JP2013072139A - Plating shielding device and plating apparatus having the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a plating shielding device and a plating apparatus having the same.SOLUTION: The plating shielding device can include a shielding member in which a hole is formed and an opening and closing means which is rotatably installed in the shielding member to adjust the size of the hole. Further, the plating apparatus includes a plating bath in which a plating object is housed, a shielding member in which a hole is formed, and an opening and closing means which is rotatably installed in the shielding member to adjust the size of the hole. The plating apparatus can include a plating shielding device installed in the plating bath and a control means for controlling the opening and closing means so that the size of the hole can be adjusted depending on the size of the plating object.

Description

  The present invention relates to a plating shielding tool and a plating apparatus equipped with the same, and more particularly to a plating shielding tool whose shielding size can be adjusted according to the size of a plating object and a plating apparatus equipped with the same.

  A probe card is a device that connects a semiconductor chip and a test equipment in order to inspect the quality of the semiconductor. The probe card includes a large number of probe needles, contacts the wafer through the probe needles, and inspects a defective semiconductor chip.

  The probe card is generally made of low temperature co-fired ceramic (LTCC) and plated by a plating apparatus.

  In general, the probe card is plated by a method in which a current is passed from the anode member to the probe card in a state where the probe card is placed in a plating bath, and a plating layer is formed on the surface of the probe card.

  Here, since the plating layer formed on the probe card is formed differently depending on the current density, a shielding member is installed between the probe card and the anode member in a normal plating process.

  Since probe cards are manufactured in different sizes depending on the type of wafer, circuit configuration, application range, etc., the shielding plate used in the plating process must also differ depending on the type (plating pattern) and size of the probe card. First, a shield plate for each probe card must be manufactured separately.

  However, if the shielding plate is individually manufactured with the probe card, not only the manufacturing cost of the probe card is increased, but also the replacement work of the shielding member requires a separate time, which reduces the production efficiency of the probe card. There is.

  The present invention is intended to solve the above-described problems, and its object is to provide a plating shielding tool capable of forming a plating layer having a certain thickness on a plating object and a plating apparatus including the same. is there.

  Furthermore, the present invention has another object to provide a plating shield device capable of adjusting the opening ratio of the plating shield device according to the size of the probe card and a plating apparatus including the same.

  In order to achieve the above object, a plating shielding apparatus according to an embodiment of the present invention includes: a shielding member having a hole; and an opening / closing means that is rotatably installed on the shielding member to adjust the size of the hole. Can be included.

  The opening / closing means of the plating shielding apparatus according to an embodiment of the present invention may be a number of opening / closing members arranged in a circle around the hole.

  In the plating shielding apparatus according to the embodiment of the present invention, the plurality of opening / closing members can be rotated at the same time.

  The opening / closing means of the plating shielding apparatus according to an embodiment of the present invention may include a number of opening / closing members and a driving means for rotating the opening / closing members.

  The driving means of the plating shielding apparatus according to an embodiment of the present invention may include a first gear that is coupled to the opening / closing member, and a second gear that rotates the first gear.

  In the plating shielding apparatus according to an embodiment of the present invention, the first gear may be a planetary gear and the second gear may be an inscribed gear.

  The opening / closing means of the plating shielding apparatus according to an embodiment of the present invention includes a pair of first opening / closing members that move in a first direction, and a pair of second opening / closing members that move in a second direction perpendicular to the first direction. , Can be included.

  In the opening / closing means of the plating shielding apparatus according to an embodiment of the present invention, the first opening / closing member is formed with a cam groove, and the second opening / closing member is formed with a protrusion fitted into the cam groove. The opening / closing movement of the first opening / closing member and the second opening / closing member can be performed integrally.

  In order to achieve the above object, a plating apparatus according to an embodiment of the present invention includes a plating bath in which an object to be plated is accommodated, a shielding member in which a hole is formed, and the hole that is rotatably installed in the shielding member. An opening / closing means capable of adjusting the size of the plating shielding apparatus installed in the plating bath, and a control means for controlling the opening / closing means so that the size of the hole can be adjusted according to the size of the object to be plated. , Can be included.

