at the time of empty bag pick-up conveyance by the bag feeder of the automatic packaging machine. In the combination with the use of a polyester film having a haze value of 5 to 40% for the outermost layer film of the dust-free packaging bag, the friction voltage is preferably 2.0 kV or less in absolute value of the peak value, preferably It has been found that the desired effect can be surely achieved if the attenuation voltage after 6 minutes of the frictional voltage test can be controlled to 1.0 kV or less in absolute value. Therefore, as a result of repeated trial experiments on various antistatic measures based on such unique knowledge, it is preferable to add a specific type of antistatic agent to the inside or innermost surface of the laminated base layer of the packaging bag. By providing an adhesive primer layer or adhesive layer containing an agent, it is possible to form a layer having both adhesion suitability and antistatic function at the same time. It is found that it is possible to suppress the frictional voltage on the surface of the packaging bag to the expected range while holding various performances required for the dust packaging bag, and to suppress peeling electrification. The present invention has been completed.

  Therefore, the present invention presents the following configurations as means for achieving the above object.

[1] In a dust-free packaging bag for packaging electronic parts and the like composed of a laminate of at least two layers of a base material layer including an outermost layer film and an innermost sealant layer,
The outermost layer film is a polyester film having a haze value of 5 to 40%, and
A dust-free packaging bag excellent in automatic packaging suitability, wherein an adhesive layer or an adhesive primer layer containing at least one antistatic agent is provided inside or on the innermost surface of the base material layer.

  [2] The dust-free packaging bag excellent in automatic packaging suitability described in [1], wherein the adhesive primer layer or adhesive layer containing an antistatic agent is provided on the back side of the outermost layer film.

  [3] The outermost layer film is a polyester film having a haze value of 10 to 35%, and the innermost sealant layer is a linear low density polyethylene, and is excellent in automatic packaging suitability as described in [1] or [2] above. Dust-free packaging bag.

  [4] Any one of [1] to [3] above, wherein the peak value of the initial charging voltage in the frictional charging voltage test on the surface of the outermost layer film is 2.0 kV or less in absolute value. A dust-free packaging bag excellent in automatic packaging suitability as described in the item.

[5] The surface resistivity of the surface of the outermost layer film is 10 ¹⁶ Ω / sq or more, and the decay voltage after 6 minutes in the friction voltage test is 1.0 kV or less in absolute value. The dust-free packaging bag excellent in automatic packaging suitability described in any one of [1] to [4] above.

  [6] The dust-proof material having excellent automatic packaging suitability as described in any one of [1] to [5] above, wherein the antistatic agent is mainly composed of alkylammonium sulfate. Packaging bag.

  [7] The above-mentioned item [6], wherein the antistatic agent is mainly composed of any one of alkyl quaternary ammonium ethosulphate, N-alkyloyltrialkylammonium sulfate, or a mixed composition. ] Is a dust-free packaging bag excellent in automatic packaging suitability.

[8] The automatic according to any one of [1] to [7], wherein the adhesive primer layer or the adhesive layer containing the antistatic agent has a surface resistivity of 10 ⁵ to 10 ¹⁴ Ω / sq. Dust-free packaging bag with excellent packaging suitability.

[9] The coating amount of the antistatic agent adhesive primer layer or adhesive layer containing the, preceding consisting uniform coating of 1 to 1000 mg / m ² in terms of solid content coating amount of the antistatic agent [1] - [ 8. A dust-free packaging bag excellent in automatic packaging suitability according to any one of items 8).

