JP2013105857A - Housing cover mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a housing cover mechanism for eliminating a winding failure of a sheet-like cover member due to aged deterioration.SOLUTION: A housing cover mechanism 1 includes: a sheet-like cover member 10 and a movement mechanism 11. The sheet-like cover member 10 has a size so as to block an opening 3a of a housing 3 and has flexibility. The movement mechanism 11 includes: a first pulley 13 and a second pulley 14 connected to one end of a rotational axis 12 attached to the fixed end 10b of the sheet-like cover member 10; an endless belt 15 wound round the pulleys 13, 14; an engaging member 16 fixed to the endless belt 15; a cover member tension member 18 attached to the free end 10a of the sheet-like cover member 10; a direct-acting actuator 19; and a press movement part 20. The housing cover mechanism 1 has: a piston member 24; and a cylinder 23 which performs reciprocal motions between an open position and a blocked position. The housing cover mechanism 1 is arranged between the cover member tension member 18 and the engaging member 16, and fixed to the piston member 24.

Description

  The present invention relates to a housing cover mechanism that covers an opening of a housing of a wafer processing apparatus that performs cleaning or solution coating on the surface of a wafer so as to be freely opened and closed.

  In recent years, as a method of dividing a wafer such as a semiconductor wafer or an optical device wafer, a laser processing groove is formed by irradiating a laser beam along a street formed on the wafer, and a mechanical braking device is formed along the laser processing groove. Has been proposed (see, for example, Patent Document 1). However, when a laser beam is irradiated along the street of the wafer, thermal energy is concentrated in the irradiated area, and sticky droplets called debris are generated, and the scattered debris adheres to the device surface of the wafer, and the device A new problem of degrading quality arises. In order to solve such a problem of debris, a laser processing method has been proposed in which a processing surface of a wafer is coated with a protective film such as polyvinyl alcohol, and the wafer is irradiated with a laser beam through the protective film (for example, Patent Documents 2 and 3).

  This type of protective film coating apparatus includes a housing that includes at least a holding unit that holds a wafer and a wafer processing unit that applies a protective coating to the surface of the wafer held by the holding unit. And it is necessary to provide the housing | casing cover mechanism which covers the opening part opened upwards of the housing | casing so that opening and closing is possible so that a coating | coated material may not scatter to the exterior of a housing | casing at the time of application | coating of a protective coating. The casing cover member is formed of a film having a winding reel in advance, and when opening the opening, the opening is opened by winding with the winding rod included in the sheet-like cover member. When closing the opening, the opening is closed by pulling out the sheet-like cover member by the moving means.

JP-A-10-305420 JP 2004-188475 A JP 2004-322168 A

  However, in the conventional method in which the sheet-like cover member is preliminarily attached with a take-up hook, the take-up wrinkles are reduced due to the deterioration of the sheet-like cover member over time, or the sheet-like cover member cannot be wound up, or is in a closed state against the take-up hook. There is a problem that the moving means is excessively loaded to maintain it.

  The present invention has been made in view of the above-described facts, and an object of the present invention is to provide a casing cover mechanism that can eliminate a winding problem of a sheet-like cover member due to deterioration over time.

  To achieve the above object, according to the present invention, there is provided a housing having at least a holding means for holding a wafer and a wafer processing means for performing a cleaning or solution coating process on the surface of the wafer held by the holding means. A casing cover mechanism that covers an opening opened upward so as to be openable and closable, and has a flexible sheet-like cover member that is at least large enough to close the opening, and the sheet-like cover member is free. A moving mechanism that moves the end between a closed position that closes the opening and an open position that opens the opening, and the moving mechanism is attached to a fixed end of the sheet-like cover member. A first pulley connected to one end of the rotating shaft, a second pulley disposed in the vicinity of the closing position, and movement of the sheet-like cover member wound around the first pulley and the second pulley Endless extending in the direction And an engaging member fixedly attached to the endless belt, and a guide rail disposed in parallel with the endless belt in the vicinity of the endless belt and having a length equal to at least the length of the endless belt extending. A cover member tensioning member that is mounted on the free end of the sheet-like cover member and the other is guided by the guide rail to pull out or pull back the sheet-like cover member, and is arranged in parallel to the guide rail A linear motion actuator having a piston member and a cylinder that reciprocate between the open position and the closed position; and disposed between the cover member tensioning member and the engagement member; and A pushing member fixed to the piston member, and when the sheet-like cover member is moved from the open position to the closed position, it is positioned at the open position. The piston member of the linear motion actuator moves to the closed position side, and the pushing member fixed to the piston member abuts against the cover member pulling member to push and moves the free end of the sheet-like cover member The piston member of the linear motion actuator positioned at the closed position moves to the open position side when the sheet-like cover member is moved from the closed position to the open position. The endless belt having the engaging member fixedly attached following the pushing of the engaging member, the pushing member fixed to the piston member abutting against the engaging member The housing cover mechanism is provided in which the rotating shaft rotates through the first pulley rotated by the endless belt, and the sheet-like cover member is wound around the rotating shaft. .