  The plating apparatus according to an embodiment of the present invention may further include a sensing unit that senses the size of a plating object and sends a sensed signal to the control unit.

  The said control means of the plating apparatus by one Example of this invention can control the said opening / closing means so that the open ratio of the said hole may be 60 to 65% with respect to the surface area of a plating target object.

  The said control means of the plating apparatus by one Example of this invention can control the said opening / closing means so that the opening ratio of the said hole may be 60 to 65% with respect to the plating area of a plating target object.

  The opening / closing means of the plating apparatus according to an embodiment of the present invention may be a large number of opening / closing members arranged in a circle around the hole.

  In the plating apparatus according to the embodiment of the present invention, a large number of the opening / closing members can rotate at the same time.

  The opening / closing means of the plating apparatus according to an embodiment of the present invention may include a plurality of opening / closing members and driving means for rotating the opening / closing members.

  The driving means of the plating apparatus according to an embodiment of the present invention may include a first gear that is coupled to the opening / closing member, and a second gear that rotates the first gear.

  In the plating apparatus according to an embodiment of the present invention, the first gear may be a planetary gear and the second gear may be an inscribed gear.

  The opening / closing means of the plating apparatus according to an embodiment of the present invention includes a pair of first opening / closing members that move in a first direction, and a pair of second opening / closing members that move in a second direction perpendicular to the first direction, Can be included.

  In the opening / closing means of the plating apparatus according to an embodiment of the present invention, the first opening / closing member is formed with a cam groove, and the second opening / closing member is formed with a protrusion fitted into the cam groove. The opening / closing movement of the first opening / closing member and the second opening / closing member can be performed integrally.

  In the present invention, the opening ratio of the shielding member can be adjusted by the probe card.

  Therefore, according to the present invention, it is not necessary to manufacture a separate shielding member depending on the type of the probe card, and thus the manufacturing cost of the shielding member can be reduced.

  Furthermore, according to the present invention, since it is not necessary to replace the shielding member depending on the type of the probe card, the probe card plating process can be simplified, thereby increasing the production efficiency of the probe card.

  In addition, since the present invention provides an open ratio that can minimize the plating deviation of the probe card, the plating quality of the probe card can be improved.

It is a front view of the plating shielding instrument by 1st Example of this invention. It is a front view of the plating shielding instrument by 2nd Example of this invention. FIG. 3 is a perspective view illustrating an opening / closing means of the plating shielding tool illustrated in FIG. 2. FIG. 4 is a front view of the opening / closing means illustrated in FIG. 3. FIG. 5 is a front view illustrating an operating principle of the opening / closing means illustrated in FIG. 4. FIG. 5 is a front view illustrating an operating principle of the opening / closing means illustrated in FIG. 4. It is a front view of the plating shielding instrument by 3rd Example of this invention. FIG. 8 is a front view showing opening / closing means of the plating shielding tool shown in FIG. 7. FIG. 8 is a front view illustrating an operating principle of the opening / closing means illustrated in FIG. 7. It is the side view which showed the plating apparatus by one Example of this invention. It is the front view which showed the shape of the general probe board | substrate.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. In the following description of the present invention, the terms referring to the components of the present invention are named in consideration of the functions of the respective components, and are therefore understood to limit the technical components of the present invention. must not.

  FIG. 1 is a front view of a plating shielding apparatus according to a first embodiment of the present invention.

  The plating shielding tool 100 according to the first embodiment may include a shielding member 110 and an opening / closing means 120. The plating shielding tool 100 may further include a driving unit that operates the opening / closing unit 120 and a control unit that controls the driving unit.

  The shielding member 110 may be made of a material that can block a plating solution or a current flow during the plating process. Further, the shielding member 110 has a cross-sectional size wider than the cross-sectional size of the plating object (for example, a probe card) so that the plating solution or the flow of current can be effectively blocked from moving to the plating object. Can have.