  First, as described in the above item [1], in the dust-free packaging bag for packaging electronic material parts and the like, the haze value of the outermost layer film on the side opposite to the innermost side sealant layer is 5 to 40%. The basic feature is that a polyester film is used, and an adhesive layer or a primer layer containing an antistatic agent is formed inside or on the innermost surface of the laminated base material layer. A polyester film is inherently smooth and excellent in transparency. On the other hand, by setting the haze value of the polyester film within the above range, a moderately rough film surface state can be obtained. As a result, it is possible to prevent the bags from adhering to each other by vacuum deaeration or the like without impairing the contents visibility of the dust-free packaging bag. In addition, by using an additive type antistatic agent, it is possible to have an antistatic function in the adhesive layer or adhesive primer layer at the same time, thereby avoiding an increase in cost due to an additional process when an antistatic layer is separately formed by coating. I can do it. In addition, by forming an adhesive layer or adhesive primer layer containing an antistatic agent on the inside or innermost surface of the laminated base material, the antistatic layer does not fall off due to external factors such as abrasion, and blocking due to the antistatic agent In addition, the frictional charging voltage on the bag surface can be suppressed to a low level, and the peeling electrification at the time of the sucking and taking out of the packaging bag by the automatic bag feeder can be suppressed. Accordingly, it is possible to reliably prevent the occurrence of the bag conveyance trouble due to the close contact of the bag and the static electricity failure as described above, and to provide a dust-free packaging bag excellent in automatic packaging suitability at a relatively low cost.

  Further, as described in the above item [2], when a layer containing an antistatic agent is disposed on the back side of the outermost layer film, the required antistatic performance can be imparted most efficiently.

  Further, as described in [3], the outermost layer film as the strength member is made of a polyester film having a haze value of 10 to 35%, and the innermost sealant layer is made of linear low density polyethylene. When it consists of a laminate of more than one layer, it can be the most preferred laminate material in terms of strength, heat sealability, transparency, bag-making suitability, etc., as a dust-free bag for packaging electronic material parts, etc. .

  Moreover, it is preferable that the peak value of the initial charging voltage in the friction charging voltage test is 2.0 kV or less in absolute value on the outermost film surface as in [4] above. When the absolute value of the peak value of the frictional voltage exceeds 2.0 kV, it is charged during the process of sucking and taking out the packaging bag by the automatic bag feeder and causes a conveyance trouble.

Further, as described in the above item [5], the surface specific resistivity of the outermost layer film surface is 10 ¹⁶ Ω / sq or more, and the decay band voltage after 6 minutes of the friction band voltage test is 1.0 kV in absolute value. The following is preferable. When the surface resistivity of the outer layer film surface is 10 ¹⁶ Ω / sq or more, the desired effect can be achieved even when a plastic film not subjected to antistatic treatment is used on the surface. However, if the decay voltage after 6 minutes of the frictional voltage test exceeds 1.0 kV in absolute value, the charge decay is slow and charge is accumulated, causing a transport trouble.

  Further, as described in the above item [6], as the antistatic material, a material mainly composed of alkylammonium sulfate can be suitably used as an additive type to an adhesive or the like. Specifically, it is preferable to use any one of alkyl quaternary ammonium ethosulphate, N-alkyloyltrialkylammonium sulphate or a mixed composition as described in the above item [7].

The surface specific resistivity of the back surface (application surface) of the film on which the primer layer or the adhesive layer containing the antistatic agent is formed is set in the range of at least 10 ⁵ to 10 ¹⁴ Ω / sq as described in the above [8]. Preferably, it is set in the range of 10 ⁹ to 10 ¹² Ω / sq. By setting the surface resistivity range as described above, the antistatic performance necessary for preventing the occurrence of the above-mentioned process troubles during automatic bag feeding (conveying) of the packaging bag is provided, and excellent in automatic packaging suitability. A dust packaging bag may be provided.

Moreover, in order to realize the surface specific resistivity as described above, the coating amount of the antistatic adhesive or primer is 1 to 1000 mg as the solid content of the coating amount of the antistatic agent as shown in the above item [9]. set in the range of / ^{m 2.} By controlling the coating amount in this way, the surface resistivity can be controlled within the desired range as described above in a uniform coating film.

It is sectional drawing which shows the laminated structure of the laminated body for packaging bags which concerns on this invention. BRIEF DESCRIPTION OF THE DRAWINGS It is an external appearance perspective view of the packaging bag by this invention, (A) shows a box-type packaging bag in a packaging state, (B) shows an envelope-type packaging bag in an unpacked state. It is a conceptual explanatory drawing which shows the automatic bag supply process by an automatic bag supply conveyance apparatus.

