JP5866891B2 - 力センサー、力検出装置、ロボットハンド、およびロボット - Google Patents

力センサー、力検出装置、ロボットハンド、およびロボット Download PDF

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Publication number
JP5866891B2
JP5866891B2 JP2011193594A JP2011193594A JP5866891B2 JP 5866891 B2 JP5866891 B2 JP 5866891B2 JP 2011193594 A JP2011193594 A JP 2011193594A JP 2011193594 A JP2011193594 A JP 2011193594A JP 5866891 B2 JP5866891 B2 JP 5866891B2
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force
piezoelectric element
force sensor
crystal
detection device
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Japanese (ja)
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JP2013053985A (ja
JP2013053985A5 (https=
Inventor
神谷　俊幸
俊幸 神谷
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Seiko Epson Corp
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Seiko Epson Corp
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JP2011193594A 2011-09-06 2011-09-06 力センサー、力検出装置、ロボットハンド、およびロボット Expired - Fee Related JP5866891B2 (ja)

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JP2011193594A JP5866891B2 (ja) 2011-09-06 2011-09-06 力センサー、力検出装置、ロボットハンド、およびロボット

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JP2011193594A JP5866891B2 (ja) 2011-09-06 2011-09-06 力センサー、力検出装置、ロボットハンド、およびロボット

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JP2013053985A JP2013053985A (ja) 2013-03-21
JP2013053985A5 JP2013053985A5 (https=) 2014-09-18
JP5866891B2 true JP5866891B2 (ja) 2016-02-24

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JP2011193594A Expired - Fee Related JP5866891B2 (ja) 2011-09-06 2011-09-06 力センサー、力検出装置、ロボットハンド、およびロボット

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6051678B2 (ja) 2012-08-22 2016-12-27 セイコーエプソン株式会社 センサーデバイス、センサーモジュール、力検出装置およびロボット
JP6476730B2 (ja) * 2014-10-21 2019-03-06 セイコーエプソン株式会社 力検出装置及びロボット

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH472668A (de) * 1967-09-05 1969-05-15 Kistler Instrumente Ag Einrichtung mit einer Mehrkomponenten-Piezomesszelle
JPS6034293A (ja) * 1983-08-03 1985-02-21 株式会社日立製作所 皮膚感覚センサ
JP2002084008A (ja) * 2000-09-06 2002-03-22 Fdk Corp 積層構造の剪断型圧電素子
JP2003266994A (ja) * 2002-03-14 2003-09-25 Axiom Co Ltd 筆記判別システム用筆記具
DE10217284B4 (de) * 2002-04-12 2005-06-30 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zur Kontrolle von Schraubverbindungen
AT500829B1 (de) * 2004-10-07 2007-03-15 Piezocryst Ges Fuer Piezoelek Sensorelement mit zumindest einem messelement, welches piezoelektrische und pyroelektrische eigenschaften aufweist
JP4912477B2 (ja) * 2010-02-02 2012-04-11 公立大学法人高知工科大学 移動型床反力計測装置

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