  Further, the shielding member 110 may be box-shaped so that other members can be accommodated therein. More specifically, the shielding member 110 may be a rectangular parallelepiped having a relatively small width (length in the Y-axis direction with reference to FIG. 1). The shielding member 110 may be formed by assembling a plurality of members. For example, the shielding member 110 may be formed by combining a front member and a rear member or an upper member and a lower member. As described above, when the shielding member 110 includes two or more members, the shielding member 110 can be formed so as to be selectively coupled and separated by a fastening means such as a bolt.

  A hole 112 may be formed in the shielding member 110. The hole 112 may be formed at the center of the shielding member 110 and may have a predetermined size. In this embodiment, the holes 112 can be circular with a radius R.

  The opening / closing means 120 may be installed on the shielding member 110 so as to be able to rotate or linearly move. The opening / closing means 120 installed in this manner can completely close or open the hole 112 through rotation or linear motion, and can adjust the open area (or open ratio) of the hole 112. For this purpose, the opening / closing means 120 may include one or more opening / closing members 130. In the present embodiment, the opening / closing means 120 may include a pair of opening / closing members 130.

  The pair of opening / closing members 130 can be arranged symmetrically about the hole 112. The opening / closing member 130 may be a thin plate. However, the shape of the opening / closing member 130 is not limited to this, and can be arbitrarily selected from a triangle, a pentagon, a semicircle, and the like. The pair of opening / closing members 130 may have a first length L1 and a second length L2 that can completely close the hole 112. That is, the first length L 1 of the opening / closing member 130 can be longer than the diameter (2 × R) of the hole 112, and the second length L 2 can be longer than the radius R of the hole 112. However, when it is not necessary to completely close the hole 112, the lengths L1 and L2 of the opening / closing member 130 do not have to satisfy the above condition.

  The opening / closing member 130 configured in this manner can be moved in one direction (X-axis direction with reference to FIG. 1) by an operator's manual operation or a separate driving means, and the opening ratio of the holes 112 can be adjusted. . For example, the opening / closing member 130 can be reciprocated in one direction in the shielding member 110 by a cylinder or a linear motor. Alternatively, a guide rail may be formed on the shielding member 110 and a roller or the like may be attached to the opening / closing member 130 so that the operator can easily move the opening / closing member 130.

  In the present embodiment formed as described above, since the opening ratio of the holes 112 is adjusted by the opening / closing member 130, plating objects having different sizes can be plated without changing the shielding member (or shielding plate). Can do.

  Hereinafter, a plating shielding apparatus according to another embodiment of the present invention will be described. FIG. 2 is a front view of a plating shielding device according to a second embodiment of the present invention, FIG. 3 is a perspective view showing an opening / closing means of the plating shielding device shown in FIG. 2, and FIG. 4 is shown in FIG. FIG. 5 and FIG. 6 are front views showing the operating principle of the opening / closing means shown in FIG. 4, and FIG. 7 is a plan view of the plating shielding apparatus according to the third embodiment of the present invention. FIG. 8 is a front view showing the opening / closing means of the plating shielding tool shown in FIG. 7, and FIG. 9 is a front view showing the operating principle of the opening / closing means shown in FIG.

  A plating shielding apparatus according to the second embodiment will be described with reference to FIGS. In the present embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  The plating shielding tool 100 according to the present embodiment is distinguished from the first embodiment in the structure of the opening / closing means 120. The opening / closing means 120 according to the second embodiment may include a pair of first opening / closing members 132 and a pair of second opening / closing members 134 as shown in FIG.

  The first opening / closing member 132 can be installed to be movable in the lateral direction of the shielding member 110 (X-axis direction with reference to FIG. 2), and the second opening / closing member 134 is arranged in the longitudinal direction of the shielding member 110 (FIG. 2). Can be installed so as to be movable in the Z-axis direction). Here, the first opening / closing member 132 or the second opening / closing member 134 has the first lengths L1, L3 and the second lengths L2, L4 that can completely close the hole 112, or the first opening / closing member. The member 132 and the second opening / closing member 134 may have a first length L1, L3 and a second length L2, L4 that can completely close the hole 112. That is, the first lengths L1 and L3 of the opening and closing members 132 and 134 can be longer than the diameter 2 × R of the hole 112, and the second lengths L2 and L4 can be longer than the radius R of the hole 112. However, when it is not necessary to completely close the hole 112, the lengths L1, L2, L3, and L4 of the opening and closing members 132 and 134 do not have to satisfy the above condition.