  First, the basic laminated structure of the laminated body (1), which is a material of a dust-free packaging bag for packaging electronic parts and the like as an application object of the present invention, will be described. A typical example of the laminated structure is shown in FIGS.

  As shown in FIGS. 1 (a) and 1 (b), the laminate (1) comprises a base material layer (3) and a sealant layer (2) as the innermost layer. The material layer (3) includes a surface outermost layer (4) and an intermediate layer (5). Each of the layers (2), (4), and (5) is bonded by, for example, a dry laminating method using an adhesive, or bonded by an extrusion laminating method through an adhesive primer layer.

  Here, in the present invention, an additive type antistatic agent is added to the adhesive layer (6) or the adhesive primer layer provided on the laminated layer of the base material layer (3), that is, the inside or the innermost surface. It is made. In the embodiment shown in FIG. 1 (a), an intermediate layer is formed by applying an adhesive layer (6) or an adhesive primer layer containing an antistatic agent to the back side of the outermost layer (4) of the base material layer (3). (5) is provided between. Further, in another embodiment of FIG. 1 (b), an adhesive layer (6) or an adhesive primer layer that also contains an antistatic agent is provided on the back side of the intermediate layer (5), that is, the innermost surface of the base material layer. The coating is formed.

  The sealant layer (2) is composed of a linear low density polyethylene film having a density of about 0.910 to 0.940, preferably an additive (sliding material, anti-blocking material, antistatic agent, antioxidant, ultraviolet ray). What does not contain an absorbent etc. is used. In addition, a linear ethylene-α olefin copolymer as described in Patent Document 2, which is a copolymer produced using a metallocene catalyst as a polymerization catalyst, or a Ziegler catalyst as a polymerization catalyst. A linear ethylene-α-olefin copolymer produced by using an ionic impurity that has been reduced or removed through an ionic impurity removal operation is preferably used.

  The material for a dust-free packaging bag to which the present invention is applied comprises a laminate of at least two layers including the sealant layer (2) and a base material layer (3) laminated thereon. Moreover, the said base material layer (3) is provided with the surface outermost layer (4) at least, and the structure further provided with the intermediate | middle layer (5) of 1 layer or 2 layers or more as needed is employ | adopted.

The outermost surface layer (4) is a polyester film having a surface resistivity of 10 ¹⁶ Ω / sq or more which is not subjected to antistatic treatment on the surface, and has a haze value of 5 to 40%. A polyester film is used. Here, in particular, the polyester film is used as the film material of the outermost layer (4) so that it has excellent inherent mechanical strength and excellent transparency so that the contents stored in the packaging bag can be seen from the outside. It is possible to give good visibility for On the other hand, the haze value to be held is limited to the range of 5 to 40% because the adhesiveness of the smooth surface is reduced and the stacked bags are in close contact with each other while maintaining the above-mentioned visibility. It is for preventing. As the polyester film having the above haze value, use of a kneading material in which a diffusing agent such as silica is uniformly dispersed in an adhesive composition or an adhesive primer composition is used, which impairs mechanical strength. However, the present invention is not limited to this, and a polyester film processed by any treatment such as sandblasting or mat coating may be used. A film having a haze value of less than 5% cannot suppress the adhesion between the bags and causes a conveyance trouble. Moreover, the film whose haze value exceeds 40% has poor content visibility, and is unsuitable for inner bag applications. A more preferable haze value range is 10 to 35%.

  When the outermost layer (4) requires light shielding and oxygen gas barrier properties, for example, a barrier on which a metal or metal oxide such as silicon oxide or aluminum is deposited or an aluminum foil is adhered. A conductive polyester film can be used.