  According to the housing cover mechanism of the present invention, when the sheet-like cover member is moved from the closed position to the open position, the piston member of the linear actuator is moved to the open position side, and the push member moves the engaging member. Following the pushing, the rotating shaft is rotated in the direction in which the endless belt winds up the sheet-like cover member. Thus, when the sheet-like cover member is moved from the closed position to the open position, the rotating shaft rotates in the direction of winding the sheet-like cover member, so that the free end portion of the sheet-like cover member is released from the closed position. Move towards. Therefore, even if the winding wrinkles are reduced due to aging of the sheet-like cover member, the sheet-like cover member is wound around the rotating shaft at the closed position. Therefore, the winding trouble of the sheet-like cover member due to deterioration over time can be eliminated.

  Further, when the sheet-like cover member is moved from the open position to the closed position, the piston member of the linear actuator is moved to the closed position side, and the pushing member pushes the cover member pulling member, so that the sheet-like cover is moved. Move the free end of the member to the closed position. Therefore, the free end portion of the sheet-like cover member can be reliably moved from the open position to the closed position.

  Furthermore, a cover member tension member that is pushed by the piston member of the linear actuator is attached to the free end portion of the sheet-like cover member, and the fixed end portion of the sheet-like cover member is engaged by the piston member of the linear actuator. A rotating shaft that is rotated when the member is pushed is mounted. With such a configuration, the opening / closing operation of the sheet-like cover member and the winding operation of the sheet-like cover member can be performed by one linear motion actuator. Therefore, it is not necessary to provide the sheet-like cover member with a winding rod, and winding problems due to aging can be eliminated.

FIG. 1 is a diagram illustrating a schematic configuration example of a wafer processing apparatus including a housing cover mechanism according to the embodiment. FIG. 2 is a diagram illustrating a state in which the sheet-like cover member of the housing cover mechanism according to the embodiment is moved from the closed position to the open position. FIG. 3 is a diagram illustrating the operation of the housing cover mechanism according to the embodiment.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. Various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

  FIG. 1 is a diagram illustrating a schematic configuration example of a wafer processing apparatus including a housing cover mechanism according to the embodiment. FIG. 2 is a diagram illustrating a state in which the sheet-like cover member of the housing cover mechanism according to the embodiment is moved from the closed position to the open position. FIG. 3 is a diagram illustrating the operation of the housing cover mechanism according to the embodiment. 3A is a diagram illustrating a state in which the sheet-like cover member of the housing cover mechanism according to the embodiment is located at the open position, and FIG. 3B is a diagram illustrating the embodiment. 4 is a view showing a state in which the sheet-like cover member of the housing cover mechanism according to the present embodiment is moving from the open position to the closed position, and FIG. 3C is a sheet-like cover of the housing cover mechanism according to the embodiment. It is a figure which shows the state which a member is located in the obstruction | occlusion position, (d) shown in FIG. 3 is the state which the sheet-like cover member of the housing | casing cover mechanism which concerns on embodiment has moved from the obstruction | occlusion position to the open position FIG. 3E is a diagram illustrating a state in which the sheet-like cover member of the housing cover mechanism according to the embodiment is further moved from the closed position to the open position.

  The housing cover mechanism 1 according to the present embodiment constitutes, for example, a wafer processing apparatus 2 (shown in FIG. 1) provided in a processing apparatus (not shown) that performs various types of processing on the wafer W. Various types of processing include dicing processing (including dicing processing by a cutting blade, ablation processing by laser beam irradiation), drilling processing using a laser beam, grinding processing, polishing processing, and expanding processing. The wafer processing apparatus 2 is an apparatus that performs a cleaning or solution coating process on the surface of the wafer W, for example.

  In this embodiment, the wafer processing apparatus 2 is provided in a laser processing apparatus (not shown) that performs ablation processing on the wafer W to form a laser processing groove (not shown) in the wafer W. The wafer processing apparatus 2 is an apparatus that coats a surface of the wafer W before processing with a protective film by applying a solution containing a synthetic resin such as polyvinyl alcohol.

  As shown in FIG. 1, the wafer processing apparatus 2 includes a casing 3 installed in the apparatus main body of the laser processing apparatus, a holding unit 4 provided in the casing 3, a wafer processing unit 5, and a cleaning unit 6. The housing cover mechanism 1 is included. The housing 3 is a container that includes a bottom wall (not shown) and a plurality (four in this embodiment) of outer walls 7a, 7b, 7c, and 7d, and is provided with an opening 3a that opens upward. Thus, the housing 3 contains at least the holding means 4 and the wafer processing means 5.

  The holding means 4 holds the wafer W before processing on the surface. The portion constituting the surface of the holding means 4 has a disc shape made of porous ceramic or the like, and is connected to a vacuum suction source (not shown) via a vacuum suction path (not shown). The holding means 4 sucks and holds the wafer W on the surface by placing the wafer W on the surface and applying a negative pressure by a vacuum suction source. The holding means 4 is provided so as to be movable in the vertical direction within the housing 3 by a support mechanism (not shown).

