JP2013053985A5 - - Google Patents

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Publication number
JP2013053985A5
JP2013053985A5 JP2011193594A JP2011193594A JP2013053985A5 JP 2013053985 A5 JP2013053985 A5 JP 2013053985A5 JP 2011193594 A JP2011193594 A JP 2011193594A JP 2011193594 A JP2011193594 A JP 2011193594A JP 2013053985 A5 JP2013053985 A5 JP 2013053985A5
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JP
Japan
Prior art keywords
force
piezoelectric element
sensitivity
force sensor
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011193594A
Other languages
English (en)
Japanese (ja)
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JP2013053985A (ja
JP5866891B2 (ja
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Priority to JP2011193594A priority Critical patent/JP5866891B2/ja
Priority claimed from JP2011193594A external-priority patent/JP5866891B2/ja
Publication of JP2013053985A publication Critical patent/JP2013053985A/ja
Publication of JP2013053985A5 publication Critical patent/JP2013053985A5/ja
Application granted granted Critical
Publication of JP5866891B2 publication Critical patent/JP5866891B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011193594A 2011-09-06 2011-09-06 力センサー、力検出装置、ロボットハンド、およびロボット Expired - Fee Related JP5866891B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011193594A JP5866891B2 (ja) 2011-09-06 2011-09-06 力センサー、力検出装置、ロボットハンド、およびロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011193594A JP5866891B2 (ja) 2011-09-06 2011-09-06 力センサー、力検出装置、ロボットハンド、およびロボット

Publications (3)

Publication Number Publication Date
JP2013053985A JP2013053985A (ja) 2013-03-21
JP2013053985A5 true JP2013053985A5 (https=) 2014-09-18
JP5866891B2 JP5866891B2 (ja) 2016-02-24

Family

ID=48131098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011193594A Expired - Fee Related JP5866891B2 (ja) 2011-09-06 2011-09-06 力センサー、力検出装置、ロボットハンド、およびロボット

Country Status (1)

Country Link
JP (1) JP5866891B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6051678B2 (ja) 2012-08-22 2016-12-27 セイコーエプソン株式会社 センサーデバイス、センサーモジュール、力検出装置およびロボット
JP6476730B2 (ja) * 2014-10-21 2019-03-06 セイコーエプソン株式会社 力検出装置及びロボット

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH472668A (de) * 1967-09-05 1969-05-15 Kistler Instrumente Ag Einrichtung mit einer Mehrkomponenten-Piezomesszelle
JPS6034293A (ja) * 1983-08-03 1985-02-21 株式会社日立製作所 皮膚感覚センサ
JP2002084008A (ja) * 2000-09-06 2002-03-22 Fdk Corp 積層構造の剪断型圧電素子
JP2003266994A (ja) * 2002-03-14 2003-09-25 Axiom Co Ltd 筆記判別システム用筆記具
DE10217284B4 (de) * 2002-04-12 2005-06-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Kontrolle von Schraubverbindungen
AT500829B1 (de) * 2004-10-07 2007-03-15 Piezocryst Ges Fuer Piezoelek Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist
JP4912477B2 (ja) * 2010-02-02 2012-04-11 公立大学法人高知工科大学 移動型床反力計測装置

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