  The said intermediate | middle layer (5) is a layer for supplementing mechanical strength (puncture strength etc.) and various barrier properties of a laminated body (1) mainly. Examples of the film used for the intermediate layer (5) include plastics such as polypropylene, polyethylene terephthalate, polyamide (nylon-6, nylon-6, 6, etc.), cellulose acetate, ethylene-vinyl acetate copolymer saponified product, and polycarbonate. Stretched or unstretched film, paper, aluminum foil and the like.

  In addition, you may employ | adopt the laminated body which adhere | attached and integrated each said layer (2) (4) (5) through the melt extrusion layer (PE extrusion layer) by a thermoplastic resin, for example, a polyethylene film.

  In addition, it is preferable to use an antistatic agent containing an alkylammonium sulfate as a main component as the antistatic agent contained in the adhesive layer (6) or the adhesive primer layer in the base material layer (3). Specifically, it is preferable to use any one of alkyl quaternary ammonium ethosulphate, N-alkyloyl trialkylammonium sulfate, or a mixed composition. The antistatic agent must be halogen-free. The primer or adhesive is not particularly limited, but must be compatible with the antistatic agent. For example, urethane, epoxy, and acrylic resins are preferable. When using an isocyanate hardening | curing agent for an adhesive agent, it is preferable to add 5-30% of propylene carbonate as a non-aqueous ion electrolytic agent.

  Although the specific laminated structure in the laminated body (1) for dustless packaging bags made into the application object of this invention is enumerated below, a laminated structure is not specifically limited to these illustrations. In the following, “LLD” is linear low-density polyethylene, “PET” is biaxially stretched polyethylene terephthalate film, “Ny” is biaxially stretched polyamide film, and “PE (EXT)” is extrusion-bonded by low-density polyethylene. Indicates the layer.

PET / Ny / LLD,
PET / Ny / PE (EXT) / LLD
PET / LLD
PET / PE (EXT) / LLD

  The present invention is a box-type dust-free packaging bag (10) as shown in FIG. 2 (a) where a bag is produced with the laminate (1) as described above, or as shown in FIG. 2 (b). In the envelope-type dust-free packaging bag (10A), in order to improve the automatic packaging suitability, a polyester film having a haze value of 5% or more and 40 or less is used for the outermost layer (4) of the packaging material. ) Or an innermost surface, a primer layer or an adhesive layer (6) containing an antistatic agent is formed as shown in FIGS. That is, when packaging a box-shaped resin case containing electronic material parts and products in the above-described packaging bag (10) using an automatic packaging machine, the packaging bags stacked in the bag feeding station as shown in FIG. (10) is picked up one by one from the top (arrow a) and picked up by the pick-up transfer means such as the suction cup (21) equipped in the automatic bag supply (transfer) device (20), and transferred toward the packing station. (Arrow b) When the bag is in close contact with each other, due to static electricity effects, especially the effects of peeling electrification, the lower bags may stick together and be lifted together or misaligned, and the packaging bag in the normal position and normal posture The above characteristic configuration is adopted as means for preventing the occurrence of a process trouble that can prevent automatic feeding in (10).

Unlike the case where a coating type antistatic agent is applied, the coating process does not increase by using an additive type antistatic agent in the adhesive for adhesive bonding or the adhesive coating agent as described above. Moreover, since the stable antistatic function is expressed with a small amount of addition, the original performance of the primer and the adhesive can be maintained. Accordingly, it is possible to achieve the desired surface resistance value of 10 ¹⁴ Ω / sq or less with a very small amount of use, and no significant increase in cost is caused. From such a cost point of view, it is necessary to control the surface resistivity of the coated surface by applying a primer layer or an adhesive layer containing an antistatic agent to a low value beyond the required antistatic performance range. Absent. Specifically, it is necessary and sufficient to be able to impart a surface resistivity of 10 ⁵ Ω / sq or more. More preferably, it is desirable to set it in the range of 10 ⁹ to 10 ¹² Ω / sq.