  The wafer processing means 5 applies a solution coating process including polyvinyl alcohol or the like to the surface of the wafer W held by the holding means 4 to coat a protective film. The wafer processing means 5 includes a plurality of spray nozzles (not shown). As the spray nozzle, for example, a spray type two-fluid nozzle is used, and the solution is sprayed in the form of a mist toward the surface of the wafer W from above by mixing air with the above-described solution. Further, the holding means 4 of the plurality of spray nozzles are provided so as to be movable in the horizontal direction within the housing 3 by a moving mechanism (not shown).

  The cleaning means 6 cleans the inner wall of the casing 3 by ejecting cleaning water toward the inner wall of the casing 3.

  The case cover mechanism 1 is a mechanism that covers the opening 3a of the case 3 so as to be opened and closed. As shown in FIG. 1, the housing cover mechanism 1 includes a sheet-like cover member 10, a moving mechanism 11, and a control means 100.

  The sheet-like cover member 10 has a size capable of closing at least the opening 3 a of the housing 3. The sheet-like cover member 10 is a flexible film-like visibility member. The sheet-like cover member 10 may be larger than the size of the opening 3a. The sheet-like cover member 10 is preferably made of a material having chemical resistance and a countermeasure against static electricity. In addition, the sheet-like cover member 10 may be appropriately set to have characteristics such as whether to give water repellency or hydrophilicity to a solution containing a synthetic resin constituting the protective film. The free end portion 10a of the sheet-like cover member 10 is moved by the moving mechanism 11 in a direction parallel to the surfaces of the outer walls 7b and 7d of the housing 3 (shown by an arrow I in FIG. 1 and the like and called a moving direction). .

  The moving mechanism 11 includes a free end 10a of the sheet-like cover member 10, a closed position (shown in FIG. 3C) where the sheet-like cover member 10 closes the opening 3a, and the sheet-like cover member 10 being an opening. It is moved between an open position (shown in FIG. 3 (a)) for opening 3a. As shown in FIGS. 1 and 2, the moving mechanism 11 includes a rotating shaft 12, a first pulley 13, a second pulley 14, an endless belt 15, an engagement member 16, a guide rail 17, The cover member tension member 18, the linear motion actuator 19, and the pressing member 20 are included.

  The rotary shaft 12 is formed in a columnar shape having a total length equal to the width of the outer wall 7a or longer than the width of the outer wall 7a, and is supported by the housing 3 so as to be rotatable around the axis. The rotating shaft 12 is disposed above the opening 3a of the housing 3 and on the outer side of the housing 3, that is, on the open position side of the outer wall 7a on the back left side of the housing 3 in FIGS. Yes. The rotating shaft 12 is attached (fixed) to the fixed end portion 10 b of the sheet-like cover member 10.

  The first pulley 13 is connected to one end of the rotary shaft 12 on the near side in FIGS. 1 and 2. The first pulley 13 is provided coaxially with the rotary shaft 12. The first pulley 13 rotates integrally with the rotating shaft 12. For this reason, the rotation speed of the first pulley 13 and the rotation speed of the rotary shaft 12 are equal to each other. The pulley diameter of the first pulley 13 is slightly smaller than the outer diameter of the rotating shaft 12.

  The second pulley 14 is supported by the housing 3 so as to be rotatable around the axis. The second pulley 14 is disposed above the opening 3 a of the housing 3 and on the outside of the housing 3, that is, on the closed position side of the outer wall 7 b facing the above-described outer wall 7 a of the housing 3. The second pulley 14 is disposed near the free end portion 10a of the sheet-like cover member 10 positioned at the closed position, that is, near the closed position. The second pulley 14 is provided at a position aligned with the first pulley 13 in the movement direction I.

  The endless belt 15 is formed in an endless annular shape and is wound around the first pulley 13 and the second pulley 14. Since the first pulley 13 and the second pulley 14 are arranged in the movement direction I, the endless belt 15 extends in the movement direction I of the free end portion 10 a of the sheet-like cover member 10. The endless belt 15 circulates (endlessly) around the first pulley 13 and the second pulley 14.

  The engaging member 16 is fixedly attached to the endless belt 15. The engaging member 16 is made of metal and is formed to protrude from the outer surface of the endless belt 15. In this embodiment, the engaging member 16 is fixed to the lower straight portion 15a of the two straight portions 15a and 15b of the endless belt 15 formed between the first pulley 13 and the second pulley 14. It is installed.

  The guide rail 17 is made of metal and is linearly formed, and is attached to the outer wall 7d. The guide rail 17 is provided in the vicinity of the opening 3 a, that is, the endless belt 15. The guide rail 17 is disposed in parallel with the straight portions 15 a and 15 b of the endless belt 15 and the moving direction I. The guide rail 17 has a length at least equal to (substantially the same as) the length of the endless belt 15. In the present embodiment, the length of the guide rail 17 is slightly shorter than the length of the endless belt 15 extending.

  The cover member tension member 18 is used to pull out or pull back the sheet-like cover member 10. The cover member tension member 18 is provided at a position farther from the rotation shaft 12 than the engagement member 16. The cover member tensioning member 18 includes a mounting portion 21 as one mounted on the free end portion 10 a of the sheet-like cover member 10, and a guide portion 22 as the other connected to the mounting portion 21 and guided by the guide rail 17. It has.