  As shown in FIG. 3, the first opening / closing member 132 and the second opening / closing member 134 can be installed so as to be partially overlapped, and can move in conjunction with each other. For example, the first opening / closing member 132 can move in the horizontal direction (X-axis direction with reference to FIG. 3) by the vertical movement of the second opening / closing member 134 (Z-axis direction with reference to FIG. 3). Alternatively, the second opening / closing member 134 can move in the vertical direction by the movement of the first opening / closing member 132 in the left-right direction.

  For such an interlocking operation, as shown in FIG. 4, the first opening / closing member 132 may have a groove 1322 and the second opening / closing member 134 may have a protrusion 1342. Furthermore, the end portion of the first opening / closing member 132 and the end portion of the second opening / closing member 134 may be arranged to contact each other or face each other.

  The groove 1322 can be formed long at both end portions of the first opening / closing member 132, and can be formed obliquely with respect to the X axis and the Z axis with reference to FIG. Here, the grooves 1322 formed at both ends of the first opening / closing member 132 may have a symmetrical shape with respect to a virtual line KK that bisects the first opening / closing member 132. Further, the grooves 1322 formed in the different first opening / closing members 132 may have a mutually symmetrical shape with respect to a virtual line MM that bisects the second opening / closing member 134.

  The protrusion 1342 may be formed at both end portions of the second opening / closing member 134 and may be fitted into the groove 1322. The protrusion 1342 may have a circular cross section so as to be in line contact with the inner wall of the groove 1322. Here, the diameter d of the protrusion 1342 may be the same as the width w of the groove 1322 or smaller than the width w of the groove 1322.

  Since the first opening / closing member 132 and the second opening / closing member 134 arranged in such a structure are connected by the groove 1322 and the protrusion 1342, they can move in conjunction with each other.

  For example, as illustrated in FIG. 5, when the pair of first opening / closing members 132 move away from each other, the pair of second opening / closing members 134 can also move away from each other.

  In contrast, as illustrated in FIG. 6, when the pair of first opening / closing members 132 moves in a direction close to each other, the pair of second opening / closing members 134 can also move in a direction close to each other.

  Here, since the moving distance of the first opening / closing member 132 and the moving distance of the second opening / closing member 134 are proportional, the open area S formed by the first opening / closing member 132 and the second opening / closing member 134 is always reduced or reduced at a constant ratio. Can be enlarged.

  In the present embodiment formed as described above, the opening ratio of the hole 112 can be easily adjusted through the plurality of opening and closing members 132 and 134. Further, according to the present embodiment, since the plurality of opening and closing members 132 and 134 operate in conjunction with each other, it is easy to control the opening and closing members 132 and 134 by driving means or manual work.

  With reference to FIGS. 7-9, the plating shielding instrument by 3rd Example is demonstrated. In the present embodiment, the same components as those in the above-described embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

  The plating shielding tool 100 according to the third embodiment can be distinguished from the above-described embodiment because the opening / closing means includes a plurality of opening / closing members 130.

  In the present embodiment, the opening / closing means may include a number of opening / closing members 130 that are circularly arranged around the hole 112 (O, center of radius). Here, the opening / closing member 130 may be a rectangle, a square, a triangle, or a polygon.

  The embodiment may further include a driving unit 140. The driving unit 140 may include a first gear 142, a second gear 144, and a third gear 146.

  The first gear 142 may be rotatably installed on the shielding member 110 and may be coupled to each opening / closing member 130. In more detail, the first gear 142 may be coupled to an eccentric position of the opening / closing member 130. Here, the first gear 142 and the opening / closing member 130 may be integrally formed. Therefore, when the first gear 142 rotates, the opening / closing member 130 can rotate about the first gear 142.