And by giving such surface specific resistivity, the peak value of the initial charging voltage in the frictional band voltage test on the surface of the outermost layer film is 2.0 kV or less in absolute value, and the attenuation band after 6 minutes has passed. The voltage is controlled to be 1.0 kV or less in absolute value. By controlling the frictional voltage, a polyester film having a surface resistivity of 10 ¹⁶ Ω / sq or more that is not subjected to antistatic treatment on the surface is used for the outermost layer. The effect of preventing the expected transport trouble can be satisfactorily achieved.

The surface specific resistivity depends on the amount of the antistatic agent added to the primer layer or the adhesive layer (6) containing the antistatic agent. The greater the amount added, the lower the surface resistivity, which is induced in the direction of conductivity. However, it is disadvantageous in terms of material cost rather than a further improvement in the effect of applying a large amount beyond the range required for improving the automatic packaging suitability and automatic transport suitability of the present invention. Is bigger. Therefore, the addition amount, in terms of solid content of the antistatic agent, should be in the range of 1 to 1000 mg / ^{m 2,} preferably from to the 5 to 100 mg / ^{m 2.}

  As a coating method for forming the primer layer or the adhesive layer (6) containing the antistatic agent, any means such as gravure coating, spray coating, and spin coater coating can be adopted. Here, the concentration of the paint is set to 1 to 30% by weight of the solid content, so that the coating operation can be easily performed including the control of the coating amount.

  The surface resistivity and frictional voltage defined in the present invention are respectively measured values using a high resistance meter manufactured by Agilent Technologies (conforming to JIS K6911) and measured values using a static electricity measuring device manufactured by Kanebo Engineering (according to JIS L1094). Compliance).

  As constituent materials of the packaging laminates of Examples, Comparative Examples, and Reference Examples, the following were used.

(Laminated material)
PET1: Biaxially oriented kneaded matte polyethylene terephthalate film Thickness
25 μm, haze 30%
PET2: Biaxially stretched polyethylene terephthalate film 25 μm thick,
5% haze
PET3: Biaxially stretched polyethylene terephthalate film 25 μm thick,
3% haze
PET4: Biaxially stretched and kneaded matte polyethylene terephthalate film Thickness
25 μm, haze 60%

Ny1: Biaxially stretched polyamide film 15 μm thick
PE (extrusion): low density polyethylene resin (MFR 5 g / 10 min,
Density 0.924 g / cm ³ )
LLD1: linear low density polyethylene (MFR 2 g / 10 min,
Density 0.930 g / cm ³ )

  And the laminated body for packaging bags of the various laminated structure shown to sample No. of Table 1, 1-22 with the said constituent material was produced. In Table 1, the laminate not using “Film 3” is obtained by dry-laminating other constituent material films 1, 2, 4, or 1, 4 using a polyurethane-based dry laminate adhesive, and “Film 3”. The laminate using “PE (extrusion)” is laminated and integrated by the extrusion sandwich lamination method.

  Moreover, about sample Nos. 1 to 9 and 11 of the above various laminates, a kneaded matte PET film having a haze of 30% and a haze of 21% is used for the outermost layer. For Sample No. 10, a PET film having a haze of 5%, and for 12 to 20 and 22, a haze of 3% is used. Sample No. For 2, 4, 13, and 15, an adhesive layer containing an antistatic agent was formed on the back surface of the nylon film. In the samples other than the above, an adhesive layer containing an antistatic agent was formed on the back surface of the outermost PET film. Here, as the antistatic agent, SAT-F-01 manufactured by Altec Co., Ltd., which is a mixture of an alkyl quaternary ammonium etosulphate and propylene carbonate, was used. The adhesive is diluted with ethyl acetate and a urethane adhesive with a solid content of 10% is used. The above-mentioned antistatic agent is added to the adhesive in a proportion of 15% by weight with respect to the solid content of the adhesive. An agent solution was obtained. And after apply | coating the adhesive agent solution which added this antistatic agent with the arrangement | positioning and application quantity which are shown in Table 1 by the gravure coating method, the drying process of 100 degreeC x 1 minute was performed, and the adhesive layer containing the said antistatic agent was formed. To be formed.