  The mounting portion 21 is made of metal and has a long shape. The length of the mounting portion 21 is formed substantially equal to the length of the free end portion 10a. The mounting portion 21 is disposed in parallel with the free end portion 10a and overlaps the free end portion 10a so as to be mounted on the free end portion 10a. The guide part 22 is comprised with the metal. The guide portion 22 is disposed in a state straddling the guide rail 17 and is movable along the longitudinal direction of the guide rail 17.

  The linear actuator 19 is disposed in parallel with the guide rail 17. The linear actuator 19 includes a cylinder 23 attached to the outer wall 7d, a piston (not shown) provided in the cylinder 23, and a piston member 24 attached to the piston and reciprocating between an open position and a closed position. Have.

  The cylinder 23 is made of metal, and is provided in a position parallel to the guide rail 17 and further away from the opening 3 a than the guide rail 17. The cylinder 23 is a pressure vessel whose inner space is sealed. At both ends in the longitudinal direction of the cylinder 23, there are provided air supply ports (not shown) that can supply pressurized gas from a pressurized gas supply source (not shown) to the inner space. When the pressurized gas is supplied to the inner space from the air supply port at one end of both ends, the cylinder 23 discharges the gas in the inner space from the air supply port at the other end. For example, when pressurized gas is supplied from the air supply port on the right side in FIG. 1 to the space inside the cylinder 23, the gas is discharged from the air supply port on the left side in FIG. When pressurized gas is supplied from the air supply port on the left side in FIG. 1 to the space inside the cylinder 23, the gas is discharged from the air supply port on the right side in FIG.

  The piston is provided in the cylinder 23 so as to be movable in the longitudinal direction of the cylinder 23, and is kept airtight with the inner surface of the cylinder 23 over the entire circumference. The piston partitions the space inside the cylinder 23 into two in the longitudinal direction of the cylinder 23. For example, when a pressurized gas is supplied from the air supply port on the right side in FIG. 1 to the space inside the cylinder 23, the piston moves in the cylinder 23 to the left end in FIG. For example, when pressurized gas is supplied from the air supply port on the left side in FIG. 1 to the space inside the cylinder 23, the piston moves in the cylinder 23 to the right end in FIG.

  The piston member 24 is made of metal and overlaps the outer surface of the cylinder 23. The piston member 24 moves in the longitudinal direction of the cylinder 23 integrally with the piston. For example, when a pressurized gas is supplied from the air supply port on the right side in FIG. 1 to the space inside the cylinder 23, the piston member 24 is moved to the left end in FIG. It moves to below the free end portion 10a of the positioned sheet-like cover member 10. For example, when a pressurized gas is supplied to the space inside the cylinder 23 from the air supply port on the left side in FIG. 1, the piston member 24 moves to the end on the right side in FIG. It moves to below the free end portion 10a of the positioned sheet-like cover member 10.

  The pushing member 20 is made of metal, is disposed between the cover member pulling member 18 and the engaging member 16, and is fixed to the piston member 24 of the linear actuator 19. The pushing member 20 is integrally provided with a fixing portion 25 fixed to the piston member 24 of the linear actuator 19 and an abutting portion 26 extending upward from the fixing portion 25. The fixing portion 25 is formed in a flat plate shape and overlaps the upper surface of the piston member 24. The contact portion 26 is formed in a flat plate shape extending upward from the edge of the fixed portion 25 on the side away from the rotation shaft 12. The contact portion 26 is disposed between the cover member tension member 18 and the engagement member 16. The contact portion 26 is one of the guide portion 22 of the cover member tension member 18 and the engagement member 16 when the piston member 24 of the linear motion actuator 19 reciprocates between the closed position and the open position. Abut.

  In the moving mechanism 11 described above, when the free end portion 10a of the sheet-like cover member 10 is positioned at the open position, the engaging member 16, the pushing member 20, and the guide portion 22 of the cover member tensioning member 18 are positioned in FIG. As shown in FIG. 2, the first pulley 13 is disposed in a position where it is almost in contact with each other. In the moving mechanism 11 described above, the engaging member 16, the pushing member 20, and the guide portion 22 of the cover member pulling member 18 are positioned when the free end portion 10 a of the sheet-like cover member 10 is positioned at the closed position. As shown to (c), the engaging member 16 is arrange | positioned in the position which leaves the space | interval D from the pushing member 20 which pushes the guide part 22 of the cover member tension | pulling member 18. FIG.

