JP2013091272A5 - - Google Patents
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- Publication number
- JP2013091272A5 JP2013091272A5 JP2011235471A JP2011235471A JP2013091272A5 JP 2013091272 A5 JP2013091272 A5 JP 2013091272A5 JP 2011235471 A JP2011235471 A JP 2011235471A JP 2011235471 A JP2011235471 A JP 2011235471A JP 2013091272 A5 JP2013091272 A5 JP 2013091272A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- aluminum oxide
- oxide film
- piezoelectric
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 claims description 13
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 11
- 238000000277 atomic layer chemical vapour deposition Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 6
- 238000005229 chemical vapour deposition Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011235471A JP5915837B2 (ja) | 2011-10-26 | 2011-10-26 | 圧電素子の製造方法、液体噴射ヘッドの製造方法及び液体噴射装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011235471A JP5915837B2 (ja) | 2011-10-26 | 2011-10-26 | 圧電素子の製造方法、液体噴射ヘッドの製造方法及び液体噴射装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013091272A JP2013091272A (ja) | 2013-05-16 |
| JP2013091272A5 true JP2013091272A5 (https=) | 2014-12-11 |
| JP5915837B2 JP5915837B2 (ja) | 2016-05-11 |
Family
ID=48614786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011235471A Active JP5915837B2 (ja) | 2011-10-26 | 2011-10-26 | 圧電素子の製造方法、液体噴射ヘッドの製造方法及び液体噴射装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5915837B2 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9136460B2 (en) * | 2014-01-29 | 2015-09-15 | Canon Kabushiki Kaisha | Piezoelectric element, method for manufacturing piezoelectric element, and electronic apparatus |
| JP6379808B2 (ja) * | 2014-07-30 | 2018-08-29 | セイコーエプソン株式会社 | 圧電素子の製造方法、液体吐出ヘッドの製造方法、および液体吐出装置の製造方法 |
| US9776405B2 (en) | 2014-10-08 | 2017-10-03 | Rohm Co., Ltd. | Inkjet apparatus and manufacturing method of inkjet apparatus |
| US20230264474A1 (en) * | 2020-07-14 | 2023-08-24 | Rohm Co., Ltd. | Inkjet print head and manufacturing method therefor |
| JP7753013B2 (ja) | 2021-09-17 | 2025-10-14 | キヤノン株式会社 | 流路部材および液体吐出ヘッド |
| JP7799455B2 (ja) * | 2021-11-29 | 2026-01-15 | キヤノン株式会社 | 液体吐出ヘッド |
| JP2023148382A (ja) | 2022-03-30 | 2023-10-13 | キヤノン株式会社 | 液体吐出ヘッド用基板および液体吐出ヘッド用基板の製造方法 |
| JP7559016B2 (ja) | 2022-08-15 | 2024-10-01 | キヤノン株式会社 | 基板接合体の製造方法、液体吐出基板の製造方法、基板接合体、及び液体吐出基板 |
| KR102952566B1 (ko) * | 2024-12-31 | 2026-04-13 | 세종대학교산학협력단 | 저유전층 기반 압전 소자 및 이의 제조방법 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4497312B2 (ja) * | 2004-10-19 | 2010-07-07 | セイコーエプソン株式会社 | 強誘電体メモリの製造方法 |
| JP2009054785A (ja) * | 2007-08-27 | 2009-03-12 | Seiko Epson Corp | 圧電素子およびその製造方法、アクチュエータ、液体噴射ヘッド、並びに、強誘電体メモリ |
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2011
- 2011-10-26 JP JP2011235471A patent/JP5915837B2/ja active Active
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