  The second gear 144 may be disposed to mesh with the multiple first gears 142. Specifically, the second gear 144 may have a ring shape, and teeth may be formed on the inner peripheral surface and the outer peripheral surface. Here, the teeth formed on the inner peripheral surface can mesh with the teeth of the first gear 142, and the teeth formed on the outer peripheral surface can mesh with the teeth of the third gear 146. In the coupling relationship between the first gear 142 and the second gear 144, the first gear 142 can be a planetary gear, and the second gear 144 can be an inscribed gear.

  The third gear 146 can be installed on the shielding member 110 and can mesh with the second gear 144. Further, the third gear 146 may be connected to a separate drive motor (not shown). That is, the third gear 146 can transmit the driving force of the driving motor to the second gear 144. Therefore, when the third gear 146 is rotated, the second gear 144 is rotated, and the rotation of the second gear 144 allows the multiple first gears 142 and the multiple open / close members 130 to be rotated together. Here, the opening / closing member 130 can be rotated by the first gear 142 and can also block or open the hole 112 to adjust the opening ratio of the hole 112.

  In this embodiment formed in this way, a relatively large number of opening / closing members 130 rotate to open or close the holes 112, so that the opening ratio and size of the holes 112 can be adjusted more precisely. .

  Therefore, the present embodiment can be effectively used to form the plating layer more uniformly and precisely.

  On the other hand, in the above-described third embodiment, it is described that the driving means for driving the large number of opening / closing members 130 is configured by a plurality of gears, but may be configured by a belt, a cylinder, or the like.

  Below, the plating apparatus by one Example of this invention is demonstrated. FIG. 10 is a side view showing a plating apparatus according to an embodiment of the present invention, and FIG. 11 is a front view showing the shape of a general probe substrate.

  The plating apparatus 200 according to an embodiment of the present invention may include a plating shielding instrument 100, a plating bath 210, an anode member 220, a cathode member 230, a control unit 240, and a sensing unit 250.

  The plating shielding tool 100 can be installed in the plating bath 210, and the plating bath 210 can be divided into two spatially. Here, the plating shielding tool 100 may be any one of the plating shielding tools 100 illustrated in FIGS. 1 to 9.

  The plating bath 210 can have a size that can accommodate the plating object (in this embodiment, the probe card 300) and the plating shielding instrument 100. Furthermore, the plating bath 210 can accommodate an electrolytic solution necessary for electrolytic plating of an object to be plated.

  The anode member 220 may be formed on the opposite side of the plating object with respect to the plating shielding tool 100. The anode member 220 may have a rod shape. However, if necessary, it can be plate-shaped to increase plating efficiency and plating quality. The anode member 220 may be connected to the anode during the plating process.

  The cathode member 230 can include a fixing means (for example, a clip or a clamp) that can fix the object to be plated. The cathode member 230 can fix the plating object so that the plating object can be maintained at a certain height in the plating bath 210, and the plating object can have a cathode property. For this, the cathode member 230 can be connected to the cathode during the plating process.

  The control means 240 can be electrically connected to the plating shielding tool 100 and can control the opening / closing member 130 of the plating shielding tool 100. Further, the control unit 240 is electrically connected to the sensing unit 250 and can operate the opening / closing member 130 based on a sensing signal sensed by the sensing unit 250. More specifically, the control unit 240 can control the opening / closing member 130 so that the size of the hole 112 is reduced or enlarged according to the size of the plating object 300. Further, the control unit 240 can control the opening / closing member 130 such that the size of the hole 112 is reduced or enlarged according to the size of the plating pattern 310.

  That is, when the cross-sectional size of the plating object 300 or the plating pattern area formed on the plating object 300 is 100%, it is preferable to open the hole 112 by an area corresponding to 60 to 70%. In Table 1 below, a, b, c, d, e, f, g, h, and i indicate parts of the probe substrate 300 shown in FIG.

  The inventor opened the opening / closing member 130 completely (opening ratio of shielding plate 100%; Experimental Examples 1 and 3) and opened / closed member 130 opened to 65% of the plating pattern area ratio (Experimental Example 2). And 4), the plating process of the plating object was performed.