  In the moving mechanism 11 described above, when the engagement member 16 moves from the open position to the closed position, the engagement member 16 is prevented from catching up with the pushing member 20 to cause a malfunction, and the engaging member 16 and the pushing member are held at the closed position. In order to prevent the tactile required for winding of the sheet-like cover member 10 from being delayed too far from 20, the engaging member 16, the pushing member 20, and the guide portion 22 of the cover member tensioning member 18 are arranged in the open position. Are provided at positions where they almost contact each other, and the pulley diameter of the first pulley 13 is slightly smaller than the outer diameter of the rotary shaft 12. Because the rotation speed of the first pulley 13 and the rotation speed of the rotary shaft 12 are equal, if the pulley diameter of the first pulley 13 exceeds the outer diameter of the rotary shaft 12, the first pulley 13 moves from the open position to the closed position. This is because the engaging member 16 catches up with the pushing member 20 to cause a malfunction. In addition, since the product of the rotational speed of the first pulley 13 and the pulley circumferential length of the first pulley 13 is equal to the travel distance of the endless belt 15 when moving from the open position to the closed position, the first pulley If the pulley diameter of 13 is much smaller than the outer diameter of the rotating shaft 12, the engaging member 16 and the pushing member 20 are too far apart at the closed position, and the tact time required for winding the sheet-like cover member 10 is delayed. It is.

When the outer diameter of the rotary shaft 12 is r, the thickness of the sheet-like cover member 10 is t, and the length of the sheet-like cover member 10 is L, the rotary shaft 12 is wound on the rotary shaft 12 and the rotary shaft 12 at the open position. The cross-sectional area S and the cross-sectional diameter R of the cross-section orthogonal to the shaft core combined with the sheet-like cover member 10 are expressed by the following formulas 1 and 2.
S = (r / 2) ² × π + t × L Equation 1
R = (S / π) ^1/2 × 2

Since the number of turns of the sheet-like cover member 10 wound around the rotation shaft 12 at the open position is equal to the rotation number rf of the rotation shaft 12 from the open position to the open position, the rotation number rf is expressed by the following equation: 3.
rf = (R−r) / (2 × t) Equation 3

  For example, when the outer diameter r of the rotating shaft 12 is 12 mm, the thickness t of the sheet-like cover member 10 is 0.15 mm, the sheet length L is 380 mm, and the pulley diameter of the first pulley 13 is 11.46 mm. The rotational speed of the rotary shaft 12 and the first pulley 13 is 9.055, and the distance D (shown in FIG. 3C) between the pushing member 20 and the engaging member 16 at the closed position is about 54 mm. Become.

  The control means 100 controls the components of the housing cover mechanism 1 and the wafer processing apparatus 2 respectively. Further, the control means 100 controls the pressurized gas supply source connected to the linear motion actuator 19. The control means 100 moves the sheet-like cover member 10 of the housing cover mechanism 1 between an open position and a closed position to open and close the opening 3a of the housing 3. Note that the control means 100 is configured mainly with a microprocessor (not shown) provided with, for example, an arithmetic processing unit configured with a CPU or the like, a ROM, a RAM, and the like, and may control the entire laser processing apparatus, In this case, it is connected to display means for displaying the state of the machining operation and operation means used when the operator registers machining content information.

  Next, the processing operation of the laser processing apparatus according to this embodiment will be described. Here, the wafer W to be processed by the laser processing apparatus is a wafer such as a semiconductor wafer or an optical device wafer whose base material is silicon, sapphire, gallium or the like in this embodiment. The wafer W has a back surface opposite to the device W3 side surface on which a plurality of devices W3 are formed, and is attached to the dicing tape T, and the dicing tape T attached to the wafer W is attached to the frame F. Thus, the frame F is fixed. Further, on the surface of the wafer W, a plurality of first streets W1 parallel to each other and a plurality of second streets W2 parallel to each other are formed orthogonally, and the first streets W1 and the second streets W2 are formed. A device W3 is formed in an area partitioned by the street W2.

  First, when the operator registers the machining content information and receives an instruction to start the machining operation, the machining operation is started. In the processing operation, the control unit 100 positions the sheet-like cover member 10 of the housing cover mechanism 1 of the wafer processing apparatus 2 in the open position, controls the support mechanism, and raises the holding unit 4. Then, the control unit 100 places the unprocessed wafer W on the holding unit 4 by a transfer unit (not shown), controls the vacuum suction source, and holds the wafer W on the holding unit 4.

  Thereafter, the control unit 100 lowers the holding unit 4 that sucks and holds the wafer W in the support mechanism, and moves the sheet-like cover member 10 of the housing cover mechanism 1 from the open position to the closed position. When the lowering of the holding unit 4 that sucks and holds the wafer W is completed and the sheet-like cover member 10 is positioned at the closed position, the control unit 100 controls the moving mechanism to cross the wafer processing unit 5 over the wafer W. In this way, while moving at a predetermined speed, the wafer processing means 5 is controlled to spray the aforementioned solution from the spray nozzle. Then, the sprayed solution is cured, and a protective film is formed on the surface of the wafer W. In this way, the control unit 100 causes the wafer processing apparatus 2 to perform a solution coating process on the surface of the wafer W.