(Measurement of surface resistivity of outermost film)
Sample No. above. About 1-22, about the laminated body in which the contact bonding layer containing an antistatic agent was formed, the surface specific resistivity of the outer surface side of the outermost layer film and the adhesive application surface before lamination | stacking was measured. This measurement was performed according to JIS K6911 using a high resistance meter manufactured by Agilent Technologies, as described above. The results are also shown in Table 1.

(Measurement of frictional voltage)
Therefore, next, the above-mentioned sample No. About each outermost layer film of 1-22, when the frictional band voltage of those outer surfaces (non-application surface of an antistatic adhesive) was measured, the initial band voltage value and the attenuation band voltage value after 6-minute progress are table | surfaces. It was as shown in the right column in 1. In addition, the measurement of this frictional voltage was measured based on JISL1094 by the static electricity measuring apparatus by Kanebo Engineering as mentioned above.

  As shown in the measurement results of Table 1, in the outermost layer film having an adhesive layer containing an antistatic agent, the peak value of the initial electric voltage in the frictional electric voltage test is not limited by the application of a predetermined amount or more of the antistatic agent. It was confirmed that the attenuation band voltage value after 6 minutes could be controlled to a sufficiently low value.

―Performance evaluation―
(Lamination strength)
The delamination strength of two adjacent layers laminated and adhered via an adhesive layer containing an antistatic agent was examined. This peel strength test was performed by measuring an initial load at the time of peeling when a 15 mm wide bonded sample was peeled at a pulling speed of 100 mm / second and a pulling angle of 180 °. As a result, it was confirmed that all of the samples 1 to 22 showed a value of 3N or more of the initial load.

(Automatic transfer test)
Next, in order to investigate the automatic conveyance suitability of the dust-free packaging bag in the corresponding relationship with the measurement result of the surface specific resistivity and the frictional voltage, the various laminates of the sample Nos. 1 to 22 obtained as described above are used. An envelope-shaped packaging bag (vertical x horizontal: 80 cm x 84 cm) as shown in 2 (b) was produced, and an automatic conveyance (bag feeding) test was performed by an automatic packaging machine.

  Here, in the automatic conveyance test, when 50 packaging bags are set as one set in the automatic conveyance device, and when the pick-up type pick-up conveyance device carries out the conveyance one by one from the top, at least two bags are temporarily stored. The number of occurrences was counted as an error when the above phenomenon occurred or even a slight shift occurred in the lower bag, and the determination was made according to the following evaluation criteria.

  The sample No. Nos. 1 to 21 are degassed and recreated from the normal shipping time of the packaging bags. For comparison, a sample that was not degassed for comparison was used as a test material.

  The results of the automatic conveyance test are shown in Table 2.

Evaluation: ◎ 0 times
○ 1-2 times
△ 3-5 times
× 5 times or more

(Visibility)
Sample No. used for the above automatic conveyance test. About each packaging bag by 1-22, the visibility of the content from the outside when packaging a to-be-packaged item was evaluated, and the good thing was evaluated by (circle) mark and the poor thing was determined by x mark.

  The results are also shown in Table 2.

  As shown in the results of the evaluation “automatic conveyance test” in Table 2, for samples subjected to appropriate antistatic measures with the conductive polymer according to the present invention, in the automatic bag feeding and conveyance process, the empty bag attachment or position due to the influence of static electricity It was confirmed that the automatic conveyance suitability could be improved as expected without causing any process trouble such as deviation.

  It was also confirmed that the required transparency was maintained and the content visibility could be improved.

(Ion analysis)
Next, in order to confirm the presence or absence of ion contamination of the packaging bag, the following anion analysis and metal ion analysis were performed.