  As a result, in Experimental Examples 1 and 3, the plating deviation due to the portion of the plating object 300 was relatively large. That is, in Experimental Example 1, the deviation between the thickest part (e, 10.9 mm) and the thinnest part (d, 4.4 mm) was 6.5 mm. Similar to this, also in Experimental Example 3, the deviation between the thickest part (f, 11.0 mm) and the thinnest part (d, 3.2 mm) was 7.8 mm. .

  On the other hand, in Experimental Examples 2 and 4, the plating deviation due to the portion of the plating object 300 was relatively small. That is, in Experimental Example 2, the deviation between the thickest plating part (h, 8.8 mm) and the thinnest plating part (f, 7.2 mm) was 1.6 mm. Similar to this, also in Experimental Example 4, the deviation between the thickest part (b, 8.4 mm) and the thinnest part (g, 7.1 mm) was 1.3 mm. .

  Therefore, it is preferable to maintain the opening ratio of the holes 112 at 60 to 70% of the cross-sectional size of the plating object 300 or the plating pattern area formed on the plating object 300.

  Moreover, although the hole 112 can be opened at 50% or less, in this case, not only much time is required to plate the plating object 300 but also the plating object 300 is plated with a desired thickness. A layer cannot be formed.

  The present invention is not limited only to the above-described embodiments, and any person who has ordinary knowledge in the technical field to which the present invention belongs can be used without departing from the technical idea described in the following claims. Various modifications can be made.

100 Plating Shielding Tool 110 Shielding Member
112 hole 120 opening and closing means
130 Opening / closing member 132 First opening / closing member
134 Second opening / closing member 140 Driving means
142 1st gear (or planetary gear)
144 Second gear (or inscribed gear)
146 3rd gear (or drive gear)
200 Plating equipment 210 Plating bath
220 Anode member (or anode plate)
230 Cathode member (or cathode plate)
240 control means 250 sensing means
300 Probe board

Claims (12)

A shielding member formed with a hole;
Opening and closing means that is rotatably installed on the shielding member and adjusts the size of the hole.   The plating shielding apparatus according to claim 1, wherein the opening / closing means includes a plurality of opening / closing members arranged in a circle around the hole.   The plating shielding apparatus according to claim 2, wherein the plurality of opening / closing members rotate at the same time.   The plating shielding apparatus according to claim 2 or 3, wherein the opening / closing means includes the plurality of opening / closing members and a driving means for rotating the plurality of opening / closing members. The driving means includes a first gear for coupling the plurality of opening / closing members,
A second gear for rotating the first gear;
The plating shielding instrument according to claim 4, comprising:   The plating shielding apparatus according to claim 5, wherein the first gear is a planetary gear, and the second gear is an inscribed gear. The opening / closing means includes a pair of first opening / closing members that move in a first direction;
A pair of second opening and closing members that move in a second direction perpendicular to the first direction;
The plating shielding instrument according to claim 1, comprising: A cam groove is formed in the pair of first opening and closing members,
The pair of second opening / closing members are formed with protrusions fitted into the cam grooves,
The plating shielding instrument according to claim 7, wherein opening and closing movements of the pair of first opening and closing members and the pair of second opening and closing members are integrally performed. A plating bath in which a plating object is accommodated;
The plating shield apparatus according to any one of claims 1 to 8, wherein the plating shield apparatus installed in the plating bath;
Control means for controlling the opening and closing means so that the size of the hole can be adjusted according to the size of the plating object.   The plating apparatus according to claim 9, further comprising sensing means for sensing a size of an object to be plated and sending a sensed signal to the control means.   The plating apparatus according to claim 9 or 10, wherein the control means controls the opening and closing means so that an open area of the hole is 60 to 70% as large as a surface area of the object to be plated.   The plating apparatus according to claim 9 or 10, wherein the control means controls the opening / closing means so that an open area of the hole is 60 to 70% larger than a plating area of an object to be plated.

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