  The control unit 100 retracts the wafer processing unit 5 from above the wafer W sucked and held by the holding unit 4 by the moving mechanism, and moves the sheet-like cover member 10 of the housing cover mechanism 1 from the closed position to the open position. When the sheet-like cover member 10 of the housing cover mechanism 1 is positioned at the open position, the control means 100 raises the holding means 4 that sucks and holds the wafer W on the support mechanism. When the raising of the holding unit 4 is finished, the control unit 100 releases the suction holding of the wafer W by the holding unit 4 and the wafer W on which the protective film is formed by the transfer unit (not shown) Transport to. After the ablation processing is sequentially performed on all the streets W1 and W2, the control means 100 is transported to a cleaning unit (not shown) that removes the protective film by a transport means (not shown) to remove the protective film, and after the processing The wafer W is transferred to a cassette elevator (not shown). The control means 100 stores the processed wafer W in the cassette elevator by a transfer means (not shown), then takes out the unprocessed wafer W from the cassette elevator and performs the same processing as the above-described process. Thus, the laser processing apparatus performs ablation processing on the wafer W.

  In addition, after the wafer W on which the protective film is formed is removed from the holding unit 4, the control unit 100 moves the sheet cover member 10 of the housing cover mechanism 1 from the open position to the closed position again, so that the sheet When the cover member 10 is positioned at the closed position, the cleaning means 6 is controlled to eject cleaning water toward the inner wall of the housing 3 to clean the inner wall of the housing 3. Excess solution adhering to the inner wall of the housing 3 is washed away by the washing water. Then, cleaning water, excess, solution, and the like are discharged out of the housing 3, that is, the wafer processing apparatus 2 through a discharge port (not shown) provided in the bottom of the housing 3.

  Next, the opening / closing operation | movement of the sheet-like cover member 10 of the housing | casing cover mechanism 1 which concerns on this embodiment is demonstrated. The opening / closing operation is an operation in which the free end portion 10a of the sheet-like cover member 10 reciprocates between an open position and a closed position.

  3A, the engaging member 16, the pushing member 20, and the guide portion 22 of the cover member tensioning member 18 are almost in contact with each other, and below the rotating shaft 12, that is, in the open position. It is positioned. Further, the piston member 24 of the linear actuator 19 is also positioned below the rotating shaft 12, that is, in an open position. When the free end portion 10 a of the sheet-like cover member 10 is positioned at the open position, most of the sheet-like cover member 10 is wound around the rotary shaft 12 to open the opening 3 a of the housing 3.

  First, when the free end portion 10a of the sheet-like cover member 10 is moved from the open position shown in FIG. 3A to the closed position, the control means 100 controls the cylinder 23 of the linear actuator 19 as shown in FIG. The pressurized gas from the pressurized gas supply source is supplied to the air supply port on the left side, that is, the open position side. Then, the piston of the linear actuator 19 moves in the cylinder 23, and the piston member 24 and the pushing member 20 move together to the second pulley 14, that is, the closed position side. Then, the contact portion 26 of the pushing member 20 in which the fixed portion 25 is fixed to the piston member 24 contacts the guide portion 22 of the cover member tension member 18. As shown in FIGS. 1 and 3B, the abutting portion 26 of the pushing member 20 pushes the guide portion 22 of the cover member tensioning member 18 toward the second pulley 14, that is, the closed position side. Since the guide portion 22 is pushed toward the second pulley 14, that is, the closed position side, and the guide portion 22 is provided to be movable along the guide rail 17, the mounting portion 21 of the cover member tension member 18 is formed in a sheet shape. The free end portion 10a of the cover member 10 is pulled out to the second pulley 14, that is, the closed position side. Then, by pulling out the free end portion 10a, the rotating shaft 12 and the first pulley 13 are rotated in the direction K1 (shown in FIGS. 1 and 3B) to pull out the sheet-like cover member 10, and the rotating shaft 12 The first pulley 13 connected to one end moves the endless belt 15 between the pulleys 13 and 14. Then, the engaging member 16 moves in the same direction as the guide portion 22 and the pushing member 20 of the cover member pulling member 18.

  At this time, since the rotary shaft 12 and the first pulley 13 rotate integrally, the rotational speeds of the rotary shaft 12 and the first pulley 13 are equal, and the first pulley 13 is larger than the outer diameter r of the rotary shaft 12. The pulley diameter is slightly smaller. For this reason, the moving speed (moving distance) of the engaging member 16 is slightly smaller than the moving speed (moving distance) of the cover member tensioning member 18 or the like. As the free end portion 10a of the sheet-like cover member 10 approaches the closed position, the engaging member 16 gradually moves away from the abutting portion 26 of the pushing member 20.

  And as shown in FIG.3 (c), the free end part 10a of the sheet-like cover member 10 is located in the obstruction | occlusion position. When the free end portion 10a of the sheet-like cover member 10 is positioned at the closed position, the control unit 100 stops or supplies the pressurized gas from the pressurized gas supply source to the air supply port on the left side of the cylinder 23. The free end 10a of the sheet-like cover member 10 is maintained in the closed position. Further, when the free end portion 10a of the sheet-like cover member 10 is positioned at the closed position, the contact portion 26 of the pushing member 20 and the engaging member 16 are spaced from each other by the distance D described above. Further, the abutting portion 26 of the pushing member 20 and the guide portion 22 of the cover member tensioning member 18 are in contact with each other and are located below the second pulley 14 and the free end portion 10a. Further, the piston member 24 of the linear actuator 19 is also positioned below the second pulley 14 and the free end portion 10a, that is, in a closed position. Thus, when the sheet-like cover member 10 is moved from the open position to the closed position, the piston member 24 of the linear motion actuator 19 positioned at the open position moves to the closed position side and is fixed to the piston member 24. The pushing member 20 comes into contact with the cover member pulling member 18 and pushes to move the free end portion 10a of the sheet-like cover member 10 to the closed position. Further, when the free end portion 10a of the sheet-like cover member 10 is positioned at the closed position, the sheet-like cover member 10 is almost pulled out from the rotating shaft 12 to cover (close or close) the opening 3a of the housing 3. To do).