Here, the analysis method was performed using the sample No. according to the example of the present invention in which the primer layer or the adhesive layer containing the antistatic agent was formed. 1000 ml of the extract (using pure water) is injected into each packaging bag of the laminate of No. 6 and the laminate of the control sample on which a primer layer or an adhesive layer not containing an antistatic agent is formed, and the inner area becomes 250 cm ² . And then shaken for 2 minutes. For “anion analysis”, components of Cl ⁻ , NO ₂ ⁻ , SO ₄ ²⁻ , and NO ₃ ⁻ were measured with the ion chromatograph after shaking. The results are shown in Table 3.

  On the other hand, for “metal ion analysis”, after shaking with pure water, 20 ml of the extract was transferred to a fluororesin container (PFA container), 20 ml of 68% nitric acid was added, and then ICP-MS (inductively coupled plasma mass spectrometer). ), Na, Al, Mg, Zn, Fe, Cu components were measured. The results are shown in Table 4.

  As shown in the results of evaluations “Anion analysis” and “Metal ion analysis” in Tables 3 and 4, the samples subjected to appropriate antistatic measures by addition of the antistatic agent according to the present invention have no antistatic agent. It can be confirmed that the content of ionic impurities such as metal ions and inorganic ions is very low, and that it is suitable for non-contamination when using dust-free packaging bags. It was.

  The dust-free packaging bag according to the present invention is used for sealed packaging for transportation of electronic material products or parts such as silicon wafers, compound semiconductor wafers, and hard disks, and medical equipment that requires a high degree of cleanliness. It is also applied for packaging.

1 ... Laminate for packaging 2 ... Sealant layer (innermost layer)
DESCRIPTION OF SYMBOLS 3 ... Base material layer 4 ... Outermost layer 5 ... Intermediate | middle layer 6 ... Primer layer containing an antistatic agent, or contact bonding layer

Claims (9)

In a dust-free packaging bag for packaging electronic parts, etc., consisting of a laminate of at least two layers of a base material layer containing an outermost layer film and an innermost sealant layer,
The outermost layer film is a polyester film having a haze value of 5 to 40%, and
A dust-free packaging bag excellent in automatic packaging suitability, wherein an adhesive layer or an adhesive primer layer containing at least one antistatic agent is provided inside or on the innermost surface of the base material layer.   The dust-free packaging bag excellent in automatic packaging suitability according to claim 1, wherein the adhesive primer layer or adhesive layer containing an antistatic agent is provided on the back side of the outermost layer film.   The dust-free packaging bag excellent in automatic packaging suitability according to claim 1 or 2, wherein the outermost layer film is a polyester film having a haze value of 10 to 35%, and the innermost sealant layer is a linear low density polyethylene.   The automatic packaging according to any one of claims 1 to 3, wherein the peak value of the initial charging voltage in the friction charging voltage test on the surface of the outermost layer film is 2.0 kV or less in absolute value. Dust-free packaging bag with excellent suitability. The surface resistivity of the surface of the outermost layer film is 10 ¹⁶ Ω / sq or more, and the decay voltage after 6 minutes in the friction voltage test is 1.0 kV or less in absolute value. The dust-free packaging bag excellent in automatic packaging suitability according to any one of claims 1 to 4.   6. The dust-free packaging bag excellent in automatic packaging suitability according to any one of claims 1 to 5, wherein the antistatic agent contains an alkyl ammonium sulfate as a main component.   7. The antistatic agent according to claim 6, wherein the antistatic agent is mainly composed of any one of alkyl quaternary ammonium ethosulphate, N-alkyloyltrialkylammonium sulphate, or a mixed composition. Dust-free packaging bag with excellent suitability for automatic packaging. The adhesive primer layer or the adhesive layer containing the antistatic agent has a surface resistivity of 10 ⁵ to 10 ¹⁴ Ω / sq, and is excellent in automatic packaging suitability according to any one of claims 1 to 7. Dust packaging bag. The coating amount of the adhesive primer layer or the adhesive layer containing the antistatic agent comprises a uniform coating film of 1 to 1000 mg / m ^{2 in} terms of solid content of the coating amount of the antistatic agent. A dust-free packaging bag excellent in automatic packaging suitability as described in the item.

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