  Next, when the free end portion 10a of the sheet-like cover member 10 is moved from the closed position shown in FIG. 3C to the open position, the control means 100 controls the cylinder 23 of the linear actuator 19 as shown in FIG. ) The pressurized gas from the pressurized gas supply source is supplied to the air supply port on the right side, that is, the closed position side. Then, the piston of the linear actuator 19 moves in the cylinder 23, and the piston member 24 and the pushing member 20 move together to the first pulley 13, that is, the open position side. Then, the abutting portion 26 of the pushing member 20 in which the fixing portion 25 is fixed to the piston member 24 is separated from the guide portion 22 of the cover member pulling member 18 and abuts against the engaging member 16. As shown in FIGS. 2 and 3D, the abutting portion 26 of the pushing member 20 pushes the engaging member 16 to the second pulley 14, that is, the open position side. Since the engaging member 16 is fixedly attached to the endless belt 15, the endless belt 15 moves integrally with the pushing of the engaging member 16. Since the endless belt 15 is wound around the pulleys 13 and 14, the first pulley 13 causes the rotary shaft 12 to wind the sheet-like cover member 10 by the pushing of the engaging member 16 and the movement of the endless belt 15. Rotate in the direction K2 (shown in FIGS. 2, 3 (d) and 3 (e)). And since the rotating shaft 12 and the 1st pulley 13 rotate integrally, the rotating shaft 12 rotates to the winding direction K2 opposite to the direction K1 which pulls out the sheet-like cover member 10, and a sheet-like cover member 10 is gradually wound up. Then, the free end portion 10 a of the sheet-like cover member 10 and the mounting portion 21 of the cover member tension member 18 are pulled back to the open position side, and the guide portion 22 of the cover member tension member 18 is moved along the guide rail 17. It moves to one pulley 13, that is, the open position side. Thus, the guide portion 22 of the cover member pulling member 18 moves in the same direction as the engaging member 16.

  At this time, as the sheet-like cover member 10 is wound around the outer periphery of the rotating shaft 12, the outer diameter of the sheet-like cover member 10 wound around the outer periphery of the rotating shaft 12 gradually increases. The relationship between the rotational speed of the rotating shaft 12 and the first pulley 13 and the moving speed (moving distance) of the endless belt 15, that is, the engaging member 16, is that even if the sheet-like cover member 10 is wound around the outer periphery of the rotating shaft 12. It does not change. For this reason, as the free end portion 10a of the sheet-like cover member 10 approaches the open position, the length of winding the sheet-like cover member 10 per unit rotation number of the rotary shaft 12 and the first pulley 13 gradually increases. As shown in FIG. 3E, the free end portion 10a of the sheet-like cover member 10, that is, the guide portion 22 of the cover member tension member 18 gradually approaches the contact portion 26 of the pushing member 20. Become.

  And as shown to Fig.3 (a), the free end part 10a of the sheet-like cover member 10 is located in an open position. When the free end portion 10a of the sheet-like cover member 10 is positioned at the open position, the control means 100 stops or supplies the pressurized gas from the pressurized gas supply source to the air supply port on the right side of the cylinder 23. The free end 10a of the sheet-like cover member 10 is maintained in the open position. Thus, when the sheet-like cover member 10 is moved from the closed position to the open position, the piston member 24 of the linear actuator 19 positioned at the closed position moves to the open position side and is fixed to the piston member 24. The endless belt 15 to which the engaging member 16 is fixedly mounted moves and rotates by the endless belt 15 following the pressing of the engaging member 16 by pressing the engaging member 20 against the engaging member 16. The rotary shaft 12 rotates via the first pulley 13, and the sheet-like cover member 10 is wound around the rotary shaft 12. As described above, the housing cover mechanism 1 opens and closes the opening 3 a of the housing 3 by moving the free end portion 10 a of the sheet-like cover member 10 between the open position and the closed position.

  As described above, the housing cover mechanism 1 according to the present embodiment moves the piston member 24 of the linear actuator 19 to the open position side when moving the sheet-like cover member 10 from the closed position to the open position. Then, following the pushing member 20 pushing the engaging member 16, the endless belt 15 rotates the rotating shaft 12 in the direction K2 in which the sheet-like cover member 10 is wound up. When the sheet-like cover member 10 is wound around the rotary shaft 12, the free end portion 10a of the sheet-like cover member 10 moves toward the open position. Thus, when the sheet cover member 10 is moved from the closed position to the open position, the housing cover mechanism 1 rotates the rotating shaft 12 in the winding direction K2 to wind the sheet cover member 10. The free end 10a of the member 10 moves from the closed position toward the open position. Therefore, in the case cover mechanism 1, the sheet cover member 10 is wound around the rotary shaft 12 in the closed position even if the winding wrinkles are reduced due to aging of the sheet cover member 10. Therefore, the housing cover mechanism 1 can eliminate the winding trouble of the sheet-like cover member 10 due to deterioration over time.

  Further, when the casing cover mechanism 1 moves the sheet-like cover member 10 from the open position to the closed position, the casing member mechanism 1 moves the piston member 24 of the linear actuator 19 to the closed position side, and the pushing member 20 is the cover member. The pulling member 18 is pushed to move the free end portion 10a of the sheet-like cover member 10 to the closed position. Therefore, the housing cover mechanism 1 can reliably move the free end portion 10a of the sheet-like cover member 10 from the open position to the closed position.

  Further, the housing cover mechanism 1 is provided with a cover member tension member 18 that is pushed by the piston member 24 of the linear actuator 19 or the like on the free end portion 10 a of the sheet cover member 10. For this purpose, the housing cover mechanism 1 moves the free end portion 10a of the sheet-like cover member 10 from the open position to the closed position by linear movement of the piston member 24 of the linear actuator 19. Further, the housing cover mechanism 1 is provided with a rotating shaft 12 that is rotated by the engaging member 16 being pushed by the piston member 24 of the linear actuator 19 or the like on the fixed end portion 10b of the sheet-like cover member 10. doing. For this purpose, the housing cover mechanism 1 converts the linear motion of the piston member 24 of the linear motion actuator 19 into the rotational motion of the rotary shaft 12 by the engaging member 16, the endless belt 15 and the pulleys 13, 14. The free end portion 10a of the cover member 10 is moved from the open position to the closed position. With such a configuration, the single linear actuator 19 can perform the opening / closing operation of the sheet-like cover member 10 and the winding operation of the sheet-like cover member 10. Therefore, it is not necessary to provide the sheet-like cover member 10 with a winding rod, and winding problems due to aging can be eliminated.

  In the above embodiment, the wafer processing unit 5 of the wafer processing apparatus 2 is a wafer processing unit that performs a solution coating process on the surface of the wafer W held by the holding unit 4. In the present invention, as the wafer processing means, a wafer processing means for performing a cleaning process on the surface of the wafer W held by the holding means 4 may be used. In the present invention, the pulley diameter of the first pulley 13 may be much smaller than the outer diameter r of the rotating shaft 12.

DESCRIPTION OF SYMBOLS 1 Housing | casing cover mechanism 3 Housing | casing 3a Opening part 4 Holding means 5 Wafer processing means 10 Sheet-like cover member 10a Free end part 10b Fixed end part 11 Movement mechanism 12 Rotating shaft 13 First pulley 14 Second pulley 15 Endless belt 16 Engagement member 17 Guide rail 18 Cover member tension member 19 Linear motion actuator 20 Pushing member 21 Mounting portion (one side)
22 Guide part (the other)
23 Cylinder 24 Piston member I Movement direction W Wafer

Claims (1)

A housing that covers an opening that opens at least above a housing containing at least a holding means for holding the wafer and a wafer processing means for performing a cleaning or solution coating process on the surface of the wafer held by the holding means. A cover mechanism,
A flexible sheet-like cover member having a size capable of closing at least the opening;
A moving mechanism for moving the free end of the sheet-like cover member between a closed position for closing the opening and an open position for opening the opening;
The moving mechanism is
A first pulley connected to one end of a rotating shaft attached to a fixed end of the sheet-like cover member;
A second pulley disposed near the closed position;
An endless belt wound around the first pulley and the second pulley and extending in the moving direction of the sheet-like cover member;
An engagement member fixedly attached to the endless belt;
A guide rail disposed in parallel with the endless belt in the vicinity of the endless belt and having a length equal to at least the length of the endless belt extending;
A cover member tensioning member that is attached to the free end of the sheet-like cover member and the other is guided by the guide rail to pull out or pull back the sheet-like cover member;
A linear actuator that is disposed in parallel to the guide rail and has a piston member and a cylinder that reciprocate between the open position and the closed position;
A pushing member disposed between the cover member pulling member and the engaging member and fixed to the piston member of the linear actuator,
When the sheet-like cover member is moved from the open position to the closed position, the piston member of the linear motion actuator positioned at the open position moves to the closed position side and is fixed to the piston member. The pressing member abuts against the cover member pulling member and moves to move the free end of the sheet-like cover member to the closed position;
When the sheet cover member is moved from the closed position to the open position, the piston member of the linear actuator positioned at the closed position moves to the open position side and is fixed to the piston member. The pushing member abuts against the engaging member and pushes, and the endless belt, to which the engaging member is fixedly mounted, moves and rotates by the endless belt following the pushing of the engaging member. The rotary shaft rotates through the first pulley, and the sheet-like cover member is wound around the rotary shaft.
A housing cover mechanism characterized by that.

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